Mi
Micro
Robotics
R b ti
Lab
L b
Prof.
P
Prof
f Sarah
S
h Bergbreiter
B gb it (collaborators
( ll b
t
Prof.
P
Proff S.K.
S K Gupta,
Gupta
G pt , Prof.
Prof
P f Pamela
P
l
Abshire Prof.
Abshire,
Prof Nuno Martins , Prof.
Prof Elisabeth Smela)
Project
j
Highlights
g g
Goal
Technical Highlights
– First monolithic , high
aspect ratio PDMS/Si
mechanisms
h i
– 100s of J stored for
energy
gy release
l
in
i jumping
j pi g
microrobots
Engineer efficient and capable robotic
systems
y
at small size scales
Technical Areas
• Robot Locomotion
– Insect
I
t biomechanics
bi
h i
– Improving
I p i g efficiency
ffi i
y and
d efficacy
ffi
y
– Scaling
S li g off locomotion
l
ti principles
p i ipl
• Mi
Microrobot
b tM
Mechanisms
h i
– Multi-material
M lti
t i l micromechanisms
i
h i
– Rapid
R pid prototyping
p t typi g processes
p
– Microfabrication
Mic ofab
b icatio
• Microrobot
Mi
b tA
Actuation
t ti
– High
Hi h power actuation
t ti from
f
stored
t d energy
– High
Hi h fforce density
d
it microactuators
i
t t
P l
b
d thermal
th
l actuators
t t
based
– Polymer
Polymer-based
– Energetic
E
ti materials
t i l
Silicon/PDMS Micromechanisms
for Jumping
p g Microrobots
200 m
400 
m
Soft Polymer
y
Microactuators
• Power
P
Sources
S
– Energy
E
harvesting
h
ti
Broader
B
d IImpacts
p t
– Soft springs
springs, grippy
sidewalls,, mechanical
energy storage for various
MEMS applications
– First truly mobile robots
robots
4 mm
Autonomous Jumping Microrobots
using Energetic Materials (w/ ARL)
Technical Highlights
– First
Fi t all-polymer
ll l
microfabricated actuators
(b th th
((both
thermall and
d
electrostatic)
– High
g aspect
p
ratio
conductive and non
nonconductive PDMS features
Broader Impacts
– Robust
obus ac
actuators
ua o s for
o use in
miniature robotics,
robotics medical
devices, prosthetics, etc.
• Mobile
M bil Sensor
S
Networks
N t
k
– Sensors
S
for
f localization
l
li ti
– Low
L
power communication
i ti
High Force Density Silicon
Actuators for Microrobots
Broader
B
d IImpacts
t
– Efficient and scalable
actuators
t t
ffor use in
i
miniature robotics
robotics,
prosthetics,
p
os e cs, e
etc.
c
Broader Impacts
– New
N
iintegration
g i method
h d
for COTS electronics
components and
polymer/metal robots
Technical Highlights
– New compliant frame
architecture
hit t
to
t reduce
d
weight
A 1.5g
1 5g
g Micro Air Vehicle (w/
( Prof
Prof.
S K
S.
K. G
Gupta)
p
pta))
Broader Impacts
– Reduced mass of frame,
frame
wings,
i g and
d electronics
l t i
can increase payload
carrying
yi g capacity
p ity
resulting in useful MAVs
at this scale
Technical Highlights
– Low-cost,
Low cost low
low-overhead
overhead
fabrication of sub
sub-cm
cm
robot
b t systems
t
– Inclusion of thermal
actuators
t t
and
d wiring
i i g on
polymer platform
Technical Highlights
– New design for
electrostatic inchworm
inch orm
actuators to improve force
d
density,
ity, p
power d
density,
ity, and
d
efficiency
• Systems
S t
IIntegration
t
ti
– Low
L
mass, low
l
power control
t l and
d sensing
i
– Robust
R b t iintegration
t
ti
Technical Highlights
– First fully integrated subsub
cm3 robot (sensing
(sensing,
actuation,
t ti
control,
t l power)
p
)
– An 8-cm high jump was
d
demonstrated
t t d in
i
response to a light
stimulus
Rapid
p Multi
Multi-Polymer
Polymer
y
Prototyping
yp g
for Microrobots (w/
( Profs.
Profs Abshire
Abshire,
Martins and Smela))
Broader
B
d IImpacts
p t
– Reduce design cycle time
f sub-cm
for
b
robots
b t
– Experimentally
investigate questions on
scaling locomotion
Selection of References (since 2009)
Gerratt, A. P., Penskiy, I., and Bergbreiter, S., “SOI/elastomer
SOI/elastomer process for energy storage and rapid release,”
release, Journal of Micromechanics and Microengineering, vol. 20, no. 10, p. 104011, 2010.
Penskiy II., Gerratt,
Penskiy,
Gerratt A
A. P.,
P and Bergbreiter
Bergbreiter, S
S., “Friction
Friction, Adhesion
Adhesion, and Wear Properties of PDMS Coatings in MEMS Devices
Devices,” in IEEE MEMS
MEMS, 2011 (accepted)
(accepted).
G
Gerratt,
tt A
A. P.,
P Tellers,
T ll
M.
M and
dB
Bergbreiter,
b it S.,
S “Soft
“S ft Polymer
P l
MEMS,”
MEMS ” in
i IEEE MEMS
MEMS, 2011 ((accepted).
t d)
Currano, L. J., Churaman, W., Rajkowski, J., Morris, C. J., Bergbreiter, S. “Nanoenergetic
Nanoenergetic Silicon as a Thrust Actuator for Jumping Microrobots,”
Microrobots, Hilton Head 2010 Workshop, June 6-10,
6 10, 2010.
Gerratt A
Gerratt,
A.P.,
P Penskiy,
Penskiy II., Bergbreiter
Bergbreiter, S
S. “PDMS
PDMS and Silicon Micromechanisms in a Monolithic Process
Process,” Hilton Head 2010 Workshop
Workshop, June 6
6-10,
10 2010.
2010
G
Gerratt,
tt A
A.P.,
P Penskiy,
P
ki II., B
Bergbreiter,
b it S
S. “Integrated
“I t
t d Sili
Silicon-PDMS
PDMS Process
P
ffor Mi
Microrobot
b tM
Mechanisms,”
h i
” ICRA 2010
2010, A
Anchorage,
h
AK M
May 3-7.
3 7 Winner
Wi
off B
Bestt C
Conference
f
P
Paper Award
A
d outt off 850 accepted
t d papers and
d almost
l
t 2000 submitted
b itt d
Rajkowski, J.E., Gerratt, A.P., Schaler, E.W., and Bergbreiter, S. “A
A Multi-Material
Multi Material Milli
Milli-Robot
Robot Prototyping Process,”
Process, IROS 2009, St. Louis, October 11-15,
11 15, 2009.