EE 529 Semiconductor Optoelectronics – Semiconductor Lasers EE529 Semiconductor Optoelectronics Semiconductor Lasers 1. 2. 3. 4. Optical gain spectrum Laser threshold, power and efficiency Modulation characteristics Advanced laser structures Reading: Liu, Sec. 13.3-13.4, 13.9-13.10 Ref: Bhattacharya, Sec. 6.7, 7.2, 7.13; Liu, Sec. 4.3, 5.1 Lih Y. Lin EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Laser Operation Lasing process in a ruby laser Process: 1. Population inversion ― Through optical pumping or carrier injection. 2. Seed photons ― From spontaneous emission and initiate the stimulated emission process. 3. Optical cavity ― Resonant enhancement and define the output wavelength. 4. Gain saturation – Population inversion decreases as stimulated emission increases. → Steady state. 5. Output coupling ― Let some of the photons out at each round trip. Lih Y. Lin 2 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Basic Semiconductor Laser Structure p+ Junction n+ Ec Eg Ev EF p eV o Ho les in V B Electro ns Electro ns in C B n+ p+ Ec EF n Ec In v ers io n reg io n Eg EF n Ec eV EF p Ev (a) (b) Current V Photograph of an edge emitting laser diode Cleaved surface mirror L Electrode GaAs p+ L n+ GaAs Electrode Active region (stimulated emission region) 500 µm Lih Y. Lin 3 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Different Regimes of Operation Energy Optical gain EF n − EF p CB EF n Ec Pumped electrically or optically until population inversion happened. → Emission > Absorption. Electrons inCB eV hυ 0 Eg Holes inVB =Emptystates Ev EF p At T >0 VB At T =0 Optical absorption Densityof states Optical P ower Laser Optical Power Optical P ower LED Stimulated emission λ Optical P ower Laser Spontaneous emission λ 0 I Ith λ Lih Y. Lin 4 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Optical Gain Spectrum Optical gain coefficient g: Fractional change in the light power (or intensity) per unit distance g(ν) 1/2 2(mr* )3/2 c 2 h ν − E [ f c ( E2 ) − f v ( E1 )] ( g) 2 2 2 n h ν τ sp ∆EF Lih Y. Lin 5 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Threshold Gain gth Shown on the right is a typical output power-Injection current characteristics of a laser diode. When does lasing happen? Steady-state condition: Laser power is constant → Round-trip gain = Round-trip loss Pf Pi Reflecting Reflecting surface surface E E f 2 PO Lasing Ith → gth I i SteadystateEMoscillations R2 L 1 Cavityaxis x R1 Where does the loss come from? Reflection loss at the mirrors. Losses in the cavity medium (scattering at defects, absorption by impurities, absorption by free carriers …) Pf Pi R1 R2 exp[ g (2 L)]exp[−α(2 L)] α : Loss coefficient of the laser medium Pf = Pi → gth = α + 1 1 ln 2 L R1 R2 Lih Y. Lin 6 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Threshold Current and Efficiency Laser diode active layer thickness = d Determine Nth from the gain spectrum edN th J th = ηinj τ s or J th = edRsp ( N th ) ηinj ηi Above threshold, under steady state, (1 / 2 L)ln(1 / R1 R2 ) hν P0ut = ηi ηinj ( I − I th ) α + (1 / 2 L)ln(1 / R1 R2 ) e External quantum efficiency d ( Pout / hν) (1 / 2 L)ln(1 / R1 R2 ) ηe = = ηi ηinj d ( I − I th ) / e α + (1 / 2 L)ln(1 / R1 R2 ) Slope efficiency dP hν ηs = out =ηe VdI eV n Po nth Threshold population inversion n Power conversion efficiency P I th hν 1 ηc = out =ηe − VI eV I P o = Lasing output power ∝ Nph Slope represents efficiency I Ith Lih Y. Lin 7 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Exercise: Threshold Current Density of a GaAs Laser Calculate the threshold current of a GaAs laser with an undoped active region of width d = 0.2 µm starting from g(E) and Rsp(E): ( E − E ) [ f ( E ) − f ( E )] cm g( E ) = 3 × 10 1/2 g 4 E c 2 v 1 −1 Rsp ( E ) =× 1.15 1029 E ( E − Eg ) 1/2 f c ( E2 )[1 − f v ( E1 )] s −1cm −3 (eV) −1 Assuming the following parameters for the laser: L = 400 µm, R1 = R2 = 0.9, α = 103 cm-1, Γ = 0.95, ηi = 0.9, ηinj=1 . Along your calculation, verify that you obtain the following results: Lih Y. Lin 8 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Exercise: Efficiencies of an InP Laser An InP Fabry-Perot laser emits at wavelength ~ λ =920 nm. It has an injection efficiency ηinj = 90% and an internal quantum efficiency ηi =95% . The voltage applied to the device is 2.5V. The reflectivity of both cavity ends are R1 = 100% and R2 = 70% . The loss coefficient of the laser medium is α =1cm-1. Its threshold current is characterized to be I th = 1mA. (a) The semiconductor laser has a cavity length L = 400 µm. Assume the refractive index n = 3.3. What should be the exact emission wavelength? At which longitudinal mode does lasing occur? (b) Calculate the photon extraction efficiency, external quantum efficiency, and slope efficiency of the device. (c) If the laser is operated at an injection level twice the threshold, find its power conversion efficiency and output power. Lih Y. Lin 9 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Transient Response Transient phenomena occur because of the time required for the electron and photon populations to come into equilibrium. As the photon population builds up rapidly, the carrier density is depleted until it falls below transparency condition. Photon population decreases. Carrier population starts to build up again, this time from a higher initial value, and so does the photon population. Lih Y. Lin 10 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Frequency Response under Small-signal Modulation As the initial oscillations cease, the situation becomes periodic small-signal modulation of a laser. mγ c γ n Ω 2 − Ω 2r + iΩγ r Complex response function: r (= eiϕ Ω) | r |= Modulation power spectrum: m 2 γ c2 γ 2n = R( f ) r= (f) 16π4 ( f 2 − f r2 ) 2 + 4π2 f 2 γ 2r 2 1/2 2 γ 2r f pk f r − 2 Resonance peak: = 8π 3-dB modulation bandwidth: 1/2 f3dB γ 2r 1/2 2 = (1 + 2) f r − 8 2π2 Lih Y. Lin 11 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Exercise: Modulation Characteristics A GaAs QW VCSEL has the following parameters: Emission wavelength = 850 nm, refractive index n = 3.52 , gain overlap factor Γ =0.2 , threshold gain coefficient gth 8.16 × 104 m −1 , excess carrier spontaneous lifetime τ s =3.02 ns , gain cross-section = σ = 2.2 × 10−19 m 2 . (a) Find the values of spontaneous carrier relaxation rate γ s and cavity decay rate γ c . What is the photon lifetime τc ? = 4.74 × 10−18 m3 , (b) If the laser output power = Pout 60.6 µW , the mode volume Vmode the emitted and photon extraction efficiency ηt =89% . Find the intracavity photon density S0 . (c) Find the values of differential gain parameter g n . Assume the nonlinear gain parameter g p = − g n , find the values of differential carrier relaxation rate γ n and nonlinear carrier relaxation rate γ p . (d) Find the values of relaxation resonance frequency f r and total carrier relaxation rate γr . (e) Find the resonance peak of the modulation spectrum f pk . What is the 3-dB modulation bandwidth f 3dB ? Lih Y. Lin 12 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Heterojunction Lasers p n G aA s A lG aA s (a) p Ith for homostructure laser diode extremely high → Not practical for room temperature operation A lG aA s ( ~ 0 . µm 1 ) E le c tr o n s i n C B ∆Ec Ec Ec Heterostructure laser: Enhance carrier confinement and photon confinement 2 eV 1.4 eV 2 eV (b) Cleaved reflecting surface W Ev Ev H o l e s in V B R e fra c t iv e in d e x (c) P h o to n d e n s i ty L Stripe electrode A c t iv e r e g io n ∆n ~ 5 % Oxide insulator p-GaAs (Contacting layer) p-Al xGa1-xAs (Confining layer) p-GaAs (Active layer) n-Al xGa1-xAs (Confining layer) n-GaAs (Substrate) (d) Elliptical laser beam 2 1 Current paths Substrate 3 Substrate Electrode Cleaved reflecting surface Active region where (Emission region) J > Jth. Lih Y. Lin 13 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers DBR Laser and DFB Laser Optical Power Laser Output spectrum of a typical Fabry-Perot (F-P) laser 2L =q L λ → Many wavelengths are possible, as long as they are within the gain spectrum λ How do we obtain single-frequency semiconductor lasers? Distributed Bragg reflector (DBR) laser Λ DistributedBragg reflector q(λB /2 n)= Λ A B Corugated dielectricstructure Activelayer (a) (b) ν m ≈ ν B ± ( m + µ) Distributed feedback (DFB) laser Λ Corrugatedgrating Opticalpower Ideallasingemission Guidinglayer Activelayer c 2nB l 0.1nm (a) (b) λB λ λ (nm) (c) Lih Y. Lin 14 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Typical Grating Coupler Structure and Coupled-Mode Theory Coherent coupling between forward- and backward-propagating waves results in selection of longitudinal modes. δ = β B − β(ω) R= ( sinh 2 | κ | L 1 − δ / κ ( cosh 2 | κ | L 1 − δ / κ 2 ) 2 ) − δ/κ 2 Lih Y. Lin 15 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Exercise: DBR Laser A DBR laser has gain section of length l = 400 µm and two identical DBRs as = 150 µm . The grating period of the DBR is end mirrors, each of length lDBR Λ =225 nm . The effective indices for the laser modes are n= N= 3.45 . β β The DBR coupling coefficient is | κ |=50 cm −1 . The gain spectrum peaks ~1550 nm. (a) Find the Bragg wavelength and frequency near the gain peak. (b) Find the peak reflectivity and the bandwidth of the two DBRs. (c) Find the effective phase length of the DBRs and that of the DBR laser to determine the longitudinal mode spacing of the laser. (d) Assume the gain bandwidth is much broader than the DBR frequency bandwidth, how many longitudinal modes can exist? (e) If the laser is pumped right at the threshold, only one mode can oscillate. What’s its wavelength? Calculate the DBR reflectivity at this lasing wavelength. Lih Y. Lin 16 EE 529 Semiconductor Optoelectronics – Semiconductor Lasers Vertical Cavity Surface Emitting Laser (VCSEL) Dielectric mirrors → Distributed Bragg reflector structures A 1st-order square grating of a 50% duty factor has the largest coupling coefficient 2∆n | κ |= λ Λ = λ B / 2n Contact λ/4n 2 λ/4n 1 Dielectric mirror Active layer Dielectric mirror Substrate Contact Surface emission SEM (Scanning electron micrograph) of a VCSEL array. Lih Y. Lin 17