IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 60, NO. 6, DECEMBER 2013 4257 Sensors Based on Radiation-Induced Diffusion of Silver in Germanium Selenide Glasses Pradeep Dandamudi, Student Member, IEEE, M. N. Kozicki, Member, IEEE, H. J. Barnaby, Senior Member, IEEE, Y. Gonzalez-Velo, Member, IEEE, M. Mitkova, Member, IEEE, K. E. Holbert, Senior Member, IEEE, M. Ailavajhala, Student Member, IEEE, and W. Yu Abstract—In this study we demonstrate the potential radiation sensing capabilities of a metal-chalcogenide glass (ChG) device. The lateral device senses radiation-induced migration of ions in germanium selenide glasses by measuring changes in electrical resistance between electrodes. These devices exhibit a high-resistance ‘OFF-state’ ( ) before irradiation, but following gamma-rays or UV light, their resisirradiation with either tance drops to a low-resistance ‘ON-state’ ( ). The devices have exhibited cyclical recovery with room temperature annealing of Ag doped ChG, which suggests potential use in reusable radiation sensor applications. Furthermore, the mechanisms of radiation-induced transport and reactions in ChG are modeled using a finite element device simulator. The essential reactions captured by the simulator are radiation-induced carrier generation, combined with reduction/oxidation for both ionic and neutral Ag species in the chalcogenide film. The results provide strong qualitative evidence that finite element codes can simulate ionic transport reactions in the ChG and reveal plausible mechanisms for radiation-induced metal doping. Index Terms—Chalcogenide glass, dosimetry, photodoping, reusable sensor, TCAD modeling, UV and gamma rays. I. INTRODUCTION C UMULATIVE radiation measurement systems quantify total ionizing dose (TID) which may cause undesirable effects on equipment or subjects over time [1], [2]. Low cost film badges, which are good for large-scale distributed applications, require time-delayed, and inconvenient wet chemical processing for readout. Thermoluminescent dosimeters (TLDs) need high-temperature processing for readout, and they suffer from poor signal retention and relatively high cost. Detection systems that provide an instantaneous electrical readout are clearly more desirable. Ionization chamber detection systems are expensive, bulky, require a high voltage supply, and therefore are not suitable for distributed applications. MOSFET detectors are used in electronic sensors because of their small Manuscript received July 02, 2013; revised August 31, 2013; accepted October 06, 2013. Date of publication November 13, 2013; date of current version December 11, 2013. This work was supported by the Defense Threat Reduction Agency under Grant HDTRA1-11-1-0055 and the Battelle Energy Alliance under Blanket Master Contract 41394. P. Dandamudi, M. N. Kozicki, H. J. Barnaby, Y. Gonzalez-Velo, K. E. Holbert, and W. Yu are with the School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287-5706 USA (e-mail: pdandamu@asu.edu). M. Mitkova and M. Ailavajhala are with the Department of Electrical and Computer Engineering, Boise State University, Boise, ID 83725 USA. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TNS.2013.2285343 size, good signal retention, and instantaneous readouts. However, limited range, lifetime, and drift in response over time can result in loss of accuracy [1]–[3]. In this study we investigate simple and cost-effective radiation sensing devices based on changes in electrical resistance due to radiation-induced diffusion of Ag metal into chalcogenide glass (ChG). We examine a lateral device configuration and demonstrate the effect of film thickness and ChG composition on the device response. The sensors have a high-resistance ‘OFF-state’ ( ) before irradiation. Post-irradiation, from either gamma-rays or ultraviolet (UV) light, the sensors exhibit a low-resistance ‘ON-state’ ( ) with a tunable input dose range. We believe such devices provide the possibility of a cost-effective, very low-voltage alternative to currently available radiation sensor technologies. The ChG sensor presented in this paper exhibits controllable sensor performance characteristics, good state retention, and instantaneous readout. The device is compact in size, scalable, and can be easily and inexpensively incorporated into a standard integrated circuit process flow. These properties make it a good candidate for the next generation of portable, electronic, field dosimeters. II. MATERIALS Chalcogenide glasses containing chalcogen atoms (S, Se, Te) are often used in conjunction with group IV and/or group V elements. These glasses are currently used in emerging memories, known as resistive random access memories (ReRAM), that have the potential to replace current flash technologies [4]–[10]. Exposure of Ag/ChG film stack(s) to UV light will initiate a process known as photodoping, whereby Ag diffuses both laterally and vertically into the ChG, resulting in a large change in the properties of the glass material [11]–[20]. The electrical rem, sistivity of undoped ChG is typically high, more than but with the incorporation of Ag, the resistivity decreases to less than m [14], [21]. In the case of the photo-dissolution of Ag, light illumination generates charged carriers (electron-hole pairs) in the ChG which facilitate the diffusion of Ag into the glass. The presumed mechanisms are: 1) Ag metal reacts with photo-generated holes ions and 2) photo-generated electrons are trapped to create in the ChG film. An electrochemical potential is thus formed ions and negatively charged, between positively charged trapped electrons [12]–[18]. The resulting electric field causes ions to drift into the undoped ChG. Metal transport mobile into the undoped region will continue until the light source is removed or the Ag supply is exhausted. The resulting Ag-ChG 0018-9499 © 2013 IEEE 4258 IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 60, NO. 6, DECEMBER 2013 Fig. 1. Sensor fabrication sequence for lateral devices. ternary [11], [22], [23] has a variety of interesting physical and electrical properties, but the most important aspect for this study is the significant change in film conductivity, which increases with increasing Ag concentration [11]–[15]. Although much of the previous work on photodiffusion has focused on the effects of UV exposure, similar mechanisms are thought to be prevalent in the case of exposure to much higher energy ionizing radiation. Previous work on gamma exposures of a Ni/Ag/ChG stack [24] shows that the irradiation causes Ag photo-doping in ChG and post-radiation annealing enables un-neutralized to transport back to the Ag top layer. In general, the absorption of ionizing radiation across a broad energy spectrum (from “low energy” ultraviolet to “high energy” gamma rays) can induce the incorporation of Ag metal into a ChG film. This will cause a significant change in the material resistance—a useful effect for radiation measurement/sensing applications. III. DEVICE FABRICATION The sensors discussed in this paper are simple to make, as the fabrication process involves only two main steps. The first step involves deposition of a thin ChG film on a substrate and the final step is formation of electrodes on the ChG. The electrodes supply the metal for photodoping as well as the terminals for resistance measurement. The device resistance is measured between two electrodes on the ChG film surface. The materials we selected were and glasses and Ag electrodes. In general, Ag has high diffusivity in Ge-Se films and many tens of atomic percent of Ag can be incorporated in them. These particular Ge-Se compositions were chosen to assess the effect of chalcogen content on device response since it is known that Ag diffusivity is higher in more chalcogen rich material [14]–[16], [22]. Several Ge-Se thicknesses were also used to determine the effect of this parameter on sensor performance. The processing steps are shown in Fig. 1. Blanket and films, of 5 nm, 10 nm, and 20 nm thickness, were evaporated onto cleaned microscope glass slides in a Cressington 308 thermal evaporator at a deposition rate of 0.1 nm/s. Then 35 nm of Ag were evaporated at 0.1 nm/s through a shadow mask on top of the deposited ChG film in order to form Fig. 2. Lateral device: (a) Cross-section view and (b) top view. the Ag electrodes. Figs. 2(a) and 2(b) show the cross-sectional view and top view of the lateral devices, respectively. The Ag dots are 2 mm in diameter, with a spacing of 1 mm between them. IV. TEST PROTOCOL AND DEVICE CHARACTERIZATION Step stress UV irradiation was first performed on test structures as a simple and quick means for assessing resistance change as a function of exposure time/dose. The UV light power density was mW/cm at a wavelength of 324 nm (1 h of UV exposure therefore corresponded to a total energy density of J/cm ). The dose is the energy density of the UV source (measured by an external calibrator) that is delivered at the point of incidence onto the sample. For gamma-ray exposures, the samples were placed in a Gammacell 220 irradiator with a dose rate of 10.5 rad(GeSe)/s. The doses are converted from to a ChG equivalent using the relative energy-absorption mass coefficients for the constituent elements (taken at the average energy of 1.25 MeV). The samples were periodically removed from the Gammacell to measure the change in electrical resistance with respect to increasing dose levels. The samples were exposed at room temperature and were left floating (electrodes unconnected) during the exposures. Quasi-static DC electrical measurements were performed using an Agilent 4155B/C Semiconductor Parameter Analyzer (SPA) at room temperature. For lateral devices, the resistance between two adjacent Ag electrodes was monitored for 500 s, at 10 mV bias. The electrical measurements were carried out at these low-voltages in order to minimize any Ag drift caused by internal electric fields during measurements. Resistance DANDAMUDI et al.: SENSORS BASED ON RADIATION-INDUCED DIFFUSION OF SILVER IN GERMANIUM SELENIDE GLASSES Fig. 4. Resistance as a function of measurement time of 5 nm devices, measured at incremental UV doses. 4259 lateral the electrodes has been bridged by Ag-Ge-Se (doped) conducting material. At this stage, the device is in a low-resistance ‘ON-state’. The device resistance may be approximated by, (1) Fig. 3. Optical micrographs show evolution of UV light induced Ag lateral diffusion in a 5 nm thick film, (a) before irradiation, (b) after J/cm of UV dose. J/cm , (c) after J/cm , and (d) after measurements with respect to dose were taken when there was a significant resistance difference (typically an order of magnitude) between each TID level. Optical microscopy was performed using a Zeiss Axiophot Microscope. Bright-field images were taken in order to capture the evolution of Ag diffusion into the ChG following UV and gamma irradiation. Dark-field images were taken to investigate the surface morphology of the Ag-Ge-Se film before and after room temperature annealing experiments following exposure. V. DEVICE OPERATION Fig. 3 shows the evolution of Ag lateral diffusion in a film with respect to UV exposure time. Fig. 3(a) shows two Ag electrodes on top of 5 nm thick . These two electrodes are used as contact pads for electrical measurements as well as providing the Ag into the ChG layer. Before UV exposure, the device exhibits a very high resistance ‘OFF-state’. This OFF state resistance cannot be determined using the 4155B/C SPA, as the current is below the measurement limit of the instrument. After J/cm of UV exposures, as shown in Fig. 3(b), Ag has diffused laterally more than 0.5 mm between the two electrodes. At this stage, the device is still in the OFF-state, as there remains a region of undoped ChG between the electrodes. As shown in Fig. 3(c), after J/cm of UV exposures, the ChG layer between (2) where, , is the resistivity of Ag-Ge-Se ( depends on the atomic fraction of Ag in Ge-Se), is the distance between two electrodes, is the thickness of ChG, and is the width of doped or undoped region between the electrodes. So as the width of Ag-Ge-Se between two electrodes is increased, the resistance is decreased. The threshold dose ( ) for radiation measurement can be defined as the point when the doped regions between two Ag electrodes connect, i.e., when a low resistivity Ag-Ge-Se ‘conduction pathway’ between the two electrodes is formed. The resistance measured at is known as the threshold resistance ( ). As shown in Fig. 3(c), although the ChG region between two electrodes has been Ag-doped, the longer region between 2 diagonal Ag electrodes has not been fully bridged. After J/cm of UV exposure, the undoped regions of ChG film have been completely doped with Ag, as shown in Fig 3(d). The dose and resistance at this stage can be defined as the saturation dose ( ) corresponding to a saturation resistance ( ). At this point, no further significant change in resistance with additional light exposure is observed. VI. EXPERIMENTAL RESULTS AND DISCUSSION A. UV Exposure Results on Lateral Devices UV irradiation tests were performed on 5 nm thick devices and the average resistance with respect to total UV dose was measured on a minimum of 20 devices. The devices were exposed to a total UV dose of J/cm . The resistance of 4260 IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 60, NO. 6, DECEMBER 2013 Fig. 5. Resistance as a function of total UV dose for four different structures. TABLE I UV SENSOR PERFORMANCE CHARACTERISTICS each device was monitored for 500 s and Fig. 4 shows the average resistance with respect to measurement time, at various total UV dose levels. Fig. 4 shows that the resistance of the devices decreases and saturates in response to the total UV dose. The high OFF-state resistance ( ) is not plotted, since it is beyond the instrument range. After a dose of J/cm , the resistance of the device was k ( ) and shows no significant change beyond this, even after J/cm of UV exposures. The average resistance also shows no significant change during the measurement time (i.e. 500 s), therefore suggesting that the application of bias (at 10 mV) during measurements may not cause Ag diffusion and disturb the state of the device. The decrease in resistance at incremental UV doses is mainly due to UV induced photodoping of Ag into the ChG and not due to measurement bias. Two different thicknesses of (5 nm and 20 nm) and 5 nm and 20 nm) samples were studied in order to analyze the effect of ChG thickness and composition on sensor performance. Fig. 5 plots the average resistance with respect to UV dose for the four different sample types and Table I shows the effect of composition and thicknesses on and . These results demonstrate that regardless of device type, the sensors show a rapid reduction in resistance followed by a saturation in response, when exposed to UV irradiation. As shown in Fig. 5, the devices with greatest sensitivity are 5 nm thick devices and the second most are 5 nm thick devices. From Table I, the threshold UV dose ( ) of 5 nm and 20 nm are 24.0 and J/cm , respectively, Fig. 6. Resistance as a function of gamma TID of 10 nm thick devices. The doses are ChG equivalent. and for 5 nm and 20 nm are 33.6 and J/cm . This shows that can be increased by increasing the thickness of ChG layer. At , the resistivity of 5 nm is calculated as m and of 5 nm is m. It is also evident that the composition of ChG can also influence the of the device. Also the difference, , is smaller in compared to devices, indicating that devices might have greater radiation sensitivity due to more rapid achievement of the threshold condition. This is likely due to the greater Ag diffusivity in more chalcogen rich materials. B. Gamma-Ray Exposure Results on Lateral Devices Exposure to gamma irradiation has also been performed on device samples. Fig. 6 shows the average resistances ( devices) with respect to TID for 10 nm thick devices. The average threshold dose is 495 krad(GeSe), where , and is 694 krad(GeSe), where . Comparing Figs. 5 and 6, the devices show similar resistance change response to both UV and gamma irradiations. C. Effects of Agglomeration and Annealing In order to study the effect of thickness on sensor performance, 5 nm thick devices were fabricated and exposed to gamma rays for a TID of 1.7 Mrad(GeSe) (Figs. 7 and 8). Fig. 7 plots average resistances ( devices) up to a TID level of 940 krad(GeSe) and Fig. 8 from a TID of 940 krad(GeSe) to 1.7 Mrad(GeSe) (including room-temperature annealing intervals). For these devices, krad(GeSe), where G , and krad(GeSe), where k . Although no significant difference has been observed in for the 5 nm and 10 nm devices, the of 10 nm devices is higher than that of the 5 nm devices, suggesting higher resistivity in 10 nm devices. Also, the response dose ( ) is lower in 5 nm devices (105 krad(GeSe)), compared to 10 nm devices DANDAMUDI et al.: SENSORS BASED ON RADIATION-INDUCED DIFFUSION OF SILVER IN GERMANIUM SELENIDE GLASSES 4261 Fig. 9. Optical microphotographs showing surface morphology of a 5 nm thick saturated device. (a) Shows formation of Ag clusters on ChG after TID of 1.303 Mrad(GeSe), and (b) shows disappearance of Ag clusters after 12 h of RT annealing interval. Fig. 7. Average resistance as a function of gamma TID of 5 nm lateral devices. The doses are ChG equivalent. Fig. 8. Characteristics of reusable sensors: Average resistance as a function of RT annealing time, measured at various step stress irradiation doses for 5 nm devices. The figure shows switching-in resistance response of thick saturated devices when stressed to irradiations and anneals cycles. The doses are ChG equivalent. (199 krad(GeSe)), indicating that Ag diffusion (i.e. saturation) is faster in thinner films. After the devices reach a saturation dose at or below 660 krad(GeSe), as shown in Fig. 7, they were further stress step irradiated to 725 krad(GeSe), 810 krad(GeSe) and 940 krad(GeSe) and no significant change in resistance was observed ( k ). After incrementally reaching a TID of 940 krad(GeSe), these ‘saturated devices’ were left unbiased at room temperature and resistance measurements were monitored during room-temperature (RT) annealing intervals (12 h, 24 h, 48 h, and 64 h). The anneal measurements show that the saturated device resistances remained in the saturation state ( k ), as shown in Fig. 8 (0 h on the x-axis represent the measurements taken soon after irradiation). The step-stress irradiations of these saturated and RT annealed devices were continued to TIDs of 1.17 Mrad(GeSe), 1.3 Mrad(GeSe), 1.49 Mrad(GeSe) and 1.7 Mrad(GeSe). Following each of these step stress doses, resistance measurements were monitored during total RT annealing intervals (0 h, 12 h, 24 h, 48 h, 64 h). Fig. 8 plots the average resistance vs. RT annealing time, measured at various doses. The results in Fig. 8 demonstrate that once 5 nm thick Ge-Se devices reach a resistance saturation state ( ), further step stress irradiation and subsequent RT annealing on ‘saturated devices’ causes switching of the resistance response. In the case of irradiation of RT anneal devices, the resistance switches from a low ( ) to high ( ) level, and in the case of RT anneal of irradiated and saturated devices, the resistance switches from a high ( ) to low ( ) resistance level. As shown in Fig. 8, the saturated devices step stressed to a TID of 1.17 Mrad(GeSe) show significant change in resistance level, on the order of , compared to its previous state. Subsequent RT annealing measurements on these devices show that the resistance dropped back to . Several cycles of step-stressed irradiation exposures and subsequent annealing intervals were performed on these devices in order to study the repeatability of the resistance switching behavior, as shown in Fig. 8. In order to further investigate the resistance switching characteristics, dark field optical microscopy was performed on saturated devices to reveal the surface morphology of Ag-Ge-Se thin films. Fig. 9(a) shows the surface morphology of a saturated device after a step-stress irradiation of 1.303 Mrad(GeSe) and Fig. 9(b) after 12 h RT anneal of this irradiated and saturated device. Fig. 9(a) reveals a large number of Ag clusters deposited/agglomerated on the surface of the irradiated Ag-Ge-Se region. This gamma-ray induced surface deposition/agglomeration of Ag nanoparticles on top of ChG is due to the presence of excess ions present inside Ag-rich ChG film that migrates towards the irradiated surface area. The migration of is due to counter flow of photoexcited holes during the radiation process [14], [25]. Previous studies have observed a photo-induced surface deposition (PSD) phenomena for 30-40 atom percent Ag in films and electron-beam surface deposition (ESD) on Ag-rich films on glass substrates. Such phenomena have found applications in rewritable optical recording disks [14]. 4262 IEEE TRANSACTIONS ON NUCLEAR SCIENCE, VOL. 60, NO. 6, DECEMBER 2013 As a result of discontinuous Ag metallic clusters deposited/agglomerated on the irradiated device, the conductivity of a previously photodoped ChG film decreases, thereby increasing the resistance of the device. Fig. 9(b) shows that the Ag clusters deposited/agglomerated during radiation exposure have disappeared after 12 h of RT annealing, leaving little Ag residue on the surface. The disappearance of the Ag deposits is likely due to re-diffusion of Ag back into the Ag-Ge-Se thin film by thermal effects [14]. The combination of radiation-induced agglomeration and RT annealing effects suggests that the device may work as a reprogrammable/reusable radiation sensor. Similar resistance characteristics were observed on 5 nm thick devices, which were step stress irradiated to a TID of 1.632 Mrad(GeSe). In this case, ( krad(GeSe)) and k . These devices showed similar radiation response characteristics and annealing behavior when compared with 5 nm thick devices. D. Controlling Sensor Performance Characteristics From UV and gamma irradiation experiments, the sensor performance parameters ( , , , ) likely depend on a number of factors including: ChG thickness, ChG composition, Ag thickness, distance between the two electrodes, substrate beneath the ChG (insulator, metal conductors, semiconductors or flexible substrates), electrode configuration (bus bars, interdigitated fingers, array or ring electrodes), radiation sources (intensity, dose rate), and annealing intervals. A ChG thickness of 20 nm or less has been shown to be a significant factor for Ag lateral diffusion. In particular, the 5 nm ChG film had a faster rate (or shorter saturation time) of Ag lateral diffusion than 20 nm ChG films. The ChG composition was also shown to have a considerable effect on the Ag diffusion rate. An increase in the Se content leads to an increase in diffusion rate and higher Ag incorporation in the films. Ag photodissolution has also been observed in other ChG materials such as Ge-Te, Ge-S, As-S, As-Se, As-Te, As–S–Te and As–Se-Te [14]–[21], and the maximum lateral diffusion occurs along the composition of lowest density. Studies have shown that lateral diffusion in sulfide glasses is much slower than selenide glasses [14], [26]. Therefore, as a result of changing the thickness and composition of ChG materials, the dynamic range of and can be tuned for measuring different total ionizing doses. Lower dose measurements can be achieved by reducing the spacing between two adjacent Ag electrodes. The electrodes spacing on our sensors were fixed at 1 mm, but can easily be reduced to much smaller dimensions using conventional lithography techniques, thereby lowering . Fig. 10. Contour plot of two-dimensional finite element simulation structure representative of lateral sensors. (a) Figure shows distribution of Ag in ChG at . an arbitrary fixed dose, and (b) after is 2.5 eV, ChG affinity is 3.45 eV, ChG dielectric constant is 5.0, and the silver work function is 4.6 eV [27]. Key ion transport (oxidation and reduction reactions) equations used in the model are: (3) (4) The electron-hole pair generation rate is defined as, VII. FINITE ELEMENT MODELING Finite element (FE) simulations were performed with Silvaco’s numerical device simulator ATLAS on a two-dimensional structure representative of a lateral sensor structure. As shown in Fig. 10(a), the structure is composed of a ChG film (10 nm thick, 200 nm wide) sandwiched between silver electrodes (10 nm thick, 350 nm wide). For the simulations, the ChG film is modeled as a wide bandgap semiconductor. Material constants used for the simulations are: ChG bandgap (5) where is the density of ChG, is the radiation dose rate, and is the ionization energy for electron-hole pairs. The ATLAS FE code solves the radiation-induced ion transport and reactions, combined with the code’s intrinsic radiation-induced carrier generation capability. Fig. 10(a) plots the DANDAMUDI et al.: SENSORS BASED ON RADIATION-INDUCED DIFFUSION OF SILVER IN GERMANIUM SELENIDE GLASSES 4263 simulation models the diffusion of Ag concentration profiles within ChG film under radiation doses. While work is in progress to improve the accuracy of the simulations through adjustments of the simulation parameters and additions to the equation set, the results reported here provide strong qualitative evidence that finite element codes can simulate ionic transport and subsequent photodoping in ChG films. Hence, the ChG sensor presented in this paper exhibits controllable sensor performance characteristics, good data retention, and instantaneous readout. The device is compact in size, scalable, and can be easily and inexpensively incorporated into a standard integrated circuit process flow, making it a good candidate for the next generation of portable, electronic, field dosimeters. ACKNOWLEDGMENT Fig. 11. Evolution of neutral Ag distribution in ChG, with increasing radiation doses where is an arbitrary dose. The authors would like to thank Dr. James Reed of DTRA for his support of this work. REFERENCES Ag density distribution within the ChG film after an arbitrary fixed dose, and Fig. 10(b) plots the distribution after 500 . The figure shows that that are oxidized at the electrodes drift into ChG film and begin to reduce to neutral Ag with increasing total dose. Fig. 11 plots the distribution of neutral Ag concentration along the cutline shown in Fig. 10(a). The figure shows that with increasing radiation dose, Ag diffuses into ChG film. Increasing radiation dose causes the ChG film to be saturated with higher Ag concentration, thereby lowering the resistivity of the ChG film. The increase in neutral Ag demonstrates that FE simulations, which include particle (ionic and neutral species) transport and reactions, can model photodoping of Ag in ChG film. VIII. CONCLUSION In this work, we studied radiation-sensing devices that exhibited a significant change in output resistance as a result of radiation-induced diffusion of Ag into chalcogenide glasses. We studied lateral sensor structures with two different compositions ( and ), three glass thicknesses (5 nm, 10 nm, and 20 nm) that were exposed to UV light and gamma-ray irradiation. The irradiation results indicate that thickness and composition of ChG material play major roles in the radiationinduced Ag photodoping process and in return influence the sensor performance characteristics. Distance between the two coplanar Ag electrodes shows linear dependence on of the sensor. It has also been demonstrated that radiation induced Ag doping is reversible through extended irradiation of saturated ChG films. The combination of radiation induced silver surface agglomeration and subsequent room-temperature/thermal annealing of Ag clusters in Ag-Ge-Se thin films has demonstrated the devices potential use for reusable sensor applications. 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