Photolithography Area Status
Friday ,July 06 , 2012
General Information / Lab Activities
Mahnaz Out LOA 5-31??
Gary Is out Today 07/06/2012
Good morning All.
Here is the morning Litho status report.
Please check back in Coral for latest tool updates and current equipment status.
Thanks... The Litho Team
Old Issues- Ongoing
ASML Stepper-Problem: Process restriction- Do not expose any wafers with thick resist, 3.0um
and above(220-3 and 220-7 resists) until further notice. The purge/extraction hood has been removed
for repair by ASML.
YES Oven- Intermittent pumpdown problem. Fails to achieve setpoint. Replaced valve
stem/seat for N2 purge. Replace pump on 7/2. Monitoring system
Zygo- Problem: User "mcherry" reports that the CD drawer is not opening. Installed a
replacement drive but software does not recognize. Need to look at system setup
Exposure Tools
Status
Comments
ASML Stepper
DOWN
ASML Work In Progress
EVAlign
Problem
Intermitent Joystick Issues
EVAlign2
UP
EVG-Imprint
Problem
Karl Suss 1
UP
Karl Suss 2
UP
Manual Coaters
Status
EVGSpraycoat
Up
Headway
Up
Laurel
UP
Coaters
Process Status
Tool Idle Til Needed
Priority
4
SVGCoat
SVGCoat2
3612 Process
Up
3617 Process
Up
220-7 Process
Up
3612 Process
Up
955-0.7 Process
Up
220-3 Process
Up
Developers
Status
SVGDEV
UP
SVGDEV2
UP
Ovens / Hotplates
Status
BLUEM
UP
Blue M 90 C.
UP
Blue M 110 C
UP
Blue M 150 C
UP
Fusion
UP
UV-Cure
UP
White-Oven
UP
YES Vapor Prime
Problem
Hotplates-
Laurel-left
UP
Laurel- right
UP
Headway
UP
Wenesco - left
UP
90 Deg C
UP
115 Deg C
UP
Wenesco - Right
UP
Metrology/Inspection
Status
AFM
UP
Alpha-Step 500
UP
Nanospec 2-Litho
UP
Nanospec 1-Etch
UP
P2 Profiler
UP
Microscpoes-
#1 Leica/Analytical
UP
#2 Ergolux/Drytek2
UP
Intermitent Vacuum Problem
1
#3 Olympus/Litho
UP
#4 Nikon Optiphot/Litho
UP
#5 Nikon/Litho
UP
#6 Leitz/Bosch
UP
#7 Leitz/Diffusion
UP
#8 Olympus/Litho
UP
#9 Olympus/Litho
UP
Miscellaneous
Status
EVBond
Problem
KSBonder
UP
Flags Are Stiff
2
DOWN
KSCoat
Litho SRD
Robot Vacuum
UP
DOWN
Zygo
CD Drawer Not Recognized
3