Thorium Dioxide (ThO2)
And Its Optical Constants in The Extreme Ultraviolet
Elise Martin & David Muhlestein
Astronomy
http://science.nasa.gov/ssl/pad/solar/images/solar-b3.jpg
The sun in the Extreme Ultraviolet
Plasma Diagnostics
UC Davis Plasma Diagnostic Group (PDG)
http://tempest.das.ucdavis.edu/pdg/
Other Uses
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Photolithography
http://www.microscopy-uk.org.uk/mag/imgoct02/486test.jpg
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Microscopy
The Sputtering Process
Berkeley, California
Provo
Berkeley
Fitting
Bad Fit
Good Fit
The Index of Refraction
δ=1-n=real part of index of refraction
affects wavelength
β =k =imaginary part of index of
refraction
affects attenuation
Attenuation due to β
Delta vs. Wavelength
Beta vs. Wavelength
Why is ThO2 important?
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Small β and small δ means ThO2
makes a good spacer layer for
multilayer mirrors
Easily made compared to other
materials
Acknowledgements
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Niki Farnsworth
Dr. Steven Turley
Dr. David Allred
The BYU Thin Films Research Group
The Advanced Light Source