Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
1: CHEMICAL PRODUCT AND SUPPLIER INFORMATION
Trade Name:
ROYALSIL -HI-PURITY-MTMS
Chemical Name:
Methyl trimethoxysilane
Supplier:
ROYALSIL Inc.
25 Lancelot Lane
Mount Laurel, NJ 08054
Phone Number:
(856)866-0038
Use of the Substance/Preparation Function: For industrial & Research use only.
US: CHEMTREC emergency number:
800-424-9300
2: COMPOSITION INFORMATION ON COMPONENTS
Chemical Name:
Methyltrimethoxysilane
98.0% +
Methyl Alcohol
<.20%
TLV for Methanol: 200 ppm – skin
HEALTH: 3 FLAMMABILITY: 4 REACTIVITY: 1
CAS#: 1185-55-3
EINECS#: 214-685-0
CAS#: 67-56-1
HMIS CODES:
Formula:
C4H12O3Si
Molecular Weight:
136.22
Minor impurities:
Not determined
CAS Number:
2031-67-6
Other Information:
The material is classified as hazardous under OSHA regulations.
HMIS
Flammability: 3 Reactivity: 4 Health
Boiling Point: 102-3 C
Melting Point: <0 C
Specific Gravity: 0.955
Vapor Pressure @25 C: Not Determined
Vapor Density, Air = 1: > 1
Solubility in water: Insoluble, reacts.
% Volatiles: 100
Evaporation Rate
(Butyl Acetate = 1): < 1
Viscosity: 0.5 cSt
Molecular Weight: 136.22
Appearance & Color: Clear liquid, characteristic odor.
Note(s): Additional methanol may be formed by reaction with moisture.
3: HAZARD IDENTIFICATION: WARNING: Flammable liquid and vapor. Causes eye and skin irritation. May casue
respiratory and digestive tract irritation. Methyl Alcohol forms on contact with water and humid air. Provide
adequate ventilation to control exposures within guidelines of OSHA PEL: TEA 200 ppm and ACGIH TLV-skin:
TWA 200 ppm, STEL
POTENTIAL HEALTH EFFECTS:
EYE: Causes mild eye irritation
SKIN: Causes Mild skin irritation.
INGESTION: May cause irritation of the digestive tract.
CHRONIC: No information found.
INHALATION: May cause respiratory tract irritation. Vapors may cause dizziness and suffocation.
HMIS
Flammability: 3 Reactivity: 4 Health
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
4: FIRST AID MEASURES:
Eyes: Flush eyes with plenty of water for at least 15 minutes, occasionally lifting the upper and lower eyelids.
Get medical aid immediately.
Skin: Get medical aid immediately. Flush skin with plenty of water for at least 15 minutes while removing
contaminated clothing and shoes. Wash clothing before reuse.
Ingestion: If victim is conscious and alert, give 2-4 cupfuls of milk or water. Never give anything by mouth to an
unconscious person. Get medical aid immediately.
Inhalation: Remove from exposure and move to fresh air immediately. If not breathing, give artificial
respiration. If breathing is difficult, give oxygen. Get medical aid.
Notes to Physician: Treat symptomatically and supportively.
5: FIRE, FLAMMABIITY & EXPLOSION INFORMATION:
Flash Point – 11 C (54F)
Autoignition Temp: Not Determined.
FLAMMABLE LIMITS IN AIR - LOWER (%): 1.2 % (V)
FLAMMABLE LIMITS IN AIR - UPPER (%): 1.2 % (V)
NFPA RATING: (estimated) HEALTH: 1 ; FLAMMABILITY: 4 INSTABILITY: 0
EXTINGUISHING MEDIA: For small fires, use dry chemical, carbon dioxide, water spray or alcohol-resistant
foam. For large fires, use water spray, fog, or alcohol-resistant foam. Use water spray to cool fire-exposed
containers. Water may be ineffective. Use agent most appropriate to extinguish fire. Do NOT use straight
streams of water.
SENSITIVITY TO STATIC: CHARGE: Sensitivity to static charge is expected. Material has a flash point below 200
degrees Farenheit.
SPECIAL FIRE FIGHTING PROCEDURES: Firefighters must wear NIOSH/MSHA approved positive pressure selfcontained breathing apparatus with full face mask and full protective clothing. Vapors extremely dangerous to
eyes. Avoid eye and skin contact. Do not breath fumes or inhale vapors.
Unusual Fire & Explosion hazards: Irritation fumes and organic acid vapors may develop when material is
exposed to elevated temparatures or open flames.
PRECAUTIONS FOR FIREFIGHTER: Vapors may form from this product and may travel or be moved by air
currents and ignited by pilot lights, other flames, sparks, heaters, electrical equipment, static discharges or
other ignition sources at locations distant from the product handling point. Vapor may ingnite by static sparks.
Use proper bonding and grounding during material transfer.
6: ACCIDENTAL RELEASE INFORMATION: ACTION TO BE TAKEN IF MATERIAL IS RELEASED OR SPILLED
Wipe, scrape or soak up in an inert material (Vermiculite, sand or earth)and put in a container for disposal.
Wash walking surfaces with detergent and water to reduce slipping hazard. Wear proper protective equipment
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
as specified in the protective equipment section. Remove all sources of ignition. Use a spark-proof tool. Provide
ventilation. A vapor suppressing foam may be used to reduce vapors.
7: STORAGE AND HANDLING INFORMATION:
Shelf Life: When stored under recommended conditions the product will be viable for 1 year after the drum is
opened. It is recommended to use a Drierite System or similar device if you cannot purge with Nitrogen every
time you open the drum.
HANDLING:
Avoid contact with skin and eyes. Keep away from children. Attention: Not for injection into humans.
Use ground strap and appropriate precautions for dispensing flammable liquids.
Avoid contact with eyes, skin, and clothing. Keep out of reach of children.
Keep away from heat, sparks and open flame. Keep container closed.
Use only spark proof and explosion proof tools and equipment.
Avoid inhalation of vapors and spray mists.
Do not taste or swallow.
ATTENTION: Not for injection into humans.
OTHER PERECAUTIONS: DANGER! Harmful if swallowed due to methanol production in the stomach. Since
accurate health hazard data is not available, appropriate care should be taken in handling this material.
STORAGE: Keep away from heat, sparks, and flame. Keep away from sources of ignition. Store in a tightly closed
container. Store in a cool, dry, well-ventilated area away from incompatible substances. Flammables-area.
Keep container tightly closed. Purge opened containers with bone dry inert gas before resealing.
8: PERSONAL PROTECTION & EXPOSURE CONTROLS:
ENGINEERING CONTROLS: Use only in an area equipped with a safety shower.; Eye wash bottle with pure water;
General (mechanical) room ventilation is expected to be satisfactory if handled at low temperatures or in
covered equipment.; Special, local ventilation is needed at points where vapors can be expected to escape to
the workplace air. Facilities storing or utilizing this material should be equipped with an eyewash facility and a
safety shower. Use adequate ventilation to keep airborne concentrations low.
Exposure Limits
Chemical Name
ACGIH
NIOSH
OSHA - Final PELs
Methyltrimethoxysilane
none listed
none listed
none listed
OSHA Vacated PELs:
Methyltrimethoxysilane: No OSHA Vacated PELs are listed for this chemical.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
PERSONAL PROTECTIVE EQUIPMENT
EYES: Wear appropriate protective eyeglasses or chemical safety goggles as described by OSHA's eye and face
protection regulations in 29 CFR 1910.133 or European Standard EN166.
SKIN: Wear appropriate protective gloves to prevent skin exposure.
CLOTHING: Wear appropriate protective clothing to prevent skin exposure.
RESPIRATORS: A respiratory protection program that meets OSHA's 29 CFR 1910.134 and ANSI Z88.2
requirements or European Standard EN 149 must be followed whenever workplace conditions warrant a
respirator's use. If exposure limits are exceeded or respiratory irritation is experienced, NIOSH/MSHA approved
respiratory protection should be worn. Supplied air respirators may be required for non-routine or emergency
situations. Respiratory protection must be provided in accordance with OSHA regulations (see 29CFR 1910.134).
PROTECTIVE GLOVES: Impermeable or chemical resistant gloves.
OTHER PROTECTIVE EQUIPMENT: Safety shoes; Protective suit
Exposure Guidelines
Component CAS RN Source Value
Methanol 67-56-1 ACGIH, TWA 200 ppm
Methanol 67-56-1 ACGIH, STEL 250 ppm
Methanol 67-56-1 ACGIH, SKIN_DES Can be absorbed through the skin.
Methanol 67-56-1 OSHA Z1, PEL 200 ppm; 260 mg/m3
Absence of values indicates none found
PEL - OSHA Permissible Exposure Limit; TLV - ACGIH Threshold Limit Value; TWA - Time Weighted Average
OSHA revoked the Final Rule Limits of January 19, 1989 in response to the 11th Circuit Court of Appeals decision
(AFL-CIO v. OSHA) effective June 30, 1993. See 29 CFR 1910.1000 (58 FR 35338).
9: PHYSICAL & CHEMICAL INFORMATION:
BOILING POINT – C : 102 °C @ 760.00 mmHg
VAPOR PRESSURE (20 C) (MM HG): 31
VAPOR DENSITY (AIR=1): Heavier than air
FREEZING POINT: < -70 °C; < -94 °F
MELTING POINT: < -70 °C; < -94 °F
PHYSICAL STATE: Liquid
ODOR: Ester-like
COLOR: Clear, colorless.
EVAPORATION RATE (BUTYL ACETATE=1): < 1
DENSITY: 1.0690 g/cm3
pH: No data available
VOLATILE ORGANIC CONTENT (VOL): No data available
SOLUBILITY IN WATER (20 C): Reacts slowly with water.
VOC EXCL. H2O & EXEMPTS (G/L): 1065.87
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
10: REACTIVITY & STABILITY:
STABILITY: This chemical is considered stable under normal temperatures and pressures.
HAZARDOUS POLYMERIZATION: Has not been reported.
HAZARDOUS THERMAL DECOMPOSITION / COMBUSTION PRODUCTS:
Burning can produce the following combustion products:; Oxides of carbon.; Oxides of silicon.; Carbon
monoxide is highly toxic if inhaled; carbon dioxide in sufficient concentrations can act as an
asphyxiant.; Acute overexposure to the products of combustion may result in irritation of the
respiratory tract.
INCOMPATIBILITY (MATERIALS TO AVOID):
Strong oxidizing agents. Reacts with water or moisture to form: Methanol. Water, strong oxidizing agents,
strong acids, moisture.
CONDITIONS TO AVOID:
Avoid temperatures: >300 °C Avoid contact with: Excessive temperatures. Open flame. Sparks.
Ignition sources.
11: TOXICOLOGICAL INFORMATION
ACUTE ORAL:
LD50; Species: Rat; 11,685 mg / kg
ACUTE DERMAL:
LD50; Species: Rat; >9,500 mg / kg
ACUTE INHALATION: LD50; Species: Rat; 42.1 mg / l Method: OCED Test Guidelines 403
OTHER:
Two inhalation studies have shown that repeated exposure to trimethoxysilane vapor
produces injury and inflammation to the entire respiratory tract.
The no effects concentration is around 0.2 ppm.
Both Studies also showed an effect on the lymphoid tissues, with decreased spleen rate and decreased number
of circulating lymphocytes.
One study also showed , on light microscopy, a depetion of lymphoid tissue in the speen, thymyus, and lymph
nodes.
The no effects concentrations was 0.2ppm.
A follow up 90 day subchronic vapor inhalation study indicated a no effects concentration of 0.5 ppm.
SKIN IRRATATION: Species Rabbit
Result: No skin irritation. Method. OCED Test Guidline 404
EYE IRRATATION: Species: Rabbit
Result: No eye irritation. Method: OCED Test Guidline 405.
OTHER EFFECTS OF OVEREXPOSURE: No adverse effects anticipated from available information.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
12: ENVIRONMENTAL & ECOLOGICAL INFORMATION
ECOTOXICOLOGY: All available ecological data have been taken into account for the development of the hazard
and precautionary information contained in this Safety Data Sheet.
13: DISPOSAL INFORMATION
DISPOSAL METHOD: Disposal should be made in accordance with federal, state and local regulations.
Chemical waste generators must determine whether a discarded chemical is classified as a hazardous waste. US
EPA guidelines for the classification determination are listed in 40 CFR Parts 261.3. Additionally, waste
generators must consult state and local hazardous waste regulations to ensure complete and accurate
classification.
RCRA P-Series: None listed.
RCRA U-Series: None listed.
14: TRANSPORT INFORMATION:
US DOT
Shipping Name:
FLAMMABLE
LIQUIDS,
N.O.S.
Hazard Class:
3
UN Number:
1993
Packing Group:
II
IATA
RID/ADR
IMO
Canada
TDG
No
information
available.
Section 15 - Regulatory Information
US FEDERAL
TSCA : CAS# 1185-55-3 is listed on the TSCA inventory.
Health & Safety Reporting List: None of the chemicals are on the Health & Safety Reporting List.
Chemical Test Rules: None of the chemicals in this product are under a Chemical Test Rule.
Section 12b: None of the chemicals are listed under TSCA Section 12b.
TSCA Significant New Use Rule: None of the chemicals in this material have a SNUR under TSCA.
SARA
CERCLA Hazardous Substances and corresponding RQs:None of the chemicals in this material have an RQ.
SARA Section 302 Extremely Hazardous Substances: None of the chemicals in this product have a TPQ.
Section 313: No chemicals are reportable under Section 313.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
Clean Air Act:
This material does not contain any hazardous air pollutants. This material does not contain any Class
1 Ozone depletors. This material does not contain any Class 2 Ozone depletors.
Clean Water Act:
None of the chemicals in this product are listed as Hazardous Substances under the CWA. None of the chemicals
in this product are listed as Priority Pollutants under the CWA. None of the chemicals in this product are listed
as Toxic Pollutants under the CWA.
OSHA:
None of the chemicals in this product are considered highly hazardous by OSHA.
STATE
CAS# 1185-55-3 is not present on state lists from CA, PA, MN, MA, FL, or NJ.
California No Significant Risk Level: None of the chemicals in this product are listed.
European/International Regulations
European Labeling in Accordance with EC Directives
Hazard Symbols:
F
Risk Phrases:
R 10 Flammable.
&
R 11 Highly flammable.
Safety Phrases:
S 16 Keep away from sources of ignition - No smoking.
S 33 Take precautionary measures against static discharges.
S 9 Keep container in a well-ventilated place.
WGK (Water Danger/Protection) - CAS# 1185-55-3: 1
Canada - DSL/NDSL - CAS# 1185-55-3 is listed on Canada's DSL List.
Canada – WHMIS - This product has a WHMIS classification of B2, D2B.
Canadian Ingredient Disclosure List
CAS# 1185-55-3 is listed on the Canadian Ingredient Disclosure List.
16 – ADDITIONAL INFORMATION
This data is offered in good faith as typical values and not as product specifications.
No warranty, either expressed or implied, is made.
The recommended industrial hygiene and safe handling procedures are believed to be generally applicable.
However, each user should review these recommendations in the specific context of the intended use and
determine whether they are appropriate.
SKN = skin
NT = not tested
NF = none found
R =recommended
NE = none established
ppm =parts per million
By-product= reaction by-product
MST = mist
C = ceiling limit
TS = trade secret
EST = estimated
NEGL = negligible
UNKN = unknown
NA = not applicable
REC = recommended
ND =none determined
ppb = parts per billion
V = recommended by vendor STEL = short term exposure limit
TSCA inventory status not required under 40 CFR part 720.30(h-2).
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTMS
DISCLAIMER: This chemical is to be used exclusively for R & D and Industrial use only unless elsewhere
specified as such. Not for drug, household or other uses.
WARRANTY: The above information is believed to be correct but does not purport to be all inclusive
and shall be used only as guidance for safe handling, use, processing, storage, transportation, disposal
and release and is not to be considered a warranty or quality specification.
The information relates only to the specific material designated and may not be valid for such
materials used in combination with any other materials or in any process, unless specified by text.
The reseller, ROYALSIL Inc., shall not, under any and all conditions, be held liable for any damage
resulting from handling or from contact with the above mentioned product.
The information above is believed to be accurate and represents the best information currently
available to us. However, ROYALSIL INC. and all affililiated with ROYALSIL INC make no warranty of
merchantability or any other warranty, express or implied, with respect to such information, and we
assume no liability resulting from its use.
Users should make their own investigations to determine the suitability of the information for their
particular purposes. In no event shall ROYALSIL INC and all affiliated with ROYALSIL INC be liable for
any claims, losses, or damages of any third party or for lost profits or any special, indirect, incidental,
consequential or exemplary damages, howsoever arising, even if Fisher has been advised of the
possibility of such damages.
Last Modified: 11-24-10
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