Press Release
March 23rd, 2009 – Berlin, Germany / Watervliet, NY, USA
Helmholtz-Zentrum Berlin ordered electron-beam lithography system
from Vistec
Vistec Lithography Inc., a global supplier of electron-beam lithography systems,
announced that they have received a major order from Helmholtz-Zentrum Berlin in
Berlin-Adlershof for one of its Vistec EBPG5000plus electron-beam lithography systems.
The Helmholtz-Zentrum Berlin and Vistec Lithography Inc. will work together on further
enhance the Gaussian Beam system to fulfil the challenging requirements for generating
advanced diffractive optics required for the X-ray imaging activities at BESSY II, the only
German 3rd generation synchrotron radiation facility.
BESSY II is now operated by the new Helmholtz-Zentrum Berlin für Materialien und Energie
GmbH (HZB), which has been formed by the merger of the Hahn-Meitner-Institut Berlin (HMI)
and BESSY. Beside other synchrotron applications Helmholtz-Zentrum Berlin pursues on highresolution X-ray microscopy.
Fresnel zone plates are the key elements for high resolution X-ray microscopy. The achievable
resolution of an X-ray microscope depends strongly on the optical performance of the Fresnel
lenses. This is where the new electron-beam lithography system comes into play. The Vistec
EBPG5000plusES is used for patterning Fresnel zone plates with a minimum zone width below
20 nm, in combination with superb placement and overlay figures. It’s worth saying that the
system can also be used for more standard e-beam lithography applications.
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
ines.stolberg@vistec-semi.com
www.vistec-semi.com
Vistec Electron Beam GmbH
Goeschwitzer Straße 25
D-07745 Jena
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
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Press Release
“The EBPG5000plusES combines both excellent resolution and the highest accuracy, which
allows us to pattern the most enhanced Fresnel optics for soft and hard X-rays. With the new ebeam lithography system, we expect to develop stacked zone plates with unique performance in
spatial resolution and efficiency for the soft and hard X-ray photon energy range”, said Dr. Gerd
Schneider, Head of the X-ray microscopy activities at the Helmholtz-Zentrum Berlin.
The order from HZB is in line with other Vistec electron-beam lithography systems currently
installed at leading edge research institutes worldwide. Based on reliable and well-proven
system architecture, the Vistec EBPG5000plusES system provides a spot size down to <2.2nm
at 100keV beam energy, thus allowing nano-lithography structures smaller than 8nm to be
routinely generated. As a result of its high flexibility and easy–to-use software, the
EBPG5000plusES has become the “system of choice” in the research community.
“We are very pleased to have received this order from the Helmholtz-Zentrum Berlin für
Materialien und Energie GmbH. We are looking forward to contributing to the success of our
customers’ challenging projects with our electron-beam technology”, says Rainer Schmid,
General Manager at Vistec Lithography Inc.
Media information:
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH
Established in January 2009, the Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (HZB)
merged two of Berlin´s largest research institutes, the Hahn-Meitner-Institut and BESSY into one centre.
The two large scale facilities of the Helmholtz-Zentrum Berlin, the neutron source BER II and the
synchrotron radiation source BESSY II, serve more than 2000 scientists from universities, research
institutes and industry. The complementary research with photons and neutrons places the HZB in a
unique position to address the needs of the international scientific community in physics, chemistry, and
materials and life sciences. The HZB intends to further the combined research with photons and
neutrons. www.helmholtz-berlin.de
The centres´ own research activities are largely concentrated in materials research with a focus on:
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Materials for Solar Energy Technology
Large Scale Facilities
Magnetic Materials
Functional Materials
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
ines.stolberg@vistec-semi.com
www.vistec-semi.com
Vistec Electron Beam GmbH
Goeschwitzer Straße 25
D-07745 Jena
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
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Press Release
Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and supplier of electron-beam
lithography systems with applications ranging from nano and bio-technology to photonics and industrial
environments like mask making or direct writing for fast prototype development and design evaluation.
Vistec Electron Beam Lithography Group combines Vistec Electron Beam and Vistec Lithography.
Vistec Lithography
Vistec Lithography develops, manufactures, and sells electron-beam lithography equipment based on
Gaussian Beam technology. Their electron-beam systems are world-wide accepted in advanced research
laboratories and universities. The company is located in Watervliet, NY (USA), within the Capital Region
of New York.
Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based on Shaped Beam
technology, which is used by leading semiconductor manufacturers and many research institutes around
the world. Their innovative electron-beam systems are used for microchip production and integrated
optics as well as for scientific and commercial research. The company is located in Jena (Germany).
For downloads of all media releases and images in print quality please visit the website
at www.vistec-semi.com. If you require other formats or images please do not hesitate to
contact us.
Media contact:
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
Vistec Electron Beam GmbH
Goeschwitzer Straße 25
D-07745 Jena
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
Vistec Electron Beam GmbH
Goeschwitzer Straße 25
D-07745 Jena
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
pr@vistec-semi.com
www.vistec-semi.com
PR Agency
Tower PR
Leutragraben 1
D-07743 Jena
Tel.: +49(0)3641/507081
vistec@tower-pr.com
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
ines.stolberg@vistec-semi.com
www.vistec-semi.com
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