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".% $/-0&.3"4*/. 2/54*.&3 &.352& "$$52"$9 $4/#&2 &7,&44;"$+"2% /52.", V1 = E1 V1 V2 = (-1/8)E2 Zx = Ro(1 + )/(1 - ), E where 1 is the gain of vector voltmeter 1, 2 is the gain of vector voltmeter 2, = -8Vrr is the measured reflection coefficient, Vr = V2/V1 is the voltage ratio, and r = 1/2 is the ratio of the voltmeter gains. V2 We define the calculated impedance sensitivity S to the voltĆ meters' gain variance as follows: Ix Zx S+ Vx General schematic for impedance measurement using two vector voltmeters. parameters is called and one method is (OSL) calibration. Calculation of Zx from the measured voltage ratio Vr according to equation 1 is called We call a linear circuit such as the one in Fig. 2Ċone that relates a signal source, two vector voltmeters, and a DUTĊa Transducers are the key element in impedance measurements. Two types of transducers of interest here are the directional bridge and the transducer in a currentĆvoltage (IĆV) method. Let's compare these in terms of their sensitivity to gain variance in the vector voltmeters in Fig. 2. Directional Bridge. Directional bridges (see Fig. 3) are used in many network analyzers, mainly to measure impedances near 50 ohms. In this case, the bilinear transformation is: Zx + Ro 1 ) , 1* (2) where = (Zx - Ro)/(Zx + Ro) is the reflection coefficient, Vr = V2/V1 = (-1/8), and Ro = 50 ohms is the characteristic impedance. The parameters in equation 1 are K1 = -8Ro, K2 = -1/8, and K3 = 8. Now assume that the vector voltmeters in Fig. 3 are not ideal but have some gain variance. The measured voltages V1 and V2 and the calculated impedance Zx are: + V2 Ro Ro V1 Ro (3) This sensitivity can be considered as the inverse of the magĆ nification of gain variance. The smaller S is, the smaller the error in the calculated impedance. For the directional bridge, equation 3 is: S+ 1 Z 2x * R 2o Z x r + 2 Z xR o r Z x S = (-1/2)Ro/Zx for Zx Ro S=0 for Zx = Ro S = (1/2)Zx/Ro for Zx Ro. This implies that this type of transducer has little sensitivity to the voltmeter gain variance when the DUT impedance is near Ro (50 ohms). The gain variance of the voltmeters beĆ haves as an offset impedance with a magnitude of (1/2)Ro r/r when the DUT impedance is much smaller than Ro, where r is the change in the gain ratio r. The gain variĆ ance of the voltmeters behaves as an offset admittance with a magnitude of (1/2)Gor/r when the DUT impedance is much larger than Ro, where Go = 1/Ro. Fig. 4 shows this characteristic. I-V Method. Fig. 5 shows the simplest transducer for the IĆV method. The bilinear transformation in this case is: Zx = RoVrā, We also assume that there is some gain variance in the vecĆ tor voltmeters in Fig. 5. The measured voltages V1 and V2 are related to the calculated impedance Zx as follows: V 1 + 1E Ro Zx ) Ro V 2 + 2E Zx Zx ) Ro where 1 is the gain of vector voltmeter 1, 2 is the gain of vector voltmeter 2, and Vr = V2/V1 is the voltage ratio. Thus, Ro Zx Zx = RoVr rā, where r = 1/2 is the ratio of the voltmeter gains. Directional bridge circuit. October 1994 HewlettĆPackard Journal (4) where Ro = 50 ohms is a resistor that converts the DUT curĆ rent to a voltage and Vr = V2/V1. The parameters in equation 1 are K1 = Ro, K2 = 0, and K3 = 0. Ro + E Z xńZ x . rń r 300 V1 100 Directional Bridge Ro Ro High 10 E Low Sensitivity Zx Ro 1 Ro I-V Method 0.1 V2 0.10 100m 1 10 Basic transducer circuit of the HP 4291A RF impedance anaĆ lyzer with switch indicating circuit configurations for highĆimpedance and lowĆimpedance measurements. Ro 100 1k 10k Impedance Rx (ohms) Sensitivity of the directional bridge and IĆV methods to voltmeter gain variance. In this case, the sensitivity is given by: S+ Z xńZ x + 1. rń r The error ratio (Zx/Zx)/(r/r) is always constant and equal to unity. For example, if the voltmeter gain ratio r changes by 1%, an impedance error of 1% is incurred for any DUT. The foregoing analysis shows that the voltmeter gain variance is neither suppressed nor magnified for all DUT impedances by an IĆV method transducer. This characteristic is desirable for wide impedance measuring capability. Therefore, we adopted this type of transducer for the new HP 4291A oneĆport RF impedance analyzer. Fig. 6 shows the basic circuit of the transducer in the HP 4291A, which is a modified version of Fig. 5. The highĆ impedance configuration (switch closed) realizes perfect open and imperfect short conditions, while the lowĆimpedance configuration (switch open) realizes imperfect open and perfect short conditions.* In either switch position, the outĆ put impedance at the DUT port is always Ro. + V1 Ro E + V2 Zx Fig. 7 shows the actual HP 4291A transducer circuit configuĆ rations. A number of considerations influenced the design of these circuits. First, because a wideband switch with small nonlinearity and small transients over a wide signal range is not easily realized, we divided the circuit of Fig. 6 into two separate circuits. Second, because the minimum frequency of the analyzer is 1 MHz, the floating voltmeter (V1), which corresponds to the current meter, is easily realized by using a balun. Third, we adopted a circuit in which the voltmeter readings change by the same percentage if the floating imĆ pedance of the balun changes. Thus, the voltage ratio Vr does not change and stable impedance measurements are realized. A conceptual block diagram of the HP 4291A including the transducer discussed above is shown in Fig. 8. Only the parts relevant to this discussion are included. The mainframe is similar to the HP 4396A network and spectrum analyzer.3 Two key features of the HP 4291A are time division multiĆ plex operation and impedance ranging. Two voltmeters are obtained by time division multiplexing one voltmeter. The multiplexing period is 2 ms. This ensures that slow drift of the voltmeter gain does not affect the impedance measureĆ ment. With this method, the signal path after the multiplexer can be extended. The HP 4291A uses a 1.8Ćm cable between the transducer and the instrument mainframe. This allows wide flexibility in constructing a test system using automatic device handlers. The singleĆpath configuration results in good temperature characteristics even with an extended cable. At frequencies below 200 MHz there is an expanded range. In the expanded range there is a gain difference between the voltage channel and the current channel ahead of the multiĆ plexer. This impedance ranging offers stable measurements for DUTs with impedances that differ greatly from 50 ohms. Fig. 9 shows HP 4291A impedance measurement specificaĆ tions. General error factors are the uncertainties of standards IĆV method. * A perfect open condition means that voltmeter V1 reads zero with the DUT port open. A perfect short condition means that voltmeter V2 reads zero with the DUT port shorted. October 1994 HewlettĆPackard Journal V2 calibration. One way to improve phase measurement accuĆ racy is to use a phaseĆcalibrated load standard. However, it is not guaranteed that the phase uncertainty for a calibrated 50Ćohm load is smaller than 10-3 at high frequencies, such as 1 GHz. Ro Another way to improve phase measurement accuracy is to use, in addition to the normal openĆshortĆload standards, a lowĆloss air capacitor as a second load (LOAD2). The dissipaĆ tion factor (D) of the air capacitor should be below 10-3 at around 1 GHz. With this method, the uncertainty in the meaĆ sured phase is decreased from the phase uncertainty of the 50Ćohm load (LOAD1) to the uncertainty of the dissipation factor D of the lowĆloss capacitor (LOAD2) for almost all DUT impedances. The next section gives the details of this method. Ro E Ro Balun V1 Ro Zx (a) V2 Ro Ro E • • • • Ro Balun V1 Ro Zx (b) (a) Actual HP 4291A transducer circuit for lowĆimpedance measurements. (b) Circuit for highĆimpedance measurements. used in the calibration, instabilities, and interpolation errors. The instabilities consist mainly of connection nonrepeatabilĆ ity, longĆterm drift, circuit nonlinearity, temperature coeffiĆ cients, and noise. The instabilities and interpolation errors are small enough that the impedance phase errors can be reduced by means of the special calibration discussed next. Normally, the accuracy requirement for impedance phase measurements is greater than that for impedance magnitude measurements. The HP 4291A has a special, easyĆtoĆuse, calibration for measurements of devices having high Q (quality factor). Even if the stability of the instrument is good enough, accuĆ rate Q measurements cannot be made without adequate phase calibration. For instance, if we want to measure the Q factor with 10% uncertainty for a DUT whose Q value is 100, the uncertainty in phase must be smaller than 10-3. The phase accuracy of the instrument is determined almost entirely by the uncertainty of the 50Ćohm load standard used in the OSL October 1994 HewlettĆPackard Journal • We want a calibration method that reduces the error in phase measurement in spite of the existence of phase error for the 50Ćohm load. We have the 50Ćohm load standard whose impedance magnitude is known but whose impedĆ ance phase is not. We add another load (LOAD2) whose imĆ pedance phase is known but whose impedance magnitude is not. We use a lowĆloss capacitor as the second load. There are still at most three unknown circuit parameters. However, two more unknowns related to standards are added. Let us define the problem. There are eight real unknown parameĆ ters: Circuit parameter K1 (two real parameters) Circuit parameter K2 (two real parameters) Circuit parameter K3 (two real parameters) The impedance phase ls1 of the 50Ćohm load (one real parameter) The impedance magnitude Zabs_ls2 of the lowĆloss capacitor LOAD2 (one real parameter). We have solved this problem analytically. For the simplest case where both the open and the short standard are ideal, the three circuit parameters are found as follows: K1 = AZlsiRo K2 = -Zsm/Ro K3 = -YomRo where: Ro = characteristic impedance A = (1 - ZlmiYom)/(Zlmi - Zsm) Yom = measured admittance for open standard Zsm = measured impedance for short standard Zlmi = measured impedance for load standard i (i = 1 for LOAD1, i = 2 for LOAD2) Zlsi = true impedance for load standard i Zls1 = Zabs_ls1exp(jls1) Zls2 = Zabs_ls2exp(jls2) ls1 = 2 - 1 + ls2 Zabs_ls2 = (A1/A2)Zabs_ls1 Zabs_ls1 = impedance magnitude for LOAD1 (50Ćohm, known) ls2 = impedance phase for LOAD2 (lowĆloss capacitor, known) 1 = arg((1 - Zlm1Yom)/(Zlm1 - Zsm)) 2 = arg((1 - Zlm2Yom)/(Zlm2 - Zsm)) (5) Test Head DUT Zx Ro High Signal Source Low V1 V2 Test Station Ro Buffer 0 dB 6 dB 18 dB Multiplexer Buffer –4 dB Buffer Ro DC Bias Mainframe 0 to 36 dB 2-dB Steps V 20 kHz ADC I Cable 1.8 m DC Bias Option 0 to 12 dB Only the mainframe parts relevant to this discussion are shown here. DAC Constant V Constant I Ro E Signal Source 1 MHz to 1.8 GHz ! " " " " ! # "# ! " # ! 100k 100 10k 10% • • • • • 5% 2% 1K 10m |Z|,R,X () |Y|,G,B (S) 1m 1% 100 100m 10 1 1 10 0.1 1M • 10M 100M 1G • Frequency (Hz) (a) • • 10 100k 100 10k 1m 1K • 10m |Z|,R,X () |Y|,G,B (S) 10% 5% 2% 100 100m 10 1 1 10 0.1 1M 1% 10M 100M 1G Frequency (Hz) (b) (a) Errors for impedance magnitude with the transducer for high impedance. (b) Errors for impedance magnitude with the transĆ ducer for low impedance. A1 = (1 - Zlm1Yom)/(Zlm1 - Zsm) A2 = (1 - Zlm2Yom)/(Zlm2 - Zsm) • • • • For the actual case these circuit parameters are expressed by far more complicated equations. Therefore, we adopted a simpler procedure consisting of two steps. Step 1 is as follows: Regard the impedance of the 50Ćohm load as Zls1 = 50+j0 (that is, the phase of LOAD1 is zero). Find the circuit parameters K1, K2, and K3 by normal OSL calibration using the load value Zls1. Execute correction for LOAD2 and get the corrected impedance Zcorr2. Calculate the phase difference between the phase of Zcorr2 and the true phase of LOAD2. Step 2 is as follows: • Modify the impedance of LOAD1 to Zls1 whose phase is - and whose impedance magnitude is still 50 ohms. • Calculate the circuit parameters again by normal OSL calibration using the modified load impedance Zls1 . Although this is an approximate method, it is accurate enough for our purposes. We call this method the modified OSL calibration. October 1994 HewlettĆPackard Journal The following error factors affect phase measurement accuracy using the modified OSL calibration: Uncertainty in the impedance magnitude of LOAD1 Impedance phase of LOAD1 Impedance magnitude of LOAD2 Uncertainty in the impedance phase of LOAD2 Uncertainty in the admittance magnitude of the open standard. Notice that the second and third factors would not cause any error if we were using the analytical solution. Computer simĆ ulations have shown that: The phase measurement error caused by the uncertainty in the impedance magnitude of LOAD1 is small. The phase measurement error caused by the impedance phase of LOAD1 is small. The phase measurement error caused by the impedance magnitude of LOAD2 is small. The uncertainty in the impedance phase of LOAD2 directly affects the phase measurement error. For reactive DUTs, the phase measurement error caused by the uncertainty in the admittance magnitude of the open standard (Yopen) is reduced to RoYopen(Copen/Cls2) in the modified OSL calibration, where Ro is the characteristic impedance (50 ohms), Copen is the capacitance of the open standard, and Cls2 is the capacitance of LOAD2 (lowĆloss capacitor). In the case of resistive DUTs, the error is the same as in the normal OSL calibration. Fig. 10 shows the relationship between the phase error and the DUT impedance when the LOAD2 phase uncertainty ls2 is 500×10-6 radian in the modified OSL calibration. The relationship between and the DUT impedance is shown in Fig. 11 when the open admittance uncertainty Yopen is 5 fF in the modified OSL calibration. In summary, the phase measurement error when using the modified OSL calibration is mainly determined by the uncerĆ tainty in the impedance phase of LOAD2 and the uncertainty in the admittance magnitude of the open standard. We now evaluate these two items. The D factor for the capacitor (3 pF) used in the calibration can be small because the capaciĆ tor's dimensions are small and the space between the inner and outer conductors is filled almost completely with air. 1 Phase Error || (radians) 10 10–1 10–2 Inductive 10–3 ls2 Resistive 10–4 Capacitive 10–5 1 10 100 1000 |Zopen| 10,000 DUT Impedance |Zx| () Relationship between phase measurement error and the unĆ certainty ls2 in the impedance phase of LOAD2 (lowĆloss capacitor) at 1 GHz for resistive and reactive DUTs. Zopen is the impedance of the open standard (about 2000 ohms). Phase Error || (radians) 1 National Standards (U.S.A. NIST) 10–1 Resistive 10–2 Capacitance Capacitance Bridge at Low Frequency 10–3 Inductive Attenuation Measurement System Attenuation 10–4 1 1 10 100 1000 |Zopen| IDOC, ODIC Reference Air Line Capacitive 10–5 DCR 10,000 DUT Impedance |Zx| () +2':/549./6 (+:=++4 6.'9+ 3+'9;8+3+4: +8858 '4* :.+ ;4)+8:'/4:? /4 :.+ '*3/::'4)+ 3'-4/:;*+ 5, :.+ 56+4 9:'4*'8* ': @ ,58 8+9/9:/<+ '4* 8+'):/<+ #"9 5%56+456+429 =.+8+ 5 /9 :.+ ).'8'):+8/9:/) /36+*'4)+ '6685>/3':+2? 5.39 %56+4 /9 :.+ ;4)+8:'/4:? /4 :.+ '*3/::'4)+ 3'-4/:;*+ 5, :.+ 56+4 9:'4*'8* '(5;: ! 56+4 , '4* 29 6 &56+4 /9 :.+ /36+*'4)+ 5, :.+ 56+4 9:'4*'8* '(5;: 5.39 ".+ <'2;+ .'9 (++4 +9:/3':+* '9 × ': @ /4 ' 8+9/*;'2 8+9/9:'4)+ 3+'9;8+3+4: ': :.+ 9+8/+9 8+954'4: ,8+A 7;+4)? 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' )'6')/:'4)+ (8/*-+ ': 25= ,8+7;+4)/+9 62'4+ '4* :.+ ,/>:;8+ :+83/4'2 ".+ (+9: )536+49':/54 '4* (? :.+ 4+:=581 '4'2?@+8 ': ./-. ,8+7;+4)/+9 ".+ 9.58: 3+:.5* /9 :.+ ! 3+:.5* 5=+<+8 /: /9 45: +'9? :5 68+6'8+ :+83/4':/54 /9 :8+':+* '9 /*+'2 #4)+8:'/4:/+9 ,58 :.+ 9.58: ' 9:'4*'8* 25'* .'</4- +>)+22+4: ,8+7;+4)? ).'8'):+8/9:/)9 9 :+83/4':/54 )549/9: 5, 91/4 +,,+): '4* 4548+6+':'(/2/:/+9 ):5(+8 +=2+::A')1'8* 5;84'2 5 Test Fixture 1 “Compensation” Fixture Terminal (Traceability Does Not Exist) Additional Error (%) “Calibration” APC-7 Terminal (Traceability Exists) Detailed Model Zo1=50W Zo2050W l1 l2 APC-7 Terminal 0.1 Fixture Terminal Compensation 0.01 10 Open Black Box Short Open-Short-Load Compensation Zo = 50+j0 g = 0+jb Open l (>l1) Short Fixture Port Extension + Open-Short Compensation g + Propagation Constant of the Transmission Line w b+v o v o + Velocity of Signal Propagation in Free Space ^ 3 10 8 mńs 8.6D;17:<D47*- $ /2@<=:. ,758.6;*<276 >.:;=; ! /2@<=:. 87:< .@<.6;276 84=; 78.6D;17:< ,758.6;*<276 * 57:. :.*42;<2, *4<.:6*<2>. ?. 8:7>2-. *67<1.: ,758.6;*D <276 /=6,<276 /2@<=:. 87:< .@<.6;276 ,75+26.- ?2<1 78.6D ;17:< ,7::.,<276 *< <1. /2@<=:. 84*6. %12; 5.<17- *;;=5.; <1*< <1.:. 2; * ;17:< <:*6;52;;276 426. +.<?..6 <1. !D <.:526*4 7/ <1. <:*6;-=,.: 1.*- *6- <1. &% ,766.,<7: 7/ <1. /2@<=:. ;.. 20 (1.6 <1. =;.: ;.4.,<; 76. 7/ 7=: 6.? /2@<=:.; 76 <1. ! -2;84*A *6 *88:78:2*<. /2@<=:. 87:< .@<.6;276 >*4=.E*6 .9=2>*4.6< 4.60<1 7/ 2-.*4 D715 426. 8:.>27=;4A -.<.:526.- /7: <1*< /2@<=:.E2; *=<75*<2,*44A ;.< %1. =;.: <1.6 8.:/7:5; * ,758.6;*<276 =;260 78.6 *6;17:< ,2:,=2<; %1. -2//.:.6,. +.<?..6 <1. $ 5.<17- *6- <1. ! 5.<17- 2; <1*< <1. $ 5.<17- *;;=5.; 2-.*4 78.6 ;17:< *6- 47*- ;<*6-*:-; ?124. <1. ! 5.<17- *;;=5.; 2-.*4 78.6 *6- ;17:< ;<*6-*:-; *6- *6 2-.*4 <:*6;52;;276 426. (. /..4 <1*< <1. *;;=58<276 7/ *6 2-.*4 <:*6;52;;276 426. 2; 57:. :.*42;<2, <1*6 <1. *;;=58<276 7/ *6 2-.*4 47*- /7: ,758.6;*<276 7>.: * ?2-. /:.9=.6,A :*60. ,<7+.: .?4.<<D!*,3*:- 7=:6*4 1000 1800 %A82,*4 .::7: ,76<:2+=<276; 7/ <1. 6.? <.;< /2@<=:.; */<.: /2@<=:. ,758.6;*<276 20 ;17?; <1. <A82,*4 <.;< /2@<=:. .::7: ,76<:2+=<276; ?1.6 =;260 <12; ,758.6;*<276 /=6,<276 %1.;. >*4=.; *:. *457;< <1:.. <25.; +.<<.: <1*6 <1. .::7:; /7: 7=: /7:5.: <A8. 7/ /2@<=:.; Load (?) 100 Frequency (MHz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roceedings of CARTSĊEurope '93, 88 D % )76.3=:* C .? *42+:*<276 .<17- /7: 58.-*6,. .<.:; Proceedings of the 1994 IEEE Instrumentation and Measurement Technology Conference, $12B=73* *8*6 *A 88 D $ *?*+*<* *6- =32A*5* C 201D!.:/7:5*6,. DB '.,<7: .<?7:3 *6- $8.,<:=5 6*4AB.: HewlettĆPackard Journal, '74 67 ,<7+.: 88 D Traceability and the HP 8510 Network Analyzer, .?4.<<D!*,3*:8=+42,*<276 67 D 7>.5+.: # .4;76 *6- # 7:A.44 Electrical Parameters of Precision, Coaxial, AirĆDielectric Transmission Lines, $ 7670:*81 =6.