Capabilities of NIST/SURF
calibrations for SSI UV
instruments
Synchrotron radiation research since 1963.
Synchrotron Ultraviolet Radiation Facility
Beam current monitor
BL-1
BL-3
BL-2
BL-4
Why is Synchrotron Radiation useful?
• Electromagnetic radiation emitted by highly
relativistic electrons or positrons bend onto an
orbit by magnets (Magneto-Bremsstrahlung).
• Emitted spectrum: broadband from microwave
(harmonics of driving RF field) to x-rays, highly
collimated, polarized, calculable.
• Output scales with electron beam current.
• Extremely clean lightsource operated in oil-free
vacuum, which avoids photo-activated
polymerization of hydrocarbons.
• Synchrotron radiation provides an absolute source!
SURF as an Absolute Source
•
•
•
•
•
•
Magnetic Flux Density B
Radio-frequency νrf
Electron Beam Current IB
Source Point Distance d
Aperture Size ∆X, ∆Y
Angle Relative to Orbit Plane ψ0
y Bending Magnet
x
Electron Orbit
∆ξ
∆ψ/2
A
∆Y
ψ0
d
ρ
Eβ
=
e0 B c
 c

 π ⋅ν rf
2
  me ⋅ c 
 − 

B
e
⋅
0 
 
2
∆X
z
E
B⋅e
=
≈ 744 @ 380 MeV
γ =
me c 2 π ⋅ν rf ⋅ me
Custom-Tailored Output Spectrum
Photon Energy hν (eV)
1000
100
EUV
1
DUV
VIS
Me V
3000 K Blackbody
183
Me V
234
eV
eV
284 M
331 M
380 M
105
eV
eV
106
416 M
104
103
1
10
Me
D2 Lamp
eV
78
134 M
Radiant Power P (nW)
100 mA, 50 mrad, λ/∆λ=100
107
10
100
V
34 MeV
1000
Photon Wavelength λ (nm)
10000
Combined Relative Standard Uncertainty
Photon Energy hν (eV)
101
100
10-1
Σ
10-2
10-3
10
106
105
2· 10-3 IB
10-4 d
-4
10-4 ∆Y
10-4 ∆Y
10-5
10-6
10
-7
10 -8
10 -3
B
ν
RF
100
103
102
101
10-8
10-1
104
101
102
Wavelength λ (nm)
103
100
104
Spectral Irradiance dE(λ)/dλ (nW nm-1 cm-2)
102
SSI
E=380 MeV
B=1.5142 T
νrf=114 MHz
IB=300 mA
d=10538 mm
R = 6.5 mm
103
λ
)/d
(λ
dE
E=380 MeV
B=1.5142 T
νrf=114 MHz
IB=1 mA
d=10000 mm
∆X=7.071 mm
∆ Y=7.071 mm
Relative Standard Uncertainty σE(λ) / E(λ)
104
Absolute Radiometry: Source Based
Absolute source based Radiometry: Calibrate
different standard sources, spectrometers
Storage Ring
Monochromator
Detector
Absolute Radiometry: Source Based
Absolute source based Radiometry: Calibrate
different standard sources, spectrometers
Storage Ring
Monochromator
Detector
Absolute Radiometry: Detector Based
Absolute Detector based Radiometry: Calibration of
detectors, filter detector packages
Detector Under
Test DUT
Storage Ring
Monochromator
Absolute
Detector AD
Absolute Radiometry: Detector Based
Absolute Detector based Radiometry: Calibration of
detectors, filter detector packages
Storage Ring
Monochromator
Detector Under
Test DUT
Absolute
Detector AD
Beamlines at SURF III/NIST
#
Wavelength range
Calibration
1a
13 nm
Resist sensitivity (EUV)
1b
5 nm – 20 nm
Photoresist prequalification testing (EUV)
Optics lifetime (EUV)
2
0.3 nm - 400 nm
EUV/UV spectrometer calibrations
<1.0 %
3
200 nm – 400 nm
200 nm – 2000 nm
Light sources (D2 and other UV)
Filtered radiometers (UV, VIS, NIR)
<1.0 %
<0.5 %
4
140 nm - 320 nm
(110 nm – 320 nm)
Detector calibrations (DUV, UV)
Detector radiation damage (DUV, UV)
Optical properties (DUV, UV)
< 0.5 % (AXUV)
< 1.0 %
< 1.0 %
5
100 nm - 400 nm
Index measurements (DUV)
< 0.0001 %
Beam Current Monitor
0.2 %
<1%
<1%
<2%
6
Accuracy
7
7 nm - 35 nm
Reflectometry (EUV)
Optical properties (EUV)
Detector calibrations (EUV)
8
13 nm
Optics lifetime(EUV)
EUV-induced surface chemistry
9
5 nm - 50 nm
Detector calibrations (EUV)
<5%
10
550 nm
Beam imaging
<5%
BL-2: UV/EUV Spectrometer Calibrations
• Undispersed synchrotron radiation
and instrument aperture are used as a
standard of irradiance.
• Class 10,000 clean room access to
large chamber.
• Calibrations provided from 2 nm to
400 nm with uncertainty from 0.6% to
< 0.1%
EVE (Extreme Ultraviolet Variability
Experiment) of NASA’s Solar Dynamics
Observatory (SDO) Mission prepared for
calibration
Continuous calibration of twininstruments using rocket underflights
BL-2: Large chamber and clean room
Houses instrumentation 1 m 1 m 2 m,
translates +- 20 cm vertical and horizontal -+ 2.5 yaw pitch
Clean oil free vacuum
BL-9: EUV Detector Calibrations
Monochromator
SURF III
Radiation
Ionization
Chamber
Monitor
Diode
Experimental
Chamber
• Grazing incidence monochromator
• SURF used as continuum source from
5 nm to 50 nm
• Accuracy
– Working standard
Photodiodes are calibrated by
comparing them to a rare-gas
ionization chamber: 2σ ≈5 %. (Not
true if ACR is used on BL-7)
– Transfer standards
Calibrated against a working standard
of the same type: 2σ
• Capabilities:
≈8 %.
– Photodetector Efficiency
– Filter Transmission
– End-to-End Calibration of Small
Instruments
– Low-Dose-Rate Radiation Hardness
SURF III/NIST Measurement Competences
• Detector efficiency
– BL-4 ultraviolet, BL-7/BL-9
extreme-ultraviolet
• Filter transmission
– BL-4 ultraviolet, BL-7/BL-9
extreme-ultraviolet
• Mirror reflectivity
– BL-4 ultraviolet, BL-7
extreme-ultraviolet
• Whole-instrument
efficiency (detector-based
or source-based)
– BL-2 extreme-ultraviolet to
visible, BL-3 ultraviolet
Transfer of Scale from Photodiode to PMT
10-7
λ = 260 nm, VPMT = 765 V
Photodiode Signal
Detector Current ID (A)
PMT Signal
10-8
10-9
10-10
10-11
10-4
10-3
10-2
10-1
100
Electron Beam Current IB (mA)
101
102
Photomultiplier Tube Uniformity
Uniformity Scan LM0159
1.0
0.000
Relative Response
0.8
0.6
0.4
0.2
0.1000
0.2000
0.3000
0.4000
0.5000
0.6000
0.7000
0.8000
-4
-2
0
-10
1.000
4
os
it io
nX
al
P
-8
-4
-2
Ho
riz
on
t
2
4
6
8
10
12
(mm
)
-6
0
2
0.9000
(m
m)
14
Ver
t ic a
l Po
sitio
nY
0.0
8
6
PMT Absolute Responsivity
PMT LM0159 at 765 V
3.5x105
(-3.5,-0.5)
(0.5, 8.5)
2.5x105
2.0x105
Vertical Position Y (mm)
Responsivity S (A/W)
3.0x105
1.5x105
1.0x10
5
14
0.000
12
0.1000
10
0.2000
0.3000
8
0.4000
6
0.5000
4
0.6000
2
0.7000
0
0.8000
-2
0.9000
1.000
-4
-10
5.0x104
-8
-6
-4
-2
0
2
4
Horizontal Position X (mm)
0.0
200
250
300
350
400
Wavelength λ (nm)
450
500
6
8
Photo Current and Counting Measurements
BL-4 @ 2 µA ∼ 80,000 photons / s @ 220 nm
-7.0x10-8
1.2x105
-6.0x10-8
Counts
1.0x105
-5.0x10-8
8.0x104
-4.0x10-8
6.0x104
-3.0x10-8
-8
-2.0x10
4.0x104
-1.0x10-8
2.0x104
0.0
0.0
200
250
300
Wavelength λ (nm)
350
PMT Counts C / IB (Hz/µA)
PTM Current IPMT / IB (A/µA)
Current
Transfer of NRL’s x24c to NIST
• NRL maintains beamline X24C
• Monochromator-based beamline with an absolutecryogenic radiometer
– Beamline covers 1 nm to 400 nm with a combination of
grazing and normal incidence gratings (can use
multilayers)
– Several large chambers are available
• When NSLS II comes online in 2015 X24C will not
be transferred
NSLS Beamline Layout and Chambers
Loadlock Chamber
Monochromator Optics
Capabilities of X24C Located at SURF III
• Enable cryogenic radiometry with 1% uncertainty by delivering at
least 0.5 μW / 100 mA and resolving power of at least 100 from 3.5
nm (354 eV) to 300 nm (4.1 eV).
– Covers entire calibration range with state-of-the-art cryogenic radiometry.
– Extends wavelength range: current limits are 5 nm (250 eV) and 254 nm (4.9
eV).
– Usable over broader wavelength range at somewhat larger uncertainty,
including the entire water window between 2.3 nm (O-K; 540 eV) and 4.4 nm
(C-K; 280 eV).
– Fills gap between 92 nm and 116 nm where there is no current detector
standard.
• Establish EUV calibration center for detectors and space research
instrumentation in a single synchrotron beamline facility at NIST.
• Complements existing source-based radiometric capability at SURF
III BL-2