Nano-Spintronics for Very Low Power and High Performance Logic and Memory Stu Wolf University of Virginia www.virginia.edu/nanostar Outline • Spintronics and Nanomagnetics – – – – – Spin Dependent Tunneling Magnetic Memory (MRAM) Spin Torque Transfer (STT-RAM) Nano-Oscillators for High Throughput Data Nanomagnetics • Reconfigurable Array of Magnetic Automata Spintronics 1996 - DARPA Spintronics: New “Degree of Freedom” for Electronics • Develop non-volatile, radiation hard memory chip for space, missile and avionics applications with the speed of SRAM (<3ns), the density of DRAM (up to 4 Gbit), low power (0.1 - 0.01x), low cost (0.1x) and is infinitely cyclable • Develop high sensitivity, low cost magnetic sensors for precision motion and rotation control for avionics, perimeter defense and detection of mines Slide and 3 buried ordnance Integrated Magnetic Sensor Spin Dependent Tunneling: MTJ Juliere (1975) RAP RP 2 PP TMR 1 2 RP 1 PP 1 2 N N with P N N IP N N N N 1 2 1 2 I AP N 1 N 2 N 1 N 2 AlOx TMR~ 70% MgO TMR ~800% Everspin Products Conventional MRAM (1T-1MTJ) K uV k BT Thermal Stability Factor Beyond 65 nm this becomes a problem As cell size decreases switching current increases Spin Torque Transfer (STT) Absorbed Angular Momentum Torque I S N t t 2 2e S I Torque t 2 e Polarizing “fixed” layer (thick) Active “free” layer (thin) Net change in S per e Spin polarized current generates torque on magnetization of free layer As cell size decreases switching current decreases Katine et al, Phys. Rev. Lett. 84, (2000) 3149 . Challenges for STT-RAM STT-RAM architecture 1MTJ-1T for maximum device density Switching current supplied by CMOS transistor Switching current density needs to be lowered to 5×105 A/cm2 Switching energy needs to be reduced Key Advantages of STT-RAM at 45 nm [Wolf, Chtchelkanova and Treger, IBM J. Res. & Dev. (2006) 50 101] Materials engineering for STT-MRAM Landau-Lifshitz Gilbert (LLG) equation: Critical current density Thermal Stability Factor Δ = HkmV/2kBT S. Mangin, et. al. , AAPPS Bulletin, 2008. 18: p. 41 Desired properties for free layer in STT-MTJ a bcc structure with small mismatch with MgO for a large TMR Reduced magnetization m Low damping constant α High Spin polarization P Perpendicular magnetic anisotropy (PMA) Materials Synthesis Thin film deposition Magnetron sputtering system (1 x 10-6 torr) Biased Target Ion Beam Deposition system (BTIBD) (8 x 10-8 torr) o Allow depositions at low voltage and process pressure ; o automated recipe control; o Co-sputtering up to three targets simultaneously; Post annealing treatments Conventional Furnace Annealing (1 x 105 torr; 1 hour) Rapid Thermal Annealing (1 x 10-5 torr; 10s~300s) GMR and TMR structures by BTIBD Top and bottom pinned spin-valves with GMR~6% using BTIBD. AlOx-barrier MTJs with TMR~20%. MgO-MTJs: (TMR ~ 70%) Seeding/CoFe(6)/FeMn(10)/CoFe(1.5)/CoFeB(5)/MgO (1.8)/CoFeB(5)/Capping MTJ with MgO barrier Spin valve 7 CoFe/Cu/CoFe MR (%) 6 5 4 MR =6.1% 3 2 1 0 -300 T=305 K -200 -100 0 100 200 H (Oe) MR% Materials we explored CoFeCrB Co2FeAl MnAl Lattice Mismatch with MgO Ms (emu/cc) Sample condition Damping α PMA (erg/cc) 3.9% 44~800 (Varied with Cr/B content) 450˚C 30nm 0.006 No 600˚C 50nm 0.002 No 400˚C 1.36nm (CFA/MgO) 0.012 Yes (1.9 x 106) Cr seeding/ 400˚C 10nm 0.033 3.4% 6.7% 1010 521 MgO interface required Yes (5.34 x 106) proper seeding required Memory Comparison (Qualcomm (2009) Intermag 2012 Spin Torque Nano-Oscillators Switching in response to a 10 mA current pulse 1.0 Easy Axis Magnetization Spin-Current Switched MRAM I Tunnel junction 0.5 High-speed switching 0.0 -0.5 simulation -1.0 50 nm 0 Spin Transfer Nano-Oscillators 50 100 150 200 Time (ps) 0.7 T, q = 10o 8 mA 8.5 mA 7 mA 0.4 7.5 mA Power (pW) I Au NiFe CoFe Cu 0.3 data 6.5 mA 0.2 9 mA 6 mA 0.1 5.5 mA 0.0 1 mm Simulations: OOMMF math.nist.gov/oommf/ 9.6 9.7 9.8 Frequency (GHz) 9.9 10.0 Tunable High Q oscillator (2 GHz – 100 GHz) Summary of Present Status 19 Frequency (GHz) Field Tunable 30 28 GHz/T 20 10 0 0.0 Current Tunable 18 0.5 GHz/mA 17 16 6 0.2 0.4 0.6 0.8 1.0 10000 •Oscillators are tunable over a wide range of frequencies via applied field or current •Output is narrow band with Q values > 10,000 •Voltage outputs in the mV regime 8 Current (mA) 10 Narrow Band Field (T) Power (nV2/Hz) Frequency (GHz) 40 8000 6000 f = 17.052 GHz f = 3.00 MHz 4000 2000 0 17.025 17.050 Frequency (GHz) 17.075 Phase Locking 500 nm Spaced Contacts (nV)2/Hz 0 3.200E-12 6.400E-12 9.600E-12 1.280E-11 1.600E-11 1.920E-11 2.240E-11 2.560E-11 2.880E-11 3.200E-11 3.520E-11 3.840E-11 4.160E-11 4.480E-11 4.800E-11 5.120E-11 5.440E-11 5.760E-11 6.080E-11 6.400E-11 6.720E-11 7.040E-11 7.360E-11 7.680E-11 8.000E-11 A 14.6 14.4 f (GHz) Spin valve 3.7 Locked IA A B 500 nm 13.3 14.2 IB 14.0 B When phase locked power increases & linewidth decreases 13.8 0 5 10 15 PT PA PB 2 PAPB cos( ) IB (mA) A biased at 11.5 mA; B swept 0 – 15 mA 10 60 2 0 40 20 14.0 14.2 14.4 f (GHz) 14.6 14.8 B 20 A 10 0 0 13.8 30 2 2 A 4 Locked PSD (nV) /Hz 6 PSD (nV) /Hz B Power (pW) 80 2 PSD (nV) /Hz 8 13.8 14.0 14.2 14.4 14.6 14.8 8 6 4 2 0 13.8 f (GHz) Kaka et al, Nature, Sept. 2005 14.0 14.2 14.4 f (GHz) 14.6 14.8 0 90 180 270 Phase Shift (deg) Pattern Recognition Using Coupled Nano-Oscillators a b c (a): An pattern recognition circuit using an array of electrically coupled DMTJ spin-torque oscillators. The DMTJ creates a harmonic oscillation which is read out by the analyzer layer (topmost layer). The frequency of oscillation of these oscillator is tuned using the two transistors on the branch. These transistors modulate the current based the on the level of match between an input and a reference image. (b): The parallel connection causes the different oscillators to cohere with each other and converge on a common frequency of oscillation. In this case, the signals converge to two frequencies representing high and low match signals. (c): The time domain signals show that the signals converge two oscillating frequencies--all of them in-phase with each other. Proposed Double Junction Structure Pattern Recognition Reference Input Coherence Time Signal Amplitude For exact matches with different patterns, the frequency and the output power of the total signal are nearly the same. Pattern Recognition Reference Input Coherence Time Signal Amplitude Frequencies of best match are shown in dashed box. These can be filtered using BPF. Amplitude shows ‘6’ is a better match than ‘2’. Pattern Recognition Reference Input Coherence Time Signal Amplitude For exact matches with different patterns, the frequency and the output power of the total signal are nearly the same. Reconfigurable Array of Magnetic Automata • Objective – To develop a new, fully reprogrammable, ultra-low power (10 zeptojoules/operation) spin logic and memory architecture based on a Reconfigurable Array of Magnetic Automata (RAMA) operated at room temperature. Reconfigurable Array of Magnetic Automata (RAMA) Top potion of cross-bars Anti-ferromagnetically ordered array Bottom potion of cross-bar anatomy Piezo electric matrix + Magnetic nano-pillar + Collossal Magneto-Capacitive Layer (CMC) Nanomagnetic array fabricated by E-beam lithography 47.81 nm 35 30 Z[nm] 25 20 15 10 5 0 0 0.00 nm 0.5 1 1.5 X[µm] Diameter increases to ~75 nm FWHM and pillars are somewhat conical 2 29/30 Self-Assembled CFO Pillars Diblock copolymer line patterns for metallization 45 kg/mol Domain period D ~ N2/3 slope ~ 0.627 34 nm period nm period, 9 nm 1217 kg/mol linewidth W lines 16 kg/mol 70 nm 17 nm period 15 nm period 30 BCP patterns can be scaled to sub-10 nm dimensions, templated into complex C. Ross MIT patterns and transferred into metal wires