Photolithography Area Status
Thursday , February 03, 2011
General Information / Lab Activities
Good morning All.
Here is the morning Litho status report.
No airflow in aisle L102(SVG coat/develop aisle) due to transfer fan problem. Due to this
failure, there will be a loss of temperature, humidity and particulate control. Repairs are in
progress. Please consider this as it relates to the sensitivity of your process.
Please check back in Coral for latest tool updates and current equipment status.
Thanks... The Litho Team
Exposure Tools
Status
Comments
Priority
ASML Stepper
Problem
Energy Sensor Temp out of Range
1
EVAlign
UP
EVAlign2
UP
EVG-Imprint
UP
Karl Suss 1
UP
Karl Suss 2
UP
Manual Coaters
Status
EVGSpraycoat
Down
Computer Down
2
Headway
UP
Laurel
UP
Coaters
Process Status
Optimizing process
3
SVGCoat
SVGCoat2
3612 Process
Up
3617 Process
Up
220-7 Process
Problem
3612 Process
Up
955-0.7 Process
Up
220-3 Process
Up
Developers
Status
SVGDEV
UP
SVGDEV2
UP
Ovens / Hotplates
Status
BLUEM
UP
Blue M 90 C.
UP
Blue M 110 C
UP
Blue M 150 C
UP
Temperature Drift. Controller on
order
Temperature Drift. Controller on
order
Fusion
DOWN
Hotplate experiments
UV-Cure
UP
White-Oven
UP
YES Vapor Prime
UP
Hotplates-
Laurel-left
UP
Laurel- right
UP
Headway
UP
Torrey Pines- left
UP
90 Deg C
UP
115 Deg C
UP
Torrey Pines- Right
UP
Metrology/Inspection
Status
Alpha-Step 500
UP
Nanospec 2-Litho
UP
Nanospec 1-Etch
UP
P2 Profiler
PROBLEM
Error -11 on Unload, reset to
recover
Microscpoes-
#1 Leica/Analytical
UP
#2 Ergolux/Drytek2
UP
#3 Olympus/Litho
UP
#4 Nikon Optiphot/Litho
UP
#5 Nikon/Litho
UP
#6 Leitz/Bosch
UP
#7 Leitz/Diffusion
UP
#8 Olympus/Litho
UP
#9 Olympus/Litho
UP
Miscellaneous
Status
EVBond
UP
KSBonder
UP
KSCoat
UP
Camera App and Data OK
4
Litho SRD
UP