Procedure – Solar Cell P509 Phosphorus Dopant - spin on application
Use only
orange tweezer
designed for
phosphorus
dopant
Lid covering
wafer spinner
Solitec Spin Coater for spin on dopants – Located in 201G
1. Turn on power strip located between the spin head and the control panel
Turn on power to spinner
Start switch
“Vac on” switch applies vacuum to the wafer
chuck.
Spinner will not operate if insufficient vacuum.
Orange vac light will go off if there is sufficient
vacuum
Spin speed and time are preset.
No adjustments are needed
2. Turn on power to spinner. Lower controller must be on as well.
3. Raise lid and place wafer to be spun on vacuum chuck and turn on “vac on” switch.
4. Verify orange vacuum light is off indicating sufficient vacuum to continue
07/02/16
File: Procedure – Solar Cell P509 Phosphorus Dopant – spin on application
Procedure – Solar Cell P509 Phosphorus Dopant - spin on application
Large bottle of P509 is usually located in the
refrigerator in the room below the table.
P509 must be a room temperature to use
P509 spin on phosphorus dopant
5. Find P509 spin on dopant dropper bottle located in dry box above spinner.
6. Refill if needed. Large bottle is located in refrigerator in chemical room.
P509 phosphorus dopant
after dispensing on wafer
but before spinning.
Wafer should be nearly covered
with dopant
7. Drop enough P509 to cover most of the wafer, quickly close lid and push start.
8. At end of cycle, remove vacuum (‘vac on” switch off) and remove wafer from vacuum chuck.
9. Repeat for additional wafers as needed.
10. Return dropper bottle of P509 to dry box.
11. Notify lab manager if dropper bottle is nearly empty
07/02/16
File: Procedure – Solar Cell P509 Phosphorus Dopant – spin on application