2011 International Conference on Compound Semiconductor Manufacturing Technology

™

™

2011

International Conference on

Compound Semiconductor

Manufacturing Technology

May 16 th

- 19 th

, 2011

Register Online at

www.CSMANTECH.org

Hyatt Grand Champions Resort, Villas and Spa, Indian Wells, California, U.S.A.

CONFERENCE AT A GLANCE

SUNDAY, May 15 th

5:00 PM

– 8:00 PM

REGISTRATION

East Foyer

MONDAY, May 16 th

7:00 AM

– 7.00 PM

7:00 AM

– 8:30 AM

8:30 AM – 4:30 PM

8:15 AM – 4:45 PM

12:00 PM –1:00 PM

6:00 PM

– 9:00 PM

REGISTRATION

East Foyer

BREAKFAST FOR

WORKSHOPS

Indian Wells NOP

CS MANTECH WORKSHOPS

Desert Vista AB

ROCS WORKSHOP

Desert Vista DE

LUNCHEON FOR

WORKSHOPS

Indian Wells NOP

EXHIBITS RECEPTION

Indian Wells IJKLM

TUESDAY, May 17 th

7:00 AM

– 5:00 PM

7:00 AM

– 8:30 AM

8:00 AM

– 8:30 AM

8:30 AM

–10:00 AM

10:00 AM

– 5:30 PM

10:00 AM

–10:30 AM

10:30 AM

–12:00 PM

12:00PM

– 1:30 PM

1:30 PM

– 3:00 PM

3:00 PM

– 3:30 PM

3:30 PM

– 5:00 PM

5:10 PM

– 6:40 PM

5:10 PM

– 6:40 PM

7:00 PM

–10:30 PM

REGISTRATION

East Foyer

Continental Breakfast

Indian Wells IJKLM

OPENING CEREMONIES

Indian Wells NOP

SESSION 1: Plenary I

Indian Wells NOP

EXHIBITS OPEN

Indian Wells IJKLM

BREAK

Indian Wells IJKLM

SESSION 2: Plenary II

Indian Wells NOP

EXHIBITS LUNCH

Indian Wells IJKLM

SESSION 3: Plenary III

Indian Wells NOP

BREAK

Indian Wells IJKLM

SESSION 4: Plenary IV

Indian Wells NOP

EXHIBITOR’S FORUM 1 – 3

Desert Vista rooms A, B and D

STUDENT FORUM

Desert Vista room E

INTERNATIONAL RECEPTION

Indian Wells Golf Resort

2 2011 Compound Semiconductor MANTECH

WEDNESDAY, May 18 th

7:00 AM

– 5:00 PM

REGISTRATION

7:00 AM – 8:30 AM

East Foyer

Continental Breakfast

Indian Wells IJKLM

EXHIBITS OPEN 7:00 AM –10:30 AM

8:00 AM

– 8:30 AM

8:00 AM – 8:30 AM

8:40 AM – 9:40 AM

8:40 AM – 9:40 AM

9:40 AM – 10:40 AM

10:40 AM –12:00 PM

10:40 AM – 12:10 PM

12:10 PM

– 1:40 PM

1:40 PM

– 3:00 PM

1:40 PM

– 3:00 PM

3:00 PM

– 3:30 PM

3:30 PM

– 5:00 PM

3:30 PM

– 5:10 PM

5:20 PM

– 7:00 PM

6:00 PM

– 7:00 PM

Indian Wells IJKLM

SESSION 5a - CS in India

Indian Wells OP

SESSION 5b - CS in China

Desert Vista AB

SESSION 6a - Process I

Indian Wells OP

SESSION 6b - GaN EPI

Desert Vista AB

BREAK

Indian Wells IJKLM

SESSION 7a-Process II

Indian Wells OP

Indian Wells OP

SESSION 7b-High Freq GaN

Desert Vista AB

LUNCH BREAK

SESSION 8a- Process III

Indian Wells OP

SESSION 8b-Substrates

Desert Vista AB

BREAK

Desert Vista Foyer

SESSION 9a-Manufacturing

SESSION 9b-Device Tech

Desert Vista AB

Desert Vista Foyer

RUMP SESSION RECEPTION

7:00 PM – 9:00 PM

RUMP SESSIONS A-D

Desert Vista rooms

A, B, D and E

SEMI Standards Meeting

Desert Vista D-Date Palm

THURSDAY, May 19 th

7:00 AM – 9:30 AM REGISTRATION

East Foyer

Continental Breakfast 7:00 AM – 8:30 AM

8:20 AM –10:00 AM

8:20 AM –10:00 AM

10:00 AM –10:30 AM

Desert Vista Foyer

SESSION 10a-Emerging Tech

Desert Vista AB

SESSION 10b-Simulation/Char

Desert Vista DE

BREAK

Desert Vista Foyer


10:30 AM –12:00 PM

10:30 AM

–11:50 AM

12:00 PM – 1:30 PM

1:30 PM – 3:00 PM

1:30 PM

– 3:00 PM

SESSION 11a-LED

Desert Vista AB

SESSION 11b-Reliability

Desert Vista DE

CS MANTECH Luncheon

Indian Wells JK

SESSION 12a-Fab/Tech Trans

Desert Vista AB

SESSION 12b-Power Switches

3:00 PM – 4:30 PM

4:30 PM – 5:00 PM

Desert Vista DE

INTERACTIVE FORUM

Indian Wells NOP

CLOSING RECEPTION

Indian Wells NOP

MESSAGE FROM THE CONFERENCE

CHAIR:

It was a great pleasure for us to hold our 25 th

Anniversary meeting last year in beautiful Portland, Oregon. Looking back on the 1970s and 1980s, CS (compound semiconductors) produced lots of dreams, innovations, and new generations of engineers and scientists, but did not hit financially successful products in the field of microwave devices. After losing the battle with Si in the development and commercialization of the high speed CPU, a savior came in the form of a small handheld device: the cellular phone. This device needed exotic materials and speed that

Si could not match and it came in the form of GaAs devices using HBTs and pHEMTs for wireless communication. After focusing on manufacturing and commercialization, we finally have grown to become an important industry in RF applications. We have continued with our growth after the 20 th

century in spite of facing a financial crisis. We continuously look at new materials and recently GaN and SiC have been showing great potential for RF applications. We still have many challenges ahead as we incorporate new materials into the manufacturing environment, but this has not stopped us from innovating. As we start a new year, we are reminded that we are entering a new era of “wireless everywhere” with new generations of smartphones, eBooks, smart grid, etc…. CS will surely play an important role in these applications as well as for LEDs, lighting, and solar cells.

The CS MANTECH Conference is the best place to check out what is important and new in the CS community.

This year we gather in Palms Springs, California, one of the most beautiful places in Southern California with warm temperatures year around. Palm Springs offers beautiful


landscapes, fine dining, shopping, or simply relaxation.

And if you are into more active pursuits, Palm Springs has some of the best golf courses in the world.

The purpose of CS MANTECH is very clear. We strive to contribute to the overall CS industry from manufacturing to market information. We help provide a venue where ideas can be exchanged freely with expanded communication among participants from academia, industry, and government. I am very excited that you can join our family, and I welcome any ideas that would help enrich our experience.

There will be a broad array of educational opportunities including our Monday workshops. From the last conference in 2010, the ROCS (Reliability of Compound

Semiconductors) Workshop started co-locating with CS

MANTECH. You can choose the MANTECH workshop and/or ROCS on Monday.

Students can also interact with potential employers.

Industry veterans can keep contact with old friends, meet new ones, and take the pulse of the industry. The technical sessions will offer the current state of the art in materials, processing, reliability, and device technology across the compound semiconductor spectrum.

This is the annual event where our industry comes together. Come join us!

Yohei Otoki

Hitachi Cable America

Chairman, 2011 CS MANTECH Conference


2011 CONFERENCE SPONSORS

(Partial list as of Feb 8, 2011)

MANTECH is an independent not-for-profit organization whose mission is to promote technical discussion and scientific education in the compound semiconductor manufacturing industry. The continued success of the conference is enabled by donations from corporate sponsors. The 2011 CS MANTECH Conference

Committee gratefully acknowledges the support from our sponsors.

Platinum Sponsors:

Aixtron

Freiberger

Plasma-Therm LLC

RF Micro Devices

Skyworks

TriQuint

WIN Foundry

Gold Sponsors:

AXT

CSBD, Sony Electronics Inc.

MAX-IEG

Silver Sponsors:

Northrop Grumman ES

2010 CONFERENCE SPONSORS

We would again like to thank our 2010 sponsors

Platinum Sponsors:

CREE

Hitachi Cable, Ltd


RF Micro Devices

Skyworks Solutions

Gold Sponsors:

Booz Allen Hamilton

Picogiga International

Sumitomo Electric

TriQuint Semiconductor

Silver Sponsors:

Aixtron

AXT

Freiberger

Kopin

Northrop Grumman

OEMGroup


2011 CONFERENCE HIGHLIGHTS

The 2011 CS MANTECH program begins on Monday

May 16 th

with a series of tutorial workshops. This year’s workshops will focus on device/process simulation, modeling, high frequency measurement and characterization, passive and EM simulation and design kit infrastructures. The workshop theme is “From Process to

Product”. In addition, this year CS MANTECH will host the internationally acclaimed ROCS Workshop (Reliability of Compound Semiconductors) which will be held on the opening day (Mon 5/16). The ROCS Workshop will present the latest results and new developments in all phases of Compound Semiconductor Reliability (see http://www.jedec.org/home/gaas/ for details).

On Monday evening the Exhibits open at 6:00 pm with the traditional Exhibits Reception. The CS MANTECH exhibits are an excellent opportunity to view suppliers of materials, services and tools from around the globe. This is a great time to renew old relationships and establish new ones while enjoying the fine food and libations of Indian

Wells (Palm Springs).

The CS MANTECH Conference formally opens on

Tuesday morning with a brief overview of the conference and the awards presentation for the best papers from the

2010 conference. This is immediately followed by the two

Plenary Sessions which will cover topics ranging from the latest in RF module technology to the newest in high frequency devices.

After lunch, we’ll see an analysis of our business and technology trends, followed by a session covering 3G/4G and LTE requirements for wireless systems and the role compound semiconductor devices play in meeting these requirements.

The Tuesday technical session will conclude with our

Exhibitor’s Forum. Also, in parallel will be our Student

Forum, which is designed to be an interactive session between students and the industry that is destined to hire them. As Tuesday evening approaches, we will walk out of the Hyatt Grand Champions to Indian Wells Golf Resort where we’ll eat, drink, and enjoy a 9-hole putting contest with old and new friends.

The Sessions on Wednesday morning will start with two parallel invited talks describing the Future of Compound

Semiconductor Technologies in India and in China. Then we start the parallel sessions with world class technical papers on the compound semiconductor industry. One side of Wednesday’s two parallel sessions focuses on emerging


wide band-gap technologies, and the other on manufacturing practices and processing. These are topics for which CS MANTECH is well known.

In order to allow additional opportunity to interact with the

Exhibitors before the Exhibits close, this year we will have a longer one hour break during the morning session to take place in the exhibit hall.

Wednesday evening features the popular Rump Sessions.

Eat, drink, and debate! Attendees may join any or all (if you move quickly) of the four parallel topics, where moderators will encourage informal, lively, and highly interactive discussions.

The Sessions on Thursday morning will start a little later and the day will proceed with parallel sessions. The morning continues with excellent technical papers on

Emerging Technologies, LEDs, simulation & characterization, and reliability. Following this session lunch will be sponsored by CS MANTECH. Thursday afternoon will include our closing two sessions on fab management/technology transfer and power switches followed by the Interactive Forum poster session. This poster session includes new papers on a diverse range of topics, as well as poster versions of all the papers presented earlier in the technical program. Attendees will have the opportunity to meet with authors to discuss their papers in detail. Attendees of the Interactive Forum will vote for the best poster, and the winning author will receive the

Best Poster Award.

The Conference Closing Reception will follow the

Interactive Forum. In a warped and hopefully humorous manner we will be holding a Haiku contest with CS

MANTECH as the theme for the writings. In English,

Haiku most often takes the form of three lines with a 5, then 7, then 5 syllable format. Limit of one submission per person, please. Our closing reception will also feature a drawing for an iPod. All those who completed and submitted their Feedback Forms will have a chance to win!



Traditionally CS MANTECH offers Monday workshops featuring topics of interest to the compound semiconductor community. Workshop attendees get the opportunity to expand their knowledge beyond their own specialties, as industry experts share their knowledge and valuable experiences in a tutorial manner. Past programs have offered many interesting topics ranging from materials and processing, test and characterization, applications and market analysis, to engineering management and intellectual property rights. This year’s Workshop theme is “ From Process to Product ”. CS MANTECH is pleased to offer a series of talks to cover device/process simulation, modeling, high frequency measurements and characterization, passive and EM simulation and design kit infrastructures. These invited talks are intended to provide the Workshop attendees with an opportunity to appreciate what product/circuit designers care about at the circuit level and how processing information is used in the realization of products by other groups. This allows process development and sustaining teams to have a better understanding of how product and circuit level needs translate to process technology requirements. The planned tutorials deliver a good overview for those just wanting to learn more, but will also provide sufficient breadth of topics and detail that even those in the field will learn something new.

Our workshops will begin with a talk by Dr. Charlie Fields from HRL Laboratories, LLC. His presentation covers the use of process simulation tools to assist the development of compound semiconductor devices and circuits. He will discuss the capability of qualitative and quantitative analysis of device and circuit cross-sections to uncover potential device/circuit failures and reliability issues by simulation tools. He will share simulation results that allow verification of process design rules with the goal of design for manufacturability.

His talk highlights the benefits of using process simulation tools to design a fabrication process that is robust and high yield in the process development stage.

As we know, a robust and high yield process reduces the expense of IC failure analysis as well as the overall product cost.

Dr. Fields has a Ph.D. from the University of California at Berkeley and is a

Senior Project Manager and the Trusted Foundry Program

Manager at HRL. His current research work involves photolithography for advanced III-V devices and circuits, process simulation, and high frequency device characterization and modeling.


The second talk will be presented by Dr. Pete Zampardi from Skyworks Solutions, Inc. His talk will focus on

“Modeling for Process”. This tutorial discusses the overall strategy for developing and implementing simple physicsbased models, including statistics, for the design of RF circuits in GaAs HBT or BiFET technology. While the examples used target the development of handset power amplifiers, the general principle is applicable to other devices and technologies (the analogies for some other technologies will be discussed). Key features of this approach are: the idea of “unified” models where devices share parameters if they are constructed from the same physical process layers, the use of Design-of-Experiments

(DOE) to define the variations and minimize the required number of simulation runs, and the idea of a “device-up” approach that uses basic device physics and process information to define the factors and determine model parameter correlation using experimental DOE. Using this approach, the links between process parameters, model parameters, and circuit performance become much clearer than using curve-fitting. This approach can also be used to enhance already existing models with a few simple modifications. Specific examples of GaAs HBTs and

GaAs MESFETs from a BiFET process will be presented.

Dr. Zampardi has a Ph.D. from the University of California at Los Angeles and currently is a Technical Director for

Device Design, Modeling, and Characterization at

Skyworks.

The next talk is an Electronic Design Automation (EDA) tutorial focused on FET and pHEMT Modeling and

Characterization. Mr. Paul Litzenberg of TriQuint

Semiconductor will briefly explore pHEMT small signal and noise models, and then focus primarily on large signal

(nonlinear) pHEMT models. Different bias regions of pHEMT operation and the “compact” model equation sets commonly used to model behavior in these respective regions will be described. The process of pHEMT characterization, model parameter extraction, and model verification will be presented. The accuracy of several large signal models, including Angelov, EEHEMT and

TOM4, will be illustrated through comparison of simulated and measured device characteristics. Finally, advanced pHEMT modeling topics will be discussed including temperature variation, process (manufacturing) variation, and size scaling. Mr. Litzenberg is the Commercial

Foundry Engineering Director at TriQuint Semiconductor in Hillsboro Oregon. He leads a team of engineers and technicians who develop and maintain the Process

Development Kits (PDK’s) for all TriQuint 150 mm GaAs

IC process technologies, FET and HBT technologies, including device characterization, model development, model parameter extraction, model verification, layout


macros and layout verification. Mr. Litzenberg earned an

MSEE degree from Arizona State University and a BSEE degree from the University of Illinois.

Dr. Marcel Tutt from Freescale will give a tutorial on “RF and Low Noise Measurements for III-V Devices”. III-V

Devices have applications in frequencies ranging from RF to millimeter wave. These applications include low noise amplifiers, power amplifiers, frequency conversion devices, and sources. In order to determine the suitability of a device for a given application or the performance of a

III-V circuit, specialized measurement techniques are required. Dr. Tutt’s talk will explain the key measurement techniques used, including S-parameters, load pull, and noise parameter determination. Measurement theory, principles, and interpretation will be covered. Dr. Tutt received his Ph.D. from the University of Michigan. His research dealt with noise properties of HEMT’s and GaAs

HBT’s. He has worked in the areas of microwaves and millimeter waves (mmW) for over 20 years. When he joined Freescale he developed the modeling process for their III-V HBT’s for handset PA applications. Later, he managed Freescale’s III-V device modeling and characterization group and has supervised the development of on-wafer mmW test systems for the characterization of mmW devices and circuits at Freescale.

The fifth talk by Mr. Michael Thompson of Agilent

Technologies will share the methods and practical examples of passive and EM simulations. From High

Speed Digital applications to RF and microwave frequency boards, modules, and ICs these simulation techniques are a cornerstone in the design of current electrical systems.

But, in spite of advances in analysis techniques and the development of faster and more capable computer systems, the designer still cannot analyze every physical detail of a design and must make judgments about what areas of the design to analyze, and in how much detail. Mr.

Thompson’s talk reviews the more popular analysis method, but focuses mainly on the trade-offs required by the designer to model critical portions of the design while still meeting design and development time lines. Mr.

Thompson received a BSEE and a ME, Microwave

Engineering Option, from Cal Poly, Pomona, in 1982 and

1986 respectively, followed by post graduate work in

Electro Magnetics and Antenna Theory at USC.

He joined

HP in 1997 and has remained within the EEsof Division throughout the spin-off from HP to Agilent where he was an Application Engineer (AE) from 1997 to 2008 and is currently the Western US AE District Manger.

Last but not least, our final talk will be presented by Dr.

Hongxiao Shao from Skyworks Solutions, Inc. Dr. Shao


will explore the objectives and methods of developing and implementing Electronic Design Automation (EDA) and process design kits (PDK) infrastructure with special considerations for a high volume manufacturing environment. His presentation will demonstrate one of the few PDKs for compound semiconductor process technologies with a complete implementation of electrical / physical / electricomagnetic and statistical yield / manufacturability functionalities, emphasizing large signal

RF MMIC applications. The underlying EDA solutions and automation opportunities between design, manufacturing, and industrial engineering will also be discussed. The problems a PDK addresses will be elaborated for two somewhat opposite aspects of a semiconductor process. One end of the spectrum is the application – focusing on the total cost of product development, especially the pains experienced by designers, while the other is the process development – focusing on the application support and releases, especially the migration of a product from one generation technology to the next. Clear distinctions will be made for PDK implementation considerations for mature technologies, and ones in development, for applications of technology to initial and derivative product development. Dr. Hongxiao

Shao received his Ph.D. in Computational Condensed

Matter Physics from Rutgers University, and currently he is a Senior Engineering Manager in charge of Design Kit and Design Environment development for

Semiconductor/Package Process Technologies at

Skyworks.

Please visit our website, www.csmantech.org

, for more information, including extended Workshop abstracts and biographies of Workshop Speakers.

ROCS WORKSHOP

The 26 th

annual ROCS Workshop - formerly known as the

GaAs Rel Workshop - will be held in conjunction with the

CS MANTECH on Monday. The ROCS Workshop brings together researchers, manufacturers, and users of compound semiconductor materials, devices, and circuits.

Papers presenting latest results, including work-inprogress, and new developments in all aspects of compound semiconductor reliability are presented.


INDUSTRY EXHIBITS

The CS MANTECH Exhibits are the premier opportunity for participating companies to showcase their products and services to the CS community .

Exhibiting companies will gain excellent visibility to a wide range of CS focused participants from around the globe and be able to ensure their prominence and market positioning within the CS field.

The Exhibits will kick off on Monday evening with the

Exhibits Reception .

Food and drinks will be available and this will provide a great opportunity to catch up with friends, colleagues, suppliers, even competitors on the first full evening of the conference. It represents an excellent networking opportunity and a window to meet and greet the assembling conference attendees.

The Exhibits will open on Tuesday morning with a continental breakfast in the Exhibits Hall at 7.00am. The extended coffee breaks and buffet style Lunch on Tuesday will also both be served in the Exhibits Hall.

The popular Exhibitor’s Forums will return and are scheduled for Tuesday afternoon. These allow participating companies to introduce or highlight new products in a short presentation.

The Exhibits will open again on Wednesday morning with a continental breakfast at 7.00am. The Wednesday morning session provides an ideal opportunity for both conference attendees and participating Exhibitors to follow up on interest generated earlier, both in the technical conference and at the Exhibitor Forums.

To reserve Exhibit space please, visit our web site at www.csmantech.org

, and click on the Exhibitors link.

Further details, including the sign up sheet, link to the

Exhibitors kit and sign up for the Exhibitors Forum, can also be found on the Web Site. Please note Forum Slots are on a first come, first served basis and the number of slots are limited!

For any questions related to Exhibiting at CS MANTECH, please contact the 2011 Exhibits Chair, Paul Cooke, (732)

271-5990 email: exhibitor@gaasmantech.org


INTERNATIONAL RECEPTION

The 2011 CS MANTECH International Reception will be held at the Indian Wells Golf Resort. This is a 36-hole public golf facility with both courses on Golfweek’s Top

20 "Best Courses You Can Play" in California. We will be having a putting contest on the site’s 9-hole natural grass putting green. Show your skills and win prizes. Dinner and drinks will be served on their outside patio overlooking the greens. You will have the opportunity to play, eat, and drink in any order you choose. The site is within walking distance of the Hyatt Grand Champions for your convenience. MANTECH extends an invitation to family and friends that may be accompanying you at the

Conference to join us at this special event Tuesday night.

Guest tickets are $50 each. We strongly encourage you to purchase guest tickets at the time of your registration to ensure space at the reception.

2010 BEST PAPER AWARDS

CS MANTECH tradition is to formally recognize the authors of the best paper and best student paper of the previous conference, as determined from the conference attendee votes tallied from your feedback forms. These awards will be presented during the conference introductions on Tuesday, May 17 th

.

The conference Best Paper Award is named in honor of Dr.

He Bong Kim, the founder of the International Conference on Compound Semiconductor MANufacturing

TECHnology. The He Bong Kim award winners for the

2010 Conference are Martin Kuball, Nicole Killat, Athikom

Manoi, and James W. Pomeroy from the University of

Bristol for Benchmarking of Thermal Boundary

Resistance of GaN-SiC Interfaces for AlGaN/GaN

HEMTs: US, European and Japanese Suppliers.

The conference would also like to recognize the following paper Ultra-Thin Barrier Layers for mm Wave

Frequencies in III-N HEMT Technologies as an

Honorable Mention for the He Bong Kim award. The authors are J. K. Gillespie

1

, A. Crespo

1

, K. Chabak

1

M.

Kossler

1

, V. Trimble

1

, M. Trejo

1

, G. D. Via

1

, B.

Winningham

1

, B. Poling

2

and D. Walker, Jr.

2

,

1

Air Force

Research Lab ,

2

Wyle Labs.


The Best Student Paper voting for the 2010 Conference resulted in co awards:

Enhancement-mode Pseudomorphic In0.22Ga0.78Aschannel MOSFETs with InAlP Native Oxide Gate

Dielectric

Xiu Xing and Patrick J. Fay, University of Notre Dame

High Performance InAlN/GaN HEMTs on SiC

Substrates

Han Wang

1

, Jinwook W. Chung

Guo

2

, Tomas Palacios

1

,

1

, Xiang Gao

2

, Shiping

1

Massachusetts Institute of

Technology,

2

IQE RF

Ultra-Low Ohmic Contacts to N-Polar GaN HEMTs by

In(Ga)-Based Source-Drain Regrowth by Plasma MBE

S. Dasgupta , Nidhi

,

, D.F. Brown

,

T. E. Mates, S. Keller,

J.S. Speck, U.K. Mishra, University of California, Santa

Barbara

The principal student authors of each paper will receive a special cash award of $1000.

Congratulations to these award winning teams for their fine work!

SEMI STANDARDS MEETING

The SEMI Standards meeting is scheduled for Wednesday,

May 18 th

, from 7:00 pm to 9:00 p.m. (immediately following the Rump Sessions) in the Desert Vista D-Date

Palm. The SEMI Compound Semiconductor (GaAs, InP and SiC) Committee invites CS MANTECH Conference attendees interested in the development of internationally approved standards for wafer specifications to attend this meeting. Topics being addressed are GaAs, InP, and SiC dimensions/orientations and electrical properties, epitaxial layer specifications (which properties should be specified, and how they are to be verified), and non-destructive test methods.

Based in San Jose, CA, SEMI is an international trade association serving more than 2,400 companies participating in the semiconductor and flat panel display equipment and materials markets. SEMI maintains offices in Brussels, Moscow, Tokyo, Seoul, Hsinchu, Beijing,

Singapore, Austin, Boston, and Washington, DC. For additional information, please contact: Co-Chair: James

Oliver of Northrop Grumman at 410-765-0117 or j.oliver@ngc.com

, Co-Chair: Russ Kremer of Freiberger

Compound Materials at 937-291-2899 or russ@fcmus.com

, or SEMI Standards Engineer Ian McLeod at 408-

943-6996 or imcleod@semi.org

.


HAIKU COMPETITION

In a warped and hopefully humorous manner we will be holding a Haiku contest with CS MANTECH as the theme for the writings. In English, a Haiku most often takes the form of three lines with 5, then 7, then 5 syllable format.

Here is a wonderful example from our TPC member Jim

Crites:

As spring always comes

Technology must advance

MANTECH can assist

Write your CS MANTECH Haiku (limit of one submission per person), print it along with your contact information and pin it to our Haiku board. Attendees will cast the second vote of the day and the winner of the Haiku contest will surely welcome an E-Book reader.

CONFERENCE CLOSING RECEPTION

The Conference Closing Reception will bring to an end the 2011 edition of CS MANTECH. It will immediately follow the Interactive Forum. Drinks and snacks will be provided to foster a congenial final opportunity to exchange business cards, ideas, and experiences.

Returning this year is a Feedback Form Raffle. Your opinion on the Feedback Form is very valuable to the CS

MANTECH committees in structuring the conference and programs year-to-year and in choosing the best paper awards. This year, when you turn in your Feedback Form you enter a raffle for an iPod Touch. It’s as simple as that.

The drawing will be held at the Conference Closing

Reception, though you need not be present to win. In addition, votes will be tallied and the Best Poster presentation and best Haiku award winners will be announced.


2011 EXECUTIVE COMMITTEE

Conference Chair

Yohei Otoki, Hitachi Cable Ltd.

Secretary

Alex Smith, Brewer Science

Treasurer

Chris Santana, RF Micro Devices

Technical Program Chair

Mariam Sadaka, Soitec USA

Publication Chair

Karen Renaldo , Northrop Grumman ES

Local Arrangements Chair

Celicia Della-Morrow, TriQuint Semiconductor

Exhibits Chair

Paul Cooke, IQE RF plc

Workshop Chair

Mike Sun, Skyworks Solutions, Inc.

Publicity Chair

Nick Kolarich, Kopin Corp.

Sponsorship Chair

Scott Sheppard, Cree, Inc.

University Liaison

Peter Ersland, M/A – Com Technology Solutions

Local Arrangements Vice-Chair

Mike Barsky , Northrop Grumman AS

Web Chair

Andreas Eisenbach, IQE plc

International Liaison

Ruediger Schreiner, Aixtron AG

Registration Chair

Drew Hanser, SRI International

Information Chair

Russ Kremer, Freiberger Compound Materials USA

Committee Members

Patrick Fay, University of Notre Dame

Chang-Hwang Hua, WIN Semiconductors Corp

Kevin Stevens, Kopin Corp

Oded Tal, Max IEG

Glenn “Dave” Via,

Air Force Research Laboratory

Executive Advisory Board

Marty Brophy, Avago Technologies

Steve Mahon, Cascade Microtech

Scott Davis, Sumitomo Electric

Chairman Emeritus

He Bong Kim, GaAstronics


TECHNICAL PROGRAM COMMITTEE

Jon Abrokwah, Avago Technologies

Travis Abshere , TriQuint Semiconductor

Kamal Alavi , Raytheon

Hani Badawi, AXT Inc.

Zaher Bardai, IMN.Epiphany.com

Tom Bird, Veeco Compound Semiconductor, Inc.

John Blevins, AFRL/RYD

Karlheinz Bock, Fraunhofer Institute

Michelle Bourke, Kilbrydon Consulting

Karim Boutros, HRL Laboritories

Arnold Chen, Infinera

Mike Clausen, The Centre for Process Innovation

Suzanne Combe, TriQuint Semiconductor

Jim Crites, Cobham

Monte Drinkwine, Cobham

Chuck Duncan, RF Micro Devices

Milton Feng, University of Illinois

Joyce Ferrante, Marubeni America

Pat Fowler, Anadigics

Allen Hanson, M/A-COM Technology Solutions

Quesnell Hartmann, EpiWorks

George Henry, Northrop Grumman ES

Yung-Chung Kao, IntelliEPI

Hidetoshi Kawasaki, Sony

Judy Kronwasser, NOVASiC

Martin Kuball, University of Bristol

Chun-Lim Lau, Booz Allen Hamilton

Amy Liu, IQE Inc.

Tom Low, Agilent Technologies

Earl Lum, EJL Wireless Research

David Meyer , Naval Research Lab

Miro Micovic, HRL

Eizo Mitani, Sumitomo Electric Device Innovations, Inc

Chanh Nguyen, Teledyne Scientific

Yogi Ota, Panasonic Corporation

Paul Pinsukanjana, IntelliEPI

Thomas Roedle, NXP Semiconductors

Robert Sadler, Nitronex Corporation

Thorsten Saeger, TriQuint Semiconductor

Keith Salzman , TriQuint Semiconductor Texas

Shyh-Chiang Shen, Georgia Tech

Andy Souzis, II-VI, Incorporated

Joerg Splettstoesser, United Monolithic Semiconductor

Andrew Stoltz, US Army, Night Vision Laboratory

Shiban Tiku, WIN Semiconductors Corp

Kevin Vargason, IntelliEPI

David Wang, Global Communication Semiconductors

Russ Westerman, Plasma-Therm, LLC

Victoria Williams, Cree

Sharon Woodruff, Northrop Grumman ES

Chris Youtsey, Microlink Devices

Guoliang Zhou, Skyworks Solutions


TECHNICAL PROGRAM

Monday, May 16

th


Chair : Mike Sun , Skyworks Solutions, Inc.

7:00 AM Registration

8:30 AM Welcome and Introductions

8:45 AM Workshop Session 1

The Use of Process Simulation Tools for the Development of Compound

Semiconductor Devices and Integrated

Circuits

Charlie Fields, HRL Laboratories, LLC


Modeling for Process

Pete Zampardi, Skyworks Solutions, Inc.

10:45 AM BREAK


Electronic Design Automation (EDA)

Tutorial: FET/pHEMT Modeling and

Characterization

Paul Litzenberg, TriQuint Semiconductor

12:00 PM WORKSHOP LUNCH

(CS MANTECH & ROCS)

1:00 PM Workshop Session 4

RF and Low Noise Measurements for III-

V Devices

Marcel Tutt, Freescale


Passive and EM Simulations

Michael Thompson, Agilent Technologies

3:00 PM BREAK


Compound Semiconductor Process

Technologies, Design Kits, and Volume

Production

Hongxiao Shao, Skyworks Solutions, Inc.

6:00 PM EXHIBITS RECEPTION


Monday, May 16

th

ROCS WORKSHOP

Chair: Peter Ersland, M/A-COM Technology

Solutions

7:00 AM ROCS Registration

- 8:30 AM

8:15 AM ROCS Workshop Sessions

- 4:45 PM

12:00 PM WORKSHOP LUNCH

(CS MANTECH & ROCS)

Tuesday, May17

th

8:00 AM Conference Opening

Yohei Otoki , Hitachi Cable

Conference Chair

8:10 AM 2010 Conference Best Paper Awards

Marty Brophy, Avago Technologies

8:20 AM Technical Program Highlights

Mariam Sadaka,

Soitec USA

Technical Program Chair

SESSION 1: PLENARY I - Si & GaAs SWITCHES

Chair: Mariam Sadaka, Soitec USA

8:30 AM Invited Presentation

1.1 Integration of E-Mode P-Channel

JFET into GaAs E/D-Mode JPHEMT

Technology for Multi-Band/Mode Antenna

Switch Application

Masahiro Mitsunaga, Shinichi Tamari, Yuji

Ibusuki and Mitsuhiro Nakamura

Sony Semiconductor


1.2 The Golden Age of Mobile Wireless

Dylan Kelly, Peregrine


1.3 Highly Resistive Substrate CMOS on

SOI for Wireless Front-End Applications

Randy Wolf

1

, Dawn Wang

2

, Alvin Joseph

1

,

Peter Rabbeni

2

, Alan Botula and Jim Dunn

1

,

1

IBM, VT,

2

1

,

IBM, MA

10:00 AM BREAK


SESSION 2: PLENARY II: HIGH FREQENCY

Chair:

DEVICES

Yohei Otoki, Hitachi Cable


2.1

The High

‐

Electron Mobility Transistor at 30: Impressive Accomplishments and

Exciting Prospects

Jesús A. del Alamo, MIT


2.2 THz Electronics: Transistors, TMICs, and High Power Amplifiers

John D. Albrecht, Defense Advanced

Research Projects Agency


2.3 Commercial GaN Devices for

Switching and Low ‐ Noise Applications

Raymond Pengelly, Scott Sheppard, Thomas

Smith, Bill Pribble, Simon Wood and Carl

Platis, Cree Inc.

12:00 PM EXHIBITS LUNCH

SESSION 3: PLENARY III: BUSINESS ANALYSIS

Chair: Alex Smith, Brewer Science, Inc.

1:30 PM 3.2 GaAs Industry Overview and

Forecast: 2009 – 2014

Eric Higham

1

and Asif Anwar

2

1

Strategy Analytics Inc, USA

2

Strategy Analytics Ltd., UK

2:00 PM Invited Presentation

3.3 Will GaN-on-Si displace Si and SiC in power electronics?

Dr. Philippe Roussel, Yole Développement


3.1 Mobile Device RF Front-End TAM

Analysis and Forecast

N. Quinn Bolton, Needham & Company,LLC

3:00 PM BREAK


SESSION 4: PLENARY IV: CS TECHNOLOGY’S

Chair:

ROLE IN 4G TERMINALS

Earl Lum, EJL Wireless Research LLC


4.1 RF Front End Component

Requirements for Mobile LTE Terminals

Kamaru Sahota, Qualcomm


4.2 3G/4G Requirements for Wireless

Systems and the Role GaAs, GaN and

Filter Devices will Play in Meeting These

Requirements

Otto Berger, TriQuint Semiconductor


4.3 From Epitaxy to Backside Process:

Reproducible AlGaN/GaN HEMT

Technology for Reliable and Rugged

Power Devices

W. Bronner, P. Waltereit, S. Müller, M.

Dammann, R. Kiefer, P. Dennler, F. van

Raay, M. Mußer, R. Quay, M. Mikulla, and

O. Ambacher, Fraunhofer Institute for

Applied Solid State Physics

5:10 PM EXHIBITORS FORUMS - Please refer to the posted placards in the exhibit area for forum participants and scheduled presentations.

5:10 PM STUDENT FORUM

7:00 PM INTERNATIONAL RECEPTION


Wednesday May 18

th

SESSION 5a: COMPOUND SEMICONDUCTORS IN

Chair:

INDIA

Yohei Otoki , Hitachi Cable


5a.1 Perspectives, Opportunities and

Future of Compound Semiconductor

Technologies in India

Dhrubes Biswas, Indian Institute of

Technology

SESSION 5b: COMPOUND SEMICONDUCTORS IN

Chair:

CHINA



5b.1 China’s Fast Growing Role in the

Future of Compound Semiconductor

Technology and Manufacturing

Morris Young, AXT, Inc.

SESSION 6a: PROCESS I-PLASMA PROCESSING

Chair: Russ Westerman, Plasma-Therm, LLC

8:40 AM 6a.1 Optimized PECVD Chamber Clean for Improved Film Deposition Capability

Ronald R. Hess, RFMD

9:00 AM 6a.2 Advanced Statistical Process Control of Critical PECVD SiNx Thin Films

D. Wolfe, F. Li, M. Chen, Y. Yang, D. Wang,

D. Hou and F. Monzon , Global

Communication Semiconductors, Inc

9:20 AM 6a.3 Dry Etch Induced Surface Damage and its Impacts on GaAs Schottky Diodes

Hong Shen, Peter Dai, and Ravi

Ramanathan, Skyworks Solution, Inc.

9:40 AM BREAK


SESSION 6b: GaN EPITAXY

Chair : Victoria Williams, CREE

Andy Souzis, II-VI Inc.

8:40 AM 6b.1 Study of AlGaN/GaN HEMT

Uniformity with Various Buffer and

Barrier Structures

Xiang Gao, Daniel Gorka, Songponn

Vatanapradit, Ming Pan, and Shiping Guo

IQE RF LLC

9:00 AM 6b.2 Development of III-Nitride HEMTs on CVD Diamond Substrates

F. Faili

1 , D.I. Babić 1

, D. Francis

1

, F.

Ejeckam

1

, J.D. Blevins

2

,

1

Group4 Labs, LLC

2

Air Force Research Laboratory

9:20 AM 6b.3 Rapid Characterization of Vertical

Threading Dislocations in GaN Using

Dedicated Scanning Transmission Electron

Microscopy

Chunzhi Jitty Gu, Mike Salmon, Jim Vitarelli

Evans Analytical Group

9:40 AM BREAK

SESSION 7a: PROCESS II - METALS

Chair: Travis Abshere, TriQuint Semiconductor

10:40 AM 7a.1 Plating Showerhead System for

Improved Backside Wafer Plating

Jens Riege, Heather Knoedler, Shiban Tiku,

Nercy Ebrahimi, Skyworks Solutions, Inc.

11:00 AM 7a.2 Overall Equipment Efficiency

Improvement for GaAs Fab Evaporators

Jesus Teran, Daniel Weaver, Heather

Knoedler, Lam Luu, Richard Bingle, Brian

Alvarez, Joshua Doria, David Holzman, Juan

Velasquez, Skyworks Solutions, Inc.

11:20 AM Student Presentation

7a.3 Type-II DHBTs Microwave

Characterization and Metallization Issues

Kuang-Yu (Donald) Cheng and Milton Feng

University of Illinois at Urbana-Champaign

11:40 AM 7a.4 Collector Contact Optimization in

GaAs HBT Manufacturing

Lam Luu-Henderson, Daniel Weaver,

Heather Knoedler, Shiban Tiku

Skyworks Solutions, Inc.


SESSION 7b: HIGH FREQUENCY GaN DEVICES

Chairs: David Meyer, Naval Research Lab



7b.1

High-Speed AlInN/GaN HEMTs on

SiC and (111) HR-Silicon

C.R. Bolognesi

1

, H.F. Sun

1

, S. Tirelli

1

, A.R.

Alt

1

, D. Marti

1

, H. Benedickter

1

J.-F Carlin

2

,

E. Feltin

2

, M. Gonschorek

2

, M. Py

2

, N.

Grandjean

2

,

1

Millimeter-Wave Electronics

Group, ETHZ,

2

Institute of Condensed

Matter Physics, EPFL


7b.2 Characterization of Coplanar

Waveguides on AlGaN/GaN HEMT on

Silicon Buffer Layers up to 110 GHz

Diego Marti

1

, Mathias Vetter

1

, Liang Liu

1

,

Andreas R. Alt

1

, Hansruedi Benedickter

1

, E.

Piner

2 and C. R. Bolognesi

Electronics Group, ETHZ,

1

,

2

1

Millimeter-Wave

Nitronex

Corporation (now at Texas State University

11:30 AM 7b.3 Performance of Strained

AlInN/AlN/GaN HEMTs with Si

3

N

4

and

Ultra-Thin Al

2

0

K.D. Chabak

3

Passivation

1

, D.E. Walker Jr.

1

, A. Crespo

1

,

M. Trejo

1

, M. Kossler

Gilbert

1

, B. Poling

1

, J.K. Gillespie

1

, G.D. Via

1

1

, R.

, J. Yang

2

, and

R. Gaska

2

,

1

Air Force Research Laboratory,

2

Sensor Electronic Technology

11:50 AM 7b.4 Effects of Via Layout on AlGaN/GaN

HEMTs at Ka-band

K. Matsushita, H. Sakurai, J. Shim, K.

Takagi, H. Kawasaki, Y. Takada, M. Hirose, and K. Tsuda, Toshiba Corp .

SESSION 8a: PROCESS III – LITHOGRAPHY/BCB

Chairs: Chris Youtsey, Microlink Devices

1:40 PM 8a.1 A New Method for Creating Sloped

Resist Profiles Using Mask Structures

Jens Riege, Samuel Mony, Nercy Ebrahimi

Skyworks Solutions, Inc .

2:00 PM 8a.2 Improved T-Gate Yield Using E-

Beam Trilayer Resist Process

Huatang Chen, Andrew Ketterson, Marcus

King, Keith Salzman, Vicki Milam, James

Halvorson, Jan Campbell, TriQuint

Semiconductor, TX


2:20 PM 8a.3 Optimization and Characterization of the Photo Definable BCB for HV3S and

HVHBT Technologies

Jerry Brown and Amy Zhou, TriQuint

Semiconductor, TX

2:40 PM 8a.4 Characterization of BCB

Planarization of Isolated and Dense

Features in a High-Topography HBT

Process

Tom Dungan, Avago Technologies

3:00 PM BREAK

SESSION 8b: SUBSTRATES

Chair: John Blevins, Air Force Research Lab


1:40 PM 8b.1 Considerations towards a Nitride

Semiconductor Substrate Roadmap

E. Preble, R. Metzger, T. Paskova, G.

Mulholland, N. Biswas, and K. Evans,

Kyma Technologies, Inc.

2:00 PM 8b.2 Challenges in AlN Crystal Growth and Prospects of the AlN-based

Technology

B. Moody

2

, S. Craft

2

, R. Schlesser

2

, R.

Dalmau

2

, J. Xie

1

, T. Rice

1

, J. Tweedy

1

, R.

Collazo

1

, Z. Sitar

1

1

North Carolina State University

2

HexaTech, Inc.,

2:20 PM 8b.3 Advances in SiC Substrates for

Power and Energy Applications

M.J. Loboda, G. Chung, E. Carlson, R.

Drachev, D. Hansen, E. Sanchez, J. Wan, J.

Zhang, Dow Corning Corporation

2:40 PM 8b.4 Development of a Manufacturing

Process for Large Diameter

Semi-Insulating Silicon Carbide Substrates

J.D. Blevins

2

, A.K. Gupta

1

, I. Zwieback

1

, E.

Emorhokpor

1

, A. Souzis

1

, T. Anderson

1

, C.

Avvisato

3

,

1

. II-VI Inc.,

2.

Air Force Research

Laboratory,

3.

Sparta dba Cobham Analytic

Solutions

3:00 PM BREAK


SESSION 9a: MANUFACTURING

Chair: Chuck Duncan , RF Micro Devices


9a:1 The Green Activity of Back Grinding

Process

Shinji Tsukino, Norio Sakaguchi, Seiji

Tsunematsu, Mitsuhiro Ooki, Osamu

Sakamoto, Sony Semiconductor

4:00 PM 9a.2 Shuffle Up and Deal: the Use of Wafer

Randomization as a Yield and Process

Analysis Tool

Albert Wang, Mark Urfer, Steve Shevenock

Avago Technologies

4:20 PM 9a.3 The Use of a Structured Approach to

Solve Yield Limiting Defects in a

Compound Semiconductor Factory

Jan Campbell, Qizhi He, Howie Yang,

Martin Ivie, John Gibbon, Darrel Lupo,

Dario Nappa, Jerry Beene, Mike McClure,

TriQuint Semiconductor,TX

4:40 PM 9a.4 Reducing Broken Thinned GaAs

Wafers During Backside Processing

Fadi Bahouth, RFMD

SESSION 9b: DEVICE TECHNOLOGY

Chair: Kamal Alavi, Raytheon

3:30 PM 9b.1 The Demonstration of

Enhancement/Depletion-Mode pHEMT

Technology with Optimized E-mode

Characteristics for Better Yield

Jhih-Han Du, Fu-Nung Chen, David Wu,

Kang-Lin Peng, Jeff Yeh

WIN Semiconductors Corp

3:50 PM 9b.2 6 Inch 0.1μm GaAs pHEMT

Technology for E/V Band Application

His-Tsung Lin, Chao-Hong Chen, Shih-Chun,

Lee, I-Te Cho,Wen-Kai Wang, and Shinichiro

Takatani, WIN Semiconductors Corp.

4:10 PM 9b.3 Role of Buffer Layers of High Power

GaAs MESFETs for Higher Output Power

Junichiro Takeda, Yohei Otoki, Tadayoshi

Tsuchiya, Takeshi Meguro, Yukio Sasaki,

Hitachi Cable


4:30 PM 9b.4 A Study of Implant Damage and

Isolation Properties in an InGaP HBT

Process

Alan Bratschun and Martin J. Brophy,

Avago Technologies

4:50 PM Student Presentation

9b.5 GaN/InGaN Heterojunction Bipolar

Transistors with Collector Current

Density > 20 kA/cm

2

Yun Zhang, Yi-Che Lee, Zachary Lochner,

Hee Jin Kim, Jae-Hyun Ryou, Russell D.

Dupuis, and Shyh-Chiang Shen

Georgia Institute of Technology

5:10 PM RUMP SESSION RECEPTION

6:00 PM RUMP SESSIONS

Chair:

Allen Hanson, M/A-COM Tech Solutions

These popular and often lively sessions offer a venue to voice your opinions and hear your colleagues call it like they see it in a less-formal and often entertaining way.

This year’s line-up of sessions is sure not to disappoint. In

Session A “Which Switch Technology Will Prevail?” attendees polish off their crystal balls and discuss the relative merits of existing and emerging RF switch technologies. In Session B - whether you are a technologist in fear of being out-sourced or a member of an organization touting your foundry services - “The Captive

Compound Semiconductor Fab – Endangered Species?” will surely be of interest and provide participants with an opportunity to weigh-in and share their thoughts, success stories, challenges and perhaps even identify a potential client or two. In Session C - while some critics have branded GaN a technology forever in search of an application, others see it as a true “game changer”. In

“Are There Real High Volume Applications for GaN?” opposing views square-off to debate the future of this emerging technology beyond mere figures of merit. And in Session D “Where Should CS MANTECH Be

Heading?” attendees will be offered a forum to discuss and perhaps shape the future of this conference – its focus, its structure and yes - even your preferred locations. Sure to beat filling out yet another questionnaire!

SESSION A: Which Switch Technology Will Prevail?

Moderator: Earl Lum, EJL Wireless Research

SESSION B: The Captive Compound Semiconductor

Fab – Endangered Species? Moderator: Allen Hanson ,

M/A-COM Tech Solutions


SESSION C: Are There Real High Volume

Applications for GaN? Moderator: Yohei Otoki, Hitachi-

Cable America

SESSION D : Where Should CS MANTECH be

Heading? Moderator: Marty Brophy, Avago Technologies

7:00 PM SEMI STANDARDS MEETING

Thursday May 19

th

SESSION 10a: EMERGING TECHNOLOGY

Chair: Chanh Nguyen, Teledyne Scientific

8:20AM Invited Presentation

10a.1 Advanced Semiconductor on

Insulator Substrates for Low Power and

High Performance Digital CMOS

Applications

Bich-Yen Nguyen, Mariam Sadaka, Nicolas

Daval, Walter Schwarzenbach, Cecile

Aulnette, Konstantin Bourdelle, Christophe

Maleville, Carlos Mazure

SOITEC


10a.2 The Best Material for the Function:

Seamless On-Wafer Integration of GaN and

Si Devices

Hyung-Seok Lee, Kevin Ryu, Jinwook Chung, and Tomás Palacios, MIT


10a.3 Engineered Substrates: alternative technologies using materials integration

M.S. Goorsky, M.Jackson, M. Joshi, C.

Ventosa, X. Lu, D. Fong, UCLA

9:35 AM 10a.4 Modular Solid State Technologies for a Multi-functional System Integration

Karlheinz Bock, University of Berlin

10:00 AM BREAK

SESSION 10b: SIMULATION/

CHARACTERIZATION

Chair: Jon Abrokwah, Avago Technologies

Sharon Woodruff, Northrop Grumman (ES)

8:20AM 10b.1 A Difference of Thermal Design between GaN and GaAs

Takuji Yamamura, Kazutaka Takagi

Toshiba Corporation



10b.2 Modeling of the Impact of Boundary

Conditions on AlGaN/GaN HEMT Self

Heating

M. Bernardoni. N. Delmonte, R. Menozzi,

University of Parma, Italy

9:00 AM 10b.3 Failure Modes and Effects Analysis of GaN Based Microwave Devices

A.Christou, University of Maryland

9:20 AM 10b. Investigation and Reduction of

Leakage Current associated with

Dielectric Gate Encapsulation in

AlGaN/GaN HFETs

S. A. Chevtchenko, P. Kurpas, N.

Chaturvedi, R. Lossy and J. Würfl

Ferdinand-Braun-Institut


10b.5 Impact Ionization in AlGaN/GaN

HEMTs with InGaN Back-barrier

Nicole Killat

Faqir

1

1 , Milan Ťapajna

, Tomas Palacios

2

1

, Mustapha

, and Martin Kuball

1

1

University of Bristol,

2

MIT

10:00AM BREAK

SESSION 11a: LED

Chair: Drew Hanser, SRI International

Shyh-Chiang Shen , Georgia Tech


11a.1 High Brightness LEDs:

Manufacturing and Applications

Andreas Weimar, Osram Opto

Semiconductor


11a.2 Optoelectronic Devices Grown on

Nonpolar and Semipolar Free-Standing

GaN Substrates

Daniel Feezell, James Speck, Steven

DenBaars, and Shuji Nakamura, UCSB

11:20 AM 11a.3 Characterizing Reverse-bias

Electroluminescence of InGaN/GaN LEDs

Hsiang Chen, Tien-Chang Lu,

Chuan-Haur Kao, National Chi Nan

University



11a.4 Investigation of Low-Temperature

Optical Characteristics of InGaN/GaN

Based Nanorod Light Emitting Arrays

Chun-Hsiang Chang, Liang-Yi Chen, Ying-

Yuan Huang, and JianJang Huang

National Taiwan University

12:00 PM LUNCH by CS MANTECH

SESSION 11b: RELIABILITY

Chair: Peter Ersland, M/A-COM Technology

Solutions

Chang-Hwang Hua, WIN Semiconductors

Corp .

10:30 AM 11b.1 Reliability Qualification Challenges of a pHEMT-HBT Hybrid Process

Dorothy June M. Hamada and William J.

Roesch, TriQuint Semiconductor Inc,.OR

10:50 AM 11b.2 Balancing Electrical and Thermal

Device Characteristics: Thru Wafer Vias vs. Backside Thermal Vias

Cristian Cismaru, Hal Banbrook, Hong Shen and Peter J. Zampardi, Skyworks Solutions

11:10 AM 11b.3The Study of Heterojunction Bipolar

Transistors for High Ruggedness

Performance

Szu-Ju Li, Cheng-Kuo Lin, Shu-Hsiao Tsai,

Bing-San Hong, Dennis William, and Yu-Chi

Wang, WIN Semiconductors Corp.


11b.

Evaluation of Existing GaAs MIM-

Capacitor Processes for Use with High-

Voltage GaN MMIC Technologies

Philipp Leber

1

, Marc Hollmer

1

, Dominik

Schrade-Köhn

1

, James Thorpe

2

, Reza

Behtash

2

, Hervé Blanck

2

, Hermann

Schumacher

1

,

1

University of Ulm

2

United Monolithic Semiconductors GmbH

12:00 PM LUNCH by CS MANTECH


SESSION 12a: FAB MANAGEMENT &

Chair:

TECHNOLOGY TRANSFER



12a.1 Relocation of Cobham’s MMIC

Wafer Fab

M. Drinkwine, J. Crites, Cobham

2:00 PM 12a.2 Successful Transfer of 12V PHEMT

Technology

Jason Fender

1

, Monica De Baca

1

, Jenn Hwa

Huang

1

, Monte Miller

1

, Jose Suarez

1

, Iris

Hsieh

2

, Y.C. Wang

2

,

1

Freescale

Semiconductor Inc.,

2

WIN Semiconductors

Corp.

2:20 PM 12a.3

Managing Process Diversity for Opto

Wafer Fabrication in a Photonics Foundry

S. Wang, P. Chen, J. Chen, D. Kumar, P.

Lao, J. Pepper, P. Tran, M. Chen, D. Hou, F.

Monzon, and D. Wang

Global Communication Semiconductors, Inc.

2:40 PM 12a.4 Waste Minimization, Pollution

Prevention and Resource Recovery at a

GaAs Manufacturer

Erich Burke, RFMD

SESSION 12b: POWER SWITCHES

Chair: Scott Sheppard, CREE


12b.1 SiC Power Devices - Lessons

Learned and Prospects After 10 Years of

Commercial Availability

Peter Friedrichs, SiCED Electronics

Development GmbH & Co.


12b.2

Which are the Future GaN Power

Devices for Automotive Applications,

Lateral Structures or Vertical Structures?

Tsutomu Uesugi and Tetsu Kachi

Toyota Central R&D Laboratories, Inc.


2:20 PM Student Presentation

12b.3

2.5-Ampere AlGaN/GaN HFETs on

Si Substrates with Breakdown Voltage >

1250V

Tsung-Ting Kao

1

, Cheng-Yin Wang

1

, and

Shyh-Chiang Shen

1

, Dev Alok Girdhar

2

, and

Francois Hebert

2

,

1

Georgia Institute of

Technology,

2

Intersil Corporation

2:40 PM 12b.4 Commercially Available Cree

Silicon Carbide Power Devices:

Historical Success of JBS Diodes and

Future Power Switch Prospects

Mrinal K. Das, Cree

SESSION 13: INTERACTIVE FORUM

Chairs: Thorsten Saeger, TriQuint Semiconductor

Thomas Roedle , NXP Semiconductors


3:00 PM - 13.1 Improving Corrosion

4:30 PM Resistance of Plasma Etch Reactors

Testing Anodize Coatings and Cleaning

Methods

K. Mackenzie, K. Pizzo, E. Scott

Plasma ‐ Therm

13.2 Atomic Level InP/Si Wafer-Scale

Direct Bonding in Low Temperature

Xuan Xiong Zhang

Zhuang

2

,

1,2

, Tian Chun Ye

1

, Songlin

1

Chinese Academy of Sciences, Beijing

2

University of Shanghai for Science and

Technology

13.3 Anisotropies of Nonpolar a-plane

GaN LEDs in Electrical and Optical

Properties

Soohwan Jang

1

, Kwang Hyeon Baik

2

, Sung-

Min Hwang

2

, S. J. Pearton

3

, and F. Ren

4

1

Dankook University, Korea,

2

Korea

Electronics Technology Institute,

3

Dept. of

Materials Sci &Eng, University of Florida,

Gainesville,

4

Dept. of Chem Eng., University of Florida, Gainesville


13.4 Thin Film Power Source Integrated with a-Si:H/a-SiGe:H Thin Film

MOSFETs on Flexible Substrates

T. Martin

3

, Aris Christou

1,3

, Martin

Peckerar

2

,

1

Dept. of Materials Sci & Eng.

2

Dept. Electrical Eng.,

3

Dept. of Mech Eng.

University of Maryland

13.5 Development of a Novel Small Pitch

Flip ‐ Chip Indium Bump Process for

Infrared Focal Plane Arrays

J. K. Markunas

1

, E. Schulte

1

, P.J. Smith

1

, and

J.W. Pattison

2

,

1

U. S. Army RDECOM,

CERDEC Night Vision,

2

U. S. Army Research

Laboratory

S

tudent Presentation

13.6 Self-aligned In

0.53

Ga

0.47

As /InP

Vertical Tunnel FET

Guangle Zhou

1

, Yeqing Lu

1

, Rui Li

1

, Qingmin

Liu

1

, Paul Pinsukanjana

2

, George Wang

2

,

Tom Kosel

1

, Mark Wistey

1

, Patrick Fay

1

,

Alan Seabaugh

1

, and Huili (Grace) Xing

1

,

1

University of Notre Dame,

2

IntelliEPI

13.7 Material Studies of GaN on Diamond

Sergey Zaitsev, Frank Lowe, Daniel Francis,

Firooz Faili, and Felix Ejeckam.

Group4 Labs, Inc.

13.8 Implementation of Value Added

Kaizens (VAK) in a GaAs Manufacturing

Facility

Jan Campbell, Rick Cobo, David Beene,

Jerry Beene, Joel Peterson

TriQuint Semiconductor, TX

Student Presentation

13.9 Characterizations of Low-

Temperature Electroluminescence from n-

ZnO Nanowire/p-GaN Light Emitting

Diodes

Tzu-Chun Lu

1

, Min-Yung Ke

1

, Sheng-Chieh

Yang

1

, Yun-Wei Cheng

1

, Liang-Yi Chen

1

,

Guan-Jhong Lin

1

, Yu-Hsin Lu

2

, Jr-Hau He

1

Hao-Chung Kuo

2

and JianJang Huang

1

,

1

National Taiwan University,

2

National

Chiao Tung University


13.10 Electron Radiation as an Indicator of

Gold Nodule Defect during E-beam

Evaporation

Kezia Cheng, Skyworks Solutions Inc.


13.11 The Effect of Interdigitated Layout

Design on the Improvement of Optical

Output and GHz Modulation Bandwidth of Tilted-Charge Light-Emitting Diodes

Mong-Kai Wu

1

, Chao-Hsin Wu

1

, Gabriel

Walter

2

, and Milton Feng

1

,

1

University of

Illinois,

2

Quantum Electro Opto Systems

13.12 An Introduction to the PETEC

Flexible Electronics Centre and Current

Technology Challenges

Mike Clausen, Bela Green, Martin

Walkinshaw, PETEC


13.13 TCAD Modeling and Simulation of a

Field Plated GaN MOSFET for High

Voltage Applications

K. Bothe

1

, M. Johnson

2

, D. Barlage

1

,

1

University of Alberta

2

University of North Carolina

13.14 Growth of GaN Layer for LED

Manufacturing: Investigations on Growth

Conditions using a “Hotwall” MOCVD

System

R.Schreiner

1

, B. Schineller

1

, D. Fahle

2

,

M.Heuken

1,2

, G.Strauch

1

1

AIXTRON,

2

Aachen University

13.15 Backside Processing Steps

Elimination and Cost Reduction by Multi

Beam Full Cut Laser Dicing

Rogier Evertsen, Rene Hendriks

ALSI

13.16 In-Situ Measurement of GaN

Surface Temperature, Effects of Changes in Carrier Gas and Satellite Rotation

Speed on Temperature Profiles

K. Haberland

1

, B. Henninger

1

, D. Brien

2

,

H. Silva

2

, M. Dauelsberg

2

, F. Brunner

3

, V.

Hoffmann

3

, M. Weyers

3

, R. Sarcia

1

1

LayTec GmbH,

2

Aixtron AG,

3

Ferdinand-

Braun-Institut



13.17 A Comprehensive Correlation between Lattice Strain and Quantum Well

Thickness of MBE Grown

AlGaAs/InGaAs/GaAs Pseudomorphic

HEMT with Device Performance for

Transconductance and Linearity

Partha Mukhopadhyay

1

, Palash Das

1

,

Saptarshi Pathak

1

, Edward Y. Chang

2 and Dhrubes Biswas

1

1

Indian Institute of Technology,

2

National

Chiao Tung University

4.30 PM CONFERENCE CLOSING RECEPTION


TECHNICAL SESSIONS

SESSION 1: PLENARY I - RF SWITCHES

Chair: Mariam Sadaka, Soitec USA

We live in an increasingly wireless world, filled with an ever expanding variety of smart phones, W-LANs,

WWANs, GPS, and a host of other wireless appliances.

Applications of RF technologies continue spreading into new systems like smart grids and e-books and even into entertainment systems and toys. At the core of these wireless systems are RF modules which are powered and enabled primarily by semiconductor devices. Front end module specifications have been made more complex with ongoing evolution of new Cellular standards and band frequencies. Multi-Mode and Multi-Band operation of PA modules is becoming a reality.

Switching and tunable output matching networks can play a pivotal role in this area. Performance requirements such as low insertion loss and high isolation, power handling, and linearity have historically motivated the selection of

GaAs. But recently, Silicon-on-sapphire (SOS) and high resistivity Silicon-on-Insulator (SOI) technologies have also been evaluated for RF switch applications.

This year’s plenary session addresses both Compound

Semiconductor and CMOS-based RF switches. Our first paper by Mitsuhiro Nakamura from Sony describes the integration of E-Mode P-Channel JFETs into their GaAs

E/D-Mode JPHEMT technology for multi-band/mode antenna switch applications. This technology enables fabrication of low power consumption GaAs logic circuits and low loss antenna switches on a single chip. Next paper by Dylan Kelly from Peregrine discusses the golden age of mobile wireless driven by the explosive growth of mobile wireless data traffic. He explains how UltraCMOS on

Silicon-on-sapphire (SOS) technology is addressing the challenges. The session concludes with Randy Wolf of

IBM describing a highly resistive substrate CMOS on SOI technology for wireless front-end applications, which shows a comparable performance to GaAs pHEMT and to

SOS technologies.


SESSION 2: PLENARY II - RF MODULES

Chair: Yohei Otoki, Hitachi Cable America

One of the strongest features of CS-devices is having high performance at GHz frequencies. This has greatly contributed to realizing the wireless mass information transfer era. This Session introduces the latest state of art devices with high frequency from GHz up to THz! First of all, Prof. Jesús A. del Alamo from MIT reviews the history and present topics on HEMTs (High Electron Mobility

Transistors), which is a historical invention of CS devices used to achieve new wireless systems with high frequency performance like satellite broadcast, cellular phones, etc.

30 years have passed after the first HEMT, and you will learn how it has progressed.

Then, development of very high frequency, over 1 THz, electronics - sub-millimeter wave devices - is presented by

John D. Albrecht of DARPA. These devices have incredibly high data resolution, leading to ultra-fine image sensors, radars, and higher speed communication in the near future. You will see the new “image” world. These devices generally use GaAs-,and InP-related materials, but innovations with wide bandgap materials like GaN have come up recently and are showing up in “fast and tough” devices. These devices have been used for the high power amplifiers, but now they are getting into new fields of switching and Low noise application. Raymond Pengelly of Cree, one of the leading companies for GaN devices, presents recent results of development. You will see an

“all GaN module” of Switch and LNA, used at GHz frequencies with very high power in commercial use.

SESSION 3: PLENARY III - BUSINESS ANALYSIS

Chair: Alex Smith, Brewer Science, Inc.

Do you know anyone that does not have some type of mobile device? We are in an amazing industry with products that are changing the world. This session includes three excellent speakers to address a variety of topics of the Compound Semiconductor industry. Eric

Higham of Strategic Analytics will provide an overview of the GaAs Industry from 2009-2014. His paper discusses the history, future drivers, market share leaders, and the competitive threats to GaAs. A question that many in the industry are asking is whether GaN on Silicon will displace

Silicon and SiC in power electronics. Dr. Philippe Rousel from Yole Development will provide his company’s insight on this question and talk about the GaN market in the next four years. The final talk in the session by Quinn

Bolton of Needham & Company, will give a run down on front-end TAM analysis and forecast for the mobile RF devices as driven by the demand for data services.


SESSION4: PLENARY IV - CS TECHNOLOGY’S

ROLE IN 4G TERMINALS

Chair: Earl Lum, EJL Wireless Research LLC

While smartphones such as the Apple iPhone and

Motorola’s DROID are changing mobile social behavior, they have been successful due to the reliance on mobile broadband data connections via 3G technologies such as

WCDMA/HSPA and EVDO Rev. A in providing access to the Internet. 3G technologies today can offer downlink data rates up to 42Mbps. Next generation 4G LTE technology promises downlink data rates up to 100Mbps and beyond.

Compound semiconductors such as GaAs have played a pivotal role in the transmit and receive functions of mobile data modem devices as well as mobile phones. Two of the invited papers in this session (from TriQuint

Semiconductor and Qualcomm) focus specifically on the component requirements of 4G LTE terminals including the power amplifier, the LNA receiver as well as switching functions and filters in the front end.

Each generation of wireless technology pushes the envelope for performance in terms of linearity, and RF power output as well as the continuous need for better and better efficiencies. Will GaAs be able to support 4G LTE terminals or will another compound semiconductor technology be required?

The final paper in this session will focus on a complete end to end GaN/SiC HEMT MOCVD process technology solution developed by the Fraunhofer Institute for power devices up to 20GHz.

SESSION 5a: COMPOUND SEMICONDUCTORS IN

INDIA

Chair: Yohei Otoki, Hitachi Cable

This session includes one talk by professor Dhrubes

Biswas from the Department of Electronics and Electrical

Communication Engineering, and Rajendra Mishra School of Engineering Entrepreneurship at the Indian Institute of

Technology. The presentation will cover the perspectives, opportunities, and future of compound semiconductor technologies in India.


SESSION 5b: COMPOUND SEMICONDUCTORS IN

Chair:

CHINA


This session includes one talk by Dr. Morris Young, CEO of AXT, Inc. Dr. Young will talk about China’s fast growing role in the future of compound semiconductor technology and manufacturing. The presentation will focus on the key activities supporting the growth, such as contributions of the private and public sectors and the role played by technical institutions and universities.

Furthermore, different segments and geographic distribution of the compound semiconductor industry in

China will be reviewed along with some details of the growth projections for the coming 5 years.

SESSION 6a: PROCESS I –PLASMA PROCESSING

Chairs : Russ Westerman, Plasma-Therm, LLC

Papers in this section focus on improving the manufacturing performance of plasma deposition and etch processes used in compound semiconductor manufacturing. The first paper of the session by RF Micro

Devices discusses optimization of an in-situ clean used in conjunction with a plasma enhanced chemical vapor deposition (PECVD) process. Recipe changes applied to the in-situ clean process improved both tool up time as well as stabilizing wafer deposition uniformities between cleans. The second paper in the session from Global

Communication Semiconductors also looks at improvements to a PECVD process. This paper correlates

PECVD silicon nitride (SiN) film properties to metalinsulator-metal (MIM) capacitor performance. The paper also discusses improvements that more than doubled the process capability (Cpk) of the deposition. The last paper of the session, by Skyworks Solutions, examines damage mechanisms from plasma etching thin films on gallium arsenide (GaAs). The Skyworks work uses electrical measurements of a Schottky diode structure to explore the damage responses of typical plasma recipe parameters.

The paper also examines post-process approaches that can be used to mitigate plasma induced damage downstream of the etch.

SESSION 6b: GaN Epi

Chairs: Victoria Williams, CREE

Andy Souzis, II-VI Inc.

The GaN epi session will present a selection of papers addressing different challenges within GaN epi technology. The first paper by Guo, et. al from IQE RF

LLC will describe a study of AlGaN/GaN HEMT uniformity using different buffer and barrier layer


structures. The effects of two different types of back barrier layers, AlGaN and InGaN, as well as different substrate sizes, substrate polytypes, and barrier/cap structures deposited after the 2DEG, will be described as part of this study. The second paper, contributed by Faili, et. al from Group4 Labs, LLC and Air Force Research

Laboratory will present results from the fabrication of GaN on diamond HEMTs by transfer and bonding of an

AlGaN/GaN epitaxial layer on a CVD diamond substrate.

Diamond substrates are predicted to improve heat spreading in the gate region, increasing the potential for

GaN to reach its performance limits. Progress and technological challenges of this technology will be discussed in detail. The third paper, by Gu, et. al. of Evans

Analytical Group, concludes the session with a description of a method for rapid characterization of vertical threading dislocations in GaN. Scanning transmission electron microscopy (STEM) was used to reduce the complexity of this type of analysis and to identify the type and density of the dislocations.

SESSION 7a: PROCESS II - METAL

Chair: Travis Abshere, TriQuint Semiconductor

It seems that every year the diversity in topics, materials, and technologies presented at CS MANTECH grows.

However, it is heartening to see that the emphasis on manufacturing technology continues to be supported both within CS MANTECH and by the quality of papers submitted by the industry. As in years past Skyworks

Solutions has a strong showing in the Metals session, starting off with a study of backside wafer plating uniformity improvements from optimization of the anode design. The work was part of a 4” to 6” conversion, but the combined optimization of equipment and process involved in scaling up this technology provides excellent material to anyone interested in improved electroplating.

The second paper moves us over to evaporated metals with an emphasis on applying a broad based group of improvement techniques to increase both tool availability and product yields. The concepts of continuous process improvement and the value of cross functional improvement teams are clear winners in this effort to relieve pressure on a capacity limited toolset. The third paper is one of the excellent student papers submitted this year. From the University of Illinois (Urbana-Champaign) we have a topic that explores the complexity associated with clearing the area beneath an air bridge when dealing with the multiple epitaxial layers of an HBT. Our fourth and final paper continues with HBTs but brings us back to

Skyworks Solutions in an exploration of Collector contact optimization. This paper brings home one of the fundamental realities of compound semiconductor


manufacturing today – our industry is maturing and the low hanging fruit of the past is being replaced by incremental improvements with contributions from suppliers, materials, and improved understanding of the interactions between process steps.

SESSION 7b: HIGH-FREQUENCY GaN DEVICES

Chairs: David Meyer, Naval Research Lab


In recent years, there has been an increasing interest in developing GaN transistor technology for millimeter-wave applications such as monolithic microwave integrated circuits (MMICs). In order to achieve the high operating frequencies necessary for millimeter-wave amplification, novel device designs with laterally and vertically-scaled geometric dimensions are currently being investigated on a variety of substrates. Potentially offering the most financially viable solution, devices fabricated out of heterostructures grown on low-cost silicon substrates have begun to demonstrate performance metrics that rival transistors made on traditional substrates. This session contains reports on GaN high electron mobility transistors

(HEMTs) that operate at frequencies above 30 GHz. We start with an invited talk by Prof. Colombo Bolognesi, chair of the Millimeter-Wave Electronics Group at the

Swiss Federal Institute of Technology (ETH) in Zurich.

Prof. Bolognesi will survey recent results for latticematched AlInN/GaN HEMTs that enable the very thin barrier layers required for <100-nm gate lengths. These devices have demonstrated the highest bandwidths yet attained for nitride transistors, with f

T

= 205 GHz on SiC substrates and 143 GHz on high-resistivity (HR) silicon substrates. Prof. Bolognesi will compare this performance with results achieved for recessed-gate AlGaN/GaN

HEMTs on HR-Si substrates. This will be immediately followed by a paper from the same group covering the RF characterization of coplanar waveguides (CPWs) on

AlGaN/GaN heterostructures on HR-silicon substrates, at frequencies up to 110 GHz. The characterization shows that CPW’s on GaN/Si exhibit performance comparable to those on semi-insulating GaAs or InP, clearly demonstrating the suitability of GaN/Si technology for mm-wave MMIC applications. The next paper in this session, contributed by Chabak and co-workers from the

Air Force Research Laboratory and Sensor Electronic

Technology, will showcase electrical results from a study investigating submicron T-gate AlInN/AlN/GaN HEMTs on SiC. By using a 6 nm-thick, strained (15% In fraction)

AlInN barrier, Chabak et al .

were able to demonstrate devices with high f

T

-L

G

product and low access resistance.

This presentation will discuss the effects of post-gate passivation with PECVD Si

3

N

4

and ALD-deposited Al

2

O

3


on the small- and large-signal properties of this novel device. The last paper in this session will be presented by

Matsushita and co-workers from Toshiba Corporation and will discuss the effects of via layout on parasitic source inductance and frequency performance of GaN HEMT devices. Matsushita will also discuss Ka-band load-pull measurements of a four via-hole configuration that has produced saturated output power of 32.6 dBm (4.5W/mm), linear gain of 7.3 dB, and PAE of 41%.

SESSION 8a: PROCESS III- LITHOGRAPHY/BCB

Chairs: Chris Yousey, MicroLink Devices, Inc

Presentations in this section, from several leading GaAs IC manufacturers, describe a range of practical challenges associated with device lithography, planarization and the novel solutions that were developed to improve process yield and robustness.

The first paper of the session from Skyworks Solutions presents a new method to create sloped resist profiles by exposing with patterns that incorporate microstructures below the stepper optical resolution limit. This enables partial exposure of the resist around the designed features and localized control over the development rate. Sloped resist profiles are an important method in device fabrication to minimize abrupt step height changes. This presentation discusses the advantages of the new technique compared with conventional approaches such as thermal reflow or exposure defocusing.

The following paper from TriQuint Semiconductor presents a new trilayer resist electron beam lithography process used to form T-gates for GaAs pHEMT devices.

The new process improves process yield by reducing metal liftoff “stringer” defects encountered when using the conventional bilayer resist. Cross-sectional FIB-SEM images clarify the mechanism for defect formation, and

DC and final visual yield data validate the process improvements.

Next TriQuint Semiconductor presents a critical process issue encountered when using photo-definable BCB to encapsulate HBT and pHEMT GaAs MMIC circuits.

Intermittent wrinkling of the BCB dielectric was solved through a DOE that clarified proper exposure, development and baking parameters.

The final paper from Avago Technologies discusses the challenges of using BCB to planarize over topologies with widely varying pattern density. Local variations in BCB thickness can lead to shorts as well as incomplete metal via formation. Optical profiler measurements of BCB film


thickness over a complex circuit structure are compared with predictions from a model that is incorporated into a design-rule checker. Electrical test structures are also described that are used to characterize the process limitations.

SESSION 8b: SUBSTRATES

Chairs: John Blevins, Air Force Research Lab


This session reviews recent progress in the development of wide bandgap substrates for high power RF amplification, power switching and light emitting diodes. Kyma will provide a comparison of many wide bandgap materials, both bulk and template, for nitride device applications, particularly LEDs. Hexatech will explore recent technological advances associated with bulk AlN growth and device fabrication. Dow Corning will highlight advances in scaling and quality improvement for their

100mm 4H-SiC substrates. The last paper of the session describes the success of the II-VI / Air Force Research

Laboratory / Missile Defense Agency joint initiative.

Improvements in 6H-SiC diameter, crystal quality, and producibility will be discussed.

SESSION 9a: MANUFACTURING

Chair: Chuck Duncan, RF Micro Devices

Compound semiconductors offer nearly limitless structural and elemental combinations which often create competitive advantage over existing scaled solutions. Although these advantages can create significant market opportunities, companies must be able to demonstrate capable manufacturing solutions with an eye toward continuous improvement in cycle time, performance, yield and cost.

Increased circuit complexity and integration demand improvements in basic manufacturing capabilities just to maintain historic yields. Manufacturing improvements are keys to the continued growth and sustainability of our industry and allow companies to maintain or even increase their competitive advantage once performance gaps begin to close.

This session includes a presentation on the reduction of manufacturing waste and environmental impact as well as three papers highlighting yield improvement solutions and techniques. The first presentation in the session highlights efforts at Sony Semiconductor Kyushu Corporation to reduce the waste and by-products associated with their wafer grinding process and to reduce the environmental impact of the GaAs grinding activities. The presentation will outline efforts to reuse waste water from the grinding process reducing demands on the factory high purity water


systems. It will also address efforts to reduce consumable components in the grinding equipment. In our second presentation from Avago Technologies, the presenter will outline strategies for the use of wafer randomizers to trouble shoot wafer yield issues. Borrowing from techniques implemented in high volume silicon manufacturing, wafer randomization techniques in use at

Avago help identify trends within single lots or lot to lot.

They also outline methods for identifying concerns in multi-chamber tools. Representatives of TriQuint

Semiconductor manufacturing facility will present an overview of techniques employed to reduce yield loss in their production process. While their resulting yield improvements are significant, the methodologies and problem solving approaches outlined are equally valuable as they demonstrate a solid framework and foundation for most any yield improvement effort. In the final presentation of the session, RFMD will describe efforts to reduce wafers broken during the backside processing of thinned wafers. Numerous process variables were explored to understand their impact on wafer breakage in a team investigation and problem solving environment.

SESSION 9b: DEVICE TECHNOLOGY

Chair: Kamal Alavi, Raytheon

The device technology session has four regular papers and one student paper, all having practical and relevant information for device engineers. The first paper, from

WIN semiconductor, discusses how to compensate for natural variations in an epitaxial layer structure through utilizing gate metal sinking in an E/D mode pHEMT process and thus achieve better consistency of pinchoff voltage of the EFETs. The second paper, also from WIN, details a 0.1 um pHEMT foundry process on 6” wafer for

V band applications. The process features Imax of 720 mA/mm, Vp of -0.9 V, fT of 135 GHz, Pmax of 850 mW/mm at Vdd=4 V, gain of 8-9 dB at 70-90 GHz, and

Fmin of 0.8 dB at 40 GHz. The third paper, from Hitachi

Cable, shows the methodology used to optimize buffer layer structure of high power MESFETs used in power amplifiers. The fourth paper, from Avago Technologies, details the optimization of Boron isolation implant doses and energies for a GaAs HBT device so that low junction leakage and high isolation resistance are achieved simultaneously. The last paper is a student paper from

Georgia Tech. It shows exciting device results for a GaN

HBT process. Collector current density of 19.8 kA/cm2 is achieved with a BVceo of 110V and knee voltage of <

2.1V.


SESSION 10a: EMERGING TECHNOLOGIES

Chair : Chanh Nguyen, Teledyne Scientific

The common theme of this session is “Beyond CMOS” or

“More-than-Moore”. We have four presentations describing novel approaches to extend performance and functionality over and above the traditional scaling of Si

CMOS by incorporating compound semiconductors. The invited paper from SOITEC reviews the latest developments in substrate engineering to integrate III-

V/Ge on Si, device architecture and challenges of this heterogeneous integration on the CMOS platform.

Integration of GaN and Si to form a hybrid wafer by wafer bonding technology is the subject of the invited paper from

MIT. Devices, circuits, and systems exploiting GaN/Si hybrid wafers will be discussed. The next invited paper from UCLA presents two alternative approaches to substrate engineering for compound semiconductor applications: the transfer of III-V templates and porous semiconductors for epi growth and device layer transfer.

The last presentation from University of Berlin discusses the integration of different technologies from the perspective of modular multi-functional technology development.

SESSION 10b: SIMULATION AND

Chair:

CHARACTERIZATION

Jon Abrokwah, Avago Technologies

Sharon Woodruff, Northrop Grumman (ES)

This session features five papers describing simulation and characterization research on GaN devices. The first paper by Takuji Yamamura and Kazutaka Takagi of Toshiba

Corporation reports on the difference in thermal design of

GaN and GaAs FETs. Simulations and measurements show that while GaAs device thermal resistance depends on total gate geometry, pitch and substrate thickness, GaN

FETs fabricated on SiC have much less dependence, due to the 6X greater thermal conductivity of SiC compared to

GaAs. Thermal resistance of AlGaN/GaN HEMTS depends mostly on die size.

The second paper by M Bernardino et al. of University of

Parma, Italy discusses modeling of the impact of boundary conditions on AlGaN/GaN HEMT self-heating. The effects include die-attach, finite backside heat-sinking, thermal boundaries between GaN and SiC and the thermal boundaries of the top metallization.

After that A. Christou of University of Maryland describes using FMEA (Failure Modes and Analysis), to review the primary failure modes of GaN based microwave devices, indicating that trapping is the dominant mechanism for


device degradation and failure. They discuss effects of piezoelectric charges, tensile strain, and defect formation.

In addition, models to predict electrical behavior, such as current collapse, power soak, DC and RF degradation are discussed. Next by S. A. Chevtchenko et al, of Ferdinand-

Braun-Institute, Germany, discuss their investigation and reduction of gate leakage in AlGaN/GaN HFETs through optimization of the process of the first and second SiN passivation dielectric to reduce stress.

Finally, N. Killat et al. of University of Bristol and MIT present a lucid description of electroluminescence capacitance measurements and simulation to show impact ionization phenomenon in InGaN/GaN HEMTs.

SESSION 11a: LED

Chair: Drew Hanser, SRI International

Shyh-Chiang Shen, Georgia Tech

This session will start with an invited presentation describing the manufacturing and applications of the highbrightness InGaN and AlInGaP light-emitting diodes

(LEDs) by Osram Opto Semiconductors. This presentation will provide an overview of these technologies and discuss key challenges of low-cost manufacturing. Another invited talk will follow with a focus on optoelectronic devices grown on nonpolar and semipolar free-standing (FS) GaN substrates. In this talk, researchers from the University of

California at Santa-Barbara will present a summary of material and device developments for laser diodes and

LEDs on several orientations of non-polar and semipolar free-standing GaN. In the second half of the session, a paper concerning the characterization of reverse-biased electroluminescence of InGaN/GaN LEDs and a student paper on InGaN/GaN nano-rod LEDs using a top-down etching processes will be presented.

SESSION 11b: RELIABILITY

Chair: Peter Ersland, M/A-COM Technology Solutions

Chang-Hwang Hua, WIN Semiconductors Corp

This year’s reliability session includes papers on both active and passive circuit elements, with relevance to both high volume consumer applications, and leading edge high voltage technologies. Our first paper discusses approaches for the reliability qualification of a Bi-HEMT process at

TriQuint. Since the failure mechanisms for HBTs and pHEMTs may be quite different, qualifying a technology that incorporates both device types requires careful planning and development of structures to investigate not only each device type individually, but the interaction of


these two process technologies on a single wafer. The authors review the wafer scale reliability tests performed, and describe the results of these tests. Our second paper addresses a topic of importance to both reliability and design engineers – thermal performance. A variety of design and process options are investigated by these authors from Skyworks, including different top side metal thicknesses, the location of both through wafer vias and backside thermal vias, and various materials choices.

Tradeoffs are described between optimizing thermal performance and minimizing parasitic capacitance for these devices. The third paper in this session describes work performed at WIN Semiconductor to assess the impact of collector design and layout on HBT ruggedness.

The authors’ results show not only the impact of these factors on Safe Operating Area (SOA), but on device electrical performance as well, and indicate the importance of characterizing SOA on large transistor cells. Our fourth and final paper addresses the effect of layout, dielectric thickness, and the nitride deposition process on capacitor reliability, particularly for use in GaN MMICs. The authors from the University of Ulm and United Monolithic

Semiconductors (UMS) present ramped voltage reliability test results that indicate a significant difference in the predicted life time of the three different nitride deposition processes assessed in this study.

SESSION 12a: FAB MANAGEMENT &

Chair:

TECHNOLOGY TRANSFER


This year the fab manufacturing and technology session will have two papers that focus on process transfers and two papers that discuss factory management. The session will begin with an invited talk from Cobham Sensor

Systems in which they discuss the unenviable task of shutting down and physically relocating their entire MMIC wafer fab operation. How they managed to go from shut down to resuming production in a mere eight months you’ll have to attend the talk to find out. The second talk in the session is from Freescale Semiconductor (in partnership with WIN Semiconductor), where they will discuss the methodology they used and the challenges encountered transferring their 12V PHEMT technology from their internal fab to WIN Semiconductor’s foundry service. In the third paper of the session, we will learn from the experiences of GCS concerning how they have successfully managed to run optoelectronic devices on a qualified RFIC manufacturing line. One of the more interesting challenges they solved is how they managed to run a single line with multiple wafer sizes. Last year’s plenary session included talks on “green” manufacturing.


It’s only fitting that we continue this trend this year. In the session’s last talk, RFMD discusses the results of a several green initiatives. These include reclaiming precious metals, recycling or reclaiming solvents as well as reducing the use of ultra pure water.

SESSION 12b: POWER SWITCHES

Chair: Scott Sheppard, CREE

The Power Switch session contains two invited, one student and one regular paper. Each paper addresses different aspects of the use of wide bandgap compound semiconductors for high-power devices. The session begins with an invited paper. Peter Friedrichs of SiCED

Electronics Development gives a survey on SiC power device development and prospects of commercialization over the past 10 years. The second paper will be a student presentation by Tsung-Ting Kao of Georgia Tech who reports the high voltage device performance of

AlGaN/GaN Heterojunction Field Effect Transistors

(HFETs) grown on Si substrates with low specific onresistance and high breakdown voltage. Next in an invited talk, Tsutomu Uesugi of Toyota central R&D Laboratories,

Inc. will compare the lateral structures and the vertical structures of the GaN on Si power devices and discuss their application to future power devices. Finally, Mrinal Das of

Cree, Inc. gives a very comprehensive overview of commercially available silicon carbide power devices. It will include a treatise on SiC JBS diodes and future power switching commercial devices in SiC.

SESSION 13: INTERACTIVE FORUM

Chairs: Thorsten Saeger, TriQuint Semiconductor

Thomas Roedle , NXP Semiconductors


Following the tradition initiated in 1994, the Interactive

Forum is a session devoted to promoting the open exchange of ideas and information. This session allows for discussions and face-to-face meetings between the authors and conference attendees. During the Interactive Forum, all authors of presented papers will be available to answer questions and further discuss their technical results. All your questions you did not dare or manage to ask during the oral sessions can now be discussed with the authors in an informal setting.

In addition, this Forum will be the only time at the conference where papers that have been selected for the


Interactive Forum only will be displayed. These papers demonstrate in a beautiful way the true nature of CS

MANTECH as the integrative conference in compound semiconductors: participants from industry and academia; from Asia, Europe and North America; presenting their valuable results generated from a broad range of compound semiconductor materials as InP, GaN, GaAs, SiGe, SiC and Diamond. Topics as diverse as optics, microelectronics and equipment-engineering are covered from an experimental as well as simulation viewpoint. In short: CS

MANTECH at its best!

Attendees of the Interactive Forum will vote for the best poster, and the winning author will receive the Best Poster

Award in form of a mini LED projector.

The 2011 International Conference on Compound

Semiconductor MANufacturing TECHnology cordially invites all attendees to visit this session, enjoy the refreshments, and meet your colleagues!


Special Thanks to our 2010 Exhibitors

Accel-RF Corporation

AIXTRON

AXT, Inc.

Balazs NanoAnalysis

Brewer Science

Bridgestone Corporation

China Crystal Technologies

Compound Semiconductor

Compugraphics International Ltd

COREwafer

Cree, Inc.

EpiWorks

EVATEC NA

Freiberger Compound Materials USA, Inc

Furukawa Denshi Co.Ltd.

Hitachi Cable Ltd.

II-VI : Wide Bandgap Materials

INNOViON Corporation

Insaco, Inc.

Intelligent Epitaxy Technology Inc.

IQE

KITEC/Neves-AxR

KLA Tencor

Kopin

Lehighton Electronics, Inc.

LINTEC OF AMERICA, INC.

MAX I. E. G. LLC

Metryx

MicroChem Corp.

Momentive Performance Materials

Nanometrics

NTT Advanced Technology Corp.

OPC Lasers LLC

Picogiga Inc.


Reedholm Instruments

RFMD

SAFC Hitech

SAMCO International Inc.

Semiconductor Today

Sinmat Inc.

Site Services, Inc.

Solid State Equipment Corporation

SPP Process Technology Systems

StratEdge Corporation

Sumika Electronic Materials

Temescal

Vacuum Engineering & Materials Co., Inc.

Visual Photonics Epitaxy Co.

Wafer World Inc. / Epak Inc.

Williams Advanced Materials

Yole Développment


GENERAL INFORMATION

2011 International Conference on Compound

Semiconductor Manufacturing Technology

May 16 th

– May 19 th

, 2011

Hyatt Grand Champions Resort, Villas & Spa

44-600 Indian Wells Lane

Indian Wells, CA 92210

REGISTRATION INFORMATION (US$)

Full Conference Registration

Student Conference Registration

On or before Apr. 21 After Apr 21

$550.00

$125.00

$650.00

$125.00

Government Conference Registration $550.00

One-Day Conference Registration $300.00

** New Low Price **

Workshop Registration $175.00

Government Workshop Registration $175.00

$550.00

$300.00

$275.00

$175.00

Payment of the full, student, or government conference registration fee includes one copy of the printed

Conference Digest (if desired), one copy of the Conference

Digest on a USB memory stick, and admission to all sessions and the exhibits. It also includes the International

Reception, Exhibits Reception, Exhibits Luncheon, Rump

Session Reception, Interactive Forum Reception, continental breakfasts, and refreshment breaks. Additional copies of the Conference Digest may be purchased at

$140.00 each. Additional copies of the Conference Digest on a USB memory stick may be purchased for $50.00 each.

The one-day registration includes admission to all sessions for that day, admission to the Exhibits Hall, buffet breakfast, break refreshments, and lunch. The Rump

Session Reception or Interactive Forum Reception is included on Wednesday and Thursday, respectively. It also includes a printed Conference Digest and a

Conference Digest on a USB memory stick. The one-day registration does not include admission to the International

Reception. The one-day option can be taken only once during the conference.

Payment of workshop registration includes one copy of the

Workshop Digest, continental breakfast, Workshop

Luncheon and break refreshments. Additional copies of the Workshop Notes may be purchased at $100.00.

Registrants may pay by check, money order, bank draft or credit card. Make checks payable in U.S. dollars drawn on a U.S bank to: “GaAs MANTECH, Inc.” Your name and address must appear on checks, money order or bank drafts. The only acceptable credit cards are Master Card,

VISA, and American Express. REGISTRATION FORMS


SENT WITHOUT PAYMENT WILL NOT BE

ACCEPTED. All refund requests must be received by

Chris Santana at the CS MANTECH office shown below by April 20 th

for a full refund less a $25 processing fee.

NO REFUNDS AFTER APRIL 21, 2011.

CS MANTECH

14525 SW Millikan Way #26585

Beaverton, Oregon 97005-2343

For Advanced Conference Registration, register online at our Web Site by April 21 st

. www.csmantech.org

HOTEL RESERVATIONS

A block of rooms at the Hyatt Grand Champions Resort

Villas and Spa in Indian Wells, California has been reserved for CS MANTECH participants and their guests.

The special CS MANTECH room rate is $170.00 for single or double occupancy. Occupancy taxes (currently 11.25%) will be added to these rates. Resort and parking fees have been waived for all guests. Price includes free in room internet.

To make a hotel reservation, please register online through our website at: www.csmantech.org

Or Reservations can be made by calling: 1-888-421-1442 within North America. Please be sure to mention you are a

CS MANTECH attendee.

We ask you to please support CS MANTECH and to enjoy all of the conference activities by staying at our official 2011 location, the Hyatt Grand Champions

Resort. Resort and parking fees have been waived for all guests. Price includes free in room internet.

Hotel reservations must be received BEFORE Tuesday,

April 21, 2011 to qualify for a discounted rate room in the CS MANTECH room block.

The discounted rate is subject to availability, so please MAKE YOUR

RESERVATION EARLY! An advance deposit or credit card is required to hold your room.

Reservations received after Thursday, April 21, 2011 will be accepted on a space- and rate-availability basis.

If the room block fills prior to the cut off date, reservations will be accepted based on space and rate availability, so RESERVE EARLY!


CONFERENCE REGISTRATION & INFO

CENTER

Conference registration will open in the Conference Center

East Foyer Registration Desk 3 of the Hyatt Grand

Champions Resort on Sunday night and will be open

Monday through Thursday during the following hours:

Sunday

Monday

May 15 th

5:00PM – 8:00PM

May 16 th

7:00AM – 7:00PM

Tuesday May 17 th

7:00AM – 5:00PM

Wednesday May 18 th

7:00AM – 5:00PM

Thursday May 19 th

7:00AM – 9:30AM

A Conference Attendee list will be available at the

Information Center on Thursday, May 19 th

.

MESSAGE BOARD

A Conference Message Board will be maintained at the

Registration & Information Center during registration hours. Please advise callers who wish to reach you during the day to ask the hotel operator to deliver a message to the

CS MANTECH Conference Registration Desk. Please check the message board periodically.

THE CONFERENCE HOTEL

Hyatt Grand Champions Resort, Villas and Spa

44-600 Indian Wells Lane

Indian Wells, California 92210

Room Reservations: 1-888-421-1442 North America

Room Reservations Website for group rate: https://resweb.passkey.com/Resweb.do?mode=welcome_ei

_new&eventID=3155112 or click on the hotel link at www.csmantech.org

.

General Information: 760-341-1000

General Fax: 760-568-2236

The 2011 CS MANTECH Conference will be held at the

Hyatt Grand Champions Resort, Villas and Spa in Indian

Wells, California (greater Palm Springs). Known throughout the world for its special brand of relaxation, style, and sophistication, Palm Springs has been a destination of choice for celebrities, movie executives, and world leaders ever since the 1920s. Palm Springs is a blend of relaxation and excitement. In the Palm

Springs area you can do it all or nothing at all. Sit by the pool and enjoy the sunshine or hike the trails of Indian

Canyons where the footsteps of the past left an indelible


impression. Golf, tennis, sunning, hiking, biking, and swimming top the list of leisure activities in Palm

Springs, and these blend easily with the abundance and variety of shopping, museums, restaurants, spas and casinos.

Indulge yourself, and surrender to luxury at Hyatt Grand

Champions Resort, Villas and Spa. A 45-acre oasis of lush gardens and shimmering fountains awaits you.

Discover the impeccable service and amenities of our elegant yet family-friendly Palm Springs resort. Relax in the award-winning spa, play a round of championship golf or swim in one of seven inviting pools. Get your exercise on our pro hard surface tennis courts or play

Badminton. Truly inspired menus make dining a decided pleasure.

For more detailed information on the Hyatt Grand

Champions Resort, visit http://grandchampions.hyatt.com/hyatt/hotels/index.jsp

For more information on Palm Springs activities, visit http://visitpalmsprings.com

TRANSPORTATION TO THE HOTEL

Palm Springs Airport- PSP (15miles)

Turn left on El Cielo Rd.. Turn left on Ramon until you reach Interstate 10 traveling East. Turn right on

Cook Street. Turn Left on Hwy 111. Turn Left on

Indian Wells Lane.

Los Angeles Airport- LAX

As you exit the terminal turn right, take the 105 Fwy

East. Exit 605 Fwy North. Exit Hwy 60 East to I-10

East. Exit on Cook, turn right. Turn left on Hwy. 111.

Left on Indian Wells Lane.

Ontario Airport- ONT

Take Archibald Avenue to I-10 East. Exit on Cook, turn right. Left on Hwy. 111. Left on Indian Wells

Lane.

**This hotel does not provide shuttle service.

Estimated taxi fare: $65.00 (one way) from PSP

FINANCIAL ASSISTANCE

CS MANTECH strongly encourages and supports participation from academic delegates. Students and

University Professors seeking financial assistance should contact Peter Ersland, the 2011 University Liaison, by email at student.aid@csmantech.org.


HYATT GRAND CHAMPIONS RESORT

MEETING ROOM LAYOUT


2011 International Conference on Compound Semiconductor Manufacturing Technology

™

™

2011

International Conference on

Compound Semiconductor

Manufacturing Technology

Register Online at

Hyatt Grand Champions Resort, Villas and Spa, Indian Wells, California, U.S.A.

CONFERENCE AT A GLANCE

East Foyer

MESSAGE FROM THE CONFERENCE

CHAIR:

2011 CONFERENCE SPONSORS

2010 CONFERENCE SPONSORS

2011 CONFERENCE HIGHLIGHTS

CS MANTECH WORKSHOPS

ROCS WORKSHOP

INDUSTRY EXHIBITS

INTERNATIONAL RECEPTION

2010 BEST PAPER AWARDS

SEMI STANDARDS MEETING

HAIKU COMPETITION

CONFERENCE CLOSING RECEPTION

2011 EXECUTIVE COMMITTEE

TECHNICAL PROGRAM COMMITTEE

TECHNICAL PROGRAM

Monday, May 16

Monday, May 16

Tuesday, May17

Soitec USA

Eric Higham

and Asif Anwar

Wednesday May 18

Chair:

Thursday May 19

tudent Presentation

TECHNICAL SESSIONS

Special Thanks to our 2010 Exhibitors

GENERAL INFORMATION

REGISTRATION INFORMATION (US$)

HOTEL RESERVATIONS

CONFERENCE REGISTRATION & INFO

CENTER

MESSAGE BOARD

THE CONFERENCE HOTEL

TRANSPORTATION TO THE HOTEL

FINANCIAL ASSISTANCE

HYATT GRAND CHAMPIONS RESORT

MEETING ROOM LAYOUT

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