Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
1: SUBSTANCE AND SUPPLIER INFORMATION
Trade Name:
ROYALSIL -HI-PURITY-MTES
Chemical Name:
Methyl triethoxysilane
Supplier:
ROYALSIL Inc.
25 Lancelot Lane
Mount Laurel, NJ 08054
Phone Number:
(856)866-0038
Use of the Substance/Preparation Function: For industrial & Research use only.
US: CHEMTREC emergency number:
Canada: CANUTEC Emergency number:
800-424-9300
613-996-6666
2: COMPOSITION INFORMATION ON COMPONENTS
Chemical Name:
Methyltriethoxysilane
99.0%
CAS#: 2031-67-6
Ethyl Alcohol
00.1% Max
CAS#: 64-17-5
Alternative Names:
Triethoxymethylsilane
Formula:
C7H18O3Si = 178.30 MW
Minor impurities:
Not determined
CAS Number:
2031-67-6
EINECS Number:
217-983-9
Other Information:
The material is classified as hazardous under OSHA regulations.
Note(s): Additional ethanol may be formed by reaction with moisture.
Ethanol
64-17-5 < 0.2 %
3: HAZARDS INFORMATION
HMIS
NFPA
Flammability: 2 Reactivity: 3 Health: 1
Flammability: 2 Reactivity: 3 Health: 1
APPEARANCE: Clear, colorless liquid. Flash Point: 23 degree C. Moisture Sensitive.
WARNING! Flammable liquid and vapor. May cause central nervous system depression. Causes eye and skin
irritation. May cause digestive tract irritation. Causes Respiratory tract irritation.
TARGET ORGANS: Central Nervous System.
SKIN: Causes minor irritation. Causes the following effects: - local discomfort - local redness Increased
pigmentation of the skin may occur. May cause cyanosis of the extremities.
INHALATION: Causes respiratory tract irritation. Vapors may cause dizziness or suffocation. Can produced
delayed pulmonary edema. May cause burning sensation of the chest.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
EYES: Causes mild irritation. Causes the following effects: - discomfort - pain - excess blinking - tear
production - marked excess redness of the conjunctivae - swelling of the conjunctivae
INGESTION: May cause gastrointestinal irritation with nausea, vomiting or diarrhea. Ingestion of large amounts
may cause CNS depression.
CHRONIC EFFECTS / CARCINOGENICITY: This product or one of its ingredients present at 0.1% or more is NOT
listed as a carcinogen or suspected carcinogen by NTP, IARC, or OSHA.
4: SAFETY INFORMATION AND FIRST AID MEASURES
INGESTION: If victim is conscious and alert, give 204 cupfuls of milk or water. NEVER give anything by mouth to
an unconscious person. Call for medical assistance immediately.
SKIN: Wash off immediately with soap and plenty of water while removing all contaminated clothes and
shoes. Wash contaminated clothing before re-use. Obtain medical attention.
INHALATION: Remove to fresh air. If not breathing give artificial respiration and/or oxygen may be necessary.
Obtain medical attention immediately.
EYES: Rinse immediately with plenty of water, also under the eyelids, for at least 15 minutes. Obtain
medical attention.
NOTE TO PHYSICIAN: Treat symptomatically and supportively.
5: FIRE & FLAMMABIITY INFORMATION:
FLASH POINT: 23 °C (73.4 °F)
GENERAL INFORMATION: As in any fire, wear a self contained breathing apparatus in pressure demand,
MSHA/NIOSH (approved or equivalent) and full protective gear. Vapors may form an explosive mixture with air.
Vapors can travel to a source of ignition and flash back. During a fire, irritating and highly toxic gases may be
generated by thermal decomposition or combustion. Will burn if involved in a fire. Use water spray to keep fire
exposed containers cool. Water may be ineffective. Material is lighter than water and fire may spread by use of
water. Containers may explode in the heat of the fire. Flammable liquid and vapor. Vapors may be heavier than
air. They can spread along the ground and collect in low or confined areas.
EXTINGUISHING MEDIA: All standard extinguishing agents are suitable.
For small fires use dry chemical, carbon dioxide, water spray or alcohol resistant foam.
For large fires use water spray, fog, or alcohol resistant foam.
Use water spray to cool fire exposed containers. Water may be ineffective. MTES is lighter than water and
insoluble in water. The fire could easily spread by use of water in an area where the water cannot be contained.
Use agent most appropriate to extinguish fire. DO not get water inside containers. Do not use straight streams
of water.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
SPECIAL FIRE FIGHTING PROCEDURES: Firefighters must wear NIOSH/MSHA approved positive pressure selfcontained breathing apparatus with full face mask and full protective clothing.
6: ACCIDENTAL RELEASE INFORMATION: ACTION TO BE TAKEN IF MATERIAL IS RELEASED OR SPILLED
General Information: use proper personal protective equipment as indicated in Section 8.
SPILLS / LEAKS: Absorb spills with inert material (e.g. Vermiculite, Sand or earth) then place in a suitable
container. Clean up spills immediately, observing precautions in the Protective Equipment section. Use a sparkproof tool. Provide ventilation. Do not get water inside the containers. A vapor suppressing foam may be used
to reduce vapors.
7: STORAGE AND HANDLING INFORMATION:
SHELF LIFE: When stored under recommended conditions the product will be viable for 1 year after the drum is
opened. It is recommended to use a Drierite System or similar device if you cannot purge with Nitrogen every
time you open the drum.
HANDLING: Ground and bond containers when transferring material. Use spark proof tools and explosion proof
equipment. Avoid contact with eyes, skin and clothing. Empty containers retain residue (liquid and / or vapor)
and can be dangerous. Keep container tightly closed. Keep away from heat, sparks and flame. Avoid ingestion
and inhalation. Do not allow contact with water. Do not pressurize, cut, weld braze, solder, drill, grind or expose
empty containers to heat, sparks or flames. Keep from contact with moist air and steam.
STORAGE:
Keep container tightly closed. Purge opened containers with bone dry inert gas before resealing. Keep away
from heat, sparks and flame. Keep away from sources of ignition. Store in cool, dry, well ventilated area away
from incompatible substances. Store protected from moisture.
8: PERSONAL PROTECTION & EXPOSURE CONTROLS & GUIDELINES:
ENGINEERING CONTROLS: Facilities storing or utilizing this material should be equipped with a safety shower.;
Eye wash bottle with pure water; General (mechanical) room ventilation is expected to be satisfactory if
handled at low temperatures or in covered equipment.; Special, local ventilation is needed at points where
vapors can be expected to escape to the workplace air. Use adequate general or local explosion-proof
ventilation to keep airborne levels to acceptable levels.
OSHA VACATED PELs: Methyltriethoxysilane: No OSHA vacated PELs are listed for this chemical.
PERSONAL PROTECTIVE EQUIPMENT:
EYE AND FACE PROTECTION: Wear appropriate protective eye glasses or chemical safety goggles as described
by OSHA’s eye and face protection regulations in 29 CFR 1910.133 or European Standard EN166
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
RESPIRATORY PROTECTION: If exposure limits are exceeded or respiratory irritation is experienced,
NIOSH/MSHA approved respiratory protection should be worn. Supplied air respirators may be required for
non-routine or emergency situations.
Respiratory protection program must be provided in accordance with OSHA regulations that meets 29CFR
1910.134 and ANSI Z88.2 requirements or European Standard EN149 must be followed when ever workplace
conditions warrant a respirator’s use.
SKIN: Wear appropriate protective clothing to prevent skin exposure.
PROTECTIVE CLOTHING: Impermeable or chemical resistant gloves. Wear appropriate protective clothing to
prevent skin exposure.
OTHER PROTECTIVE EQUIPMENT: Safety shoes; Protective suit.
9: PHYSICAL & CHEMICAL INFORMATION:
PHYSICAL STATE: Liquid.
APPEARANCE: Clear, colorless.
BOILING POINT – 141-143 °C @760.00 mmHg
VAPOR PRESSURE: 11 mm Hg @20 C
VAPOR DENSITY: 6.15
PHYSICAL STATE: Liquid
EVAPORATION RATE: Not Available.
DENSITY: 0.8950 g/cm3
pH: No data available
VOLATILE ORGANIC CONTENT (VOL): No data available
SOLUBILITY: Insoluble.
10: REACTIVITY & STABILITY:
STABILITY: This chemical is considered stable under normal temperatures and pressures.
INCOMPATIBILITY (MATERIALS TO AVOID): Incompatible materials, ignitions sources, moisture, excess heat,
strong oxidants.
HAZARDOUS POLYMERIZATION: Has not been reported.
HAZARDOUS DECOMPOSITION / COMBUSTION PRODUCTS:
Carbon monoxide, irritating and toxic fumes and gases, carbon dioxide, silicon dioxide.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
11: TOXICOLOGICAL INFORMATION
Draize test, rabbit eye: 100 uL Mild
Draize test Rabbit, Skin: 500 mg / 24H mild.
Oral, rat: LD 50 = 8750 uL/Kg
Skin, Rabbit: LD50 = 13300 uL/Kg; < BR
CARCENOGENICITY: Not listed by ACGIH, IARC, NIOSH, NTP or OSHA.
Epidemiology: No Information Available.
Teratogenicity: No Information Available.
Reproductive Effects: No Information Available.
Neurotoxicity: No Information Available.
Mutagenicity: No Information Available.
OTHER EFFECTS OF OVEREXPOSURE: No adverse effects anticipated from available information.
12: ENVIRONMENTAL & ECOLOGICAL INFORMATION
ECOTOXICOLOGY: No information available.
13: DISPOSAL INFORMATION
DISPOSAL METHOD: Disposal should be made in accordance with federal, state and local regulations.
Chemical waste generators must determine whether a discarded chemical is classified as a hazardous waste.
U.S. EPA guidelines for the classification determination are listed in 40 CFR Parts 261.3. Additionally, waste
generators must consult state and local waste regulations to ensure complete and accurate classification.
RCRA P-Series: None Listed
RCRA U- Series: Non Listed.
14: TRANSPORT INFORMATION:
Hazard Class: 3
UN Number: UN1993
Packing Group: III
15: REGULATORY INFORMATION
REGISTRATIONS: This product is registered in the European Union (EINECS/ELINCS) Australia (AICS) Canada
(DSL/NDSL), Philippines (PICCS), USA (TSCA), P.R> China (IECS) Japan (ENCS and South Korea (ECL)
Health & Safety Reporting List: None of the chemicals are on the Health & Safety Reporting List.
Chemical test Rules: None of the chemicals in this product are under a Chemical Test Rule.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
Section 12 B: None of the chemicals are listed under TSCA Section 12b.
TSCA Significant New Use Rules: None of the chemicals in this material have a SNUR under TSCA.
SARA
CERCLA Hazardous Substances and corresponding RQ’s.
None of the chemicals in this material have an RQ
SARA Section 302 Extremely Hazardous Substances:
None of the chemicals in this product have a TPQ
Section 313
No chemicals are reportable under Section 313
CLEAN AIR ACT: This material does not contain any hazardous air pollutants. This material does not contain any
Class 1 Ozone depletors. This material does not contain any Class 2 Ozone depletors.
CLEAN WATER ACT: None of the chemicals in this product are listed as Hazardous Substances under CWA. None
of the chemicals in this product are listed as Priority Pollutants under CWA. None of the chemicals in this
product are listed as Toxic Pollutants under CEA.
OSHA: None of the chemicals in this product are considered highly hazardous by OSHA.
STATE: CAS # 2031-67-6 is not present on state list from CA, PA, MN, MA, FL or NJ. California No Significant Risk
Level: None of the chemicals in this product is listed.
EUROPEAN / INTERNATIONAL REGULATIONS: European Labeling in Accordance with EC Directives.
HAZARD SYMBOLS: Not available.
RISK PHRASES: R 10 Flammable.
SAFETY PHRASES: S 16 Keep away from sources of ignition – No Smoking
S 33 Take Precautionary measures against static charges.
S 9 Keep container in well ventilated place.
WGK (Water danger / Protection) CAS # 2031-67-6: No Information available.
Canada – WHMIS: This product does not have a WHMIS classification.
Canadian Ingredient Disclosure List: CAS # 2031-67-6 is listed on the Canadian Ingredient Disclosure List.
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Material Safety Data Sheet
ROYALSIL HI-PURITY MTES
16 – ADDITIONAL INFORMATION: The recommended industrial hygiene and safe handling procedures are
believed to be generally applicable. However, each user should review these recommendations in the specific
context of the intended use and determine whether they are appropriate.
DISCLAIMER: This chemical is to be used exclusively for R & D and Industrial use only unless elsewhere specified
as such. Not for drug, household or other uses.
WARRANTY: No warranty, either expressed or implied, is made. This data is offered in good faith as typical
values and not as product specifications. The above information is believed to be accurate and correct and
represents the best currently information available to us but does not purport to be all inclusive and shall be
used only as guidance for safe handling, use, processing, storage, transportation, disposal and release and is not
to be considered a warranty or quality specification.
Users should make their own investigations to determine the suitability of this information for their particular
purposes.
The information relates only to the specific material designated and may not be valid for such materials used in
combination with any other materials or in any process, unless specified by text.
The reseller, ROYALSIL Inc., shall not, under any and all conditions, be held liable for any claims, losses or
damages of any third party or for the loss of profits or any special, indirect, incidental, consequential or
exemplary damages however resulting from handling or from contact with the above mentioned product even
if ROYALSIL Inc. has been advised of the possibility of such damages.
Last Modified: 04-11-12
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