Michael Hackerott
IT Architect
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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► Semiconductor design and manufacturing company established in 1953
► Focused on the automotive, consumer, industrial, mobile communications, networking, and enabling technologies
► Engaged with 10,000+ customers globally; more than 100 of the top electronic manufacturers
► $6.4 billion in revenue in 2006
► Headquartered in Austin, Texas
► 24,000 employees in over 30 countries
Company Overview
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Building on a 50+ Year Heritage of Innovation
1960
Si-Base
Transistor 1989
MC68302
Communications
Processor
1979
16-Bit Processor MC68000
Late
1980’s
Development of the first surface micromachined inertial sensors for the automotive airbag
1998
First PowerQUICC II communications processor (MPC8260)
2003
Low-K Volume Production
2003
2006
Industry’s First
The pressure sensor portfolio expands with the tire pressure monitor sensor with capacitive technology to save power
Commercial MRAM
2003
Product
2006
MC9RS08KA2
Ultra-low end
First single core modem:
MXC. “Smartphone-on –apostage stamp”
MCU with
RS08 core
1950 1955 1960 1975 1980 1985 1990 1995 2000 2001 2002 2003 2004 2005 2006
1952
3 Amp power
Transistor 1975
MC6800 is first microprocessor used in automotive application
1984
32-Bit Processor
MC68020
1995
MPC860
PowerQUICC™
1994
First PowerPC®
(1) MPC601
1991
2006 leading supplier of automotive embedded processors
1991
PowerPC® (1) Alliance
2004
60 millionth applications processor for portable multimedia devices
2001
MPC7455 SOI
Volume Production
2006
MSC8144 multicore
DSP targeting wireless and wireline infrastructure
2005
2005 i.MX31 processor for mobile multimedia entertainment
First PowerQUICC communications processor with
QUICC Engine
(MPC8360E)
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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TSMC
Fab11 Dalsa
Legend
Die Manufacturing
Assembly & Test
Manufacturing Partners
Tower
StatsChipPac Ambit
Amkor
ASE
Mitsui
TSMC, UMC
AIT, ASE,
StatsChipPac
Chartered, UMC
ASE
Amkor
Americas EMEA
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Asia Pacific/Japan
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The Goal of the Semiconductor Manufacturing Supply Chain
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To make $$$ by delivering products to the customer that are produced in the shortest time and at the lowest cost.
•
•
Manufacturing is responsible for the majority of the time and of the cost to achieve the goal.
Time is managed by moving the material as quickly and efficiently as possible … “ Cycle Time”
Cost is managed by making the maximum number of product per unit of material … “ Yield”
Large amounts of data are generated and must then be aggregated, summarized, analyzed, and then used to drive the entire supply chain to achieve these goals.
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Semiconductor Manufacturing In A Nutshell
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Semiconductor Manufacturing Process Steps
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Semiconductor Manufacturing Data Overview
Enterprise Data Warehouse
Data Presentation:
• Information Integration
AIM Extract/Transform/Load Integration Layer
WIP: Product Visibility
• Wafer fab, Probe, FM and Test WIP
• Foundry, Subcon and In-transit WIP
•
Starts/Ships/Inventory/History
• Wafer Slot Tracking
•
Cycle time/planning Information
• Process Flow
Equipment: Performance Optimization
• Equipment State Changes
• Alarms and Events
•
Process Data Detail and Summary
• Chamber Wafer Tracking
• Maintenance Events
AIM Manufacturing Data Distribution Layer
Measurement: Yield Acceleration
• In-process Metrology Readings
•
Class Probe Results
• Unit Probe Results
• Final Test Results
•
Coordinate Mapping
Wafer fab  Probe  Final Assembly  Test
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
TM

Manufacturing Data Volume and Growth
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Semiconductor Manufacturing Data Overview
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•
Hundreds of manufacturing steps.
Thousands of datum per “chip”.
“Deep and wide” data relationships.
•
Data produced by …
People interacting with Applications …
 WIP
Automated equipment in “real time” …
 Equipment
 Measurement
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Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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The Semiconductor Manufacturing Supply Chain
Finance
Sales
Logistics
Planning
Inventory
MES
Equipment
Data
Volume
1K+
1K+
10K+
10K+
100K+
1M+
100M+
+
Domain
Business $$$
Function Goal
Cycle
Time
Business Product Demand Cycle
Time
Business
Business +
Manufacturing
Business +
Manufacturing
Product Delivery Cycle
Time
Product
Scheduling
Cycle
Time
Product Location Cycle
Manufacturing Material
Movement
Time
Cycle
Time
Manufacturing Material
Processing
Yield
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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The Semiconductor Manufacturing Supply Chain Data Flow
Finance
Sales Planning
Equipment
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
Inventory
MES
11
Logistics
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Yield!
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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Data Analysis for Yield Improvement
– Wafer Maps
Very high performance graphical data visualization …
Multiple Wafer
Single Wafer
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
A single wafer map represents
100’s to 1,000’s of data points; a multiple wafer map can represent 1,000’s to 100,000’s of data points.
TM

Summary
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To goal of Semiconductor Manufacturing is to make $$$ by delivering products to the customer that are produced in the shortest time (“Cycle Time”) and at the lowest cost (“Yield”).
Manufacturing produces the majority of the data at a
•
Semiconductor Manufacturer.
“Real Time” automated data production and collection.
A subset of manufacturing data is aggregated and summarized for business analysis and decisions.
The individuals, aggregates, and summarized data are used for manufacturing and engineering analysis decisions.
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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To Learn More About Semiconductor Manufacturing …
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Semiconductor Analysis and Engineering Data Analysis Overview http://mrhackerott.org/semiconductorinformatics/informatics/tutorial/smeda.pdf
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INFRASTRUCTURE http://www.infras.com/Tutorial/
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SEMI http://www.semi.org/
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Freescale http://www.freescale.com/
Freescale™ and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. © Freescale Semiconductor, Inc. 2007.
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