Taiwan Standards Committee
Liaison Report
SEMI Taiwan
April 2014
Venue, Location, Date
SEMI Taiwan Standards Committee
SEMI Taiwan
I&C Committee
Established in
2003
Mission:
Focus on interface
of manufacturing
tools, factory
automation
computers, purpose
of transferring
commands and data
used during the
manufacturing
process.
Venue, Location, Date
EHS Committee
FPD Committee
PV Committee
3DS-IC3DS-IC
Committee
Established in
2005
Established in
2008
Established in
2009
Established in
2011
Mission:
Focus on
Environmental,
Health, and
Safety standards
fulfilling the
technical needs.
New TF to LED
and PV, 2011
April
Mission:
Focus on
standards for
materials and
equipment used
in the
manufacture
and test
methods of
TFT-LCD
Mission:
Focus on
standards for
Cell Appearance
and vibration
Test Method in
the manufacture
and test
methods of PV
industry
Mission:
Focus on
standards for
Testing and
Middle-end
process in the
manufacture and
test methods of
3DS-IC industry
EHS TC
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3
Contents
•
•
•
•
•
•
•
Leadership
Current Committee Structure
Meeting Information
New SNARFs & TFOFs
Ballot Results
Upcoming Ballots
Task Force Update
Leadership of TC
Co-Chair: Shuh-Woei Yu-SAHTECH
Co-Chair: Fang-Ming Hsu-TSMC
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5
EHS Committee Structure and Organization
Chart
TWN EHS TC
FPD Safety Sub-Committee
C: Shuh-Woei Yu-SAHTECH
C: Fang-Ming Hsu-TSMC
L:C.C. Huang -SAHTECH
IC Equipment Safety TF
L: Collin Shen-Mxic
Equipment Safety TF
L: C.C. Huang-SAHTECH
Gas & Chemical Safety TF
L: Benny Chen-AUO
L: Benny Chen-AUO
L:Juo Cho-AUO
L: Heng Li Sue-SAHTECH
L: Alice Lin-CMO
L: Moony Lee-UMC
Seismic TF
L:K.C. Tsai -NCREE
L: J.S. Hwang-NCREE
Environmental Sustainability
TF
L: Tony. C.H. Lu-ITRI
L: C.Y Hung-TSMC
L: D.W. Sun-TSMC
Accreditation Committee
PV Safety TF
LE Safety TF
L: Eddie Wu -Nexpw
L: Eric Lin-Epistar
Under Process
EHS Committee Meeting Information
Committee
EHS Committee:
NA 3DS-IC Committee Report -
Last Meeting
Location
April 1, 2014
SEMI
Next Meeting
Location
September, 2014 (TBD)
SEMI
New SNARF & TFOFs
• None
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8
Ballot Result
• None
<Month> <Year>
<Region> <Committee>
9
Upcoming Ballot
• None
<Month> <Year>
<Region> <Committee>
10
TF Update
•
Overall TF Update by Dr. C. C. Huang/SAHTECH. Dr. Huang updated the current
industry issues in Taiwan such as Occupational Safety and Health Act’s impact on
high-tech equipment safety：
 Equipment and Mechanical appliances impact
 Explosion-proof electrical impact
•
Fire Act impact on high-tech plant
Fire protection system in MO chemical room should be followed (or should follow)
by water reaction and flammable liquid requirements. It is still difficulty on
Cleanroom fire protection.
• SEMI Japan Energy-Saving Cooperation
 Propose technical manual to explain assumption and derivation of
S23 convection factors
 Proposed tank N2 conversion factor
 Agree on Japan’s suggestion to have the common view on the ECF
ranking of N2 and CDA. It affects the equipment energy saving design.
The Committee is going to work on this issue first. Will continue
collecting related information of technical manual.
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11
TF Update
•
SEMI High-Tech Facility Committee Fire Protection task force is proposing the
following issues.
 Cleanroom exhaust system - multi-zone desmoke effectiveness validation
 Cleanroom exhaust system - Subfab desmoke control effectiveness validation
 Sprinkler system-subfab action verified
 Local water mist protection verified
 Very early smoke detection system location under wafer slab evaluation verified
 Establish visualization safety expert system for HPM location
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12
TF Update
•
Action Item:
 Dr. C. C. Huang/SAHTECH to work with Dr. Tsai/NCREE for Seismic Topics and
feedback to SEMI NA and SEMI Japan.
 Co-chairs recommended to form a working group to study the impact of
Occupational Safety and Health Act on high-tech equipment safety. Assigned
Dr. C. C. Huang as working group leader, invited Dr. Po-Wen Wu/UMC, Eric
Lin/Epistar, Jean Yang/Innlux, Yee-Long Yi/AMAT, Representative/Siemens as
team members to work on the said Act. Warmly invite Siemens to join this group
to share EU regulations on risk management of process equipment.
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13
Regional Staff
Contact Information
Name
Cher Wu
E-mail
cwu@semi.org
Phone
+886-3-560-1777
Fax
+886-3-560-1555
Office Address
11F-2, No. 1, Taiyuan 1st Street, Zhubei, City, Hsinchu,
County 30265, Taiwan
Other Committees
I&C / EHS / FPD / PV /3DS IC Committee
In charge
Venue, Location, Date