An integrated organic circuit array for flexible large-area temperature sensing The MIT Faculty has made this article openly available. Please share how this access benefits you. Your story matters. Citation He, David Da et al. “An Integrated Organic Circuit Array for Flexible Large-area Temperature Sensing.” IEEE International Solid-State Circuits Conference, Digest of Technical Papers (ISSCC), IEEE, 2010. 142–143. Web. ©2010 IEEE. As Published http://dx.doi.org/10.1109/ISSCC.2010.5434013 Publisher Institute of Electrical and Electronics Engineers Version Final published version Accessed Thu May 26 06:42:09 EDT 2016 Citable Link http://hdl.handle.net/1721.1/72077 Terms of Use Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. Detailed Terms ISSCC 2010 / SESSION 7 / DESIGNING IN EMERGING TECHNOLOGIES / 7.5 7.5 An Integrated Organic Circuit Array for Flexible Large-Area Temperature Sensing David Da He, Ivan A. Nausieda, Kyungbum Kevin Ryu, Akintunde I. Akinwande, Vladimir Bulovic, Charles G. Sodini Massachusetts Institute of Technology, Cambridge, MA Traditionally, several technologies have been used for temperature sensing, including integrated silicon ΔVBE and ΔVt circuits, resistance temperature detectors, and thermocouples [1]. The organic thin-film transistor (OTFT) is a new technology suitable for temperature sensing because of two key advantages. First, OTFTs have the ability to be fabricated on flexible and large-area substrates [2]. This ability allows an OTFT temperature sensor to be used for applications such as electronic skin, biomedical thermal imaging, and structural temperature monitoring [2]. Second, the OTFT’s semiconductor trap states make OTFTs highly responsive to temperature. This paper presents the first integrated OTFT temperature sensing circuit array. The array is compatible with flexible and largearea substrates, and its outputs are 22 times more responsive than the MOSFET implementation while dissipating 90nW of power per cell. The pentacene-based OTFTs are fabricated using an integrated photolithographic process that is kept below 95°C to ensure compatibility with large-area and flexible substrates [3]. Figure 7.5.1 shows the measured OTFT transfer characteristics as die temperature is increased from -20°C to 60°C. In comparison to the OTFT, Fig. 7.5.2 shows simulated BSIM3 silicon pMOSFET transfer characteristics versus temperature. Two important differences are observed between the OTFT and the MOSFET. First, the OTFT’s current increases with temperature in both subthreshold and above-threshold regimes, whereas the MOSFET’s above-threshold current decreases with temperature. Second, when biased at a constant ID, the OTFT’s VSG is approximately 20 times more responsive to temperature than the MOSFET’s VSG. Both differences are due to the fact that pentacene is a disordered semiconductor with substantial trap states [4]. A temperature sensing circuit that takes advantage of OTFT’s responsiveness to temperature is shown in Fig. 7.5.3. OTFTs M3, M4, and M5 form two current mirrors that bias the two branches at different ID’s. Diode-connected and identically sized M1 and M2 act as temperature sensing transistors whose VSG1 and VSG2 are functions of temperature. The differential output VO=VSG1–VSG2 performs curvature cancellation and removes any common-mode Vt drifts of M1 and M2. If M1 and M2 are subthreshold MOSFETs, then this circuit is analogous to a ΔVBE circuit. From Fig. 7.5.3’s MOSFET implementation, one can graphically see that VSG2 decreases faster than VSG1 over the same temperature rise because the transfer curves converge at a higher ID. Therefore, the circuit’s output VO=VSG1–VSG2 increases with temperature. On the other hand, Fig. 7.5.3’s OTFT implementation shows that VSG2 decreases slower than VSG1 over the same temperature rise because the transfer curves diverge at a higher ID. As a result, the OTFT circuit’s output VO=VSG1–VSG2 decreases with temperature. The OTFT temperature sensing circuit is fabricated with the device dimensions shown in Fig. 7.5.4 and occupies an area of 1mm×1mm. Wide transistors are used in order to lower the VDD voltage and to increase the temperature sensing area. The circuit uses a 5V voltage supply and a 3nA current sink from an Agilent 4156C. At each temperature, 240 samples of VO are taken at two samples/second and the standard deviation of the samples is 1.9mV. The averaged VO at each temperature is plotted in Figure 7.5.4. The temperature responsivity (|dVO/dT|) is 6.3mV/°C and the temperature sensitivity is 2.5×106ppm at 25°C. The maximum power dissipation of the circuit is 170nW at 50°C. In the unit of temperature, the standard deviation of output samples corresponds to 0.30°C. The output is highly linear as shown by the best-fit line with R2=99.7%. The maximum and average deviations of data from the best-fit line are 0.99% and 0.56%, respectively. Another key advantage of the OTFT temperature sensing circuit is its ability to be fabricated on large-area substrates. We explore this application by scaling the circuit to a 3×3 array consisting of 1mm2 cells. The circuit schematic is shown in Fig. 7.5.5. The circuit uses a 5V voltage supply and a 2nA current sink. The averaged VO’s at each temperature for the nine cells are plotted in Fig. 7.5.5. The average temperature responsivity is 6.8mV/°C and the maximum power dissipation of the array is 810nW at 50°C. In an array format, variations due to cell-to-cell mismatches in device parameters such as Vt and carrier mobility become apparent. As shown in Fig. 7.5.5, responsivities vary by 19% and 0°C VO voltages vary by 8% of their average values. However, an important observation is that R2 values to best-fit lines vary by only 0.059% from an average of 99.8%. Therefore, the array’s VO linearity is unaffected by cell-to-cell variations. Linearity is crucial to the array application because it enables simple two-point calibrations, which can remove the effects of responsivity and offset voltage variations. This is especially relevant to largearea applications where device mismatches are anticipated across the geometry. In Fig. 7.5.5, if two-point calibration is used for each cell based on -10°C and 50°C data points, the average error between linearly interpolated VO and measured VO is only 1.1% with a standard deviation of 0.58%. The linear temperature response of the circuit is a result of curvature cancellation between the differential outputs. This curvature cancellation is possible at a range of ISINK and VDD bias settings. In Fig. 7.5.6 (left), VO is plotted versus temperature as ISINK is swept from 0.5nA to 10nA. The R2 value remains above 98% for ISINK=0.5nA to 4.5nA. Linearity worsens at high ISINK currents because the high VSG’s of M1 and M2 cause the current mirrors to enter the triode regime. In Fig. 7.5.6 (right), VO is plotted versus temperature as VDD is swept from 2V to 10V. Transistors M3 and M4 are in the saturation regime as long as VDD stays above 3V, where the R2 value remains above 98% and is nominally independent of VDD because the circuit’s operating point is set by ISINK. In conclusion, this work has demonstrated the first integrated OTFT temperature sensing circuit array compatible with large-area and flexible substrates (die photo Fig. 7.5.7). The circuit outputs an average responsivity of 6.8mV/°C, which is 22 times more responsive than the MOSFET implementation while dissipating 90nW of power per cell from a 5V supply. Output linearity is guaranteed across the array as long as the current mirrors stay in the saturation regime. The linearity enables two-point calibrations, which remove the effects of cell-to-cell variations and make large-area implementations feasible. Acknowledgements: The authors would like to thank Peter Holloway of National Semiconductor for his inputs. The devices were fabricated at Microsystems Technology Labs at MIT. This work was funded in part by the FCRP Focus Center for Circuit & System Solutions (C2S2) under contract 2003-CT-888, Hewlett Packard, and the Canadian NSERC Scholarship. References: [1] D. Hilbiber, “A New Semiconductor Voltage Standard,” ISSCC Dig. Tech. Papers, pp. 32-33, Feb. 1964. [2] T. Someya, H. Kawaguchi, T. Sakurai, “Cut-and-paste Organic FET Customized ICs for Application to Artificial Skin,” ISSCC Dig. Tech. Papers, vol, pp. 288-289, Feb. 2004. [3] I. Kymissis, A.I. Akinwande, V. Bulovic´, “A Lithographic Process for Integrated Organic Field-Effect Transistors,” IEEE J. of Disp. Tech., vol. 1, pp. 913, Jan. 2005. [4] E. Cantatore, E.J. Meijer, “Transistor Operation and Circuit Performance in Organic Electronics,” Proc. 29th European Solid-State Circuits Conference, pp. 29-36, Sept. 2003. As previously mentioned, the OTFT circuit would be a ΔVBE circuit if designed using MOSFETs. The MOSFET circuit’s output responsivity is (nk/q)×ln(I1/I2) according to [1], where n is the ideality factor, k is Boltzmann’s constant, and q is the elementary charge. With n=1.5 and I1/I2=10, a ΔVBE circuit’s responsivity is 0.30mV/°C. Using the same current ratio of 10, the OTFT circuit’s responsivity of 6.3mV/°C is 21 times greater. 142 • 2010 IEEE International Solid-State Circuits Conference 978-1-4244-6034-2/10/$26.00 ©2010 IEEE ISSCC 2010 / February 9, 2010 / 10:30 AM 7 Figure 7.5.1: The OTFT’s device cross-section and measured transfer characteristics versus temperature (W/L=1,000µm/5µm). Figure 7.5.2: The BSIM3 pMOSFET’s simulated transfer characteristics versus temperature (W/L=10µm/0.18µm). Figure 7.5.3: The temperature sensing circuit with its operating principles stylized for MOSFET and OTFT. Figure 7.5.4: The OTFT temperature sensing circuit schematic and averaged VO versus temperature with best-fit line. Figure 7.5.5: The OTFT temperature sensing circuit array’s schematic, measured outputs, and output variations. Figure 7.5.6: The dependence of output linearity on ISINK (left) and VDD (right) with R2 values (bottom). DIGEST OF TECHNICAL PAPERS • 143 ISSCC 2010 PAPER CONTINUATIONS Figure 7.5.7: Die photo of the 3×3 OTFT temperature sensing circuit array. • 2010 IEEE International Solid-State Circuits Conference 978-1-4244-6034-2/10/$26.00 ©2010 IEEE