MEFBPVSENa
Chemical Filtration Assemblies
FlexBowl™ Filter Pressure Vessel System
Description
The FlexBowl single-cartridge filter pressure vessel system has been specifically
designed for the challenging ultrapure
chemical applications used in semiconductor manufacture. It meets Pall’s same
high standards for cleanliness, purity,
compatibility, and mechanical strength as
its Megaplast™ housings and
Kleen-Change® assemblies. The system’s extremely flexible design allows for
easier and safer filter handling, and
reduces cost of ownership.
The key to the flexibility of the
FlexBowl system design is a universal
manifold, which can accommodate a
fully disposable capsule assembly or a
reusable housing. Either of these connects easily to the manifold with a
quarter turn of the locking ring.
Pall offers the FlexBowl pressure vessel
system with many housing and capsule
assembly options to maximize flexibility.
Housings are available in 4 in (102 mm),
10 in (254 mm), and 20 in (508 mm)
sizes. The 10 in (254 mm) housing is
designed to fit standard 10 in (254 mm)
filter cartridges with a diameter of up to
3.25 in (82.5 mm) and a nominal length
of 10 in (254 mm). Standard semicon-
The FlexBowl Filter Pressure Vessel System
G2 Style PFA capsule
Disposable
Capsule
Assembly
G3 Style PFA capsule
AB Style HDPE capsule
Universal
Manifold
4 in Megaplast Bowl
Reusable
Housing
10 in Megaplast Bowl
20 in Megaplast Bowl
The universal manifold can accept either a housing or a capsule.
ductor industry inlet and outlet connection fittings for this system are also
offered in a variety of different sizes and
styles.
Reusable Housing Option
• Filter cartridge can be securely
sealed in the bowl before
approaching the tool.
• Housing accepts standard length
cartridges without the need for
special adapters that add cost and
may impede fluid flow and cleaning.
• Assembled housing and cartridge
unit is inserted into the manifold and
securely sealed with a quarter turn of
the manifold locking ring using a
spanner wrench.1 It can be
disengaged from the manifold quickly
with a quarter turn of the locking ring.
• Cartridge and bowl are removed as
a unit, requiring minimal space in the
tool.
• Cartridge, still sealed within the
housing, can be safely transported to
an appropriate area for changeout,
with minimal exposure to chemicals
at the tool.
1
Part number ACS0655AA
Disposable Assembly Option
Dimensions
• Convenient, eco-friendly, and
economical (low cost of ownership).
• Safer and more reliable than
conventional housings.
• Capsule is offered in high-purity PFA
G2 and in high density polyethylene
(HDPE), AB style.
• Capsule is inserted into the manifold
and securely sealed with a quarter
turn of the manifold locking ring. It
can be disengaged from the
manifold quickly with a quarter turn
of the locking ring.
• Manifold head with inlet, outlet, and
drain fittings remains installed in the
tool.
L
L
Specifications
Materials
Reusable housing
• Manifold and bowl: High-purity PFA
• O-ring: Fluoropolymer-encapsulated
fluoroelastomer
• Locking ring: PVDF
Disposable assembly
• Manifold: High-purity PFA
• Capsule assembly: High-purity PFA
(G2 and G3) or HDPE (AB style)
W
W
G2 style housing
G2 style capsule
Manifold
• Locking ring: Polyetherimide (PEI)
Connections
• Inlet/outlet: ¾ in and 1 in Pillar,2
¾ in and 1 in flare style, or
1 in butt weld pipe
• Vent and drain: ½ in Pillar,
½ in flare style, or ½ in butt weld
Operating Conditions
Maximum operating temperature:
FlexBowl PFA G2 housing
• 95°C (203°F)
L
L
FlexBowl PFA G2 and G3 disposable
assemblies
• 100°C (212°F)
FlexBowl HDPE disposable assemblies
• 50°C (122°F)
Maximum operating pressure:
FlexBowl PFA G2 housing
• 0.56 MPa (80 psid) @ 30˚C (86˚F)
• 0.28 MPa (40 psid) @ 95˚C (200˚F)
FlexBowl PFA G2 and G3 disposable
assemblies
• 0.5 MPa (73 psid) @ 25˚C (77˚F)
• 0.3 MPa (44 psid) @ 100˚C (212˚F)
W
G3 style capsule
HDPE style capsule
FlexBowl HDPE disposable assembly
• 0.4 MPa (58 psid) @ 25˚C (77˚F)
• 0.15 MPa (21 psid) @ 50˚C (122˚F)
2
Pillar is a trademark of Nippon Pillar Packaging
Co., Ltd.
W
L
W
Universal Manifold
Manifold Inlet/Outlet Connections
Style
Width (mm / in)
1 in butt weld
196.85 / 7.75
3
⁄4 in flare style
190.50 / 7.50
1 in flare style
214.63 / 8.45
3
⁄4 in pillar
217.67 / 8.57
1 in pillar
255.50 / 8.76
FlexBowl Capsule Assembly
Pressure Drop vs. Liquid Flow Rate3
3
⁄4 in nozzle
Flow rate (gpm)
0
1
2
3
Flow rate (gpm)
4
5
6
7
8
9
10
0
2
3
4
5
6
7
8
9
10
12
0.08
10
0.06
8
6
0.04
4
0.02
2
0
0
5
10
15
20
25
30
35
40
Flow rate (L/min)
8
QL
GP
0.05
L
FD
UC
C
FT
UC RL
F
C
U
0.04
0.03
4
0.02
2
0.01
0
0
0
5
10
15
20
25
30
35
Flow rate (L/min)
For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.
Part Numbers / Ordering Information
Part Number
Connections
Inlet, Outlet / Vent, Drain
Nominal Length
(L) (mm/in)
Complete Housing System
FBMH04T17E71H1
4 in complete housing system
FBMH04T13E71H1
4 in complete housing system
FBMH04T17E51H1
4 in complete housing system
FBMH04T13E51H1
4 in complete housing system
FBMH04T16EBWH1
4 in complete housing system
FBMH04T174E51H14
4 in complete housing system
FBMH04T134E51H14
4 in complete housing system
FBMH1T17E71H1
10 in complete housing system
FBMH1T13E71H1
10 in complete housing system
FBMH1T17E51H1
10 in complete housing system
FBMH1T13E51H1
10 in complete housing system
FBMH1T16EBWH1
10 in complete housing system
FBMH1T174E51H14
10 in complete housing system
FBMH1T134E51H14
10 in complete housing system
FBMH2T17E71H1
20 in complete housing system
FBMH2T13E71H1
20 in complete housing system
FBMH2T17E51H1
20 in complete housing system
FBMH2T13E51H1
20 in complete housing system
FBMH2T16EBWH1
20 in complete housing system
1 in Pillar / 1⁄2 in Pillar
3
⁄4 in Pillar / 1⁄2 in Pillar
1 in flare style / 1⁄2 in flare style
3
⁄4 in flare style / 1⁄2 in flare style
1 in butt weld / 1⁄2 in butt weld
1 in flare style / 1⁄4 in flare style
3
⁄4 in flare style / 1⁄4 in flare style
1 in Pillar / 1⁄2 in Pillar
3
⁄4 in Pillar / 1⁄2 in Pillar
1 in flare style / 1⁄2 in flare style
3
⁄4 in flare style / 1⁄2 in flare style
1 in butt weld / 1⁄2 in butt weld
1 in flare style / 1⁄4 in flare style
3
⁄4 in flare style / 1⁄4 in flare style
1 in Pillar / 1⁄2 in Pillar
3
⁄4 in Pillar / 1⁄2 in Pillar
1 in flare style / 1⁄2 in flare style
3
⁄4 in flare style / 1⁄2 in flare style
1 in butt weld / 1⁄2 in butt weld
396.14 / 15.60
396.14 / 15.60
351.04 / 13.82
351.04 / 13.82
335.69 / 13.22
346.96 / 13.66
346.96 / 13.66
528.64 / 20.81
528.64 / 20.81
483.54 / 19.04
483.54 / 19.04
468.19 / 18.43
479.54 / 18.88
479.54 / 18.88
784.14 / 30.87
784.14 / 30.87
744.54 / 29.31
744.54 / 29.31
723.69 / 28.49
Manifold Only
FBMT17E71
FBMT13E71
FBM17E51
FBM13E51
FBM16EBW
1 in Pillar / 1⁄2 in Pillar
3
⁄4 in Pillar / 1⁄2 in Pillar
1 in flare style / 1⁄2 in flare style
3
⁄4 in flare style / 1⁄2 in flare style
1 in butt weld / 1⁄2 in butt weld
144.01
144.01
136.14
136.14
129.79
4
Description
Manifold
Manifold
Manifold
Manifold
Manifold
only
only
only
only
only
6
The manifold vent and drain connections are 1⁄2 in flare style. The housing bowl vent is 1⁄4 in flare style.
/
/
/
/
/
5.67
5.67
5.36
5.36
5.11
40
Differential pressure (psi)
14
K
GP
Differential pressure (MPa)
16
0.1
0
3
1
0.06
Differential pressure (psi)
Differential pressure (MPa)
0.12
Part Numbers / Ordering Information
Part Number 5
Description
Complete G2 Assembly System 6
n/a
10 in complete G2 assembly
n/a
10 in complete G2 assembly
10 in complete G2 assembly
n/a
n/a
10 in complete G2 assembly
n/a
10 in complete G2 assembly
Connections
Inlet, Outlet / Vent, Drain
system 1 in Pillar / 1⁄2 in Pillar
system 3⁄4 in Pillar / 1⁄2 in Pillar
system 1 in flare style / 1⁄2 in flare style
system 3⁄4 in flare style / 1⁄2 in flare style
system 1 in butt weld / 1⁄2 in butt weld
Nominal Length
(L) (mm/in)
517 /
517 /
511 /
511 /
TBD
20.35
20.35
20.12
20.12
Complete G3 Assembly System6
n/a
10 in complete G3 assembly system 1 in Pillar / 1⁄2 in Pillar
10 in complete G3 assembly system 3⁄4 in Pillar / 1⁄2 in Pillar
n/a
547 / 21.53
547 / 21.53
Complete PE Assembly System6
n/a
10 in complete PE assembly system
⁄4 in flare style / 1⁄4 in flare style
466 / 18.36
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
n/a
374.86
TBD
374.86
TBD
374.86
TBD
374.86
TBD
374.86
TBD
374.86
TBD
374.86
TBD
TBD
3
G2 Capsule
LDFBGT1GPKLE51K3
LDFBGT1GPKLE71K3
LDFBGT1GPQLE51K3
LDFBGT1GPQLE71K3
LDFBGT1GPDLE51K3
LDFBGT1GPDLE71K3
LDFBGT1UCFDLE51K3
LDFBGT1UCFDLE71K3
LDFBGT1UCFTLE51K3
LDFBGT1UCFTLE71K3
LDFBGT1UCFRLE51K3
LDFBGT1UCFRLE71K3
LDFBGT1STQDE51K3
LDFBGT1STQDE71K3
LDFBGT1XXXXEBWK3
10
10
10
10
10
10
10
10
10
10
10
10
10
10
10
G3 Capsule7
LDFBHT1XXXXE71K3
10 in G3 capsule
n/a / 1⁄2 in Pillar
TBD
LDDFBT1UHSQE518
10 in PE capsule
n/a / 1⁄4 in flare style
TBD
Housing Kit
FBHT04EBWH1
FBHT044E51H1
FBHT04E51H1
FBHT04E71H1
FBHT1EBWH1
FBHT14E51H1
FBHT1E51H1
FBHT1E71H1
FBHT2EBWH1
FBHT2E51H1
FBHT2E71H1
4 in G2 bowl
4 in G2 bowl
4 in G2 bowl
4 in G2 bowl
10 in G2 bowl
10 in G2 bowl
10 in G2 bowl
10 in G2 bowl
20 in G2 bowl
20 in G2 bowl
20 in G2 bowl
n/a / 1⁄2 in butt weld
n/a / 1⁄4 in flare style
n/a / 1⁄2 in flare style
n/a / 1⁄2 in Pillar
n/a / 1⁄2 in butt weld
n/a / 1⁄4 in flare style
n/a / 1⁄2 in flare style
n/a / 1⁄2 in Pillar
n/a / 1⁄2 in butt weld
n/a / 1⁄2 in flare style
n/a / 1⁄2 in Pillar
TBD
TBD
214.90 / 3.82
TBD
TBD
TBD
347.40 / 13.68
TBD
TBD
608.40 / 23.95
TBD
in
in
in
in
in
in
in
in
in
in
in
in
in
in
in
G2
G2
G2
G2
G2
G2
G2
G2
G2
G2
G2
G2
G2
G2
G2
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
capsule
/
/
/
/
/
/
/
/
/
/
/
/
/
/
/
⁄2
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
⁄2
1
1
in
in
in
in
in
in
in
in
in
in
in
in
in
in
in
flare style
Pillar
flare style
Pillar
flare style
Pillar
flare style
Pillar
flare style
Pillar
flare style
Pillar
flare style
Pillar
butt weld
/ 14.76
/ 14.76
/ 14.76
/ 14.76
/ 14.76
/ 14.76
/ 14.76
HDPE Capsule
5
6
7
8
The part number suffix K3 indicates that the filter is prewet and packaged with DI water. Replace K3 with K7 for the low metal ion Me-Kleen SM pretreatment
option.
The manifold and the capsule must be ordered separately.
Contact your Pall representative for additional information about the G3 option.
Add K6 to the end of the part number for the low metal ion Me-Kleen pretreatment option.
Unit conversion: 1 MPa = 10 bar
Microelectronics
25 Harbor Park Drive
Port Washington, NY 11050
+1 516 484 3600 telephone
+1 800 360 7255 toll free US
microelectronics@pall.com
Visit us on the Web at www.pall.com
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/corporate_contact.
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please
consult your Pall representative or visit www.pall.com to verify that this information remains
valid.
© Copyright 2009, Pall Corporation. Pall,
, FlexBowl, Megaplast and Kleen-Change are trademarks of Pall
Corporation. ® Indicates a trademark registered in the USA.
and
Me-Kleen are service marks of Pall Corporation.
MEFBPVSENa
March 2010