Integrated Systems Nanofabrication Cleanroom
Overview
Steve Franz
Technical Director of ISNC
Lab Manager, NRF
October 6, 2010
Integrated Systems Nanofabrication Cleanroom
Overview
Pronounced ī-sink
Steve Franz
Technical Director of ISNC
Lab Manager, NRF
October 6, 2010
ISNC Objectives
– Provide a state-of-the-art nanofabrication facility that is
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Open to all UCLA and academic researchers
Available to Industry and Government users
Is professionally managed and safe
Keeps current in new process techniques and latest equipment
– Support CNSI’s broader mission
– Complement and support other
CNSI Cores and UCLA labs eg NRF
– Provide mentoring opportunities
• Scientists, students and teachers
– Work with industry and government to
provide more and better jobs and the
educated work force to fill them
October 6, 2010
ISNC Clean Room Layout
Occupies entire A level
Clean Room Space (~9700 sq. ft.)
Class 100 – Yellow Bays- 2750 sq ft
Class 1000-700 sq ft support space
Dedicated service chases
October 6, 2010
Class 1000 – White Bays- 6250 sq ft
6 Bays for standard processing equipment
2 Bays are Bio-suites with separate negative air flow
ISNC Clean Room Facilities
• Bulk high purity N2 system with point-of-use purification
• High Purity DI water loop (18 Meg ohm cm)
• Regular and scrubbed exhaust
• Low vibration flooring (<< Class D 250 micro inches per sec)
• Waste neutralization system (End of year)
• Electrical single and 3 phase (120, 208, 480V) throughout
lab with low noise grounds at selected locations
• Remote gas room for toxic and reactive gas storage
• Complete utility drops in each chase
October 6, 2010
ISNC Staffing & NRF Support Engineers
Name
Area
Kang Wang
Faculty Director
Steve Franz
Technical Director
Adriane Nolan
Administrative Assistant
Brian Matthews
Office Location
Email
Telephone
franz@nanolab.ucla.edu
310-206-8923
CNSI - B128
anolan@cnsi.ucla.edu
310-206 8324
Research Engineer
CNSI – A216
matthews@cnsi.ucla.edu
310-983-3255
Ghassan Malek
Lithography
CNSI – A216
ghassan@cnsi.ucla.edu
310-983-3179
Da Teng
Lithography & Etch
CNSI – A216
teng@seas.ucla.edu
310-983-1107
Yuwei Fan
Nano-Lithography
CNSI – A216
ywfan@ee.ucla.edu
310-983-3257
Lorna Tokunaga
Krissy Do
Wet & Thermal Process
Assistant
Cleanroom Support &
Equipment Engineering
CNSI – A216
CNSI – A216
lornat@cnsi.ucla.ed
310-983-3413
CNSI – A216
tonywright@cnsi.ucla.edu
310-983-1182
Tony Wright
E-IV – 14-131A
NRF Support Engineers
Tom Lee
Etch
E-IV – 14-131A
leet888@yahoo.com
310-206-4641
Hoc Ngo
Metals
E-IV – 14-131A
hoc@seas.ucla.edu
310-206-5528
Huynh Do
PECVD
E-IV – 14-131A
huynhd@seas.ucla.edu
310-206-4641
Wilson Lin
Thin Film, Metrology, & ALD
E-IV – 14-131A
yousheng@seas.ucla.edu
310-206-8923
Joe Zendejas
Mask Shop & 2 Shift
FIB & SEM
E-IV – 14-131A
zendejas@ee.ucla.edu
310-206-5528
E-IV – 14-131A
nbodzin@seas.ucla.edu
310-983-3312
Noah Bodzin
October 6, 2010
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Lab Operations
• Staffed Hours of Operation
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M-F, 8 AM to 10 PM
Some operations allowed only during staff hours
Yearly recertification planned (online)
Buddy system always in effect
• Responsible Engineer List with backup for each equipment
online and at tool.
• Lab Rules and Etiquette
– Spelled out in Lab Manual, at Orientation and at Walkthru
• Periodic Lab Cleanups need participation of all users
• Quarterly user meetings to improve Lab Operations
• Periodic faculty user meetings for strategic planning
October 6, 2010
Lab Management System
• Information & documents (Web Based)
– http://www.isnc.cnsi.ucla.edu
– Lab Manual,
– Equipment Specs,
– Forms and applications,
– Orientation notes,
– Calendar,
– Contact info,
– Important links (http://www.cnsi.ucla.edu,
http://www.nanolab.ucla.edu)
• Announcements and inter-user communication (Email)
– isnc-users@lists.ucla.edu
October 6, 2010
Lab Management System
www.isnc.cnsi.ucla.edu
October 6, 2010
Lab Management System
• Lab Access
– Badge readers for lab entry and exit
– Records time inside cleanroom
• Equipment Access & Tracking
– Touch-Screen Terminals with interlock box on
major equipment
– Activate and de-activate equipment
– Record time equipment used
– Log books to record equipment-specific data
October 6, 2010
Lab Management System
Cleanroom Entrance
Badge Reader
Green Light When
Door is Unlocked
Badge
Reader
CNSI badges must be programmed for ISNC entry
October 6, 2010
Lab Management System
• Equipment Use
– Must be trained and authorized
– Must reserve equipment if wanted
at a specific time
– Must log into terminal to begin use
– Terminal software tracks time of use
– Must fill out dedicated log book at
start and end of each use
– In some cases staff can run for you
(eg for one time need)
– Terminals in main aisle throughout lab
– Terminals show equipment in use and users in the lab
– Major equipment will be hardware interlocked by end of
year
October 6, 2010
Lab Management System
• Custom Lab Management software
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Requires account for each new user
Tracks lab and equipment use
Manages and tracks training
Reserves equipment
Provides detailed info on equipment and users
Calendar for lab events
Admin level for reports, controlling access etc
• Phones & Paging System
– 7 telephones in cleanroom and 2 in corridor
– Paging can be used for local evacuation and can be
done from office
October 6, 2010
Lab Management System
http://lr.isnc.cnsi.ucla.edu
October 6, 2010
Laboratory Charges
Two-Tiered Rate Structure
Academic Rate
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Lower Rate
No monthly minimum
Faculty & Graduate Students
Undergraduate students
– Professor support and ISNC
approval required
Collaborators with Faculty
– UCLA PI & ISNC authorization
required
Non-Academic Rate
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Higher Rate
Monthly minimum
Industry & Government Labs
October 6, 2010
Becoming an ISNC Member
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Apply online for account
– http://clms.cnsi.ucla.edu/cnsi/clms/request-account
– Download New User Application
– Download Project Form
Sign up and attend 1st orientation meeting
– Held every 4th Friday of month
– Limited to 15 new users per month
– Submit New User Application & Project Form
– Pay $100 non-refundable new user fee for startup kit
Study User Guide
Take Online Safety Test
– http://www.isnc.cnsi.ucla.edu/test
Attend Lab walkthru (usually week after orientation)
October 6, 2010
New User Startup
• Storage
– Individual locker with locks inside cleanroom
– Day-use lockers outside of cleanroom
– Coat rack outside of cleanroom
• New User Startup Kit
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Tool Box
Tweezers
Cleanroom Notebook & Pen
Cleanroom Paper (100 Sheets)
Safety Glasses
October 6, 2010
New User Training
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Training takes time; Plan ahead and be patient
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Training is done by staff and superusers, experienced users authorized
to train others.
Training is done to a written procedure (specs) which are also online
and at the respective tool.
New users signup for specific training and are put on a wait list.
Training coordinator emails people on wait list to set up training time.
Training is done first come, first served except superusers are given
preference.
Training is held monthly for most equipment in small groups (5-7
people).
Complex equipment eg SEM, Stepper etc require a 2nd , certification
step with staff or superuser.
After authorization, trained user can reserve equipment and use
machine alone.
Superusers receive training credits equal to lab and equipment
charges.
October 6, 2010
Auxiliary Processing
• NRF
– LPCVD & PECVD Deposition processes
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Poly Si doped & undoped
Si3N4 Stnd and low stress
Low Temp Oxide Phos Doped & Undoped
Amorphous Si
Poly or amorphous silicon, Si oxide,
Deep (>2 micron) Si and Ox etches
Special metrology eg EDX, optical profiler, film stress
Lapping and polishing (Si, GaAs, glass etc)
FEI Nova 600 Focused Ion Beam
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TEM sample prep
Medical scalpel
IC repair
Nano etch
– Mask shop
October 6, 2010
Auxiliary Processing
• HSSEAS CHFE Lab
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Wafer dicing and sawing
Wire bonding
High Resolution Plotter for Mask Fabrication and Circuit Layout
High Frequency Test Equipment Rental
October 6, 2010
Acknowledgements
• UCLA leadership
• CNSI administration
– Prof Paul Weiss, Director of the CNSI
– Profs Kang Wang, Lenny Rome, Associate Directors of the CNSI
– Susan Rubin, Managing Director of the CNSI and her staff
• HSSEAS School of Engineering and Dean V.K. Dhir
• Electrical Engineering Dept and Prof Frank Chang
October 6, 2010
Acknowledgements
• ISNC staff
– Krissy Do, Dr Yuwei Fan, Ghassan Malek, Dr Brian Matthews, Adriane
Nolan, Dr. Da Teng, Lorna Tokunaga, Tony Wright
• NRF Staff
– Noah Bodzin, Huynh Do, Max Ho, Jamie Kahng, Tom Lee, Dr Wilson
Lin, Hoc Ngo, Mo Shahangian, Joe Zendejas
• Lab Beta Testers
• SEAS Shops Services
October 6, 2010
Acknowledgements
Special thanks to our industry partners and donators:
October 6, 2010
Thank You
October 6, 2010