A Quick Guide to the FT-650 Film Thickness Probe System
By Kerwin Wang
System Introduction
The FT-650 Prometrix Film Thickness (FT) Probe System provides automated measurement and mapping of your
wafer. The FT tester can measure single and multiple layers of oxide, nitride, photoresist, polysilicon, SOG and other
transparent films from 100 to 4um. Here is the detailed information of its measurement range.
Measurement range
Oxide
700Å -4m
Nitrides/Oxynitrides
100Å -4m
Resists
500Å -4m
Transparent multilayer total sum 500Å -4m for 3 layers
Poly on Oxide
400Å to 8000Å poly on 400Å to 1700Å oxide
Oxide on Aluminum
2500Å -3m
SOG on Gold
(Not working right now)
SOG on TiW
Around 3000 Å is fine by select feasible optic filters
Typical Accuracy +-1%
System Components
Computer Monitor
Video Monitor
Wafer
Handler
FT Tester
FT Tester
Wafer
Handler
Objective Lens
Wafer Stage
Line Conditioner
Wafer Stage
(at the loading position)
Mouse
Tester
Power
Switch
Computer
Manual Controller
Before start using this equipment, several things should be noticed!
1. NEVER put anything on or near the top of the wafer stage, FT tester or Wafer Handler
2. NEVER force the Objective Lens, Stage or Wafer Handler by hand or any other objects.
3. NEVER look directly at the Lamp when it is on.
Turn on procedure
1.
2.
3.
4.
Make sure the working area of the handler arm and wafer stage is clear.
Switch On the ONEAC Line conditioner (Wait for 15 sec. It will turn on the displays automatically. )
Switch On the FT tester and Wait for 30sec. The wafer handler will finish the initialization.
Turn on the Computer and Wait for 2min30sec. The tester should be initialized automatically.
(Please see the figures next page)
Step2
5.
Step3
Step4
After the tester finishes the initialization, you will see the StatTrax Introduction window on the computer screen.
The StatTrax Introduction screen
F1
F2
F3
F4
F5
F6
F7
F8
The green toggles below the introduction window are mappings to the function keys on the keyboard. You can activate the
toggle by using the mouse or press the function key.
Automatic measurement procedure
(No specific pattern on the wafer)
1.
2.
3.
4.
F1 Folder Select
Select the test sample (SiO2, Nitride, SOG..) by using arrow
F1 Collect New Data
Select TEST SETUP in Card Index Window by
using PgUp PgDn
5. Make sure the Test Type = Quick Test
6. Check the Wafer DIAM in test type window
7. Move the indicator to the Wafer DIAM
8. Use F4 Toggle Active to select right DIAM
9. Set up the TEST DIAM by moving the highlighted area to
TEST DIAM and directly key in the number and unit then
press ENTER (Suggest 2.5in for 3 in wafer, 3.5in for 4in wafer)
10. F1 Load the wafer Let the tester position the stage.
11. Put the wafer at the center of the stage
12. F1 continue, the system will start the wafer analysis. It will take around 36sec. (It may be longer than 36 sec if
the lamp is warming up)
13. After that, the tester will automatically start to sample the data. (Each data will take 8-9sec)
14. After the sampling, the wafer stage will move back to the loading position. You can remove the wafer and start
the turn off procedure or replace the wafer and press F6 to start a new test. (Press F1, then follow the step12)
To see more testing results
F5 to see each individual data
F8 Return the previous screen
F6 New test to start a new test
F2 Switch the Unit to see the Thickness or Index
Manual Test Window
Manual measurement procedure
( You want to get the thickness information
on some specific location)
0.
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.
17.
18.
F6 to Start a new test
PgUp PgDn select Test Setup in the card index window
Chang test type form Quick test to Manual Test
Define the step size, (The original setup should be good for most applications)
F1 Load the wafer
Put the wafer at the center of the wafer stage
F1 continue; let the tester begin the wafer analysis (It will take around 32 sec)
After the wafer analysis is done, the “Manual Test Window” will show up.
F3 Begin Correct then F3 End Correct
F1 Begin the test
Manual Controller
F2 Toggle data to select unit (Index or Angstroms)
In some cases, you will need to select different optical sets to sample the data.
F5 Change the objective lens (2.5X-50X)
F6 Color filter (filter wavelength) (None, 420nm-495nm)
F7 Density filter (change the transmittance) (1%-91%)
Measure
F8 Cancel the test
Index LED
The Index LED on the manual controller should be lightened
Use the Manual Controller
XY Mode
XY mode to select speed
Use Arrow to find sampling region
Suggest using Auto to do the automatic focus
Press Measure to sample the data.
Based on the default setup, you can sample up to 30 data each run.
Press F3 to End the test
The wafer stage will move back to the loading position
Remove the wafer
You can press F6 to Start a new test or end the testing by following turn off procedure.
Turn off procedure
1.
2.
3.
Switch Off the computer
Switch Off the FT tester
Switch Off the Line Conditioner
If you need some help
Please contact:
Kerwin Wang Kerwin@ee.washington.edu (206) 221-5340
Tai-Cheng Chen tcchen@u.washington.edu (206) 221-5388
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