NANO LETTERS Growth of Semiconducting Graphene on Palladium 2009 Vol. 9, No. 12 3985-3990 Soon-Yong Kwon,†,‡ Cristian V. Ciobanu,*,§ Vania Petrova,| Vivek B. Shenoy,⊥ Javier Bareño,|,# Vincent Gambin,¶ Ivan Petrov,| and Suneel Kodambaka*,† Department of Materials Science and Engineering, UniVersity of California Los Angeles, Los Angeles, California 90095, DiVision of Engineering, Colorado School of Mines, Golden, Colorado 80401, Frederick Seitz Materials Research Laboratory, UniVersity of Illinois, Urbana, Illinois 61801, DiVision of Engineering, Brown UniVersity, ProVidence, Rhode Island 02912, and Northrop Grumman Space and Technology, Redondo Beach, California 90278 Received July 5, 2009; Revised Manuscript Received August 31, 2009 ABSTRACT We report in situ scanning tunneling microscopy studies of graphene growth on Pd(111) during ethylene deposition at temperatures between 723 and 1023 K. We observe the formation of monolayer graphene islands, 200-2000 Å in size, bounded by Pd surface steps. Surprisingly, the topographic image contrast from graphene islands reverses with tunneling bias, suggesting a semiconducting behavior. Scanning tunneling spectroscopy measurements confirm that the graphene islands are semiconducting, with a band gap of 0.3 ( 0.1 eV. On the basis of density functional theory calculations, we suggest that the opening of a band gap is due to the strong interaction between graphene and the Pd substrate. Our findings point to the possibility of preparing semiconducting graphene layers for future carbon-based nanoelectronic devices via direct deposition onto strongly interacting substrates. Graphene1,2sa two-dimensional crystalline sheet of carbon atoms arranged in a honeycomb latticesgenerated enormous interest in the research community owing to its ultrathin geometry and properties such as high carrier mobility,3 excellent thermal conductivity,4 and high mechanical strength.5 One of the attractive features of free-standing graphene, a semimetal, is its semiconducting behavior6,7 at length scales below 500 Å with a size-dependent band gap.8-10 Previous reports11-13 have shown that a band gap can also be opened in graphene grown on insulating SiC(0001) and BN(0001) via interactions with the substrate. Here, we report the formation of semiconducting graphene layers with a band gap of 0.3 ( 0.1 eV on Pd(111), a metallic substrate. Using in situ scanning tunneling microscopy (STM) and spectroscopy (STS), we determine the electronic structure of graphene islands grown in situ via chemical * Towhomcorrespondencemaybeaddressed.E-mail:kodambaka@ucla.edu, cciobanu@mines.edu. † Department of Materials Science and Engineering, University of California Los Angeles. ‡ Present address: School of Mechanical and Advanced Materials Engineering, Ulsan National Institute of Science and Technology, Ulsan 689-798, Korea. § Division of Engineering, Colorado School of Mines. | Frederick Seitz Materials Research Laboratory, University of Illinois. ⊥ Division of Engineering, Brown University. # Present address: Department of Physics, Chemistry and Biology (IFM) Linköping University, SE-581 83 Linköping, Sweden. ¶ Northrop Grumman Space and Technology. 10.1021/nl902140j CCC: $40.75 Published on Web 09/28/2009 2009 American Chemical Society vapor deposition on Pd(111). In contrast to recent reports on nanoribbons, where the band gap originates from size/ edge effects,8-10 the band gap in epitaxial graphene on palladium is caused by a strong interaction with the Pd substrate and the ensuing breaking of translational symmetry between the two hexagonal close-packed sublattices of graphene. Our experiments illustrate the control over the electronic properties of graphene through interactions with substrates in well-defined epitaxial configurations. This approach opens up the possibility of preparing metal-semiconducting graphene structures and metal-doped graphenebased devices with potentially new applications. Using STM, we followed the formation and growth of graphene on Pd(111) during ethylene deposition over a range of pressures, substrate temperatures, and times. Panels A and B of Figure 1 are representative STM images of graphene islands acquired from a Pd(111) surface in situ during ethylene deposition at 968 K. In our experiments, island sizes vary between 200 and 2000 Å and are commonly observed at or near the Pd step edges as in Figure 1A, or spanning across multiple terraces as in Figure 1B. During ethylene deposition, we observe graphene islands on the surface, which likely form via precipitation of the carbon atoms dissolved in the substrate. This is plausible because C dissolves readily in Pd with a temperature-dependent solubility14 that increases from 0.2 atom % at 723 K to 1.4 atom % Figure 1. STM images of graphene on Pd(111) acquired in situ during growth. (A and B) Derivative filled-state STM images (VT ) -1.3 V) acquired from a Pd(111) sample at 968 K during exposure to ethylene. Images show graphene islands near or spanning across substrate steps. IT ) 0.13 nA in (A) and 0.22 nA in (B). Fourier transforms (insets) of the images in (A) and (B) show 6-fold symmetry. (C) High-resolution filled-state STM image (VT ) -1.3 V, IT ) 0.13 nA) of a graphene island at 968 K. (D) Surface height profile along the white line shown in panel C. Graphene forms a hexagonal Moiré pattern with a spatial periodicity of 21 ( 1 Å. (E) Atomic model showing the [21j1j0] orientation of graphene (honeycomb lattice) aligned with the Pd [11j0] atoms (large spheres). This specific arrangement of the two lattices is consistent with the most frequently observed Moiré periodicity of 21 Å. at 1023 K. The decrease of the substrate temperature following the high-temperature deposition and/or extended deposition times lead to an increase of the C supersaturation in the bulk, which eventually results in precipitation of crystalline carbon at the surface.15 A similar process has been previously reported for graphene growth on other metals.16-19 In all our growth experiments, graphene islands appear instantaneously, presumably due to faster nucleation and growth rates compared to the STM scan rates. After graphene islands are formed, their shapes and sizes do not change significantly with time and appear to be independent of C2H4 pressure at a given temperature. More interestingly, we observe considerable rearrangement of the substrate surface (refer to Figure S1 in Supporting Information for more details). Similar morphological changes of the substrate have been recently reported for graphene growth on ruthenium and attributed to the displacement of substrate atoms by carbon.20 We now focus on the structure of graphene islands. Fourier transforms (FT) of the STM images (shown as insets in panels A and B of Figure 1) indicate that the islands exhibit an ordered superstructure with a 6-fold symmetry. Figure 1C is a higher resolution image of the ordered superstructure within a graphene island. These superstructures are Moiré patterns formed by the superposition of the honeycomb lattice of graphene and the hexagonal lattice of Pd(111) and have also been observed on other metal surfaces.17-20 From the FTs, we measure spatial periodicities of ∼19 and ∼20 Å for the islands in panels A and B of Figure 1, respectively. 3986 Figure 2. Surface morphologies of graphene islands on Pd substrate. (A and B) Higher magnification STM images showing portions of the graphene island in Figure 1B. (C and D) Surface height profiles obtained along the lines highlighted in panels A and B, respectively. The observed step height difference between the substrate and the graphene island is <0.4 Å for the configuration shown in A and is ∼2.3 Å for the island geometry in B. The bottom panel shows schematics of the suggested growth morphologies for graphene on Pd(111). From the surface height profile (Figure 1D) measured along the white line shown in Figure 1C, we obtain a periodicity of ∼20 Å. In our experiments, most islands exhibit Moiré patterns with periodicities of 21 ( 1 Å; however, we have also observed periodicities as small as 15 ( 1 Å (see Figure S2 in Supporting Information), but they are relatively few. Using the in-plane lattice constants of graphene (2.46 Å) and Pd(111) (2.75 Å), we calculated the relative orientation between the two lattices that is required to explain the observed structures. We find that a Moiré pattern with 21 ( 1 Å periodicity is obtained when the [21j 1j 0] direction of graphene is aligned along the [11j0] direction of Pd lattice; such alignment can be realized by superposition of 9-10 graphene unit cells onto 8-9 unit cells of Pd(111). An atomic model of such a commensurate Moiré superstructure is shown in Figure 1E, along with the determined epitaxial relationship between monolayer graphene and Pd(111). Interestingly, STM images indicate that the graphene islands lie in the substrate surface. Panels A and B of Figure 2 are higher magnification STM images of the graphene island in Figure 1B. They show the most commonly observed graphene/substrate configurations in our experiments: graphene bounded by monatomic steps (Figure 2A) and graphene blanketing substrate steps and terraces in between (Figure 2B). The surface height profiles in panels C and D of Figure 2 taken along the lines highlighted in the images confirm these observations. That is, the height difference between graphene and the Pd surface is <0.4 Å, which is significantly lower than the Pd-Pd or graphenegraphene interlayer spacings. This result is typical of several tens of STM images of graphene islands acquired from different regions of the substrate during growth at any temperature between 723 and 1023 K and ethylene pressures between 10-8 and 10-7 Torr. Moreover, the observed topologies are independent of tunneling biases between -1.9 Nano Lett., Vol. 9, No. 12, 2009 Figure 3. Tunneling bias-dependent STM images of graphene islands. (A) Empty- and (B) filled-state STM images (310 × 310 Å2) of the ordered superstructure acquired at room temperature. Notice the contrast reversal with the change in tunneling voltage bias. Tunneling bias VT is changed from +1.1 V in panel A to -1.1 V in panel B while current IT ) 0.24 nA is held constant. V and +1.9 V, suggesting that this lack of difference in surface heights is not a tunneling artifact. In order to establish the location of carbon atoms on Pd(111), we used density functional theory (DFT) calculations to test the stability of two of the most likely C/Pd configurations: (1) a honeycomb lattice of C atoms interspersed among Pd atoms in the uppermost Pd(111) layer and (2) single six-atom rings made of C atoms located at interstitial surface sites in the top (111) layer. DFT calculations indicated that both these configurations are unstable and showed that the C atoms relax upward reaching an equilibrium distance of ∼2.3 Å aboVe the first Pd(111) layer. This distance is consistent with previous theoretical results,21 and is nearly the same as the Pd (111) step height of 2.245 Å. To reconcile the results of these DFT calculations with the STM images that show graphene islands in the surface, we suggest that the topologies observed in our experiments are due to monolayer graphene surrounded by Pd steps. Our reasoning is as follows: (1) Graphene islands are surrounded by Pd substrate steps during growth. This is based upon our in situ high-temperature STM observations, which indicate that the Pd steps are relatively mobile during ethylene deposition and that they can move without affecting the graphene layer (see Figure S3 in Supporting Information). (2) Presence of multiple (g2) layers of graphene would yield graphene-graphene or graphene-Pd step heights that are incompatible geometrically with the height of the monatomic steps on Pd(111), and would also yield fainter contrast of the Moiré superstructures in the STM images. However, we have never observed such graphene island step heights in our experiments. Therefore, we suggest that the observed Moiré superstructure is due to monolayer height graphene islands on Pd(111). We now discuss the electronic characteristics of the graphene layers. Surprisingly, we observe bias-dependent contrast in the STM images of the graphene superstructures; i.e., the image contrast reverses with the polarity of the bias voltage on the tip. Figure 3 shows typical empty (3A) and filled (3B) state STM images of graphene on Pd surface. This contrast reversal, characteristic of semiconducting surfaces,22 suggests that the observed graphene islands may also be semiconducting. To understand the origin of biasNano Lett., Vol. 9, No. 12, 2009 dependent contrast, we used DFT to simulate the STM images. For comparison, we have simulated STM images for flat free-standing graphene in vacuum and for graphene on Pd. In the case of free-standing graphene the simulated filled and empty state STM images are very similar; i.e., the image contrast did not change with bias. In the case of graphene on Pd with large surface unit cells (which is relevant to our experiments), we have found that tunneling contrast in the simulated STM images always has a strong bias dependence; in several cases, the contrast of the simulated STM images reversed upon changing the sign of the voltage bias (Figure S4 in Supporting Information). This effect may be understood as follows. Carbon atoms in the graphene lattice that are farther away from the Pd surface (i.e., at the top of the hills in the graphene layer) behave much like the atoms of free-standing graphene and thus yield similar contrast in both filled and empty states. The carbon atoms at the bottom of the valleys interact more strongly with Pd, which results in substantial distortion of their π orbitals and in charge transfer with the substrate. This charge transfer can increase the density of filled states in the valleys, which in turn would change the contrast of the (simulated) STM images. Furthermore, the electronic band structure of flat free-standing monolayer graphene does not exhibit an energy band gap (Figure S4 in Supporting Information), while there is a small band gap for the graphene islands on Pd as shown in the following sections. This reinforces our suggestion that the experimentally observed contrast reversal is indicative of the semiconducting nature of graphene on Pd. In order to draw firm conclusions about the electronic structure of graphene on Pd(111), we used point-mode scanning tunneling spectroscopy (STS) and collected I vs V data from the graphene islands (Figure 4A). From the STS data, we extracted normalized conductance values [(dI/dV)/ (I/V)]. This normalized conductance is expected to be nearly independent of the tip-sample separation23,24 and is a measure of the local surface density of states (LDOS). Figure 4B shows plots of [(dI/dV)/(I/V)] vs V obtained using three different tunneling currents. The data are an arithmetic average of values measured at over 70 different points on the graphene island. The absence of electronic states, as indicated by the zero conductance over a range of voltages centered around 0 V, confirms the existence of a band gap. This result is typical of all of our STS measurements acquired using a range of tunneling currents from several locations up to 300 Å apart within the same as well as different graphene islands. From the data, we measure band gap values between 0.2 and 0.4 eV for different graphene islands. Within our experimental uncertainties of (0.1 eV, we did not observe any significant variation of the band gap with island size or shape. The uncertainty value of 0.1 eV originates from limited spectroscopic resolution at room temperature due to the thermal broadening of both the sample and tip electron energy distribution. We note that for a given graphene island, band gap values do not vary significantly (e10%) with the change in tunneling currents IT between 0.1 and 1.1 nA, a measure of sample-tip tunneling height. 3987 Figure 4. Scanning tunneling spectroscopy (STS) of graphene on Pd(111). (A) High-resolution STM image from a graphene island on Pd(111). (B) Typical plots of (dI/dV)/(I/V) vs V data obtained using point-mode STS at three different tunneling currents IT ) 0.3, 0.5, and 0.7 nA with VT ) +1.075 V. Inset in B shows the (dI/dV)/(I/V) vs V data over a smaller range of V around 0 V. We note that (dI/dV)/(I/V) ) 0 over a range of 0.25 V (band gap) centered around 0 V. Similar band gap values are obtained in all our STS measurements. (C) Average local density of states (LDOS) spectrum from a 20 × 20 Å2 region within a graphene island, extracted from current imaging tunneling spectroscopy (CITS) measurements (VT ) +1.1 V, IT ) 0.2 nA). (D) DFT calculated projected density of states (PDOS) corresponding to the carbon atoms of single-layer graphene on Pd(111). This rules out any tip-induced artifacts in STS data. As a consistency check, we also used current imaging tunneling spectroscopy (CITS) to measure LDOS on graphene islands. Figure 4C shows the average LDOS calculated from five or more I-V spectra collected from within a 20 × 20 Å2 area on a graphene island using VT ) +1.1 V and IT ) 0.2 nA. Band gap values extracted from the CITS data are in good agreement with the STS measurements and thus provide a validation for our results. The observed semiconducting nature of the graphene layer on Pd(111) is intriguing, because free-standing graphene is a semimetal with zero band gap and in our experiments graphene is grown on a metallic substrate. The possible causes for the presence of a band gap are (i) the finite-size effects as in refs 9, 10 and (ii) the interaction of graphene with the substrate as in refs 13, 21. The range of sizes for the quantum confinement regime in graphene-based structures was determined recently by several groups.9,10 Using DFT, Son et al. showed that the band gap induced by size effects in nanoribbons becomes smaller than 0.05 eV at dimensions larger than ∼60-80 Å.9 Han and co-workers studied lithographically patterned graphene structures10 and showed that the band gap drops below 0.01 eV for ribbons with widths greater than 320 Å. For dimensions of 200 Å (the smallest island sizes observed in our experiments), Han et al. find a band gap of ∼0.03 eV (last figure in ref 10); this value is an order of magnitude smaller than that measured in our experiments, ∼0.3 eV. Furthermore, from the STS measurements obtained from graphene islands located in different regions of the substrate, we always find a band gap; within our experimental errors, this band gap is nearly the same for smaller (200 Å) or larger (2000 Å) islands. On the basis of our measurements and on previous reports on the size/edge effects in graphene ribbons,9,10 we assess that the effects of island size on the electronic behavior of graphene are not significant and that the origin of the band gap in graphene lies in its interactions with the substrate. The opening of a band gap in graphene on Pd(111) can be understood by analyzing the interaction of graphene and the substrate at the level of density functional theory (DFT, methods section). We constructed Moiré superstructures with periodicities ranging from ∼8 to 22 Å and calculated the strengths of interaction between carbon and Pd atoms. For all the superstructures simulated, the calculations reveal 3988 strong interaction energies (∼0.13 eV/carbon atom) between graphene and the Pd substrate, consistent with experimental observations16 other recent reports of DFT calculations of graphene on metals.21 This interaction is due to the large deformation (partial sp3 hybridization) of the π orbitals of the carbon atoms in the vicinity of Pd atoms. In free-standing graphene, the gapless energy spectrum is caused by the perfect symmetry of the two identical hexagonal sublattices. However, on strongly interacting substrates, this symmetry can be broken.12,13 As seen in Figure 1E, some of the carbon atoms are directly above Pd atoms, while some other carbon atoms lie above the midpoint of a surface Pd-Pd bond. Such local variations in C-Pd coordination for C atoms within the graphene lattice cause different distortions of the carbon orbitals, thus breaking the translational symmetry of the two hexagonal sublattices. Once the symmetry is broken, a nonzero band gap is expected to appear,25 which could be seen both in the energy dispersion relations and in the density of states corresponding to graphene. In analyzing the DFT results, we found that the total density of states (i.e., with contributions from all atoms in the supercell and all angular momentum components) has no band gap because of the dominant contribution from the substrate Pd atoms. However, the projected density of states (PDOS) corresponding to the carbon atoms alone (Figure 4D) shows a band gap of ∼0.25 eV for a simulated Moiré pattern with a periodicity of 10 Å (refer to Figure S4 in Supporting Information). This result is consistent with the experimental LDOS (Figure 4C), in that they both show a band gap of similar magnitude. We emphasize that the agreement can only be qualitative because of the possible influence of the top layer Pd atoms on the LDOS spectrum. In conclusion, we used in situ high-temperature STM to follow the chemical vapor deposition of graphene on Pd(111) and room-temperature STS to determine the electronic structure of as-grown layers. Interestingly, these graphene islands are semiconducting as indicated by the STM image contrast reversal with change in tunneling bias polarity. We confirm this behavior using point-mode STS and CITS measurements, which yield band gap values between 0.2 and 0.4 eV. Our DFT calculations agree with the experimental results. We attribute this opening of the band gap to strong interactions between the carbon atoms and the Pd substrate, which break the symmetry of the two hexagonal sublattices Nano Lett., Vol. 9, No. 12, 2009 of the graphene lattice. We expect that a similar behavior can be realized on other strongly interacting metallic as well as insulating substrates. This opens up the exciting possibility of tailoring electronic properties of graphene layers by appropriate metal doping and for fabricating metalsemiconducting graphene-metal sandwich structures26 with potentially new applications. Methods. All our graphene growth experiments were carried out on epitaxial Pd(111) layers, 1600 Å thick, sputterdeposited on Al2O3(0001) using the procedure described in ref 27. The Pd(111)/Al2O3(0001) samples were transferred to an ultrahigh vacuum (UHV) multichamber (base pressure <2 × 10-10 Torr) STM system equipped with facilities for electron-beam evaporation, ion etching, and low-energy electron diffraction (LEED). The Pd(111) sample was degassed in UHV at 873 K for approximately 1200 s and then at 1073 K for 60 s. This procedure resulted in sharp 1 × 1 LEED patterns corresponding to an in-plane atomic spacing of 2.75 Å. STM images showed atomically smooth terraces wider than 1000 Å and separated by monolayerheight steps with a measured step height of ∼2.3 Å. Both these results are consistent with the values expected for clean Pd(111).28 Carbon was deposited using ethylene (C2H4) at pressures between 1 × 10-9 and 5 × 10-7 Torr and temperatures T between 300 and 1100 K. Substrate temperatures were measured using optical pyrometry and are accurate to within 50 K. At each temperature, the sample and the tip were allowed to stabilize for up to 2 h prior to STM data acquisition. STM images were acquired as a function of deposition time t and C2H4 pressure in the constant current mode using commercially available Pt-Ir tips. Typical tunneling currents IT of 0.1-0.8 nA and bias voltages VT of ( 0.8-2.0 V were used. Scan rates varied between 45 and 200 s/frame. Pixel resolution in the images varied from 0.5 × 0.5 Å2 to 5.0 × 5.0 Å2. Scan sizes, scan rates, and tunneling parameters were varied to check for tip induced effects. We observed no such effects in the results presented here. STM images were processed using Image SXM software.29 The as-deposited graphene layers were characterized using point-mode STS and CITS at room temperature. In the STS mode, I vs V data was acquired over a range of bias voltages VT between -2 V and +2 V. For CITS, I vs V data were obtained at each pixel (resolution ) 1.0 × 1.0 Å2) within a scanned area. The acquisition time at each pixel was 10 ms. During the measurements, tip-sample separation was held constant by interrupting the feedback loop. DFT calculations were performed in the generalized gradient approximation, using the projector-augmented pseudopotentials30 and Perdew-Burke-Ernzerhof exchangecorrelation functional.31 We used the VASP package30 to perform structural relaxations of a single graphene layer on a palladium slab with up to six (111) layers of Pd (bottom two layers fixed) and a vacuum spacing of 15 Å along Pd[111]; for the in-plane directions (i.e., which are perpendicular to the Pd[111] axis) there is no vacuum so as to simulate a 2D periodic system with no edges. The energy cutoff for plane waves was 400 eV during the geoNano Lett., Vol. 9, No. 12, 2009 metry relaxations and was increased to 500 eV for the calculation of electronic properties and the simulation of STM images. The Brillouin zone was sampled using a 2 × 2 × 1 Γ-centered grid for structural optimizations, and a 24 × 24 × 1 grid for computing the density of states. The projection of the density of states onto atoms and angular momentum components were calculated using the Wigner-Seitz radii of 1.43 and 1.03 Å for the Pd and the C atoms, respectively. Acknowledgment. We gratefully acknowledge support from the Department of Materials Science and Engineering and the Henry Samueli School of Engineering and Applied Sciences at the University of California Los Angeles, University of California Discovery grant, from the National Science Foundation through Grant No. CMMI 0825592/ 0825771 and the MRSEC programs at Colorado School of Mines (DMR-0820518) and Brown University (DMR0520651). This work benefited from computing resources from the National Center for Supercomputing Applications (Grant. No. DMR-090121), and was carried out in part at the Frederick Seitz Materials Research Laboratory Central Facilities, University of Illinois, which are partially supported by the U. S. Department of Energy under grants DE-FG0207ER46453 and DE-FG02-07ER46471. 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