Data Sheet A74d
Microlithography Assemblies
PhotoKleen™ EZD-3
Filter Assembly
Description
Specifications
The PhotoKleen™ EZD-3 filter is
designed for extremely small resist
pump installations. It is specifically
designed for small-volume dispense
systems, which have the smallest
footprint. The PhotoKleen EZD-3 filter
unit consists of a quick-disconnect
head manifold and a High Density
Polyethylene (HDPE) capsule. This
configuration allows for safe, quick, and
easy filter change outs. Three filter
media – PTFE, HDPE and nylon 6,6 – are
available. The naturally hydrophilic nylon
6,6 membrane allows for spontaneous
wettability. This minimizes photochemical
waste by providing quick start up and
minimized bubble generation.
Materials
Removal Ratings
Head Manifold
• Head: PFA/High Density Polyethylene
(HDPE)/Polypropylene (PP)
• Fittings: PFA
• Stage and lever: SUS304
• P-Nylon filter:
0.2 µm, 0.1 µm, 40 nm
• P Emflon® filter:
0.2 µm, 0.1 µm, 0.05 µm
• PE-Kleen filter:
1.0 µm, 0.15 µm, 0.07 µm, 0.05 µm,
30 nm, 10 nm
• Asymmetric P-Nylon filter:
40 nm, 20 nm
• Capsule-style filter assembly
• Top in / top out flow direction, with
inlet flow stream down to the bottom
• Minimized hold-up volume (40 mL)
• Quick filter replacement (one step)
• Optimized for 60 mm-width resist
pump for reduced dispense system
• Minimized dead space
• Reduces chemical waste during filter
startup and change out
PhotoKleen EZD-3 capsule
• Filter media: Hydrophilic nylon 6,6,
High Density Polyethylene (HDPE),
PTFE and Hydrophilic Asymmetric
Nylon 6,6
• Support and drainage: High Density
Polyethylene (HDPE)
• Core, cage and end caps: High
Density Polyethylene (HDPE)
• Housing: High Density Polyethylene
(HDPE)
• O-ring: Kalrez1
Filter Area
• 660 cm2 / 0.7 ft2
Connections
Inlet, outlet / vent:
• FS44L: 1⁄4 in Flowell 60 male fitting
• FS44ML: 4 mm Flowell 60 male fitting
• PS44L: 1⁄4 in Pillarfitting2 elbow union
• PS44LT: 1⁄4 in Pillarfitting straight-up
• FS55ML: 5-3 mm Flowell 60 male fitting
Operating Conditions
Maximum operating temperature:
• 30°C /86°F
Maximum Operating Pressure:
• 300 kPa @ 30°C / 42 psi @ 86°F
Recommended Applications
• i-Line and DUV photoresist for
reduced resist dispense system
• Top and bottom anti-reflective coating
• Spin-on low-k ILD material
1
2
Kalrez is a registered trademark of E. I. du Pont de
Nemours and Company
Pillarfitting is a trademark of Nippon Pillar Packing
Co., Ltd.
Initial Pressure Drop vs. Liquid Flow Rate3
7.5
0.05 m
(UFD)
5.0
1.0
0.1 m
(UFT)
0.5
2.5
0.2 m
(UFR)
0
0
0.5
1.0
Liquid Flow Rate (mL/sec), 1 cP fluid
1.5
0
10.0
Clean Pressure Drop (kPa)
10.0
2.0
10 nm
(UG001)
7.5
0.05 µm
(UG005)
30 nm
(UG003)
1.0
5.0
0.07 µm
(UG007)
2.5
0.15 µm
(UG015)
0
0
0.5
1
Liquid Flow Rate (mL/sec), 1 cP fluid
1.5
2.0
0.5
0
Clean Pressure Drop (psid)
PE-Kleen Filter (HDPE media)
Clean Pressure Drop (psid)
Clean Pressure Drop (kPa)
P Emflon Filter (PTFE media)
40 nm
(UND)
40 nm (AND)
0.1 µm (UNI)
7.5
1.0
5.0
0
0.5
0.2 m
(UNA)
2.5
0
0.5
1
Liquid Flow Rate (mL/sec), 1 cP fluid
0
1.5
3 For liquids with a viscosity differing from 1 cP,
multiply by the viscosity in cP.
Dimensions
65 mm
2.6 in
20 nm
(ANM)
2.0
79 mm
3.1 in
153 mm
6 in
Clean Pressure Drop (kPa)
10.0
Clean Pressure Drop (psid)
P-Nylon Filter (Nylon 6,6 media)
Part Numbers / Ordering Information
Medium
Removal Rating
O-ring Material
PHD11UNAEH11B
Nylon 6,6
0.2 µm
Kalrez
PHD11UNIEH11B
Nylon 6,6
0.1 µm
Kalrez
PHD11UNDEH11B
Nylon 6,6
40 nm
Kalrez
PHD11ANMEH11B
Asymmetric Nylon 6,6
20 nm
Kalrez
PHD11ANDEH11B
Asymmetric Nylon 6,6
40 nm
Kalrez
PHD11UG015EH11B
HDPE
0.15 µm
Kalrez
PHD11UG007EH11B
HDPE
0.07 µm
Kalrez
PHD11UG005EH11B
HDPE
0.05 µm
Kalrez
PHD11UG003EH11B
HDPE
30 nm
Kalrez
PHD11UG001EH11B
HDPE
10 nm
Kalrez
PHD11UFREH11B
PTFE
0.2 µm
Kalrez
PHD11UFTEH11B
PTFE
0.1 µm
Kalrez
PHD11UFDEH11B
PTFE
0.05 µm
Kalrez
PHDC11H11B
Dummy cartridge for system start up
60 mm
2.4 in
93 mm
3.7 in
123 mm
4.8 in
Part Number
23 mm4
0.1 in
Kalrez
Head Manifold
Part Number
Connections
PHF11GFS44WLTD
Inlet: 1⁄4 in Flowell 60
135 mm4
5.3 in
4
Outlet: 1⁄4 in Flowell 60
Vent: 1⁄4 in Flowell 60
PHF11GFS44MLD
Inlet: 4 mm Flowell 60
Outlet: 4 mm Flowell 60
Vent: 4 mm Flowell 60
PHF11GPS44LD
Inlet: 1⁄4 in Pillarfitting
Outlet: 1⁄4 in Pillarfitting
Vent: 1⁄4 in Pillarfitting
PHF11GPS44LTD
Inlet: 1⁄4 in Pillarfitting
Outlet: 1⁄4 in Pillarfitting
Vent: 1⁄4 in Pillarfitting
PHF11GFS55MLTD
Inlet: 5-3 mm Flowell 60
Outlet: 5-3 mm Flowell 60
Vent: 5-3 mm Flowell 60
Clearance for filter removal
Unit conversion: 1 bar = 100 kilopascals
25 Harbor Park Drive
Port Washington, New York 11050
1.800.360.7255 toll free (only in US)
1.516.484.3600 phone
1.516.625.3610 fax
microelectronics@pall.com
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world.
© Copyright 2007, Pall Corporation. Pall,
, Photokleen, and P-Emflon are trademarks of Pall Corporation.
® Indicates a Pall trademark registered in the USA.
is a service mark of Pall
Corporation.
A74d
12/07