Semicond. Sci. Technol. 11 (1996) 717–721. Printed in the UK Spatial distribution of composition and misfit dislocations on the surface of alloys N V Fomin and D V Shantsev Ioffe Physico-Technical Institute, 26 Polytekhnicheskaya St., St Petersburg 194021, Russia Received 25 January 1996, accepted for publication 26 February 1996 Abstract. The Frenkel–Kontorova theory of phase transitions into an incommensurate phase with the formation of a superlattice of misfit dislocations on a surface is extended to the case of alloys for which the lattice mismatch depends on the local composition. A model is considered that takes into account the possibility of atomic diffusion between the surface and the bulk. Peculiarities of the conditions at the surface are accounted for by introducing a chemical potential for one type of the atoms of the alloy which leads to a difference in composition between the bulk and the surface layer. We calculated the average mismatch between the surface and the bulk lattices and the critical value of chemical potential at which the phase transition into an incommensurate phase with misfit dislocations occurs. A phase diagram of the system in coordinates of temperature and chemical potential is presented for the alloy Inx Ga1−x As. 1. Introduction In previous works [1, 2] we discussed the specificity of the appearance of misfit dislocations and incommensurate structures in the surface layer or adsorbed film of alloys. It is well known that the origin of misfit dislocations is a mismatch of the crystal lattice parameters of the adsorbed film (or surface layer) and the bulk. A classic model describing transitions between incommensurate and commensurate phases is the Frenkel–Kontorova model [3], which considers a linear chain of adatoms connected to one another by elastic springs of length a and placed in a cosinusoidal potential with period a0 induced by the substrate. For the case of weak interaction between adatoms and the substrate this problem was solved by Frank and van der Merwe [4]. The energy of the chain can then be written as Z 2 1 2πu(x) V 0 FFK = u (x) − δ + dx V0 1 − cos a0 a0 2 (1) where u(x) represents the displacements of adatoms with respect to their positions in the commensurate phase, i.e. minima of the cosine potential (for the continual approach to be valid u(x) must be a slowly varying function of the coordinate x along the chain, i.e. u0 = ∂u/∂x 1), V and V0 are parameters characterizing the interaction of adatoms with the substrate and with one another, and δ = (a − a0 )/a 1 is the misfit characterizing the lattice c 1996 IOP Publishing Ltd 0268-1242/96/050717+05$19.50 mismatch. When the misfit exceeds its critical value δFK = 4 √ π α α= V V0 (2) the model gives the solution in the form of a lattice of solutions—misfit dislocations—with the period depending on the misfit. In alloys the lattice parameter a depends on the composition c (we will restrict our consideration to binary or pseudobinary alloys Ac B1−c or Ac B1−c C), and therefore a change of the local lattice parameter a(c) is made possible by a change of local composition [5]. This spatial redistribution of composition proceeds owing to atomic diffusion in the crystal lattice. In reference [1] this effect was taken into account in terms of a continual Frenkel– Kontorova model considering the misfit δ as a function of the coordinate. Then the energy functional can be written in the form Z 2 2π u(x) α 0 V0 u (x) − δ(x) + 1 − cos F = a0 a0 2 β δ(x) − δ̄ dx (3) + 2 where the overbar designates averaging over the coordinate, and the parameter β= fch00 (c)a03 η2 V0 (4) where η = (1/a)(∂a/∂c), is proportional to the second derivative of the specific chemical energy of the alloy 717 N V Fomin and D V Shantsev fch with respect to composition c. In expression (3) the term containing β accounts for the increase in the alloy energy caused by a spatially nonuniform distribution of composition (we consider only the case of positive β, which corresponds to an alloy stable against spinodal decomposition). Furthermore the composition modulation in the vicinity of dislocations lowers the elastic energy by reducing the local mismatch. The competition of these two mechanisms leads to a value of critical misfit which is less than that given by equation (1): s s β β 4 δc = = δFK < δFK . (5) π α(α + β) α+β At β → ∞, when a nonuniform distribution of composition is energetically unfavourable, expression (5) naturally transforms into (2), while small enough β values provide instability of the commensurate phase for as small a misfit δ as desired. Another interesting feature of the Frenkel– Kontorova model for alloys is the power-law dependence of the interaction between two misfit dislocations on the dislocation spacing l: Fint = 8π 2 V0 a0 α l β (6) with the interaction sign corresponding to repulsion. Therefore the phase transition can be described here as a second-order phase transition on the basis of the Ginsburg– Landau theory with an order parameter of 1/ l, while in the classic Frenkel–Kontorova model the dependence of the energy on the order parameter at the critical point is not analytical. In generalizing the Frenkel–Kontorova model to the case of a substrate with finite rigidity many authors took into account the interaction between misfit dislocations through elastic strain in the substrate (see [6] and references therein). It should be mentioned that the elastic interaction of misfit dislocations is proportional to 1/ l 2 at large distances, i.e. it decays more quickly than would be expected from equation (6). An important point for the analysis carried out in reference [1] is the assumption that the average composition in the chain is constant, which rules out the possibility of atomic diffusion between the chain and the bulk. In the present paper we give up this assumption and allow atomic diffusion along the chain as well as beyond it (surely, if an atom of type A leaves a site of the crystal lattice, it is replaced by another atom of type B). As a result, and as will be shown below, the conclusion of reference [1] that the critical misfit δ tends to zero when the parameter β approaches zero remains valid, while the power-law interaction (6) between dislocations disappears. 2. Generalization of the Frenkel–Kontorova model to alloys with regard to atomic diffusion between the chain and the substrate It is supposed that the atoms of the surface layer of an alloy are placed in peculiar conditions with respect to the atoms in the bulk since some bonds of surface atoms are dangling or their hybridization takes place. Then it can be expected 718 Figure 1. Black and white circles represent atoms of two types for a binary alloy. Peculiar conditions at the surface provide a difference in compositions and hence a mismatch of lattice parameters at the surface and in the bulk. (a ) A coherent structure (mismatch is sufficiently small); (b ) presence of misfit dislocations (mismatch is large). that it is energetically more favourable for atoms of one type to be at the surface than for atoms of the other type. This tendency should lead to a change of alloy composition at the surface and hence to a mismatch between lattice parameters at the surface and in the bulk (see figure 1). If the composition change is small, a linear approximation can be used for this dependence. Let us write the total energy of the system. In the spirit of the Frenkel–Kontorova model we will suppose that the bulk of the alloy is rigid and has a spatially uniform composition c. Then the linear term in the chemical free energy expansion in terms of composition variation fch (c + 1c) = fch (c) + fch0 (c)1c + 12 fch00 (c)(1c)2 (7) vanishes when integrated over the whole material and the integral of the quadratic term over the bulk is far less than that over the surface. Thus, the total energy of the system can be written as an integral over just the surface layer: Z 2 V0 2π u(x) α 0 u (x) − δ(x) F = + 1 − cos a0 a0 2 β + [δ(x)]2 − γ δ(x) dx (8) 2 where δ is the misfit between the lattice constant at the surface and the average lattice constant. Here we used Vegard’s rule for the linear dependence of the lattice parameter on composition δ = η1c. The parameter γ is related to the effective chemical potential µ (the energy associated with exchange of an atom of type A and an atom of type B between the surface and the bulk) by the following expression: γ = µ ηV0 (9) where V0 is, as before, the amplitude of the cosinusoidal potential characterizing the interaction between the chain of the surface atoms and the bulk. Varying (8) with respect to δ, we obtain the Euler– Lagrange equation: α 0 γ δ(x) = u (x) + . (10) α+β α Misfit dislocations on the surface of alloys Substitution of δ, expressed in terms of u by (10), into (8) allows us to write the energy as Z V0 2πu(x) α∗ 0 2 α∗ γ 0 F = u dx 1 − cos + (u ) − a0 a0 2 β (11) where αβ α∗ = (12) α+β and the energy reference point is chosen so that the energy of the commensurate phase is zero, F [u(x) ≡ 0] = 0. Expression (11) differs from the related one in reference [1] by the absence of the term with (ū0 )2 responsible for the interaction of dislocations. This is because in reference [1] the misfit δ̄ was predetermined since the average composition in the chain was assumed to be constant. This time, however, the predetermined value is the chemical potential µ, while δ̄ is defined by the condition of minimization of the energy and, according to (10), it increases when a lattice of misfit dislocations with period l = a0 /ū0 appears: α a0 γ δ̄ = + . (13) α+β l α Note that expression (11) coincides with the corresponding expansion in the Frenkel–Kontorova model with misfit γ /β and elastic constant α∗ . Now let us find the function u(x). Varying equation (11) with respect to u gives the sine-Gordon equation: 2πu a0 2 2πu 00 sin = α∗ (14) a0 2π a0 whose first integral is − cos 2πu α∗ 0 2 1 (u ) − 2 = a0 2 z (15) where 1/z 2 is an integration constant which must be determined from the condition of minimization of the energy. It is easy to see that z takes on values from 0 to 1. Expressing the function cos u through (15), we can write the average energy density as a function of z: V0 γ 1 0 2 ¯ f (z) = 3 1 − 2 + α∗ (ū ) − α∗ ū0 (16) z β a0 where the dependence of u0 on z is determined by (15). It is convenient to express (ū0 )2 and ū0 in terms of elliptic integrals: Z 2π p E(z) = 1 − z 2 cos ϕ dϕ 0 Z K(z) = 0 2π dϕ p . 1 − z 2 cos ϕ (17) The functions u(x), solutions of (15), describe a lattice of misfit dislocations with period l defined as √ Z a0 α∗ zK(z)a0 l(z) = (u0 )−1 du = . (18) √ 2 2π 0 Further we have (ū0 )2 = l −1 Z a0 0 E(z)a0 u0 du = √ 2α∗ π zl(z) ū0 = a0 / l. Substituting these expressions into (16), we obtain √ α∗ E(z) α∗ γ a0 1 V0 ¯ . − f (z) = 3 1 − 2 + √ z β l a0 2π z (19) (20) (21) The value z = 1 corresponds to the commensurate structure (u(x) ≡ 0). An incommensurate structure emerges if f (z) has a minimum at z = z0 lying within the interval [0, 1]. Near the point of phase transition (z = 1) the dislocation density 1/ l is small and the expression d = √ V0 (4 α∗ /π − α∗ γ /β) has the meaning of the energy necessary for one dislocation to be formed. If this energy is negative, formation of a dislocation is favourable. The generation of dislocations proceeds until the interaction (repulsion) between them comes into force. Since K(z) and hence, according to (18), l(z) diverge logarithmically at z = 1, the interaction between dislocations decays exponentially with their spacing which, in turn, implies a singular dependence l −1 (d ). The condition of the transition into the incommensurate phase can be written in the form γ 4 > √ β π α∗ (22) by analogy with the Frenkel–Kontorova model (see equation (2)). Now let us turn to more convenient variables. Applying the regular solution approximation [7], we can write the specific free energy of a binary alloy as 1 {cµA + (1 − c)µB + c(1 − c) Wmole + RT [(1 − c) ln(1 − c) + c ln c]} fch (c) = (23) where µA and µB are the chemical potentials of atoms of type A and B, is the interaction parameter, R is the gas constant, T is temperature and Wmole is the molar volume. Applying (4) and (23), we obtain the following expression for β: β = tα. (24) Here t is linear in temperature: t= RT − 2c(1 − c) c(1 − c)NA V η2 (25) where NA is the Avogadro constant. Substituting (9) and (24) in (22), we obtain the applicability condition for our model p 4η p µ > µc = V0 V t (1 + t). (26) π The fulfilment of this condition means that the chemical potential µ, providing for atoms of one type an excess concentration at the surface with respect to that in the bulk, is high enough for the average misfit between surface and √ bulk lattices to achieve the critical value 4/(π α∗ ). The 719 N V Fomin and D V Shantsev Figure 2. Phase diagram in coordinates of the effective chemical potential and temperature for the alloy Inx Ga1−x As. The critical line separating commensurate (C) and incommensurate (I) phases is given by equation (26); parameters are taken from [9]; α = 20. The (C) phase corresponds to a coherent structure at the surface. The (I) phase corresponds to the presence of misfit dislocations. The full line indicates the temperature range where our model is applicable (see (30)). Tc is the critical temperature of spinodal decomposition. phase diagram of the system for the alloy Inx Ga1−x As is presented in figure 2. Since it was assumed that β > 0, our analysis is valid only for T > Tc where Tc = 2c(1−c)/R is the critical temperature of spinodal decomposition of the alloy. According to experimental data (see e.g. [8]), for III–V compounds Tc is in the range 300–1000 K, which corresponds to typical temperatures of epitaxial growth. Theoretically, at T close to Tc , equation (26) gives µc → 0. It should be noted, however, that in this case we appear to be beyond the continual approach. Next, let us find the range of applicability of our model. For harmonic expansion of the chemical energy to be valid the following condition must be fulfilled: δ |aA − aB | =η a (27) where aA and aB are the periods of monolattices consisting of atoms of type A and type B respectively. In addition, for the continual approach to be applicable it was supposed that 1 (28) u0 ≈ √ 1. α∗ According to (10) and (20) in the vicinity of the phase transition, δ is given by s β 4 . (29) δ≈ π α(α + β) Replacing strict inequalities by nonstrict ones and dropping numerical coefficients, we obtain from (24) and (27)–(29) the range of applicability of our model: αη2 1 t . α−1 1 − αη2 720 (30) It can be seen that at η < α −1 the model is inapplicable at any temperature. Since the parameter η is always less than unity (for real compounds far less than unity), the approach discussed is appropriate only for the case of weak interaction between surface atoms and the substrate (α 1). In principle, it is beyond reason to expect such a large difference in interactions of surface atoms with one another and with the substrate, though if it is assumed that not one but n near-surface layers are placed in peculiar conditions then α for such a system increases n times. Nevertheless there is reason to believe that in a qualitative sense our analysis adequately accounts for the enhanced tendency of alloys to form dislocations owing to the spatially nonuniform distribution of composition and that it can also be used for describing the thermodynamically non-equilibrium process of epitaxial growth. Finally it should be mentioned that in the case of n near-surface layers we should replace the quantity µ by nµ, and from (26) it follows√that the critical value of chemical potential µc decreases n times. As an example, we propose a numerical estimation using parameters for which our model is correct. According to (9), for Inc Ga1−c As = 2.9 kcal mol−1 , η = 0.069, and to estimate the quantity V , the elastic energy per atom, we take the value of a pertinent combination of elastic moduli which is ≈ 730 kcal mol−1 ; then at c = 1/2, α = 20 and T = 770 K condition (30) takes the form 0.05 0.08 0.11, which is appropriate for a qualitative description of the situation. 3. Conclusion In summary, we have developed a model describing the surface of an alloy in terms of the atomic diffusion between the surface and the bulk. It was assumed that conditions for the composition parameter in the surface layer differ from those in the bulk, which results in a mismatch of surface and bulk lattice constants. If this mismatch is large enough there occurs a phase transition into an incommensurate phase with the appearance of misfit dislocations. At temperatures far from the melting point atomic diffusion is suppressed because for an atom to hop into an interstitial it is necessary to overcome a potential barrier of the order of the bonding energy, and that is why the mechanism discussed in this paper can be responsible for slow degradation of alloys. However, our chief tendency that the appearance of misfit dislocations is facilitated in alloys owing to the possibility of a spatially nonuniform distribution of composition seems to be appropriate also for the process of epitaxial growth when the analysis in terms of equilibrium thermodynamics used here is inapplicable. Allowing atomic diffusion into the bulk leads to the disappearance of strong interaction between dislocations, which takes place in the chain with a fixed average composition. As a result, the model predicts a phase transition similar to that considered by the model of Frenkel–Kontorova, i.e. with a singular dependence of the free energy on the order parameter (superlattice period). The results obtained can be useful from the standpoint of choosing the optimum conditions for the epitaxial growth of non-defect structures of alloys. Misfit dislocations on the surface of alloys Acknowledgments The authors are grateful to V A Shchukin and R A Suris for fruitful discussions and interest in the work. The work was supported by the Foundation for Fundamental Research of Russia, grant no 93023199. References [1] Fomin N V 1994 Sov. Phys. Solid State 36 754 [2] Fomin N V and Shantsev D V 1995 Fiz. Tverd. Tela at press [3] Frenkel’ F I and Kontorova A A 1939 J. Phys. (USSR) 1 137 [4] Frank F C and Van der Merwe J H 1949 Proc. R. Soc. 198 206 [5] Khachaturyan A G 1983 Theory of Structural Transformations in Solids (New York: Wiley) [6] Fomin N V 1991 Sov. Phys. Solid State 33 111 [7] Ilegems M and Panish M B 1974 J. Phys. Chem. Solids 35 409 [8] Ipatova I P, Malyshkin V G and Shchukin V A 1993 J. Appl. Phys. 74 7198 [9] Glas F 1987 J. Appl. Phys. 62 3201 721