WEEKLY REPORT
Name: Mary Tang
Date: 2/4/02
Weekly Report for: 1/25/02-2/1/02
1. Accomplishments:
-
Process staff meeting - main issues:
- Training labmembers on shutdown procedures and documenting station
problems. We should also work on defining conditions for these procedures
in the operating documents for each lab tool.
- Strangers were reportedly in the lab very early (4-5 am) one morning. We had
discussed having badges to identify labmembers, staff, and visitors -- perhaps
we should get moving on this.
- Qualification procedures. Need to standardize process qualification criteria
for certain equipment procedures (i.e., silane bottle change on the sts, tylan
bank 1 move.)
- Chemicals Handling Safety. Our policy now is to ensure that people are
informed of the hazards and are provided with the protective gear and
instructions they need to be able to use each station safely - it's up to each
individual to take responsibility for his/her own safety and the safety of those
around. As Uli points out, this is a particular problem at the wbgeneral and
wbgaascl stations because there are few standard operations there (and an
especially exciting near-incident with Delrin tweezers) - so Uli will be
instituting stricter standards at wbgen and wbgaascl, and we should all support
her by following these procedures when we use these stations.
- Otherwise, everyone has everything under control! Henry is causing (good)
trouble in litho. Nancy is coordinating Jim McV's nitride study and
stsetch/p5000 activities. Gladys has EE410 under control - processing is
scheduled for completion by the 3rd week in February. She will then be
leaving for 4 weeks starting mid-March (we'll need to plan for training
coverage). Nancy and Gladys are overseeing Eehern's activities. James is
hard at work keeping equipment up and running as well as conducting
trainin/retraining sessions and coordinating new equipment installation. Paul
is helping James out, especially with ebeam, and is also continues to chug out
masks at a phenomenal pace. Jeannie has got her hands full with training on
three difficult pieces of equipment, but is making headway on her list. Uli is
improving/changing procedures at the wet benches.
-
Lab Cleanup: Still need to address the loose ends (ordering the last few missing bins,
earthquaking tall shelving, keycard lock on the CAD room, fastening down remaining
the drawer bins.)
-
Hiring: The Laboratory & Administrative Services Manager position has been not
officially approved by the senior staff and HR. The listing should become official
tomorrow. This person will oversee administration of SNF finance (a big job in and
of itself), shipping/receiving/stockroom, labmember services and programs. Dick is
continuing to collect resumes for the electronics person. .
-
Student helpers. Interviewing students today. The goal is to have two students this
week. Eehern is starting to train people -- although he has some staff privileges, he
does not yet have the ability to charge his staff time to labmembers (need to follow up
on this.)
-
Wafersaw: Need to follow up on Don Arnold's suggestion regarding a mounting
blade flange for cutting thick quartz.
-
Consulting activities: Regnier chips: A second batch requested -- Henry is working
on this. A new mask/batch also requested (need to track this mask down.) Binhua
Lin: Requesting a second batch of wafers. Henry will hopefully be able to work on
this as well.
2. Problems:
-
Equipment status and DCS: Cold weather over the past few weeks has caused
DCS flow to drop out at epi and Nitride. There are two problems here. First, that
this happens at all. Dick and company have since found a nice, simple solution
that is pretty consistent with safety/hazard codes, and there have been no
problems since then (first, the nitride DCS was done then, after another incident
on epi, the epi DCS was done up.) The second problem is that this and a couple
other equipment issues occurred without process staff being aware of the problem
or the solution. To address this, Dick is having the maintenance guys put together
a daily report of equipment status (one report each for litho, etch/thin films, and
diffusion/tubes). After a couple of weeks to iron out the bugs, we will all get
these reports and they will also be posted at the gowning room entrance.
(Hooray!)
3. Projects:
-
Mike McGehee/Joe Klein's reverse MOS chips - No progress...
-
DNA Lecture for MSE. Done!
4. Plans:
1. Wet bench safety station. Wups! Still need to pester the Coral development team to
hookup the displaced Coral terminal (now located next to its sister terminal across
from wbdiff.)
2. SNF Affiliates. Lourdes is collecting info. Plans are to make this a brief (say, two three weeks), intense campaign, so that everyone is aware of this program.
3. Cross-Training: We (the process staff) should discuss how we might be able to
support each other and adjoining areas through backup training. We didn't manage to
get to this in our last process meeting.
5. Equipment Issues:
-
-
Karlsuss: Need to follow up on this cancellation.
EV Group Embosser: Need to follow up with this. The EV Group was willing to
give us a deeply discounted system in exchange for research data -- need to find out if
there are any takers.
MEMS wet bench: Uli and Nancy are interested in this. The goal is to have a safe
wet bench that allows handling of cassettes for contaminated substrates, such as KOH
and HF etching, piranha clean, and maybe even electrochemical processing.
6. Other: