Vibration level of floor and the air table
1. Description
The vibration level was measured using PCI accelerometer and Siglab dynamic signal
analyzer. The data were acquired from 1Hz to 1000Hz, and they were averaged 10 times.
In the graph, x axis is frequency in Hz, and y axis is displacement. The range of x axis is
from 1Hz to 1000Hz, and that of y axis is from 0 to 20nm in RMS (Root Mean Square).
Blue line refers to the vertical vibration, while yellow and green lines refer to the
horizontal vibrations.
2. Vibration of the floor
2
x 10
-8
X:m/s^2
aspec ch: 1,2,3
Y:m/s^2
Z:m/s^2
1.8
1.6
1.4
rms int² (m/s2)
1.2
1
0.8
0.6
0.4
0.2
0
1
2
10
10
x:log Hertz
3
10
3. Vibration on the air table
2
x 10
-8
X:m/s^2
aspec ch: 1,2,3
Y:m/s^2
Z:m/s^2
1.8
1.6
1.4
rms int² (m/s2)
1.2
1
0.8
0.6
0.4
0.2
0
1
2
10
10
x:log Hertz
3
10