Instructions forPreparing the Manuscripts for EBT 2016 – Template Title of the paper “bold Times New Roman 18 pt” FirstName A. FamilyName – bold Times New Roman 14pt Thes einstructions give you basic guidelines for preparing the camera-ready EBT 2016 papers. These instructions have been prepared in the required format. The abstractis a brief (50-80 words) synopsis of yourpaper. Its use is to provide a quick outline of your presentation, giving the reader an overview of the research. This is an important aspect of your paper, as it is this description that may attract the reader to continue and finish your report. Keywords should be so chosen that they best describe the contents of thepaper. In mostcases, these words can be found in the title and abstract. Noun forms without articles must be used. The use of hyphens and prepositions should be avoided. Bulgarian – Title, authors and abstract – PLEASE, COPY theabstractinEnglishonceagainhere! Introduction Authors must submit a softcopy version of the paper in MS Word format via e-mail (ebt2016@mail.bg) or upload it by the conference web-site: http://www.ebt2016.com/Submission.htm. Table 2 Recommendedfonts(10pts) Font Size 8 Bold Italic Text Authors' names - Left, Spacing before; 18pt Main text in two columns How to Construct the Paper 10 A. Manuscript Layout In formatting your A4-size paper (210×297mm) with the text area 225×160mm, set the margins as given in Table 1. You should left- and right-justify your columns. On the last page of your paper, try to adjust the lengths of the two columns so that they are the same. Use automatic hyphenation, if you have it. Don't forget to check spelling. Table 1 Settingmargindistances(10pts) Top margin 3.6cm Bottom margin Left margin Right margin Header margin Footer margin Column spacing 3.6cm 2.5cm 2.5cm 2.8cm 2.8cm 0.8cm B. Fonts Use Times New Roman Font. Try to follow the font sizes specified in Table 2, as best you can. “E+E”, 5-6/2016 10 10 YES YES 8 8 Headings (Abstract, Introduction, References etc.) - Spacing Before Sub-heading etc.)18pt. Spacing(1.1, After1.2, I2pt, Left Spacing Before 12pt, Spacing After Opl. Left References main text, table names, table captions, figure Footnotes, sub- andsuperscripts captions - Left C. Illustratios Position figures and tables al the tops and bottoms of columns, if possible. Large figures and tables may span both columns. Figure captions should be below the figures; table captions should be above the tables. Try to place the figures and tables after their first mention in the text. Use the abbreviation even at the beginning of a sentence (e.g. "Fig. 1"), all half-tone illustrations (pictures/photographs) should be clear black and white prints. Figure format *.bmp, pictures / photograph format - *.jpg. M,Nm 3,5 ME ME1 ME2 2,5 M11 M1 M12 M2 M3 1,5 M4 M52 M51 0,5 -180 -144 -108 -72 -36 -0,5 0 36 72 108 144 qm -1,5 180 tita,deg -2,5 -3,5 Fig.1. Example of a figure occupying both columns. Helpful Hints D. Equations Number equations consecutively with equation numbers in parentheses flush with the right margin, as in (1). To make your equations more compact, you may use the solidus (/), the exp function, or appropriate exponents. Italicize Roman symbols for quantities and variables, but not Greek symbols. Use a long dash rather than a hyphen for a minus sign. Use parentheses to avoid ambiguities in denominators. Punctuate equations with commas or periods when they are part of a sentence. Be sure that the symbols in your equation have been defined before the equation appears or immediately following. When you refer to equations in the text, refer to (1). (1) Mk 1 z.1 F2N F2S . sin 2 E. References List and number all references at the end of the paper. When referring to them in the text, type the corresponding reference number in square brackets as shown at the end of this sentence [l]. Number the citations consecutively. The sentence punctuation follows the brackets. Give all authors' names; do not use "et al" unless there are six authors or more. Papers that have not been published, even if they have been submitted for publication, should be cited as "unpublished". Papers that have been accepted for publication should be cited as "in press". Capitalize only the first word in paper title, except for proper nouns and element symbols, for papers published in translated journals, please give the English citation first, followed by the original foreign-language citations. A. Abbreviations and acronyms Define abbreviations and acronyms the first time they are used. Acronyms such as MOS, IC, ac and dc do not have to be defined. Redefine acronyms when first used in the text, even if they have been defined in the abstract. B. Other recommendations All publications cited in the text should be presented in a list of references following the text of manuscript. The references should be given as that is shown at the end of the paper. Figures will be included in the text columns. Use the column width as limitation of maximum figure width. Please bigger (from one column width) figures put with the wide dimension extended to the page width, changing the page Format locally for this figure from two columns to one column_(See Fig.1 bellow) and please continue the rest part of the paper as two-column text, as was recommended - through fulfilling the instructions shown in Table 1. Conclusions Designed for the “Electromask Series 6000” machine installation software allows us to manage all systems from a PC and convert data from other formats. We obtain accurate mechanical movements of 0.20 micrometers in the field of 250mm x 250 mm. Acknowledgements This work was supported by the Ukrainian State Agency for Science, Innovations and Information (State Registration № 0111U008786). “E+E”, 5-6/2016 REFERENCES [1] S. R. J. Brueck, “Optical and interferometric lithography –Nanotechnology Enablers,” Proc. IEEE 93, 1704-1721 (2005) [2] G.Pashkevich, M.Sychev, I.Mitelman, B.Sveshnikov, “Experimental verification of the basic scattering theorem”, IEEE Ultrasonics Symposium Proceedings, 2005, p.331. [3] K.Vutova, G.Mladenov, I.Raptis, A.Olziersky, Process simulation at electron beam lithography on different substrates, J Mater Processing Technol (2007); 184/1-3:305-11. Senior Research Fellow, PhD Genadzi A. Pashkevich– Was born in Brest, Belarus, 1955. He received his Ph.D. degrees in Physical electronics including quantum from Institute of Physics, National Academy of Sciences, Minsk, Belarusin 1987. He is currently working at the National TechnicalUniversity of Ukraine “KPI”, Reserch Institute “Applied Electronics”, Kyiv, Ukraine. His research interests are acousto-electronics and acousto-optics, electronicand RFID systems, information technologys. Tel.: +380 (67) 2388034; e-mail: pgena@inbox.ru Prof. PhD Anatolіі T. Orlov – Was born in 1958. He graduated from the Kiev Polytechnic Institute (now- Publication of papers will be performed after reviewing and payment of the conference fees (see at: www.ebt2016.com). Bank account details: Payment: Fee for EBT 2016 - name of the participant (Bank transfer taxes are not included in the fee!) To: TC EPTT Ltd. (Technological Center on Electron Beam ana Plasma Technologies and Technique) SOCIETE GENERALE EXPRESSBANK IBAN: BG81 TTBB 9400 1527 3479 30 SWIFT/BIC: TTBBBG22 Branch: 42425 – “Technical University” Address: 16 Prof. G. Bradistilov str., Sofia 1700, Bulgaria “E+E”, 5-6/2016 National Technical University of Ukraine). Vice Dean of the Faculty of Electronics, Deputy Head of Microelectronics Department. Author of 65 scientific publications, 5 patents. Area of Interest–MEMS/NEMS RF devices and sensors, nanostructured materials for electronics and energy harvesting, wireless broadband access and sensors networks, VLSI design. National Technical University of Ukraine “KPI”, Department of Microelectronics, Kyiv, Ukraine Tel.: +380 (44) 599-18-12; e-mail: atorlov@rambler.ru Senior Research Fellow, Oleksander V. Bogdan- Was born in 1959. He graduated from the Kiev Polytechnic Institute (now- National Technical University of Ukraine). Deputy Director of the Research Institute “Applied Electronics”. Author of 130 scientific publications, 5 monographs and 3 textbooks. Area of Interest- solid state physics, microelectronics, electronic materials and devices, information technologiess, electronic systems. National Technical University of Ukraine “KPI”, Ukraine, Reserch Institute “Applied Electronics”, Kyiv, Ukraine Tel.: +380 (44) 2369676; e-mail: bogdan@ipe.com.ua address: off.137, 16, Politekhnichna Str., 03056, Kyiv, Ukraine, tel./fax(office):+380 (44) 2369676; e-mail: bogdan@ee.ntu-kpi.kiev.ua