Outlook of MEMS Foundry and Process Technology
Fourth Workshop for MEMS Consortium
When: 25th April 2011, 10.00 a.m. to 2.30 p.m.
Where: Institute of Microelectronics, Singapore
11 Science Park Road Singapore Science Park II Singapore 117685
Dr. Alissa M. Fitzgerald
Founder and managing member of A.M. Fitzgerald & Associates, LLC
Dr. Alissa M. Fitzgerald has over 15 years of hands-on engineering experience in MEMS design, fabrication and product
development. She advises clients on the entire technology development cycle, from business and IP strategy, to initial design and
prototyping, all the way through to foundry transfer. She is a recognized expert on reliability of brittle materials and is active in
the development of a proprietary MEMS fracture prediction tool. She has previously been employed by the Jet Propulsion
Laboratory, Orbital Sciences Corporation, Sigpro, and Sensant Corporation (acquired by Siemens). Dr. Fitzgerald received her
bachelor and master degrees from the Massachusetts Institute of Technology and her doctorate from Stanford University. She is
also a frequent lecturer at UC Berkeley, Stanford University and local professional group meetings. Also, she serves on the
Governing Council of the MEMS Industry Group.
Abstract: “Opportunities and Challenges in the MEMS Industry”
The world has woken up to the usefulness of MEMS, as evidenced by the rapid proliferation of hand-held devices containing
MEMS sensors. Large markets are ahead for those who can make MEMS small and cheap enough for integration into consumer
electronics. This talk will cover on how the MEMS industry is really two industries (large volume vs. niche) and how different
business strategies are needed to address them. The differences between the semiconductor and the MEMS foundry models, and
the key challenges for fabless MEMS companies to bring product to market will also be discussed. The MEMS industry, though
growing well, is still far from maturity. Areas of opportunity where companies with vision and resources that can innovate the
future of MEMS will be identified.
Mr. Kevin T Crofton
Exec VP & Chief Operating Officer of SPP Process Technology Systems (SPTS)
Kevin Crofton, the Exec VP & COO of SPTS is responsible for worldwide customer operations (Sales and Sevice) and the global
factory operations. He has 28 years of commercial industry experience, including 18 years in the semiconductor capital
equipment sector. Mr. Crofton began his Semi career at Lam Research Corporation, holding various positions including
Managing Director/General Manager of Lam’s CMP/Clean Business Unit. Since then, Mr. Crofton has held executive positions
at Newport Corporation and NEXX Systems. In 2006, he joined Aviza Technology, Inc., as Vice President and General Manager.
He was promoted to his current position in 2009 when SPP acquired most of the product lines of Aviza Technology, Inc. to
combine with Surface Technology Systems to create SPTS. He graduated from Virginia Tech with a B.S. in Aerospace
Engineering and received his MBA from American University. Mr. Crofton has published various technical and trade articles, as
well as been a keynote speaker in multiple Semi, MEMS, TSV and Fiber Optic/Photonic forums.
Abstract: “MEMS Manufacturing Comes of Age – Silicon Etching in Volume Production”
In recent years, MEMS have achieved a new level of prominence and attention due to the demand for motion sensors and
filters used in communication devices, gaming consoles and automotive products. SPP Process Technology Systems (SPTS)
provide a range of Etch, PVD, CVD, dry release and thermal processing solutions for MEMS production. This talk will focus on
Deep Reactive Ion Etch (DRIE) techniques and the successful transfer of technology from small scale development to full
volume production, which includes considerations for creating smooth sidewalls, and low structure tilt without compromising
system productivity. Case studies on effective/production proven manufacturing methods that deliver stable wafer to wafer
performance which ultimately translates into positive cost-of-ownership for device makers will also be presented.