Data Sheet MEGPico1000EN1c
Gaskleen® Pico1000 Analyzer
Description
The Gaskleen Pico1000 analyzer measures trace
moisture in nitrogen and argon process gas streams,
with a limit of detection of 300 part per trillion (pptv). The
system is ideally suited for qualifying and certifying ultrahigh purity process gases, as well as detecting purifier
end-of-life. Its robust, compact design is readily
portable, allowing users to easily move it around a
facility for quick checks of process gas quality or
troubleshooting moisture excursions. The Pico1000
consumes up to 70% less process gas, compared to
competitive analyzers.
Gaskleen® Pico1000 Analyzer
Operation
The analyzer uses a microelectromechanical system
(MEMS) to gravimetrically measure the moisture
concentration. Sample process gas flows through a
mass flow controller to the preconcentrator MEMS where
the moisture is trapped with a proprietary coating
throughout the sample period. When the sampling is
complete the preconcentrator heats in milliseconds
vaporizing the collected moisture.
Co-packaged with the preconcentrator is a MEMS
resonator vibrating in the MHz frequency range. This
resonator is functionalized with another proprietary
chemoselective coating to enhance absorption and
desorption of the moisture from the preconcentrator.
This proprietary design allows the resonator to quickly
capture and measure the mass of moisture absorbed on
the resonator.
The resonator is vibrating continuously during the
measurement cycle. The preconcentrator vaporizes the
moisture and the resonator frequency shift (ΔHz) occurs,
which is detected and transformed into an electrical
signal that is directly proportional to the mass of that
moisture.
Sample collection is performed continuously, except
during preconcentrator heating and resonator
measurement, which only takes a few seconds. The
Pico1000 is a near-real-time analyzer with continuous
collection and batch measurement.
Features
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USB data extraction port
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Novel 21 century MEMS technology
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300 pptv Lower Detection Limit
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Rugged, light weight and versatile design
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Built-In Diagnostics
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Consumes 70% less gas than traditional systems
st
Benefits
MEMS Sampling
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Extract csv data to a USB in seconds
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Easy “Plug and Play” installation and operation
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900 pptv Limit of Quantitation
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Fast response time
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Designed for Mobility
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Purifier prequalification and end of life detection
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Low cost of ownership
Gaskleen® Pico1000 Specifications (Part Number: 3005105)
Performance
Measurement Range
Accuracy: 0.3 – 200 ppbv
201 – 3000 ppbv
Precision
Sample Time
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0 to 3 ppmv
+ / - 300 pptv or 10 % of reading whichever is greater
+ / - 20 % of reading
+ / - 5 % of reading across the full measurement range
10 min. (0 – 50 ppbv), nominal
2.5 min. (50 - 200 ppbv), nominal
30 sec. (200 ppbv - 3 ppmv), nominal
Representative Performance (non-quality control parameter)
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300 pptv (3σ at 8 ppbv, nominal)
100 pptv
1.6 to 2.3 ppmv / 2.3 to 1.6 ppmv, nominal: T-10 = 8 min, T-90 = 9 min
8 to 12 ppbv / 12 to 8 ppbv, nominal: T-10 = 24 min, T-90 = 79 min
Gas Inlet Connection
Gas Outlet Connection
Wetted Components
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Helium Leak Test
Shipping / Storage Temperature
Mounting Configuration
Equipment Ratings
Authorizations
U. S. Patents #
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Gravimetric MEMS Resonator
H2O
44.6 cm W x 28.8 cm D x 17.6 cm H (17.6 inch W x 11.3 inch D x 6.9 inch H)
11.4 kg (25 lbs) – system only
67 cm W x 50 cm D x 29.7 cm (24.6 inch W x 19.7 inch D x 11.7 inch H) case
20.4 kg (45 lbs) case and system
1
1/4 inch gasket seal (VCR or compatible)
2
1/4 inch male compression fitting (Swagelok or compatible)
< 0.25 µm / 10 µinch Ra internal surface finish (except for MFC with
<0.41 µm / 16 µinch Ra internal surface finish)
-8
< 2 X 10 mbar• liter per second
-30°C (-22°F) to 80°C (176°F)
483 mm rack-mountable component or desktop
IEC Installation Category II, VDC Pollution Degree 2
CSA, UL, CE, WEEE, ISTA 1A,
6,511,915; 6,627,965; 6,953,977
Gas Compatibility
Sample Temperature
Sample Flow Rate
Environmental Conditions
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Nitrogen, Argon (contact Pall for additional gases)
5°C (41°F) to 30°C (86°F)
280 sccm (nominal) +/- 1%
0°C (32°F) to 30°C (86°F); Max 80% RH non-condensing environment
Inlet Pressure
Exhaust Pressure
• 69 kPa (10 psig) to 310 kPa (45 psig)
• 101 ± 7 kPa absolute pressure (14.7 ± 1 psia); If > 500 m (1640 ft.) in
elevation consult with Pall
Lower Detection Limit (LDL)
Sensitivity
Speed of Response
Design Parameters
Measurement Method
Analyte
Size and Weight (nominal)
Operating Conditions
Electrical
Power Requirements
Power Consumption
Inputs/Outputs (analog/digital)
Alarms
1
VCR is a trademark of the Swagelok Co.
• 100-240 VAC 50/60 Hz, supply voltage fluctuations not to exceed +/- 10% of
nominal supply voltage (indoor use only)
• 60 W average with a nominal 90 W peak start-up draw
• 4-20 mA (isolated), requires external voltage source, 12 ... 36 VDC
• 0-5 VDC (isolated), load requirements: RL > 2 kΩ, 0 pF < CL < 200 pF
• 2 USB 1.1
• 7” LCD Touch screen
• Output by USB downloadable csv data file, or analog signal
• RS232 serial port (factory service diagnostic communication only)
• 4 user programmable Form C relays
2
Swagelok is a trademark of Swagelok Co.
Flow Diagram
Mobile Case Included
Visit us on the Web at www.pall.com
Pall Corporation has offices and plants throughout the world. For Pall
representatives in your area, please go to www.pall.com/contact
Microelectronic Group
25 Harbor Park Drive
Port Washington, NY 11050
+1 516 484 3600 telephone
+1 800 FILTERS toll free US
Because of technological developments related to the products, systems, and/or
services described herein, the data and procedures are subject to change without notice.
Please consult your Pall representative or visit www.pall.com to verify that this
information remains valid. Products in this document may be covered by one or more
of the following patent numbers: US 6,511,915; US 6,627,965; US 6,953,977.
Pall,
and Gaskleen are
© Copyright 2016, Pall Corporation.
trademarks of Pall Corporation. ® indicates a trademark registered in the
USA. BETTER LIVES. BETTER PLANT and Filtration. Separation. Solution. SM and
are service marks of Pall Corporation.
MEGPico1000EN1c
Produced in the USA
February 2016