Background Statement for SEMI Draft Document 5009D
Line Item Revisions to SEMI S8-0712a, SAFETY GUIDELINES FOR
ERGONOMICS ENGINEERING OF SEMICONDUCTOR
MANUFACTURING EQUIPMENT with title change to:
SAFETY GUIDELINE FOR ERGONOMICS ENGINEERING OF
SEMICONDUCTOR MANUFACTURING EQUIPMENT
Revisions on Multiple Topics
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant
patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this
context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the
latter case, only publicly available information on the contents of the patent application is to be provided.
Background Statement
This ballot consists of four (4) line items which start on page 36 of this document. Each line item is shown as a
separate section with subcategories.
Line item 1 – Change document title from “Safety Guidelines for ….” to “Safety Guideline for ….” to conform with
Appendix 4 of the SEMI Standards Procedure Manual.
Line item 2
Part A – Addition of a term to §5 Terminology.
Part B – Revisions to end user documentation recommendations. These changes are intended to better define
ergonomics-related clearances within the total equipment footprint for equipment design and installation.
Line item 3 –
Part A – Modifications to Appendix 1, SESC checklist, Section 6 enclosed handle design guidelines to allow for a
wider range of acceptable handle shapes and sizes (see detailed discussion below).
Part B – Addition of an Appendix with handle assessment criteria.
Part C – Addition of several documents to § 8 Related Documents.
Line item 4 –
Part A – Modifications to Appendix 1, SESC checklist, Section 7 to expand whole body clearance criteria to
include equipment operation tasks and provide design criteria for a seated posture. Whole body clearance
recommendations are separated into two categories: walking/crawling and working postures.
Part B – Existing recommendations specific to maintenance and service tasks are moved to a new Section 11 (see
detailed discussion below).
Part C – Addition of several documents to §8 Related Documents.
As this is a technical ballot, all votes of reject must be accompanied by reasons (negatives) and also be sent to SEMI
staff before the balloting deadline or they will be considered abstention votes. If you have any comments on the ballot
(suggestions or questions that you do not believe are technical negatives) please clearly indicate them as COMMENTS
to assist us with reducing the administrative overhead in handling them during the task force and committee meetings.
i
Additional Background Information for the Document
Line items 2-4 add design recommendations to fill gaps in the original SEMI-S8 document and are intended to improve
usability of the guidelines. The proposed changes were developed during SEMI-S8 Task Force activities which have
been ongoing since March of 2008.
Calculations and Rationale for Line Item 3 Proposal: Modifications to Appendix 1, SESC, Section 6 Enclosed
Handle Design Guidelines
Index to Line Item 3 Background Statement
1. Background
2. Overview of Proposed System
3. Comparison of results to SEMI-8 0712, Appendix 1, Section 6
4. Enclosed Handle Assessment System Parameters
A. Finger clearance.
B. Gloved hand conditions.
C. Force pressures.
D. Pressure distribution.
E. Hook and power grip hand-handle interface surface.
F. Full finger encirclement (power grip) hand-handle interface surface.
G. Fingertip grip hand-handle interface surface.
pg. ii
pg. iv
pg. v
pg. v
pg. v
pg. vii
pg. vii
pg. viii
pg. ix
pg. ix
pg. x
1. Background
There have been many complaints from SEMI EHS committee members about limitations of the current handle
design guidance in SEMI-S8 Appendix 1, Supplier Ergonomic Success Criteria (SESC), Section 6 including
restrictive values, inability to find commercially available handles that meet the design criteria for 4-finger enclosed
handles, and how to risk-rank handles that do not conform to the provided criteria.
Design criteria for enclosed handles in sections 6.7, 6.8, and 6.9 of SEMI-S8 07012 SESC checklist were created by
the authors based primarily on numerical values provided in the Humanscale 4/5/6 design guide (Diffrient,1981).
Data provided in the Humanscale design guides was largely derived from US military data. Much of the handle
dimensional and force data for enclosed handles in Humanscale appears to be extracted from MIL-HDBK 759 but
the original source for the data provided in the handbook is unknown. Adjustments of up to ½ inch were added to
some of the Humanscale barehanded handle dimensions by the SEMI-S8 authors to provide additional clearance for
the use of cleanroom gloves. This may be excessive given the types of gloves typically worn in a cleanroom. Table 1
lists original sources for the values in SESC Section 6.
Table 1 Data Sources for SEMI-S8 0712 Section 6 Enclosed Handles
Section
6.7.1
6.7.1
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Enclosed handle, full hand power grip (suitcase handle)
Width (W)
minimum 127 mm (5 in.)
Original Source
Kodak vol. 1, 1983, pg 147.
6.7.1 Depth (D)
6.7.1 Diameter (d)
6.7.1.1 Diameter (d), requiring no
greater than 71 N (16 lbf) force
6.7.1.2 Diameter (d), requiring no
greater than 89 N (20 lbf) force
minimum 45 mm (1.75 in.) Woodson 1981, pg. 637.
maximum 25 mm (1 in.)
Diffrient [Humanscale] 4/5/6, 1981, chart 5a.
minimum 6.3 mm (0.25 in.) MIL-STD 1472D, 1992).
minimum 13 mm (0.5 in.)
Diffrient [Humanscale] 4/5/6, 1981, chart 5a and
MIL-STD 1472D, 1992.
6.7.1.3 Diameter (d), requiring no
greater than 180 N (40 lbf)
force
6.7.2 Enclosed handle, three fingers
minimum 19 mm (0.75 in.)
Diffrient [Humanscale] 4/5/6, 1981, chart 5a).
MIL-STD 1472D, 1992).
ii
Section
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Original Source
Diffrient [Humanscale] 4/5/6, 1981, chart 6b individual
finger sizes 95th-97.5th percentile male finger widths
summed and adjusted up for gloves. Index (0.9) + Middle
(1.0) + Ring finger widths (0.9) = 2.8 in. + 0.5 glove
adjustment = 3.3 in.
minimum 38 mm (1.5 in.)
Diffrient [Humanscale] 4/5/6, 1981, chart 5A) cylinder
handle.
minimum 6.3 mm (0.25 in.) Could not find source
maximum 71 N (16 lbf)
Could not find source
6.7.2
Enclosed handle, three fingers minimum 90 mm (3.5 in.)
Width (W)
6.7.2
Depth (D)
6.7.2
6.7.2
6.7.3
6.7.3
Diameter (d)
Force
Enclosed handle, two fingers
Width (W)
minimum 60 mm (2.5 in.)
MIL-STD 1472D, 1992, (ungloved) pg. 204, fig. 48.
6.7.3
Depth (D)
minimum 38 mm (1.5 in.)
MIL-STD 1472D, 1992 (gloved) pg. 204, Fig. 48.
6.7.3
Diameter (d)
minimum 6.3 mm (0.25 in.) MIL-STD 1472D, 1992, (ungloved) pg. 204, fig. 48.
6.7.3
Force
maximum 51 N (11.5 lbf)
6.7.4
Enclosed handle, one finger
6.7.4
Width (W)
6.7.4
Depth (D)
6.7.4
6.7.4
6.8
6.8.1
minimum 90 mm (3.5 in.)
Diffrient [Humanscale] 4/5/6, 1981, chart 5a).
6.8.1
Diameter (d)
Force
Hook grasp handle
Hook grasp handle (four
fingers)
Opening length (L)
Opening width (W)
minimum 38 mm (1.5 in.)
Diffrient [Humanscale] 4/5/6, 1981 (gloved hand), chart
5a). 38 mm (1.5 in.) (Konz, 2004, pg. 273).
6.8.1
Depth (d)
minimum 50 mm (2 in.)
Diffrient [Humanscale] 4/5/6, 1981 [gloved hand], chart
5a)
6.8.1
Lip length (l)
minimum 50 mm (2 in.)
Gloved and ungloved (Diffrient [Humanscale] 4/5/6,
1981, chart 5a).
6.8.2
maximum 80 N (18 lbf)
Could not find source
minimum 90 mm (3.5 in.)
Gloved/ bare hand (Diffrient [Humanscale] 4/5/6, 1981,
chart 5a).
6.9.1
Hook grasp handle pull force
(four fingers)
Finger pull handle
Finger pull handles (four
fingers)
Opening length (L)
Opening width (W)
minimum 25 mm (1 in.)
Diffrient [Humanscale] 4/5/6, 1981, chart 5a) (gloved
hand).
6.9.1
Depth (d)
minimum 19 mm (0.75 in.)
(Diffrient [Humanscale] 4/5/6, 1981, chart 5a) (ungloved
hand).
6.9.1
Lip length (l)
minimum 19 mm (0.75 in.)
Appears to be a cut and paste error. Humanscale 5A
recommendation is 13 mm (0.5 in.).
6.9.2
Finger pull handles pull force
(four fingers)
maximum 9.8 N (2.2 lbf)
Could not find source.
6.9
6.9.1
Could not find source
Individual finger sizes for 95th-97.5th percentile male
index finger width (Diffrient [Humanscale] 4/5/6, 1981,
chart 6B) used and adjusted up for gloves.
minimum 38 mm (1.5 in.)
Diffrient [Humanscale], 1981, chart 5A) Cylinder handle
minimum depth of 38 mm (1.5 in) (appears to have been
used, with no adjustment for gloves).
minimum 3.2 mm (0.13 in.) Could not find source
maximum 27 N (6 lbf)
Could not find source
minimum 38 mm (1.5 in.)
iii
2. Overview of Proposed System
A design guideline for enclosed, hook grip and finger grip handles was created to replace the current design
guidelines in SESC Section 6. The new system is based on clearance for a large (95th percentile male) hand and
pressure (kPa) for a small (5th percentile female) hand with adjustments for gloved conditions typically found in the
semiconductor manufacturing industry.
The proposed handle assessment system has the following advantages over the current “power” grip, hook grip, and
finger-pull handle design guidelines provided in SESC Section 6:
A. Can be used to design or specify new handles for semiconductor manufacturing equipment and assess
existing handles of various shapes and sizes.
B. Makes “downgrading” of sub-optimal handles based on force requirements and type of grip an obvious
choice.
a. If a handle’s opening height isn’t high enough for full finger encirclement then it may be suitable for a
“hook” or a “fingertip” grip provided the measured forces don’t exceed maximum recommendations
for that (hook grip or fingertip grip) configuration.
Note: Downgrading of the handle opening width for assessment purposes is possible with the current
system but this option is not obvious.
C. Can be used to assess handles with rectangular or oval cross-sections as well as with circular cross-sections.
D. Provides allowances for bare hand and various gloved hand conditions.
a. In some environments (integrated circuit device testing, for example) gloves are not normally worn by
equipment operators and technicians so allowances for glove thickness are not necessary.
E. Provides allowances for anticipated frequency of use (machine operation versus maintenance/service).
iv
3. Comparison to Current Criteria in SEMI-S8 0712 Appendix 1, Section 6
A comparison of results of the proposed handle assessment system to the dimensions and force values in section 6 of
SEMI-S8 0712 is provided in Table 2. Less restrictive criteria is shown in bold text, more restrictive criteria is
shown in italicized text)
Table 2 Enclosed Handle Criteria Comparison
SESC
Section/
Handle
Type
6.7.1.1
4-finger
encircle
6.7.1.2
4-finger
encircle
6.7.1.3
4-finger
encircle
6.7.2
3-finger
encircle
6.7.3
2-finger
encircle
6.7.4
1-finger
encircle
6.8
4-finger
hook
6.9
4-finger
fingertip
Maximum recommended force, bare
hand Note: gloves affect maximum
forces in the new system
SEMI-S8
Maint. &
0712
Operation
service
Section 6.7
tasks
tasks
& 6.8
N (lbf)
N (lbf)
N (lbf)
Diameter
mm (in.)
SEMI-S8
0712
Inside
Width
mm (in.)
New
assessment
system
inside
width
mm (in.)
SEMI-S8
0712
inside
height
mm (in.)
New
assessment
system
inside
height
mm (in.)
6.3
(0.25)
127
(5)
122
(4.8)
45
(1.75)
41
(1.6)
71
(16.0)
33
(7.4)
88
(19.8)
13
(0.5)
127
(5)
122
(4.8)
45
(1.75)
41
(1.6)
89
(20)
72
(16.1)
191
(42.9)
19
(0.75)
127
(5)
122
(4.8)
45
(1.75)
41
(1.6)
180
(40.0)
110
(24.8)
294
(66.1)
6.3
(0.25)
90
(3.5)
99
(3.9)
38
(1.5)
41
(1.6)
71
(16.0)
26
(5.8)
69
(15.5)
6.3
(0.25)
60
(2.5)
66
(2.6)
38
(1.5)
41
(1.6)
51
(11.5)
18
(4.0)
47
(10.6)
6.3
(0.25)
38
(1.5)
33
(1.3)
38
(1.5)
41
(1.6)
27
(6.0)
9
(2.0)
24
(5.3)
N/A
90
(3.5)
97
(3.8)
50
(2)
28
(1.1)
80
(18)
51
(11.5)*
137
(30.9)*
N/A
90
(3.5)
91
(3.6)
19
(0.75)
22
(0.8)
9.8
(2.2)
36
(8.1)
97
(21.7)
*The given force is for a 19 mm radius handle.
4. Enclosed Handle Assessment System Parameters
The proposed handle assessment system is based on the understandings listed below.
A. Finger clearance. Clearance dimensions accommodate the 95th percentile US male hand (Garret, 1971)
plus an allowance for ease of hand insertion and deformation of the hand when force is applied. Clearance
values were rounded up as appropriate (see Table 2).
v
Table 2 Hand Measurements for the 95th Percentile Male and Clearance Dimensions
Joint
Metacarpalphalangeal
(MCP) joint
Proximal
interphalangeal
(PIP) joint
Distal
interphalangeal
(DIP) joint
Actual joint depth
Measurement
Digit 2
--
Digit 3
36.1 mm
Digit 4
--
Digit 5
--
Joint depth w/ clearance
--
45.0 mm
--
--
Finger width actual
23.7 mm
24.1 mm
22.3 mm
20.1 mm
Finger width clearance
(cumulative)
30.0 mm
60.0 mm
90.0 mm
110.0 mm
Finger depth w/ straight
finger
--
22.6 mm
--
--
Finger width
20.3 mm
20.3 mm
19.2 mm
17.6 mm
Finger width clearance
(cumulative)
25.0 mm
50.0 mm
70.0 mm
85.0 mm
Finger depth w/ straight
finger
--
18.0 mm
--
--
Finger depth w/ clearance
--
25.0 mm
--
--
Knuckle clearances were estimated by modeling a 95th percentile male hand grasping 6 mm and 25mmdiameter handles using CAD software for full finger encirclement, hook grip, and fingertip grip conditions
(see Table 3). Allowances were made for finger insertion and hand deformation when force is applied.
Table 3 Knuckle Clearances for the 95th Percentile Male Hand
Handle type
Full finger encirclement
Hook grip
Fingertip grip
Proximal interphalangeal
(PIP) joint thickness
= 22.6 mm
38 mm
Distal interphalangeal
(DIP) joint thickness
= 18.0 mm
25 mm
Distal interphalangeal
(DIP) joint thickness
= 18.0 mm
20 mm
Finger grasping
handle
Joint thickness
for 3rd digit
Clearance dim.
Lip lengths for hook and fingertip grip handles were estimated using finger segment lengths for the 95th
percentile male hand. Length of the 95th percentile male hand is 211.6 mm (Garret, 1970). Length of 3rd
digit middle segment is 15.8% (33.2 mm) and the length of the distal segment is 9.8% (20.6 mm) of hand
length (Freivalds, 2000). The center of rotation of the finger joint is near the middle of the joint. When a
finger segment is flexed 90 degrees, the segment length is assumed to be shortened by about half of the
thickness of the joint. Therefore, half of the thicknesses of the proximal interphalangeal (PIP) and distal
interphalangeal (DIP) joints were subtracted in the formulas used to determine handle lip lengths shown
below. See Table 4 for a depiction. MCP is the metacarpal phalangeal joint.
vi
a. Hook grip lip length:
Middle segment + distal segment + fingernail – (½ × PIP thickness) = lip length
33.2 mm + 20.6 mm + 3 mm – (½ × 22.6 mm) = 45.5 mm (rounded up to 46 mm)
b. Fingertip grip lip length:
Distal segment + fingernail – (½ × DIP thickness) = lip length
20.6 mm + 3 mm – (½ × 18 mm) = 14.6 mm (rounded up to 15 mm)
Table 4 Lip Length Clearances (Bare Hand)
Handle type
Fingertip grip
Hook grip
Finger section(s)
engaging handles
B. Gloved hand conditions. Provisions have been made for gloved and ungloved conditions anticipated by
the SME supplier since gloved and non-gloved conditions exist in semiconductor processing facilities.
a. Gloves are not worn in some wafer fab support and assembly/test areas so bare hands are used.
b. Cleanroom gloves are typically worn in semiconductor wafer fabrication facilities.
i. Knit liners are commonly worn under cleanroom gloves to absorb and wick perspiration and to
provide insulation for some thermal processes. These liners add to the thickness of gloved
hands and digits.
c. Chemically resistant gloves are worn to protect workers from chemical hazards.
d. Electrical insulating gloves with leather over-gloves are worn to protect workers from electrical
hazards.
e. Thermal insulating gloves are worn to protect workers from thermal hazards.
Glove allowances have been added to bare hand clearance dimensions of each gloved condition. For finger
insertion dimensions, glove allowances were added to both sides of each finger. For example, if the handle
is intended to accommodate three fingers then six glove thicknesses were added to the clearance dimension
for three fingers. Hand measurements were collected from wafer fab employees at Texas Instruments for
four glove conditions (see Table 5). Bare hand dimensions were subtracted from gloved hand dimensions to
determine glove thicknesses and the difference was divided by two.
Table 5: Gloved Hand Measurements
Condition Bare hand
Cleanroom (Nitrile) Chemical glove
glove with knit
over cleanroom
Nylon liner
glove
Electrical insulating Thermal insulating
glove (leather glove glove
over a rubber glove)
Image
One side
Two sides
0 mm (0 in.)
0 mm (0 in.)
1.5 mm (0.12 in.)
3 mm (0.12 in.)
3 mm (0.12 in.)
6 mm (0.25 in.)
6 mm (0.25 in.)
12 mm (0.5 in.)
6 mm (0.25 in.)
12 mm (0.5 in.)
C. Force pressures. Skin contact pressure values were used to determine maximum recommended forces for
handles. Pushing, pulling, and lifting a handle involves gripping the handle while applying force to perform
the intended task.
a. Machine operation tasks: maximum contact pressure against fingers = 70.5 kPa (10.2 psi). This is
an average of a sustained externally applied surface pressure deemed acceptable for a full workday
vii
by male 104 kPa (15.1 psi) and female 37 kPa (5.4 psi) test subjects (Fransson-Hall, 1993). The
work pace in semiconductor manufacturing facilities is generally slower than general
manufacturing so rest-recovery cycles are longer. Therefore, an average of male and female force
preferences was chosen over the female preferences.
b. Machine maintenance and service tasks: maximum contact pressure against fingers = 188 kPa
(27.3 psi) average pressure-discomfort threshold (PDT) for 24 male and female test subjects
(Johansson, 1999).
D. Pressure distribution. Finger contact area for a 5th percentile Japanese female hand (Human Hand
Dimension for Ergonomic Design, 2010) was used to calculate pressure distribution area for hand-handle
interfaces for full finger encirclement (power grip), hook grip, and fingertip grip handles (see Table 6).
a. For the full finger encirclement handle, cumulative digit width at the proximal interphalangeal
(PIP) joints was used.
b. For the hook grip handle, cumulative digit width at the distal interphalangeal (DIP) joints was
used.
c. Fingertip contact area for each finger is assumed to be round. For the finger grip handle, fingertip
contact area was calculated using the circle area formula below and the values were summed for
the fingers involved.
(π × [{DIP joint width}/2]2 )
Table 6 Finger Joint Widths for the 5th Percentile Japanese Female
(Note: digits are counted sequentially from the thumb to the little finger)
Measurement
Digit 2
Digit 3
Digit 4
Digit 5
PIP joint width
15.35 mm
15.16 mm
14.30 mm
12.41 mm
DIP joint width
13.58 mm
13.54 mm
12.65 mm
11.27 mm
E. Translation of push-pull forces to hand pressure forces. For handle movement, gripping forces can
exceed push and pull forces because there is usually some control required (consider using a handsaw or
pushing a shopping cart). Seo, et al. (2008) measured the total normal forces against the surface of a
cylinder to be 2.3 times greater than the force applied to a split cylinder for all diameters tested (38 mm –
83 mm dia.) (see Table 7 for a graphic interpretation). While this was a static test, this multiplier has been
applied to estimate normal pressure against the fingers resulting from push or pull forces. Therefore, a
multiplier of 0.43 (1/2.3) was applied to the contact surface area to adjust for normal forces against the
handle when calculating pressure against the hand.
Table 7 In-line Versus Normal Force
In-line force measured using a split cylinder
F.
Normal force measured using a pressure pad wrapped
around a cylinder
Total force is equal to 2.3 times the in-line force
Full finger encirclement (power grip) hand-handle interface surface. Maximum achievable gripping
force on a cylinder is attained when the fingers fully encircle the cylinder with the fingers and thumb
overlapping. Seo, et al. (2007) estimated the optimum grip diameter to be a cylinder where the thumb and
index finger overlap by ½ the length of the distal phalanges of these digits. Grant, et al. (1992) determined
the optimum overlap to be about 1 cm although the exact amount is not known because of the limited
diameters of cylinders tested. Full handle encirclement also has the added benefit of allowing the hand to
viii
rotate around the handle allowing the wrist of the user to remain neutral or nearly neutral throughout the
range of motion.
Handles with a smaller diameter have less hand-handle contact area than handles with a larger diameter so
the interface pressure will be greater when the same force is applied. The interior section of the fingers
when using a power grip is nearly circular. For handles with a rectangular cross-section, it is assumed that
most of the force on the hand is borne by the corners. When a hand grasps a handle with a rectangular cross
section with a power grip, the fingers and palm contact the corners of the handle before the flat sections
creating contact stress inversely proportional to the radii of the corners (smaller radii create more contact
stress). Therefore, only the radiused corners are considered when calculating the hand-handle surface
contact area (see the pictograms in Table 8).
If a rectangular handle has a section with sharp (un-radiused) corners then a fingertip grip is expected to be
more comfortable than a full finger encirclement grip or a hook grip because there is less contact stress,
thereby allowing greater force to be applied. When several types of grips can be used to grasp a handle, the
evaluator may choose the grip that provides the greatest force.
Table 8 Full Finger Encirclement Handle Surface Contact Dimensions
Handle cross-section
Surface area
Image
Round handle
Square handle
π × r × (cumulative width of digit[s] at PIP* joint)
*proximal interphalangeal joint (second knuckle)
Direction of force
Direction of force
π × r × 15.2 mm
π × r × 30.7 mm
π × r × 44.6 mm
π × r × 56.7 mm
1 finger
2 fingers
3 fingers
4 fingers
G. Hook grip hand-handle interface surface. A hook grip is less efficient than a power grip because force is
applied by only the medial and distal phalanges. A hook grip may be necessary when the handle height
opening is not sufficient enough to allow the second knuckle (proximal interphalangeal [PIP] joint) to pass
but allows the third knuckle (distal interphalangeal [PIP] joint) to pass. Contact area is limited because only
medial and distal phalanges engage the handle. Average third digit PIP joint flexion angles are 80.2° and
83.5° for males and female, respectively, measured from the outside of the grip (Freivalds, 2000). These
values were averaged and rounded to 82°.
ix
Table 9 Hook Grip Hand-Handle Surface Interface
Surface area
Handle cross-section
Image
(82/360) × 2 × π × r × (cumulative width of digit[s] at DIP* joint)
*distal interphalangeal joint (third knuckle)
Note 1: For square handles, 82/360th of the curved surface against the hand is
used to calculate the surface area.
Note 2. The hand is not rigid so some pressure may be applied to the fingers
beyond the estimated area; however, this is a best estimate.
Round handle
Square handle
Direction of
force
Direction of
force
98°
98°
82°
41°
(82/360) ×
(82/360) ×
(82/360) ×
(82/360) ×
1 finger
2 fingers
3 fingers
4 fingers
2×π
2×π
2×π
2×π
41°
× r × 12.7 mm
× r × 25.4 mm
× r × 37.4 mm
× r × 48.2 mm
H. Fingertip grip hand-handle interface surface. This grip is weaker than a power or hook grip because
only the distal phalanges are employed. Hand-handle interface is limited to the fingertips. The fingertip
contact area was estimated by squaring half the DPI width and multiplying by pi (π) to determine circular
area for each finger and then summing the areas for the fingers involved (see Table 10).
Table 10 Fingertip Grip Hand-Handle Interface
Handle cross-section
Surface area
Image
Round handle
Square handle
Sum of fingertip pad area(s) (π × [width of digit/2]2) for each digit
Direction of force
π×
π×
π×
π×
1 finger
2 fingers
3 fingers
4 fingers
Direction of force
(13.6 mm/2)2 = 144.9 sqmm
(13.5 mm/2)2 = 288.9 sqmm
(12.7 mm/2)2 = 414.5 sqmm
(11.3 mm/2)2 = 514.2 sqmm
Maximum recommended forces are based on hand-handle interface pressure. These forces may be greater
than maximum recommended push, pull, or lifting forces derived using ergonomics assessment tools
including those listed in Appendix 2 of SEMI-S8. The lesser value should be used when assessing handles.
Optimal handle diameter for most users is 38 mm (Freivalds, 2000), which allows most users to apply the
greatest force. For handles that do not have a circular cross section, measure the perimeter of the handle
cross section. The optimal perimeter is approximately the same as the circumference of a 38 mm diameter
circle (119 mm).
x
Calculations and Rationale for Line Item 4 Proposal:
Table 11 provides sources and calculations for whole body clearances.
Table 11 Rationale for Proposed Whole Body Clearance Changes
7.1.1 Clearance for walking (operator tasks)
Pictogram
Data sources and calculations
A. Vertical clearance, minimum 1980 mm (78 in.)
Source: Diffrient [Humanscale] 7/8/9, 1991, chart 9a.
B
B. Passage width, minimum 610 mm (24 in.)
Diffrient [Humanscale] 7/8/9, 1991, chart 9a and MIL-HDBK-759C, 1995, pgs. 151152, Figure 30.
A
7.1.2 Clearance for walking (maintenance and service activity only)
Pictogram
Data sources and calculations
A. Vertical clearance, minimum 1900 mm (74.8 in.)
Source: International Organization for Standardization. (2001). ISO 14122-2:2001.
Safety of machinery -- permanent means of access to machinery -- Part 2: Working
platforms and walkways. Geneva, Switzerland: ISO. Section 4.2.2.
B
A
D
C
B. Upper body passage width, minimum 610 mm (24 in.)
Source: Diffrient, N., Tilley, A. R., Harman, D., and Henry Dreyfuss Associates
“Humanscale 7/8/9: a portfolio of information.” MIT Press, 1991, chart 9a.
C. Walking surface width minimum 457 mm (18 in.)
Original source: 457 mm (18 in.) (OSHA 29 CFR 1910.23, [c][2])
Other dimension sources are provided for comparison:
305 mm (12.0 in.) minimum (Damon, 1966, pg. 319).
305 mm (12.0 in.) minimum (Van Cott, 1972, pg. 453).
305 mm (12.0 in.) minimum (Woodson, 1981, pg. 305)
305 mm (12.0 in.) minimum (Tilley, 1993, pg. 33).
380 mm (15.0 in.) preferred (Humanscale, 1981, chart 9a).
380 mm (15.0 in.) preferred (MIL-HDBK-759C, 1995, pg. 144).
406 mm (16.0 in.) preferred (Tilley, 1993, pg. 33).
500 mm (19.7 in.) (EN-ISO 14122-2, Section 4.2.2) Note: this dimension is applied to
the walkway width at all heights, not just the walking surface.
D. Elbow/hip clearance height, maximum height of sloped area 1002 mm (39.8 in.)
Source: 971.6 mm 5th percentile US female elbow height (Harrison, 2002, pg. 77)
Adjustment for shoes: add 30 mm.
Note 1: Hip width limits elbow clearance when walking.
Note 2: Female data was chosen for this dimension because women have greater hip
width than men. 5th percentile US female elbow height was chosen because it’s possible
for a 5th percentile female to have 95th percentile hip width.
xi
7.1.3 Clearance for walking through vertical hatchways (maintenance and service activity only)
Pictogram
Data sources and calculations
B
A
C
A. Overhead clearance, minimum 1524 mm (60.0 in.)
Source: Woodson, W. E. “Human Factors Design Handbook : Information and
Guidelines for the Design of Systems, Facilities, Equipment, and Products for Human
Use.” McGraw-Hill, 1981, pg. 284.
B. Upper body passage width, minimum 610 mm (24 in.)
Source: Diffrient [Humanscale] 7/8/9, 1991, chart 9a.
C. Height of threshold, maximum 406 in. (16.0 in.)
Source: Woodson, W. E. “Human Factors Design Handbook: Information and
Guidelines for the Design of Systems, Facilities, Equipment, and Products for Human
Use.” McGraw-Hill, 1981, pg. 284.
7.1.4 Clearance for moving sideways (maintenance and service activity only)
Pictogram
Data sources and calculations
B
A
A. Overhead clearance, minimum 1900 mm (74.8 in.)
Source: International Organization for Standardization. (2001). ISO 14122-2:2001.
Safety of machinery -- permanent means of access to machinery -- Part 2: Working
platforms and walkways. Geneva, Switzerland: ISO. Section 4.2.2.
B. Forward horizontal clearance, minimum 477 mm (18.8 in.)
Calculations were performed using available data listed below. For the purposes of this
exercise, a round abdominal section is assumed.
((Waist circumference /π ) × 1.05) + 50 mm
(1278 mm/π) × 1.05 + 50 mm = 477 mm
Waist circumference: 1278 mm. 95th percentile American male data. Source:
McDowell, M. A. et al. Anthropometric Reference Data for Children and Adults:
United States, 2003–2006, National Health Statistics Reports, no. 10, October 22, 2008.
Clothing allowance: add 5% for light clothing. Source: Kroemer, K. H. E.
“Engineering Anthropometry” in W. Karwowski & W. S. Marras (eds.) “Occupational
Ergonomics Handbook” CRC Press, 1999.
Body movement allowance: 50 mm. Source: EN 547-2:2009, Safety of machinery Human body measurements - Part 2.
7.2.2 Standing lower body clearance
Pictogram
Data sources and calculations
C. Lower body clearance, minimum 508 mm (20 in.)
Source: VanCott, Harold P., and Robert G. Kinkade, Ed., Human Engineering Guide to
Equipment Design, U.S. Department of Defense. Washington, D.C.: U.S. Government
Printing Office, 1972, pg. 394.
C
xii
7.2.5 Sitting. Note: Provided clearance dimensions do not provide room for movement of seating devices.
Pictogram
Data sources and calculations
A. Overhead clearance measured from sitting surface, minimum 1010 mm (39.8 in.)
Seated height, 95th percentile American male, 985 mm (38.7 in). Source: Harrison, C.
and Robinette, K. “Caesar: Summary Statistics for the Adult Population (Ages 18-65)
of the United States of America.” Air Force Research Laboratory, Human
Effectiveness Directorate, Crew System Interface Division, 2002, pg. 45.
Adjustment for hair: 25 mm added for hair and head clearance.
B1. Horizontal clearance for operation tasks (relaxed posture), minimum 1034 mm
(40.7 in.)
Source: Calculations are based on the dimensions provided below.
SO (Shoulder Offset) = Seated shoulder height × sin(back angle)
B
A
SO = 647 mm × sin(15°) = 167 mm
Clearance = SO + BP + FL + ST
Clearance = 167 mm + 542 mm + 295 mm + 30 mm = 1034 mm
B2. Clearance for maintenance tasks (upright posture), minimum 867 mm (34.1 in.)
Source: Calculations are based on the dimensions provided below.
Clearance = BP + FL + ST
Clearance = 542 mm + 295 mm + 30 mm = 867 mm
Data used for sections B1 and B2.
Back angle
Symbol
Measure
Seated acromial
(shoulder) height:
647 mm
(95th percentile
American male)
Source/Calculation
Harrison, C. and Robinette, K. “Caesar:
Summary Statistics for the Adult Population
(Ages 18-65) of the United States of
America.” Air Force Research Laboratory,
Human Effectiveness Directorate, Crew
System Interface Division, 2002.
BP
Buttock popliteal
distance: 542 mm
(95th percentile
American male)
BIFMA G1-2013 Ergonomics Guideline for
Furniture Used in Office Work Spaces
Designed for Computer Use. American
National Standards Institute.
FL
Foot length:
295 mm
(95th percentile
American male)
Harrison, 2002.
SH
Shoe height:
30 mm
Pheasant, S. “Bodyspace: Anthropometry,
Ergonomics and Design.” Taylor & Francis,
1996.
ST
Shoe-toe
allowance (toe to
front of shoe):
30 mm
(95th percentile
American male)
Pheasant, 1996.
AH
Shoulder
offset
Buttockpopliteal
length
Foot
length
Please forward a courtesy copy of any comments or negatives against the ballot to Paul Schwab at pschwab@ti.com.
Respectfully,
Paul Schwab and Ron Macklin,
SEMI-S8 Task Force Co-Leaders
xiii
Review and Adjudication Information
Task Force Review
Committee Adjudication
Group:
Ergonomics Task Force
NA EHS Committee
Date:
14 July, 2015
16 July, 2015
Time & Time Zone:
3:00 PM to 4:30 PM (U.S. Pacific Time)
9:00 AM to 5:00 PM (U.S. Pacific Time)
Location:
San Francisco Marriott Marquis Hotel
780 Mission Street
San Francisco Marriott Marquis Hotel
780 Mission Street
City, State/Country:
San Francisco, California 94103 USA
San Francisco, California 94103 USA
Leaders:
Paul Schwab (Texas Instruments, Inc.)
Ron Macklin (R. Macklin & Associates)
Sean Larsen (Lam Research)
Chris Evanston (Salus Engineering)
Bert Planting (ASML)
Standards Staff:
Paul Trio (SEMI NA)
408.943.7041
ptrio@semi.org
Paul Trio (SEMI NA)
408.943.7041
ptrio@semi.org
Details for these meetings are subject to change, and additional review sessions may be scheduled if necessary. Contact
the Task Force leaders or Standards staff for confirmation. Telephone and web information will be distributed to
interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would
like to participate by telephone/web, please contact Standards staff.
xiv
Safety Checklist for SEMI Draft Document #5009D
Delayed Line Items Revisions to SEMI S8-0712a, SAFETY
GUIDELINES FOR ERGONOMICS ENGINEERING OF
SEMICONDUCTOR MANUFACTURING EQUIPMENT
Developing/Revising Body
Name/Type:
Ergonomics Task Force
Technical Committee:
Environmental, Health, and Safety
Region:
North America
Leadership
Position
Leader:
Leader:
Technical Editor
Last
Schwab
Macklin
Sklar
First
Paul
Ron
Eric
Affiliation
Texas Instruments, Inc.
R. Macklin & Associates, LLC
Safety Guru, LLC
Documents, Conflicts, and Consideration
Safety related codes, standards, research studies, guidelines, and practices used in developing the safety guideline, and
the manner in which each item was considered by the technical committee.
# and Title
Manner of Consideration
Aldien, Y., D. Welcome, S. Rakheja, R. Dong, and P. E. Boileau. "Contact Pressure
Distribution at Hand-Handle Interface: Role of Hand Forces and Handle Size." International
Journal of Industrial Ergonomics 35, no. 3 (2005): 267-86.
Line item 3, Hand pressure
data.
BIFMA G1-2013 Ergonomics Guideline for Furniture Used in Office Work Spaces Designed
for Computer Use. American National Standards Institute.
Line item 4, Body clearance
dimensions.
Diffrient, Niels, Alvin R. Tilley, David Harman, and Henry Dreyfuss Associates. Humanscale
4/5/6 : A Portfolio of Information: 4. Human Strength and Safety, 5. Controls and Displays, 6.
Designing for People. Cambridge, Mass.: MIT Press, 1981.
Line item 3, Original source
for Section 6 handle design
criteria.
EN 547-2:2009, Safety of machinery - Human body measurements - Part 2: Principles for
determining the dimensions required for access openings, European Committee for
Standardization, Vienna, 2009.
Line item 4, Body clearance
dimensions.
EN-ISO 14122-1:2001, Safety of machinery : permanent means of access to machinery -- Part
1: Choice of fixed means of access between two levels. European Committee for
Standardization, Vienna, 2009.
Line item 4, Body clearance
dimensions.
EN-ISO 14122-2:2001, Safety of machinery – permanent means of access to machinery --Part
2: Working platforms and walkways. European Committee for Standardization, Vienna, 2009.
Line item 4, Body clearance
dimensions.
EN-ISO 14738:2002, Safety of machinery –Anthropometric requirements for the design of
workstations at machinery.
Line item 4, Body clearance
dimensions.
Fransson-Hall, Charlotte, and Åsa Kilbom. "Sensitivity of the Hand to Surface Pressure."
Applied Ergonomics Special Issue Hand Tools for the 1990s 24, no. 3 (1993): 181-89.
Line item 3, Hand pressure
data.
Freivalds, Andris. Biomechanics of the Upper Limbs: Mechanics, Modelling and
Musculoskeletal Injuries. Boca Raton, FL: CRC Press, 2000.
Line item 3, Finger phalanx
lengths and joint angles.
Garrett, John W. Anthropometry of the air force female hand, AMRL-TR-69-26, Aerospace
Medical Research Laboratory, Wright-Patterson AFB, Ohio, 1970.
Line item 3, Hand
anthropometric data.
Garrett, John W. The adult human hand: some anthropometric and biomechanical
considerations. Human Factors 13 (1971): 117-131.
Line item 3, Hand
anthropometric data.
Gordon, Claire C. 1988 Anthropometric Survey of U.S. Army Personnel: Summary Statistics,
Interim Report. Natick, Mass: U.S. Army Natick Research, Development and Engineering
Center, 1989.
Line item 4, Body clearance
dimensions.
xv
# and Title
Manner of Consideration
Grant, Katharyn A., Daniel J. Habes, and Libby L. Steward. "An Analysis of Handle Designs
for Reducing Manual Effort: The Influence of Grip Diameter." International Journal of
Industrial Ergonomics 10, no. 3 (1992): 199-206.
Line item 3, Handle
diameter.
Harrison, Catherine R., and Kathleen M. Robinette. CAESAR: Summary Statistics for the
Adult Population (Ages 18-65) of the United States of America. Wright-Patterson AFB, Ohio:
Air Force Research Laboratory, Human Effectiveness Directorate, Crew System Interface
Division, 2002.
Line item 4, Body clearance
dimensions.
Hertzberg, H., I. Emanuel, and M. Alexander, The Anthropometry of Working Positions. 1. A
Preliminary Study, WADC Technical Report 54-520. Wright-Patterson Air Force Base, Ohio,
1956.
Line item 4, Body clearance
dimensions.
Human Hand Dimension for Ergonomic Design 2010. Research Institute of Human
Engineering for Quality Life: Osaka, Japan, 2010.
Line item 3, Hand
anthropometric data.
ISO 14738: Safety of Machinery - Anthropometric Requirements for the Design of
Workstations at Machinery. International Standards, 14738, Geneva: International
Organization for Standardization, 2002.
Line item 4, Body clearance
dimensions.
Japanese Body Size Data, 2004-2006. Research Institute of Human Engineering for Quality of
Life: Osaka, Japan, 2008.
Line item 4, Body clearance
dimensions. Minimum chair
height.
Johansson, Lena, Anders Kjellberg, Ãsa Kilbom, and Goran M. Hagg. "Perception of Surface
Pressure Applied to the Hand." Ergonomics 42, no. 10 (1999): 1274-82.
Line item 3, Hand pressure
data.
McDowell, M. A. et al. Anthropometric Reference Data for Children and Adults: United
States, 2003–2006, National Health Statistics Reports, no. 10, October 22, 2008.
Line item 4, Body clearance
dimensions. Abdominal
circumference
measurements.
MIL-HDBK-759: Handbook for Human Engineering Design Guidelines. Washington, D.C:
Department of Defense.
Line item 3, Handle design
criteria.
SEMI S2-0712 Environmental Health and Safety Guideline for Semiconductor Manufacturing
Equipment.
All line items. Reviewed to
avoid direct conflicts.
SEMI S8-0712 Safety Guidelines for Ergonomics Engineering of Semiconductor
Manufacturing Equipment.
All line items. Base
document for changes.
Seo, Na Jin, and Thomas J. Armstrong. "Investigation of Grip Force, Normal Force, Contact
Area, Hand Size, and Handle Size for Cylindrical Handles." Human Factors: The Journal of
the Human Factors and Ergonomics Society 50, no. 5 (2008): 734-44.
Line item 3, Handle normal
force data.
United States Occupational Safety & Health Administration. General Industry : OSHA Safety
and Health Standards (29 CFR 1910). Washington, D.C. U.S. Dept. of Labor, Occupational
Safety and Health Administration, 1983.
Line item 4, Body clearance
dimensions. Walking path
clearance.
VanCott, Harold P., and Robert G. Kinkade, Ed., Human Engineering Guide to Equipment
Design, U.S. Department of Defense. Washington, D.C.: U.S. Government Printing Office,
1972.
Line item 4, Body clearance
dimensions.
Note: Recommendations within this document were derived from or compared to the documents listed in this section. The
Task Force selected criteria that meet the majority of the referenced documents, that are the most conservative, or that are
most appropriate for the semiconductor industry and the regions where this equipment is used.
Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited
in the safety guideline
# and Title Inconsistency with This Safety Guideline
# and Title Inconsistency with This Safety Guideline
None known
None known
xvi
Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to
the extent practical
# and Title
Nature of Conflict with This Safety Guideline
None known
None known
Participants and Contributors
Name, Last
Austin
Barsky
Birrell
Bogner
Braun
Breder
Brody
Crane
D'Agostino
Ergete
Evanston
Faust
Fessler
Frankfurth
Funk
Giles
Green
Greenburg
Hamilton
Harralson
Hayford
Hsu
Hughes
Ibuka
Illerhaus
Johnson
Jones
Karl
Kelly
Kiley
Krauss
Krauss
Krov
Kryska
Kuwatani
Larsen
Layman
Leboults
Macklin
Marshall
Mashiro
McDaid
McGreevey
Mills
Nesbitt
Name, First
Lindy
Joe
Ron
Mark
Stephan
Paul
Steve
Lauren
Mark
Nigusu
Chris
Bruce
Mark
Mark
Rowland
Andrew
Paul
Cliff
Jeff
Mark
James
Peter
Stanley
Shigehito
Chris
J.D.
Matt
Ed
Paul
Andrew
Mark
Josh
Alan
Paul
Ken
Sean
Curt
Kyle
Ron
Les
Supika
Raymond
Mark
Ken
Abraham
Affiliation
Salus Engineering
TUV Rheinland
TUVSUD America
TUVSUD America
TUV Reinland
Estec Solutions
Product ESH Consulting
KLA-Tencor
Varian
Intertek, Global Semiconductor Safety Services, GS3
Salus Engineering
TUV America
TEL
Cymer
Salus Engineering
Estec Solutions
Ultratech
Nikon
TEL
Intel
AMAT/Semitool
Aixtron
Lam Research
Horiba
CI Industrial Safety Consulting, LLC
Advanced Energy
Empirical
Applied Materials
Estec Solutions
Varian
System Development-ESH
EHS2
TEL
Novellus
TUV-SUD
Lam Research
Seagate
Xactix
Ron Macklin Associates
Global 450 Consortium
TEL
Lam
DNS Electronics
Estec Solutions
ESTEC
xvii
Name, Last
Oswalt
Petry
Planting
Rai
Roberge
Sackllah
Sawyer
Schmitt
Schwab
Shristi
Sklar
Sleiman
Tan
Werner
Wong
Yakimow
Name, First
James
William
Bert
Sunny
Steven
Michael
Debbie
Jeff
Paul
Kharel
Eric
Samir
Conrad
Stephen
Carl
Byron
Affiliation
Mattson
IBM Corporation
ASML
Intertek
Axcelis Technologies, Inc.
Intel
Glacier Export Services, LLC
IBM Corporation
Texas Instruments, Inc.
KLA-Tencor
Safety Guru
Brooks Automation
Lewis Bass
Intel Corporation
AMAT
Cymer
The content requirements of this checklist are documented in § 15.2 of the Regulations Governing SEMI Standards
Committees.
xviii
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
SEMI Draft Document 5009D
Line Item Revisions to SEMI S8-0712a, SAFETY GUIDELINES FOR
ERGONOMICS ENGINEERING OF SEMICONDUCTOR
MANUFACTURING EQUIPMENT with title change to:
SAFETY GUIDELINE FOR ERGONOMICS ENGINEERING OF
SEMICONDUCTOR MANUFACTURING EQUIPMENT
Revisions on Multiple Topics
NOTICE: Per ¶ 3.4.3.3.1 of the SEMI Standards Procedure Manual, the purpose, scope, limitations, and terminology
sections of SEMI S8 are provided below, as is the full text of those other sections (§7, §8, Appendix 1, and Appendix
2) to which revisions are proposed in this ballot.
The line item changes proposed by this ballot begin on page 36.
1 Purpose
1.1 These guidelines provide ergonomics design principles and considerations for semiconductor manufacturing
equipment.
1.2 The purpose of these guidelines is to promote compatibility between the user and the equipment in the
manufacturing environment. The following general principles are integral to the ergonomics design and evaluation of
equipment:
1.2.1 The equipment should be designed to optimize safety by distributing tasks. Tasks should be distributed among
hardware, software, and users to make the best use of their respective capabilities and to minimize limitations and
hazards. Appropriate distribution of tasks will also optimize performance.
1.2.2 Equipment should be designed to minimize potential for errors and mishaps, by conforming to users’
expectations.
1.2.3 The equipment design should reduce fatigue and injury by fitting the equipment to the expected body size,
strength, and range of motion characteristics of the user population. Such design will also facilitate task performance.
2 Scope
2.1 The guidelines address safety aspects of ergonomics engineering in the design of semiconductor manufacturing
equipment. It should be noted that in order to ensure comprehensive coverage of potential safety hazards, some
guidelines also address general design goals for effective human-machine performance. The guidelines apply to the
design, operation, maintenance, and service of semiconductor manufacturing equipment, as well as, to a limited extent,
equipment installation (see ¶ 7.3).
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use.
It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 International, national, and local standards, codes, and regulations must be consulted to ensure that equipment
meets regulatory requirements.
3.2 Human factors data compiled in references and specifications are influenced by the population from which they
were drawn and the reason they were collected. Human factors design criteria are sometimes based on studies using
few subjects or are context-specific. Ergonomics experts should be consulted where data development or interpretation
is required.
3.3 The equipment design should incorporate reasonable accommodations for users with special needs, such as lefthandedness and color blindness. Where feasible the design should also accommodate users with hearing or vision
impairments and/or physical disabilities. It should be understood that although designing for the target user population
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 1
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
will accommodate some users with special needs, these guidelines cannot anticipate and fully accommodate all such
users.
3.4 Existing models and subsystems that meet previous versions of SEMI S8 should continue to meet the guidelines
of SEMI S8 in force at the time of design. Models with redesigns that significantly affect the ergonomic design of the
equipment should include conformance to the latest version of SEMI S8 for the redesign.
NOTE 1: Conformance with this document is believed to be a suitable substitute for conformance with its predecessors.
3.5 Conformance with the guidelines in Appendix 1 (SESC) constitutes conformance with SEMI S8.
4 Referenced Standards and Documents
4.1 SEMI Standards and Safety Guidelines
SEMI E95 — Specification for Human Interface for Semiconductor Manufacturing Equipment
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health, and Safety Guidelines for Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
4.2 CEN/CENELEC Standards1
4.2.1 European Norm (EN) standards are listed herein for application to semiconductor manufacturing equipment to
be used in the European Union (EU). As EN standards are intended for use with a broad range of industrial and
consumer products, conflicts with SEMI safety guidelines are likely. Additionally, provisional EN (prEN) standards
are subject to revision prior to adoption.
EN 894-2 — Safety/Ergonomics for Displays
EN 894-3 — Safety/Ergonomics for Control Actuators
EN 60204-1 — Safety of Machinery – Electrical Equipment of Machines, Part 1 – Specification for General
Requirements
4.3 Military Standard2
MIL-STD-1472 — Human Engineering Design Criteria for Military Systems, Equipment, and Facilities
4.4 NFPA Standard3
NFPA 79 — Electrical Standard for Industrial Machinery
4.5 ISO Standard4
ISO 9241 — Ergonomic Requirements for Office Work with Visual Display Terminals
4.6 Other Standards and Documents
Humanscale, The MIT Press, Massachusetts Institute of Technology, Cambridge, MA 02142, 1974
ANSI/IES RP75 — Practice for Industrial Lighting
Waters, Thomas, et al., Application Manual for the Revised NIOSH Lifting Equation, U.S. Department of Health and
Human Services (NIOSH), Cincinnati, OH, 1994.
1
European committee for standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat: rue
de Stassart 35, B-1050 Brussels, Belgium. http://www.cenelac.org
2
United States Military Standards, Available through the Naval Publications and Forms Center, 5801 Tabor Avenue, Philadelphia, PA 191205099, USA. Telephone: 215.697.3321
3
National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269, USA. http://www.nfpa.org
4
International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30; http://www.iso.ch
5
American National Standards Institute, 25 West 43rd Street, New York, NY 10036, USA; Telephone: 212.642.4900, Fax: 212.398.0023,
http://www.ansi.org
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 2
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
A. Mital, A.S. Nicholson, M.M. Ayoub: A Guide to Manual Materials Handling, Taylor and Francis, London, 1993.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 MAWL — maximum acceptable weight of lift
5.1.2 MMH — manual material handling
5.1.3 SESC — supplier ergonomics success criteria (see Appendix 1)
5.2 Definitions
5.2.1 administrative controls — administrative controls modify the way in which a job is performed without involving
equipment design. They are non-engineering controls which include: job rotation, job enlargement, work-rest
scheduling, micro-breaks, and stretching exercises. Engineering controls are preferred over administrative controls.
5.2.2 anthropometric considerations — design considerations based upon anthropometric (e.g., size and strength)
limitations of user personnel.
5.2.3 anthropometry — description of the physical measurement of humans (e.g., size and strength).
5.2.4 cognitive — relating to human information processing, perception, and attention.
5.2.5 critical controls and displays — controls and displays which prevent the equipment from entering, or indicate
that equipment is entering an unsafe condition in which hazards to personnel or damage to equipment may occur.
Emergency Off (EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical controls
and displays.
5.2.6 cumulative trauma disorder — a disorder which results from the accumulation of stresses (e.g., forces, repetitive
movements, etc.) to a body part over a period of time.
5.2.7 duration — the length of time of a cycle or the entire task, which represents the time of exposure to single or
multiple risk factors.
5.2.8 emergency off (EMO) — a control circuit which, when activated, places the equipment into a safe shutdown
condition.
5.2.9 engineering control — a method to eliminate or mitigate a hazard through equipment design.
5.2.10 ergonomic-related hazard — an equipment or workplace condition that creates stress to the user that
contributes to the risk of developing either an acute injury or a cumulative trauma disorder.
5.2.11 ergonomic issues — those issues dealing with the user’s physical and cognitive needs, capabilities, and human
performance limitations in relation to the design of machines, tasks, and other features of the human’s working
environment.
5.2.12 ergonomics — the study of human mental and physical capability in relation to the working environment and
the equipment operated by the worker.
5.2.13 excessive reach — a reach which may result in biomechanical or other stress to the user.
5.2.14 extended reach — a reach which requires either stretching, stooping, crouching, bending forward at the waist
greater than 20°, or shoulder flexion or abduction greater than 45°.
5.2.15 force — the mechanical effort to accomplish a specific movement or exertion. These include: static exertions,
which produce no motion but have significant duration; dynamic exertions, which are motions including lifting,
pushing, pulling; and contact stress, which is localized pressure exerted against the skin by an external force.
5.2.16 frequency — how often a task is performed over time.
5.2.17 frequently used — used in processing or job cycle at least once every hour. Multiple tool operation by a single
operator should be considered.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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5.2.18 human error — errors which include: failure to perform a required function; performing a function that has an
undesirable consequence; failure to recognize and correct a hazardous condition; or inadequate or incorrect response
to a contingency.
5.2.19 inadvertent actuation — accidental or unintentional activation or deactivation of a control.
5.2.20 infrequently used — used in processing or job cycle less frequently than once every hour. Multiple tool
operation by a single operator should be considered.
5.2.21 installation — the activities performed after the equipment is received at a user site through preparation for
initial service, including transportation, lifting, uncrating, placement, leveling, and facilities fit up.
5.2.22 lateral pinch — grip in which the object is held between the thumb and the side of the index finger (often
referred to as key grip).
5.2.23 maintenance — planned or unplanned activities intended to keep equipment in good working order.
5.2.24 mock up — a full size physical model of the equipment, generally made of relatively inexpensive materials,
used for human factors evaluation.
5.2.25 neutral posture — the position of the human body in which the joints are least stressed. Generally, the body
in its neutral position is standing erect with the eyes looking forward, and the arms hanging by the sides.
5.2.26 non-neutral (awkward) postures — the position of a joint(s) away from its neutral, or least stressed, posture.
5.2.27 normal line of sight — the line extending from the eyes, perpendicular to the intraocular line and 15° below
the horizontal position of the eye.
5.2.28 operation — consists of functions by which the operator causes the equipment to perform its intended purpose;
these may include loading product and setting or manipulating external controls.
5.2.29 operator — a user that interacts with the equipment only to the degree necessary for the equipment to perform
its intended function.
5.2.30 override — to take precedence over the current control system state.
5.2.31 palmar pinch — grip where the fingers press against the palm of the hand, with the object held between the
fingers and the palm. Thumb is not used (e.g., picking up a sheet of plywood).
5.2.32 personal protective equipment (PPE) — equipment and clothing worn to reduce potential for personal injury
from hazards associated with the task to be performed (e.g., chemical gloves, respirators, safety glasses, etc.). In the
context of this document, cleanroom attire (e.g., gloves, smocks, booties, hoods) is not considered personal protective
equipment.
5.2.33 power grip — a grip in which the fingers and thumb wrap entirely around the handle such that the thumb
contacts or overlaps the index finger.
5.2.34 postural stress — stress occurring when a body position places undue load on the muscles, tendons, nerves,
and blood vessels, or produces pressure on a joint.
5.2.35 primary viewing area — the 30° cone around the normal line of site (15° above, below, and to either side of
the line of sight).
5.2.36 problem tasks — tasks which have been defined as presenting ergonomically incorrect conditions that are
likely to cause biomechanical stresses or injury to personnel, misoperation, or damage to equipment or the product.
5.2.37 risk factors — those elements of the design which allow an increased potential for injury/illness to personnel,
or for damage to equipment, environment, or product.
5.2.38 semiconductor manufacturing equipment — equipment used in the design, development, manufacture,
assembly, measurement and test of semiconductors, and associated semiconductor support processes.
5.2.39 service — unplanned activities intended to return equipment, which has failed, to good working order.
5.2.40 static posture — a fixed position, with minimal movement of the particular body parts.
5.2.41 stooping — bending the head and shoulders, or the general body, forward and downward from an erect position.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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5.2.42 task — a group of related job elements performed within the work cycle and directed toward a specific
objective.
5.2.43 task analysis — an analytical process employed to determine the specific actions required of the user when
operating, maintaining, or servicing equipment, or doing work on single or multiple tools. Within each task, steps are
described in terms of the perception, decision-making, memory storage, posture, and biomechanical requirements, as
well as the expected errors.
5.2.44 tip pinch — grip in which the object is held between the tips of the thumb and index finger.
5.2.45 user — person interacting with the equipment. Users may include operators, maintainers, service personnel,
and others.
5.2.46 user population — a specific cross section of persons that may reasonably be expected to interact with the
equipment to perform operation, maintenance, or service tasks.
5.2.47 validation testing — testing to confirm effectiveness of design. An item’s “effectiveness” is viewed in terms
of its functional design, specific to SEMI S8.
5.2.48 WIP nest — a storage structure for work in process (WIP).
5.2.49 work environment — the location where semiconductor devices and associated support processes are designed,
developed, manufactured, assembled, measured, and tested.
5.2.50 workplace layout — the physical arrangement of equipment in the facility.
5.2.51 workspace — the available area where the user is expected to operate, maintain, and service the equipment.
5.2.52 workstation — the location where equipment controls and displays are found or the location of
loading/unloading of material.
5.2.53 work surface — a (typically horizontal) surface provided for the location of input devices, handwriting,
assembly work, etc. that is part of a seated or standing workstation.
6 General Guidelines
[This section has been omitted from the ballot in the interest of brevity. If you need a copy of this
section in order to vote, please contact SEMI Staff. ]
7 Documentation
7.1 The supplier should provide an evaluation of the equipment to SEMI S8 using Appendix 1, “Supplier Ergonomic
Success Criteria” for measurable criteria. The evaluation should include a determination of the level of risk associated
with non-conformance items. Evaluation of risk should be compatible with the SEMI S10 severity categories;
catastrophic, severe, moderate, and minor.
7.1.1 For each item in Appendix 1 which does not meet the criteria, the evaluation report should include the measured
actual dimensions, and state any supporting rationale for non-compliance. Supporting rationale may include test data
or documented engineering judgment.
EXCEPTION: For § 1, the manual material handling analysis, the evaluation report should provide documented
calculations regardless of the outcome of the analysis.
7.1.2 The evaluation report should also include the following information: manufacturer’s model number, serial
number of unit evaluated, date the equipment was evaluated, a list of all tasks which were evaluated as part of the
analysis and the name of the person performing the evaluation.
7.2 Supplier provided documentation should include administrative controls intended by the supplier to mitigate
ergonomic risks.
7.3 Supplier provided documentation should illustrate any installation requirement necessary to meet SEMI S8
guidelines (e.g., Diagram should show clearance area required for opening hinged panels, operator working area,
allowable range of vertical foot adjustment to keep ergonomic measurements within SESC acceptable limits, etc.).
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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DRAFT
7.4 The evaluation should specify an installation reference point for each independently adjustable section of the
equipment for vertical measures. If there is a supplier recommended installation height, the reference for the evaluation
should be the same. This installation height should be included in the supplier’s installation documentation.
NOTE 2: Installation documentation may include installation manuals and other information provided by supplier addressing
installation concerns.
8 Related Documents
8.1 SEMI Standards and Safety Guidelines
SEMI S13 — Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing
Equipment
8.2 ANSI Standards
ANSI Z535.4 — Product Safety Signs and Labels
ANSI/HFES 100 — Human Factors Engineering of Computer Workstations; Human Factors and Ergonomics Society,
2007.
8.3 CEN/CENELEC Standards6
EN 614-1 — Safety of Machinery – Ergonomic Design Principles, Part 1 – Terminology and General Principles
EN 894-1 — Safety/Ergonomics for Operator Interaction
EN 894-2:1997 — Safety of Machinery: Ergonomics Requirements for the Design of Displays and Control
Actuators, Part 2: Displays
EN 50099-2 — Safety/Marking Principles
8.4 ISO Standards7
EN ISO 7250 — Basic Human Body Measurements for Technological Design
EN ISO 14738 — Safety of Machinery, Anthropometric Requirements for the Design of Workstations at Machinery
8.5 JIS Standards8
JIS Z 8513 — Ergonomics – Office Work with Visual Display Terminals (VDTs) – Visual Display Requirements
(Amendment 1)
8.6 NIOSH Documents9
NIOSH Publication No. 81-122 — Work Practices Guide for Manual Lifting, National Institute for Occupational
Safety and Health, 1981.
Revised NIOSH Equation, Ergonomics, Vol. 36, No. 7, 1993.
8.7 SAE Document10
SAE J833 — Human Physical Dimensions
6
European Committee for Standardization (CEN)/European Committee for Electrotechnical Standardization (CENELEC), Central Secretariat,
rue de Stassart 35, B-1050 Brussels, Belgium; http://www.cenelec.com
7
International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland;
Telephone: 41.22.749.01.11, Fax: 41.22.733.34.30, http://www.iso.ch
8
Japanese Standards Association, 4-1-24 Akasaka, Minato-ku, Tokyo 107-8440, Japan; Telephone: 81.3.3583.8005, Fax: 81.3.3586.2014,
http://www.jsa.or.jp
9
National Institute for Occupational Safety and Health, Technical Information Branch, 4676 Columbia Pkwy, Cincinnati, OH 45226, USA;
http://www.niosh.com.my
10
Society of Automotive Engineers, 400 Commonwealth Drive, Warrendale, PA 15096-0001, USA; Telephone: 724.776.4970, Fax:
724.776.0790, http://www.sae.org
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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DRAFT
8.8 SEMATECH Documents11
Preventing User-Hostile Interfaces in IC-Fab Equipment — Ergonomic Approaches for Preventing Ten Frequent
Interface Problems, Miller, Dwight P. and Whitehurst, Hugh, SEMATECH Technology Transfer
#92091299NA-ENG, Nov. 1992.
SEMATECH SCC User interface Style Guide, 1.0. 92061179A-ENG, August 21, 1992.
8.9 Other Documents
8.9.1 Bailey, Robert W. “Human Performance Engineering.” Prentice Hall, 1989.
8.9.2 Eastman Kodak Company “Ergonomic Design for People at Work, Vols. 1 and 2.” Van Nostrand-Reinhold,
1983.
8.9.3 Grandjean, E., Fitting the Task to the Man: A Textbook of Occupational Ergonomics (4th Ed.), Taylor & Francis,
1988.
8.9.4 Grether W.F. and Baker C.A., 1972, Visual Presentation of Information in Van Cott and Kincade “Human
Engineering to Equipment Design.” Washington DC, US Government Printing Office.
8.9.5 Konz, S. “Work Design: Industrial Ergonomics.” (3rd Ed), Publishing Horizons, 1990.
8.9.6 Kroemer, K.H.E. “Engineering Anthropometry.” Occupational Ergonomics Handbook, eds. W. Karwowski &
W.S. Marras, CRC Press, Boca Raton, 1999.
8.9.7 Pheasant, Stephen, Bodyspace “Anthropometry, Ergonomics and Design.” Taylor & Francis, 1988.
8.9.8 Salvendy, Gavriel (ed.) “Handbook of Human Factors.” Wiley, 1987.
8.9.9 Sanders, Mark S. and McCormick, Ernest “Human Factors in Engineering and Design.” (7th Ed), McGraw-Hill
Book Company, 1993.
8.9.10 Snook, Stover and V. Ciriello “The Design of Manual Handling Tasks — Revised Tables of Maximum
Acceptable Weights and Forces.” Ergonomics, Vol. 34, No. 9, 1991.
8.9.11 VanCott, Harold P. and Kinkade, Robert (eds.) “Human Engineering Guide to Equipment Design.” U. S.
Government Printing Office, 1972.
APPENDIX 1
SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)
NOTICE: The material in this Appendix is an official part of SEMI S8 and was approved by full letter ballot
procedures on November 21, 2006.
NOTICE: Revisions to Appendix 1 will be effective upon the July 2015 publication as shown in Delayed Revisions
Section 1. The Environmental Health & Safety Global Technical Committee has voted that the revision is OPTIONAL
before the Effective Date.
A1-1 Introduction
A1-1.1 Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not
normative. Also, the pictograms are not intended to depict every possible application of the guidelines.
11
SEMATECH, 257 Fuller Road, Suite 2200, Albany, NY 12203, USA; Telephone: 518.649.1000, http://www.sematech.org
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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DRAFT
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section 1: Manual Material Handling
Section
Indicator
1.1
Potentially hazardous manual material handling tasks
performed as part of operations, maintenance, or
service are analyzed utilizing appropriate procedures.
NOTE: Two hand lifting or lowering tasks should be
analyzed:
if the object being handled weighs more than 44.5 N
(10 lbf);
OR, if the object weighs more than 22.2 N (5 lbf) and
the anticipated frequency is greater than 1 lift every 5
minutes.
See Appendix 2 for further information.
Acceptance Criteria
Metric Units (US Customary Units)
Actual/
Conforms?
Analysis and results documentation. Table A22, Appendix 2, or the equivalent, should be used
to document two-hand lift/lower analysis.
Actual
Conforms?
Yes
No
N/A
Section 2: Product Loading in a Standing Posture
(Applicable to all media other than wafer cassettes including JEDEC trays, magazines and reticle cassettes.)
Section
2.1
Indicator
Clearance provided for
finger thickness.
Acceptance Criteria
Metric Units
(US Customary Units)
Minimum 38 mm (1.5 in.)
Reference
Pictogram
Actual/
Conforms?
Actual
Finger clearances
Conforms?
Yes
No
N/A
One hand
2.2
Clearance provided for
hand thickness.
Two hands
Actual
Minimum 76 mm (3 in.)
Hand
clearance
Conforms?
Yes
No
N/A
2.3
Reach distance measured
from the leading edge of
the tool or obstruction to
the hand/product
coupling point(s).
Maximum 330 mm (13 in.)
Reach
distance
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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DRAFT
Section 2: Product Loading in a Standing Posture
(Applicable to all media other than wafer cassettes including JEDEC trays, magazines and reticle cassettes.)
Section
2.4
Acceptance Criteria
Metric Units
(US Customary Units)
Indicator
Reference
Pictogram
Actual/
Conforms?
Vertical coupling point of Maximum 1010 mm (40 in.)
hand to product in load
Minimum 890 mm (35 in.)
position.
Actual
Conforms?
Yes
No
N/A
Vertical
coupling
height
Section 3: Wafer Cassette Loading
Section
3.1
3.2
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Wafer cassette loading
Less than 10° rotation in any axis.
should not require greater
than 10° cassette rotation
in any axis.
NOTE: Unless otherwise
specified, you should
assume that 200 mm or
smaller wafers are
transported in the vertical
orientation and that
300 mm wafers are
transported in the
horizontal orientation.
Load port height, vertical
distance from standing
surface (150–200 mm
wafers).
Reference
Pictogram
Actual/
Conforms?
Wafer cassette shown in the
manual carrying orientation
Actual
Rotation about the Yaxis: maximum 10º
Conforms?
Yes
No
N/A
Rotation about
the X-axis
maximum 10º
Rotation about the Zaxis: maximum 10º
Maximum 960 mm (38 in.)
Minimum 890 mm (35 in.)
Actual
Load port
height
3.3
Maximum lip height in
Maximum 30 mm (1.2 in.)
front of cassette load port
over which the cassette is
lifted (150–200 mm wafer
cassettes only). Measure
lip height from the load
surface.
Conforms?
Yes
No
N/A
Actual
Lift-over lip
above load
port
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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DRAFT
Section 3: Wafer Cassette Loading
Section
3.4
3.5
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Reach distance from the
Maximum 330 mm (13 in.)
leading edge of the tool or
obstruction to the
coupling point(s) on a
rotation device or the
product grasp point.
Minimum hand clearance Minimum 76 mm (3 in.)
on either side of the
cassette, measured from
the side of the cassette to
the nearest adjacent
object.
Reference
Pictogram
Actual/
Conforms?
Actual
Reach
distance
Conforms?
Yes
No
N/A
Actual
Hand
clearance
Conforms?
Yes
No
N/A
Section 4: Work in Process Storage (specific to wafer cassettes)
Section
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
4.1
Integral wafer cassette/lot
box storage shelf height
(150 and 200 mm [6 and
8 in.] wafer cassette/lot
boxes only).
Maximum (1 item deep) 1520 mm
(60 in.)
Maximum (2 items deep) 1220 mm
(48 in.)
Minimum 460 mm (18 in.)
Reference
Pictogram
Actual/
Conforms?
Maximum shelf
height, 1 item
deep
Maximum shelf
height, 2 items
deep
Minimum shelf
height
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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DRAFT
Section 5: Manual Wafer Cassette Rotation Device Design
Section
5.1
Indicator
Handle height, couple
point for hand(s) from
standing surface.
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Maximum 1206 mm (47.5 in.)
Minimum 838 mm (33 in.)
Actual
Maximum
handle
height
Conforms?
Yes
No
N/A
Minimum
handle
height
5.2
Hand grip(s) shall allow
for a full “power grip”
similar to grabbing a rung
on a ladder or holding a
pistol.
Allows for a full power grip in
either pronated (palm facing down)
or neutral (handshake position)
posture.
Neutral grip
5.3
5.4
Single hand lift force
Two hand lift force
Actual
Power grip examples
Maximum 37.8 N (8.5 lbf). This
value includes a 15% capacity
reduction due to cleanroom glove
use.
Wrist deviation reduces further
strength capacity by 15%.
Maximum 64.5 N (14.5 lbf). This
value includes a 15% capacity
reduction due to cleanroom glove
use.
Wrist deviation reduces further
strength capacity by 15%.
Pronated grip
Conforms?
Yes
No
N/A
Actual
—
Conforms?
Yes
No
N/A
Actual
—
Conforms?
Yes
No
N/A
Section 6: Handle Design
(Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves)
Section
6.1
Indicator
Handle surface finish
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
All edges radiused
—
Actual/
Conforms?
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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DRAFT
Section 6: Handle Design
(Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves)
Section
Acceptance Criteria
Metric Units
(US Customary Units)
Indicator
6.2
Cylindrical Handle
6.2.1
Cylindrical handle
diameter
Reference
Pictogram
Actual/
Conforms?
—
Maximum 38 mm (1.5 in.)
Minimum 25 mm (1 in.)
Diameter
Actual
Conforms?
Yes
No
N/A
6.2.2
Cylindrical handle length
Minimum 127 mm (5 in.)
Actual
Length
Conforms?
Yes
No
N/A
6.3
6.3.1
—
Circular or Triangular Handle
Circular or triangular
handle diameter
Maximum 90 mm (3.5 in.)
Minimum 50 mm (2 in.)
Actual
Diameter
Conforms?
Yes
No
N/A
6.3.2
Circular or triangular
handle height (thickness)
Maximum 25 mm (1 in.)
Minimum 19 mm (0.75 in.)
Thickness
Actual
Conforms?
Yes
No
N/A
6.4
6.4.1
—
Ball Handle
Ball handle diameter
Maximum 63 mm (2.5 in.)
Minimum 19 mm (1.5 in.)
Diameter
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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DRAFT
Section 6: Handle Design
(Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves)
Section
6.5
6.5.1
6.5.2
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
Actual/
Conforms?
—
Squeeze Grip Handle
Squeeze grip handle grip
span
Handle sections need not
be cylindrical.
Measurement taken at the
maximum grip span of
handle measured at the
user’s middle finger.
Maximum 89 mm (3.5 in.) open
Minimum 38 mm (1.5 in.) closed
Squeeze grip handle grip
length.
Minimum 127 mm (5 in.)
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
6.6
6.6.1
—
Pistol Grip Handle
Pistol grip handle diameter Maximum 63 mm (2.5 in.)
Minimum 38 mm (1.5 in.)
Actual
Diameter
6.6.2
Pistol grip handle length
Minimum 127 mm (5 in.)
Actual
Length
6.7
6.7.1
Conforms?
Yes
No
N/A
Enclosed Handles
NOTE: Handle diameter refers to the surface of the handle presented to the inside of the curled fingers.
Enclosed handles need not be made solely from cylindrical stock.
Enclosed handle, full hand Width, minimum 127 mm (5 in.)
power grip (suitcase
Depth, minimum 45 mm (1.75 in.)
handle).
Diameter, maximum 25 mm (1 in.)
Minimum 6.3 mm (0.25 in.)
6.7.1.2 Diameter, requiring no
greater than 89 N
(20 lbf) force.
Minimum 13 mm (0.5 in.)
—
Actual
Depth
Diameter
Width
6.7.1.1 Diameter, requiring no
greater than 71 N
(16 lbf) force.
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Actual

Conforms?
Yes
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 13
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 6: Handle Design
(Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves)
Section
Indicator
6.7.1.3 Diameter, requiring no
greater than 180 N
(40 lbf) force.
6.7.2
Enclosed handle, three
fingers.
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
Minimum 19 mm (0.75 in.)

Width, minimum 90 mm (3.5 in.)
Depth, minimum 38 mm (1.5 in.)
Diameter, minimum 6.3 mm
(0.25 in.)
Force, maximum 71 N (16 lbf)
6.7.4
6.8
6.8.1
Enclosed handle, two
fingers.
Enclosed handle, one
finger.
Hook grasp handle (four
fingers).
Hook grasp handle pull
force (four fingers)
6.9
Finger Pull Handle
6.9.2
Width, minimum 38 mm (1.5 in.)
Depth, minimum 38 mm (1.5 in.)
Diameter, minimum 3.2 mm
(0.13 in.)
Force, maximum 27 N (6 lbf)
Diameter
Finger pull handles (four
fingers)
Finger pull handles pull
force (four fingers)
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
—
Hook Grasp Handle
6.8.2
6.9.1
Width, minimum 60 mm (2.5 in.)
Depth, minimum 38 mm (1.5 in.)
Diameter, minimum 6.3 mm
(0.25 in.)
Force, maximum 51 N (11.5 lbf)
No
N/A
Actual
Depth
Width
6.7.3
Actual/
Conforms?
Opening length, minimum 90 mm
(3.5 in.)
Opening width, minimum 38 mm
(1.5 in.)
Depth, minimum 50 mm (2 in.)
Lip length, minimum 50 mm (2 in.)
Maximum 80 N (18 lbf)
Actual
Conforms?
Yes
No
N/A
—
Opening length, minimum 90 mm
(3.5 in.)
Opening width, minimum 25 mm
(1 in.)
Depth, minimum 19 mm (0.75 in.)
Lip length, minimum 19 mm
(0.75 in.)
Actual
Conforms?
Yes
No
N/A
Maximum 9.8 N (2.2 lbf)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 14
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 7: Maintainability and Serviceability
Section
7.1
7.2
7.2.1
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Minimum lighting level in Minimum 300 lux (30 fc)
routine maintenance areas
is required where the
operator has to read
information, use a hand
tool, or make a
connection. This provision
can be met by providing
integral lighting or
portable lighting which
can be temporarily
attached such that it does
not have to be hand held.
Reference
Pictogram
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
—
Full Body Clearance
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be
provided based on the nature of the tasks performed in the designated area.
Any posture: upper body Minimum 610 mm (24 in.)
clearance (shoulder width)
—
Actual
Conforms?
Yes
No
N/A
7.2.2
7.2.3
7.2.4
Standing
Sitting-on-floor
Squatting
A. Overhead clearance, minimum
1980 mm (78 in.)
B. Forward horizontal clearance#1,
minimum 690 mm (27 in.)
A. Overhead clearance, minimum
1000 mm (39 in.)
B. Forward horizontal clearance#1,
minimum 690 mm (27 in.)
C. Working height, minimum
280 mm (11 in.)
A. Overhead clearance, minimum
1220 mm (48 in.)
B. Forward horizontal clearance#1,
minimum 790 mm (31 in.)
C. Working height, minimum
460 mm (18.1 in.)
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 15
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 7: Maintainability and Serviceability
Section
7.2.5
7.2.6
7.2.7
7.2.8
7.2.9
7.3
7.3.1
Indicator
Kneeling
Kneeling crawl
Stooping
Supine lying on back
Prone or crawl space
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
A. Overhead clearance (from floor),
minimum 1450 mm
(57 in.)
B. Forward horizontal clearance#1,
minimum 1220 mm (48 in.)
C. Working height, minimum
640 mm (25.2 in.)
Actual
Conforms?
Yes
No
N/A
A. Overhead clearance measured
from floor, minimum 740 mm
(29 in.)
B. Forward horizontal clearance#1,
minimum 1520 mm (60 in.)
Actual
Conforms?
Yes
No
N/A
A. Overhead clearance, minimum
1450 mm (57 in.)
B. Forward horizontal clearance#1,
minimum 1020 mm (40 in.)
C. Working height, minimum
640 mm (25.2 in.)
Actual
Conforms?
Yes
No
N/A
A. Height (overhead), minimum
430 mm (17 in.)
B. Length (forward), minimum
1980 mm (78 in.)
Actual
Conforms?
Yes
No
N/A
A. Height (overhead), minimum
510 mm (20 in.)
B. Length (forward), minimum
2440 mm (96 in.)
Actual
Conforms?
Yes
No
N/A
Hand/Arm Clearance
NOTE: Where appropriate to do so, dimensions have been adjusted for the use of cleanroom gloves
Clearance provided for
finger access round
(diameter) or square.
One finger access, minimum
32 mm (1.25 in.)
2, 3, or 4 finger twist of small knob,
minimum object diameter + 58 mm
(2.3 in.)
—
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 16
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 7: Maintainability and Serviceability
Section
7.3.2
7.3.3
7.3.4
7.3.5
7.3.6
7.3.7
Indicator
Clearance provided for
flat hand wrist access.
Clearance provided for
fist to wrist access.
Acceptance Criteria
Metric Units (US Customary Units)
Height (palm thickness), minimum
89 mm (3.5 in.)
Width (palm width), minimum
114 mm (4.5 in.)
Height (fist thickness), minimum
89 mm (3.5 in.)
Width (fist width), minimum
127 mm (5 in.)
Clearance provided for
Reach, maximum 610 mm (24 in.)
two hands arm to
Width, minimum 483 mm (19 in.)
shoulders access (does not Height, minimum 114 mm (4.5 in.)
ensure visual access).
Clearance provided for
two hands, hand to wrist
access (does not ensure
visual access).
Reach, maximum 203 mm (8 in.)
Width, minimum 191 mm (7.5 in)
Height, minimum 114 mm (4.5 in.)
Clearance provided for
one arm to shoulder
access (does not ensure
visual access).
Minimum 132 mm (5.2 in.)
Clearance provided for
one arm to elbow access,
diameter, or square area
(does not ensure visual
access).
Minimum 119 mm (4.7 in.)
Reference
Pictogram
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 17
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 7: Maintainability and Serviceability
Section
7.4
7.4.1
7.4.2
7.4.3
7.5
7.5.1
7.5.2
7.5.3
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
—
Maintenance and Service Access
Enclosures or covers
must, unless fully
removable, be selfsupporting, in the open
position, and not require
manual support during
maintenance. Exceptions
may be allowed for selfclosing doors for fire
safety or compliance
reasons.
Supports present
Conforms?
Yes
No
N/A
—
Access covers should be Handles present, refer to § 6 for
equipped with full-handed design criteria.
grasp areas or other means
for opening them.
Height of access cover
handle over the entire
range of motion required
for operation or
maintenance. There
should be no greater than
a 254 mm (10 in.) deep
obstruction in front of the
handle.
—
Maximum 1700 mm (67 in.).
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Replaceable Components
Serviceable components
Serviceable components configured
are replaceable as modular as described.
packages, and are
configured for rapid
removal and replacement.
Serviceable components
should not be stacked
directly on one another
(i.e., a lower layer should
not support an upper
layer).
Actual/
Conforms?

Serviceable components
independently accessible.

Heavy components
Guide/locating pins present.
(objects which have a
lifting index of 0.5 or
greater, see SESC, § 1.0)
or bulky components
(greater than 36 inches in
length) requiring frequent
removal/installation
should include
guide/locating aids to
assist in positioning.

Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Locating pins
An example of locating pins
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 18
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 7: Maintainability and Serviceability
Section
7.5.4
7.5.5
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Cables, connectors, plugs, Identification present, keyed where
and receptacles should be needed.
labeled, keyed, color
coded, or otherwise
configured to make
connection easier and
prevent cross connection.
This feature is assessed
only if a SEMI S2
assessment is not being
conducted.
Reference
Pictogram

Circuit boards mounted in Finger access, gripping, or ejecting
a card cage configuration aids available.
should have gripping or
ejecting aids for mounting
and removal.
Actual/
Conforms?
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Section 8: Display Location
Section
8.1
8.1.1
8.1.2
8.1.3
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Location for Operator Primary Interface, Standing Station
Height of video display
terminal (single monitor).
Does not include
touchscreens, measured
from floor to center of
screen.
Maximum 1470 mm (58 in.)
Minimum 1320 mm (52 in.)
Height of video display
terminal (stacked
monitors). Does not
include touchscreens,
measured from floor to
top line of the top
monitor.
The primary monitor in a
stacked configuration is
the bottom monitor.
Maximum 1680 mm (66 in.)
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Height of infrequently used Maximum 1680 mm (66 in.)
video display terminal
(viewed briefly less often
than once per hour)
measured to top line of
monitor.
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 19
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 8: Display Location
Section
8.1.4
8.1.5
8.1.6
8.1.7
8.1.8
8.2
8.2.1
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Height of very infrequently Maximum 1880 mm (74 in.)
used video display terminal
(viewed briefly less often
than once per day)
measured to top line of
monitor.
Conforms?
Yes
No
N/A
Height of infrequently
viewed visual signal
measured to the top of the
signal. This guideline
does not apply to light
towers.
Maximum 2130 mm (84 in.)
Conforms?
Yes
No
N/A
Height of touch screen
monitor.
See § 9 for horizontal
reach criteria.
Maximum 1470 mm (58 in.)
measured from floor to uppermost
active pad on screen.
Minimum 910 mm (36 in.)
measured from floor to lowest
active pad on the screen.
Tilt angle of touch screen
monitor between
1041 mm (41 in.) and
1219 mm (48 in.) in
height to top of screen.
Upward minimum 30°
Tilt angle of touch screen
monitor less than
1041 mm (41 in.) in
height to top of screen.
Upward minimum 45°
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Location for Operator Primary Interface, Seated Station
NOTE: A seated station is where a short cylinder office-style chair is used.
Height of video display
terminal (single monitor).
Does not include
touchscreens, measured
from the underside of the
work surface to the
centerline of monitor.
Conforms?
Yes
No
N/A
Maximum 517 mm (20.5 in.)
Minimum 267 mm (10.5 in.)
—
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 20
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 8: Display Location
Section
8.2.2
8.2.3
8.2.4
Indicator
Height of video display
terminal (stacked
monitors), does not
include touchscreens,
measured from the
underside of the work
surface to the top line of
top monitor.
The primary monitor in a
stacked configuration is
the bottom monitor.
Acceptance Criteria
Metric Units (US Customary Units)
Maximum 727 mm (28.5 in.)
Minimum 267 mm (10.5 in.)
Tilt angle of video display Downward minimum 15°
terminal greater than
1397 mm (55 in.) from
underside of work surface
to top of display.
Note: This line item
becomes significant in the
event that the maximum
height criteria cannot be
met.
Height of touch screen
monitor.
Maximum 397 mm (15.5 in.)
measured from the underside of
work surface to highest active pad
on the screen.
Minimum 77 mm (3.5 in.) measured
from underside of work surface to
lowest active pad on the screen.
See § 9 for horizontal reach criteria.
Reference
Pictogram
Actual/
Conforms?
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 21
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 8: Display Location
Section
8.3
8.3.1
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
—
Display Characteristics
Lateral distance from the
centerline of the display to
the center of the keyboard
home row, which is
typically the midpoint
between the “G” and “H”
keys on a keyboard with a
standard “QWERTY” key
layout.
When practical, off-center
displays should be angled
perpendicular to the user’s
line of sight to minimize
image distortion.
Calculate maximum lateral offset
distance using the following
formula: (KD+EK) × tan 35° = LD
KD = Forward distance from
keyboard home row to display.
EK = 304 mm (12.0 in.) Constant
forward distance from eye to
keyboard home row.
LD = Maximum recommended
lateral distance to center of display.
Actual
Conforms?
Yes
No
N/A
Examples of maximum recommended
offset dimensions using the provided
formula.
Keyboard home
row to display
distance
8.3.2
Actual/
Conforms?
Display distance. Measure Minimum 229 mm (9.0 in.)
horizontal distance from
keyboard home row or
center of input device in the
home position to the
display.
Applies to seated and
standing workstations.
This recommendation does
not apply to applications
where input devices
(keyboard, trackball, or
mouse) are used more like
machine controls
(intermittent one finger
entry on the keyboard,
intermittent short term use
of the mouse or trackball)
than for standard typing
(continuous use of
keyboard for entry of long
character strings, extended
use of trackball or mouse in
a graphical environment).
Maximum
offset
229 mm
(9.0 in.)
373 mm
(14.7 in.)
300 mm
(11.8 in.)
423 mm
(16.6 in.)
350 mm
(13.8 in.)
458 mm
(18.0 in.)
400 mm
(15.7 in.)
493 mm
(19.4 in.)
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 22
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 8: Display Location
Section
8.3.3
8.3.4
Indicator
Character height (specific
to Chinese, Korean, and
Japanese characters).
Character height (all
characters other than
Chinese, Korean, and
Japanese).
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Minimum 25 minutes of arc
(character height is greater than or
equal to the viewing distance
divided by 137.5).
Minimum recommended viewing
distance is 500 mm (19.7 in.).
Minimum 16 minutes of arc
(character height is greater than or
equal to the viewing distance
divided by 215).
Minimum recommended viewing
distance is 500 mm (19.7 in.).
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and
maintenance)
Section
Indicator
9.1
Standing station
NOTE: A standing station
is one where the operator
can assume a standing
posture or a seated posture
in a tall stool which places
the operator at
approximately the same
stature.
9.1.1
Vertical location of very
infrequently used controls
(controls used less often
than once every 24 hours)
measured from the
standing surface to the
centerline of the control.
Acceptance Criteria
Metric Units (US Customary Units)
Actual/
Conforms
—
Maximum 1640 mm (64.5 in.)
Minimum 0 mm (0 in.)
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 23
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and
maintenance)
Section
9.1.2
9.1.3
Indicator
Location of infrequently
used and/or critical
controls. Maximum
reaches are indicated for
various heights. Reaches
are measured from the
leading edge of the
equipment or obstacle.
Interpolate for
intermediate values.
Location of frequently
used controls. Maximum
reaches are indicated for
various heights. Reaches
are measured from the
leading edge of the
equipment or obstacle.
Interpolate for
intermediate values.
Acceptance Criteria
Metric Units (US Customary Units)
Actual/
Conforms
Controls should not be located above 1638 mm (64.5 in.) or below 838 mm
(33 in.).
Height
Conforms?
Yes
No
N/A
Horizontal reach
1638 mm (64.5 in.)
254 mm (10 in.)
1524 mm (60 in.)
368 mm (14.5 in.)
1422 mm (56 in.)
432 mm (17 in.)
1321 mm (52 in.)
470 mm (18.5 in.)
1219 mm (48 in.)
483 mm (19 in.)
1118 mm (44 in.)
470 mm (18.5 in.)
1016 mm(40 in.)
394 mm (15.5 in.)
914 mm (36 in.)
292 mm (11.5 in.)
838 mm (33 in.)
178 mm (7 in.)
Controls should not be located above 1270 mm (50 in.) or below 940 mm
(37 in.).
Height
Horizontal reach
1270 mm (50 in.)
292 mm (11.5 in.)
1219 mm (48 in.)
330 mm (13 in.)
1168 mm (46 in.)
368 mm (14.5 in.)
1118 mm (44 in.)
394 mm (15.5 in.)
1067 mm (42 in.)
406 mm (16 in.)
1016 mm (40 in.)
394 mm (15.5 in.)
940 mm (37 in.)
318 mm (12.5 in.)
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 24
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and
maintenance)
Section
Indicator
9.2
Seated station
NOTE: A seated station is
one where a short cylinder
office-style chair is used.
9.2.1
Acceptance Criteria
Metric Units (US Customary Units)
Actual/
Conforms
Conforms?
Yes
No
N/A
Location of infrequently
Controls should not be located greater than 724 mm (28.5 in.) above or
used and/or critical
140 mm (5.5 in.) below the underside of the work surface.
controls. Maximum
Height
Horizontal reach
reaches are indicated for
724
mm
(28.5
in.)
356 mm (14 in.)
various heights. Reaches
are measured from the
597 mm (23.5 in.)
432 mm (17 in.)
leading edge of the work
495 mm (19.5 in.)
470 mm (18.5 in.)
surface or obstacle.
394 mm (15.5 in.)
483 mm (19 in.)
Heights are measured
from the underside#1 of the
292 mm (11.5 in.)
483 mm (19 in.)
work surface. Interpolate
191 mm (7.5 in.)
470 mm (18.5 in.)
for intermediate values.
89 mm (3.5 in.)
445 mm (17.5 in.)
−13 mm (−0.5 in.)
381 mm (15 in.)
−140 mm (−5.5 in.)
254 mm (10 in.)
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 25
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and
maintenance)
Section
9.2.2
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Actual/
Conforms
Location of frequently used Controls should not be located greater than 394 mm (15.5 in.) above or less
Actual
controls. Maximum reaches than 89 mm (3.5 in.) above the underside of the work surface.
are indicated for various
Height
Horizontal reach
heights. Reaches are
Conforms?
394 mm (15.5 in.)
330 mm (13 in.)
measured from the leading
Yes
edge of the work surface or
343 mm (13.5 in.)
368 mm (14.5 in.)
No
obstacle. Heights are
292 mm (11.5 in.)
394 mm (15.5 in.)
N/A
measured from the
241 mm (9.5 in.)
406 mm (16 in.)
underside#1 of the work
surface. Interpolate for
191 mm (7.5 in.)
419 mm (16.5 in.)
intermediate values.
140 mm (5.5 in.)
419 mm (16.5 in.)
89 mm (3.5 in.)
419 mm (16.5 in.)
Section 10: Workstation Design
Section
10.1
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Standing Station
NOTE: A standing station is one where the operator can assume a standing posture or a seated posture in
a tall stool which places the operator at approximately the same stature.
10.1.1 Work surface edge radius
where the operator can
assume a static posture in
contact with the edge.
Minimum 6.4 mm (0.25 in.) radius
—
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 26
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 10: Workstation Design
Section
Indicator
10.1.2 Height of keyboard,
trackball, or mouse (to
home row, top of
ball/mouse).
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Maximum 1020 mm (40 in.)
Minimum 970 mm (38 in.)
NOTE: In applications where input devices (keyboard, trackball,
or mouse) are used more like machine controls (intermittent one
finger entry on the keyboard, intermittent short term use of the
mouse or trackball) than for standard typing (continuous use of
keyboard for entry of long character strings, extended use of
trackball or mouse in graphical environment), it is appropriate to
use the height and reach locations described in § 9, Hand Control
Location (standing station).
10.1.3 Height of microscope
eyepieces. Should be
adjustable through at least
this range.
10.2
Range includes 1270 mm (50 in.) to
1730 mm (68 in.)
Maximum 87 mm (3.5 in.)
Minimum 37 mm (1.5 in.)
NOTE: In applications where input devices (keyboard, trackball,
or mouse) are used more like machine controls (intermittent one
finger entry on the keyboard, intermittent short term use of the
mouse or trackball) than for standard typing (continuous use of
keyboard for entry of long character strings, extended use of
trackball or mouse in graphical environment), it is appropriate to
use the height and reach locations described in § 9 of this table,
Hand Control Location (seated station).
10.2.2 Vertical leg clearance.
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Seated Station
NOTE: A seated station is one where a height-adjustable, office-style chair is used.
10.2.1 Height of keyboard,
trackball, or mouse.
(measured to home row
and top of ball/mouse
from the underside of the
work surface).
Actual/
Conforms?
Minimum 673 mm (26.5 in.)
—
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 27
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 10: Workstation Design
Section
Indicator
10.2.3 Horizontal leg clearance,
depth at knee level.
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Minimum 508 mm (20 in.)
Actual
Conforms?
Yes
No
N/A
10.2.4 Horizontal leg clearance,
depth at foot level.
10.2.5 Horizontal leg clearance,
width.
Minimum 660 mm (26 in.) depth
clearance at a minimum vertical
range of 419 mm (16.5 in.) to
673 mm (26.5 in.) below the
underside of the work surface.
Conforms?
Yes
No
N/A
Minimum 610 mm (24 in.)
Actual
Conforms?
Yes
No
N/A
10.2.6 Equipment integrated
microscope: Height of
microscope eyepiece
measured from underside
of work surface to center
of eyepiece. Must be
adjustable with the entire
range.
Range includes 495 mm (19.5 in.)
to 658 mm (25.9 in.).
Actual
Conforms?
Yes
No
N/A
NOTE: The intent of the change of reference from the floor to the underside of the work surface is to
allow for higher work surfaces in situations where there is a specific advantage, and to ensure in those
cases that the other design features are located appropriately for the higher work surface.
Stand-alone (table top)
microscopes:
Height of microscope
eyepiece measured from
the top of the work
surface to center of
eyepiece. Must be
adjustable with the entire
range.
Range includes 445 mm (17.5 in.)
to 607 mm (23.9 in.).
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 28
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 10: Workstation Design
Section
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
10.2.7 Microscope eyepiece
location in relation to
leading edge of
workstation.
Eye pieces are flush with or
protrude horizontally beyond the
leading edge of the workstation
toward the user (applicable at all
eyepiece height adjustment
settings).
10.2.8 Thickness of work
surface.
Only needs to be applied
to depth of work surface
in section 10.2.3 of this
table.
Maximum 51 mm (2 in.)
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
10.2.9 Thickness of work surface Maximum 75 mm (3 in.)
used for an enclosed
keyboard.
Only needs to be applied to
depth of work surface in
section 10.2.3 of this table.
10.2.10 Maximum work surface
Maximum 145 mm (5.7 in.)
thickness for non-keyboard
applications.
Only needs to be applied to
depth of work surface in
section 10.2.3 of this table.
Arm support surface should be
10.2.11 For work surfaces
thicknesses greater than
present in front of primary controls.
75 mm (3 in.), arm support
surface should be present in
front of primary controls
used by each hand.
10.2.12 Work surface edge radius
where the operator can
assume a static posture in
contact with the edge.
Reference
Pictogram
Work surfaces less than or equal to
51 mm (2.0 in.) thick, minimum
6 mm (0.25 in.) radius.
Work surfaces greater than 51 mm
(2.0 in.) thick, minimum 13 mm (0.5
in.) radius.
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 29
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 10: Workstation Design
Section
Indicator
10.2.13 Work surface edge radius
where the operator can
assume a static posture in
contact with the edge.
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Minimum 6 mm (0.25 in.) radius
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
#1 Distance measured away from the equipment or obstruction for body clearance in the given posture.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 30
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
APPENDIX 2
LIFTING, STRENGTH, AND MATERIALS HANDLING
[This section has been omitted from the ballot in the interest of brevity. If you need a copy of this
section in order to vote, please contact SEMI Staff. ]
[Related Information sections 1 through 6 have been omitted from the ballot in the interest of brevity. If you need
a copy of these sections in order to vote, please contact SEMI Staff.]
RELATED INFORMATION 1
ANTHROPOMETRIC RESOURCE DATA
RELATED INFORMATION 2
WORKSTATION DESIGN
RELATED INFORMATION 3
DESIGN FOR MAINTAINABILITY AND SERVICEABILITY
RELATED INFORMATION 4
HAZARD ALERTS, LABELS, AND ALARMS
RELATED INFORMATION 5
CONTROLS AND DISPLAYS
RELATED INFORMATION 6
USER COMPUTER INTERFACE
Please note: Delayed Revision 1 to this document (shown on the
next four pages) has already been voted on and approved by the
Environmental Health & Safety Global Technical Committee and will
be included in the July 2015 publication.
Also, please note that Delayed Revision D1-2 will change the
checkbox format in the SESC Checklist ‘Actual/Conforms’ column
but these changes are not in effect at the time of this ballot.
Therefore, Line Items 3 and 4 show the original checkboxes for
sections that are to remain unchanged while the new checkbox
format is used for proposed revisions. If line items 3 and 4 are
approved then they will have the new checkbox format which will be
effective July 2015.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 31
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
DELAYED REVISIONS 1 (Effective July 2015)
CHANGES TO TERMINOLOGY FOR CRITICAL CONTROLS AND
DISPLAYS
NOTICE: This Delayed Revisions Section contains material that has been balloted and approved by the
Environmental Health & Safety Global Technical Committee, but is not immediately effective. The provisions
of this material are not an authoritative part of the Document until their effective date. The main body of SEMI
S8-0712 remains the authoritative version. Some or all of the provisions of revisions not yet in effect may
optionally be applied prior to the effective date, providing they do not conflict with portions of the authoritative
version other than those that are to be revised or replaced as part of the deferred revision, and are labeled
accordingly.
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall be
struck through.
D1-1 Revisions to § 5 (Terminology) (OPTIONAL Before Effective Date).
D1-1.1 Modify definition of ‘critical controls’ as shown below.
5.2.5 critical controls and displays — manual controls (actuators) that are intentionally provided to reduce risk to
personnel, equipment, or the environment to Low or Very Low (see SEMI-S10) in response to a malfunction.
Examples of critical controls include, but are not limited to: EMO actuators, emergency gas off actuators, and
emergency stop actuators. controls and displays which prevent the equipment from entering, or indicate that equipment
is entering an unsafe condition in which hazards to personnel or damage to equipment may occur. Emergency Off
(EMO) switches, interlock defeat indicators, and malfunction alarms are examples of critical controls and displays.
D1-2 Revisions to SEMI S8 Appendix 1, SESC Checklist ‘Actual/Conforms?’ column (OPTIONAL
Before Effective Date).
D1-2.1 Modify all SESC Appendix 1 SESC checklist items so there’s a line for each measurement within a section
with a corresponding letter and a header of ‘Measurement(s).’ The reason for this change is to allow a space for the
documentation of each value if the evaluator uses a printed copy of the checklist for recording purposes.
D1-2.2 Modify all Appendix 1 SESC checklist checkboxes so they are placed side-by-side instead of stacked, as
shown below to conserve space. To further conserve space, only one set of checkboxes is provided for all criteria
within each cell.
D1-2.3 The proposed changes apply to the ‘Actual/Conforms?’ column of the entire SESC checklist. In the interest
of brevity, only sections 7.1 – 7.2.3 have been provided below as a sample to show how the proposed changes would
affect different types of measurements in the checklist.
Section 7: Maintainability and Serviceability
Section
7.2
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Full Body Clearance
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be
provided based on the nature of the tasks performed in the designated area.
—
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 32
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 7: Maintainability and Serviceability
Section
7.2.1
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Any posture: upper body Minimum 610 mm (24 in.)
clearance (shoulder width)
Reference
Pictogram
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
Measurement
______
Conforms?
Yes No N/A
7.2.2
Standing
A. Overhead clearance, minimum
1980 mm (78 in.)
B. Forward horizontal clearance#1,
minimum 690 mm (27 in.)
Actual
Conforms?
Yes
No
N/A
Measurements
A ______
B ______
Conform?
Yes No N/A
7.2.3
Sitting-on-floor
A. Overhead clearance, minimum
1000 mm (39 in.)
B. Forward horizontal clearance#1,
minimum 690 mm (27 in.)
C. Working height, minimum
280 mm (11 in.)
Actual
Conforms?
Yes
No
N/A
Measurements
A ______
B ______
C ______
Conform?
Yes No N/A
D1-3 Modify Appendix 1, SESC Checklist ¶ 6.4.1 so the metric measurement is consistent with the
US Customary dimension (OPTIONAL Before Effective Date).
D1-3.1 Replace the incorrect SI dimension with the correct SI dimension derived from the US Customary dimension.
This change is to correct a transcription error from the previous version of SEMI S8 (1103).
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 33
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
Ball handle diameter
Maximum 63 mm (2.5 in.)
Minimum 19 38 mm (1.5 in.)
Actual
Diameter
Conforms?
Yes
No
N/A
D1-4 Exceptions to Hand Control Location recommendations added to SESC § 9 header
(OPTIONAL Before Effective Date).
D1-4.1 Modify text in Appendix 1, Table A1-1 SESC Checklist, § 9 header as shown below.
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation
and maintenance tasks from floor-standing postures and from chair-seated postures at a workstation or console).
Exception 1: These criteria do not apply to freestanding equipment or sub-systems with an installed height of less than 838
mm (33 in.) such as pumps, power supplies, chillers, and heat exchangers.
Exception 2: Infrequently used or critical controls may be located outside the recommended height ranges if their location
makes them more readily accessible for other postures adopted during maintenance activities anticipated by the supplier. If this
exception is used, the evaluator should note the activity and the means used to access the control recommended by the supplier
(e.g., ladder or step platform).
Controls that move as designed should be measured in the least favorable position.
Interpolate for intermediate values.
NOTE 1: See Section 7 for other work postures.
NOTE 2: Devices outside the recommended ranges may have an operational means to meet the criteria (e.g., pull cord or
extension rod).
NOTE 3: Visual access is assumed for these reach criteria.
D1-5 Exceptions to Hand Control Location recommendations added to SESC § 9 (OPTIONAL
Before Effective Date).
D1-5.1 Add an illustration depicting a person sitting on a tall stool to Appendix 1, Table A1-1 SESC Checklist, § 9
as shown below.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 34
Doc. 5009D  SEMI
LETTER BALLOT
6.4.1
DRAFT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Section 9: Hand Control Location
Hand Control Location (These criteria only apply to controls, tools, and materials accessed for routine production operation and
maintenance)
Section
Indicator
9.1
Standing station
NOTE: A standing station
is one where the operator
can assume a standing
posture or a seated posture
in a tall stool which places
the operator at
approximately the same
stature.
Acceptance Criteria
Metric Units (US Customary Units)
Actual/
Conforms
—
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 35
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Line Item 1
Change the Word “Guidelines” to “Guideline” in the Document Title
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall be
struck through.
Change the word “guidelines” in the document title to make it singular as shown below.
SEMI S8-XXXX, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment.
Line Item 2
Ergonomics Clearances Considerations
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall be
struck through.
Line Item 2, Part A: Addition to § 5 (Terminology)
Add definition for “Ergonomics Clearance” and a note as shown below.
5.2.x ergonomics clearance - the space that should remain clear around the equipment for ergonomics
considerations related to tasks anticipated by the supplier. This can include pinch-point avoidance clearances, access
space, component removal space, and room for doors to swing out.
NOTE 2: This definition is different from the concept of “easement space” as provided in [SEMI-E72], “easement
space – the floor space that must remain clear to the rear and sides of the equipment (but not in front of the load face
plane). This includes safety aisles, ergonomic maintenance access space, component removal space, and room for
doors to swing out.” Ergonomics clearance includes all sides of the equipment, including the front of the load face
plane.
Line Item 2, Part B: Revisions to end user documentation recommendations.
Modify § 7 to include documentation of “ergonomics clearances.
7.3 Documents provided to the end user should illustrate all ergonomics clearances required by the supplier. Supplier
provided documentation should illustrate any installation requirement necessary to meet SEMI S8 guidelines (e.g.,
Diagram should show clearance area required for opening hinged panels, operator working area, allowable range of
vertical foot adjustment to keep ergonomic measurements within SESC acceptable limits, etc.).
7.3.1 Space for ergonomics clearances should include room needed for of all of the following:
 operator tasks (e.g., loading and unloading of product or other materials, interfacing with the equipment,
and seating),
 opening of access panels and covers (e.g., room for doors to swing out, up, or down), and
 maintenance access and postures for intended for maintenance activity (e.g., component removal/insertion
and specialty equipment such as ladders, steps, seating, diagnostic equipment, and lifting equipment)
7.3.2 The space for ergonomics clearances should also include consideration of space required for the servicing of
components (particularly large components) that could reasonably be expected to fail during the expected lifetime of
the equipment, including tools and specialty equipment that might be required for their repair, removal, or
installation.
7.3.3 Documents provided to the equipment user should also describe the allowable range of vertical foot adjustment
that will keep ergonomics-related measurements within supplier requirements (e.g., to keep heights of various items
within the SESC acceptable limits).
7.4 The evaluation should specify an installation reference point for each independently adjustable section of the
equipment for vertical measures. If there is a supplier recommended installation height, the reference for the evaluation
should be the same. This installation height should be included in the supplier’s installation documentation.
NOTE 6: Installation documentation may include installation manuals and other information provided by supplier
addressing installation concerns.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 36
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Line Item 3
Changes to Appendix 1, Section 6: Handle Design Criteria, addition of
an Appendix providing handle assessment criteria, and addition of
several documents to §8 Related documents
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall
be struck through. New text within pictogram cells has not been underlined to maintain readability.
Line Item 3, Part A: Changes to handle design section of Appendix 1, Section 6.
Modify Appendix 1 SESC ¶¶ 6.7 to 6.9 as shown below.
APPENDIX 1
SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)
NOTICE: The material in this appendix is an official part of SEMI-S8 and was approved by full letter ballot
procedures on November 21, 2006.
A1-1 Introduction
A1-1.1 Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not
normative. Also, the pictograms are not intended to depict every possible application of the guidelines.
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section
1
2
3
4
5
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Manual Material Handling {no changes to this section for line Item 3}
Product Loading in a Standing Posture {no changes to this section for line Item 3}
Wafer Cassette Loading {no changes to this section for line Item 3}
Work in Process Storage {no changes to this section for line Item 3}
Manual Wafer Cassette Rotation Device Design {no changes to this section for line Item 3}
Section 6: Handle Design
(Handle dimensions are correct for use of bare hand or use of typical cleanroom gloves.)
Dimensions of handles and knobs to which one needs to apply less than the amounts below do not need to be assessed to the
criteria in this section:
 Linear force: 13 N (3 lbf)
 Torque: 0.43 N-m (3.8 lbf-in.)
Sections 5.1 and 9 should be used to assess the location of all handles and knobs regardless of the force required.
Unless otherwise noted, the provided dimensions are acceptable for use with or without gloves.
If a handle is used for both machine operation and maintenance/service tasks then apply the operational criteria.
Provided forces are for hand-handle and hand-knob interface only and might exceed the maximum recommended forces for
performing a task based on the appropriate analysis tool. See Appendix 2 for a list of lifting, strength, and material handling
analysis tools.
Section
6.1
Indicator
Handle surface finish
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
Actual/
Conforms?
—
Conforms?
Yes
No
N/A
All edges radiused
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5009D
Date: 3/21/2016
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Phone: 408.943.6900, Fax: 408.943.7943
Acceptance Criteria
Metric Units
(US Customary Units)
Indicator
6.2
Cylindrical Handle
6.2.1
Cylindrical handle
diameter
Reference
Pictogram
Actual/
Conforms?
—
Maximum 38 mm (1.5 in.)
Minimum 25 mm (1 in.)
Diameter
Actual
Conforms?
Yes
No
N/A
6.2.2
Cylindrical handle length
Minimum 127 mm (5 in.)
Actual
Length
Conforms?
Yes
No
N/A
6.3
6.3.1
—
Circular or Triangular Handle
Circular or triangular
handle diameter
Maximum 90 mm (3.5 in.)
Minimum 50 mm (2 in.)
Actual
Diameter
Conforms?
Yes
No
N/A
6.3.2
Circular or triangular
handle height (thickness)
Maximum 25 mm (1 in.)
Minimum 19 mm (0.75 in.)
Thickness
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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LETTER BALLOT
Section
DRAFT
Document Number: 5009D
Date: 3/21/2016
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3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
6.4
6.4.1
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
Actual/
Conforms?
—
Ball Handle
Ball handle diameter
Maximum 63 mm (2.5 in.)
Minimum 19 mm (1.5 in.)
Actual
Diameter
Conforms?
Yes
No
N/A
6.5
6.5.1
6.5.2
—
Squeeze Grip Handle
Squeeze grip handle grip Maximum 89 mm (3.5 in.) open
span
Minimum 38 mm (1.5 in.) closed
Handle sections need not
be cylindrical.
Measurement taken at the
maximum grip span of
handle measured at the
user’s middle finger.
Squeeze grip handle grip
length.
Actual
Conforms?
Yes
No
N/A
Minimum 127 mm (5 in.)
Actual
Conforms?
Yes
No
N/A
6.6
6.6.1
—
Pistol Grip Handle
Pistol grip handle
diameter
Maximum 63 mm (2.5 in.)
Minimum 38 mm (1.5 in.)
Actual
Diameter
6.6.2
Pistol grip handle length
Minimum 127 mm (5 in.)
Actual
Length
6.7
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Enclosed Handles
NOTE: Handle diameter refers to the surface of the handle presented to the inside of the curled fingers.
Enclosed handles need not be made solely from cylindrical stock.
Guidelines for the design of optimum enclosed handles with a round section are provided in section
6.7.1. Use of cleanroom gloves with knit liners is assumed. Enclosed handles that do not meet the
design criteria in section 6.7.1 should be assessed using the instructions and data provided in
Appendix 3, Enclosed Handle Assessment Criteria.
—
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 39
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LETTER BALLOT
Section
DRAFT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
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Phone: 408.943.6900, Fax: 408.943.7943
6.7.1
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Enclosed handle, full hand Width, minimum 127 mm (5 in.)
power grip (suitcase
Depth, minimum 45 mm (1.75 in.)
handle).
Diameter, maximum 25 mm (1 in.)
Opening width, minimum
122 mm (4.8 in.)
Opening depth, minimum
41 mm (1.6 in.)
Maximum push/pull force
Reference
Pictogram
Actual
Depth
Force, max.
3.1 mm (0.12 in.)
33 N (7.4 lbf)
Diameter
Width
Opening
depth
Operational tasks
Radius, min.
6.5 mm (0.25 in.) 72 N (16.1 lbf)
10 mm (0.39 in.) 110 N (24.8 lbf)
Maintenance/service tasks
3.1 mm (0.12 in.) 88 N (19.8 lbf)
Actual/
Conforms?
Radius
Opening
width
6.5 mm (0.25 in.) 191 N (42.9 lbf)
Conforms?
Yes
No
N/A
Force
________
Opening
depth
________
Opening
width
________
Radius
________
Conforms?
Yes No N/A
10 mm (0.39 in.) 294 N (66.1 lbf)
6.7.1.1 Diameter, requiring no
greater than 71 N
(16 lbf) force.
Minimum 6.3 mm (0.25 in.)
6.7.1.2 Diameter, requiring no
greater than 89 N
(20 lbf) force.
Minimum 13 mm (0.5 in.)
6.7.1.3 Diameter, requiring no
greater than 180 N
(40 lbf) force.
Minimum 19 mm (0.75 in.)
6.7.2
6.7.3
6.7.4
Enclosed handle, three
fingers.
Enclosed handle, two
fingers.
Enclosed handle, one
finger.
Width, minimum 90 mm (3.5 in.)
Depth, minimum 38 mm (1.5 in.)
Diameter, minimum 6.3 mm
(0.25 in.)
Force, maximum 71 N (16 lbf)
Width, minimum 60 mm (2.5 in.)
Depth, minimum 38 mm (1.5 in.)
Diameter, minimum 6.3 mm
(0.25 in.)
Force, maximum 51 N (11.5 lbf)
Width, minimum 38 mm (1.5 in.)
Depth, minimum 38 mm (1.5 in.)
Diameter, minimum 3.2 mm
(0.13 in.)
Force, maximum 27 N (6 lbf)
Actual

Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
Actual
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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LETTER BALLOT
Section
DRAFT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
6.8
6.8.1
Indicator
Acceptance Criteria
Metric Units
(US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Hook Grasp Handle
Hook grasp handles that do not meet the design criteria in section 6.8.1 should be assessed using the
instructions and data provided in Appendix 3, Enclosed Handle Assessment Criteria.
Hook grasp handle (four
fingers).
Opening length, minimum 90 mm
(3.5 in.)
Opening width, minimum 38 mm
(1.5 in.)
Depth, minimum 50 mm (2 in.)
Lip length, minimum 50 mm (2 in.)
Finger clearance width, minimum
97 mm (3.8 in.)
Finger clearance height, minimum
28 mm (1.1 in.)
Knuckle clearance height, minimum
48 mm (1.9 in.)
Lip length, minimum
49 mm (1.9 in.)
Maximum push/pull force
Actual
Conforms?
Yes
No
N/A
Knuckle
clearance
height
Finger
clearance
height
Operational tasks
Radius, min.
Force, max.
6.3 mm (0.25 in.)
15 N (3.5 lbf)
13 mm (0.5 in.)
33 N (7.5 lbf)
19 mm (0.75 in.) 51 N (11.5 lbf)
—
Radius
Lip
length
Finger
clearance width
Maintenance/service tasks
Force
________
Finger
clearance
height
________
Finger
clearance
width
________
Radius
________
Lip
________
Knuckle
clearance
height
________
6.3 mm (0.25 in.)
41 N (9.3 lbf)
Conforms?
13 mm (0.5 in.)
89 N (20.1 lbf)
Yes No N/A
19 mm (0.75 in.) 137 N (30.9 lbf)
6.8.2
Hook grasp handle pull
force (four fingers)
6.9
Finger Pull Handle
Finger pull handles that do not meet the design criteria in section 6.9.1 should be assessed using the
instructions and data provided in Appendix 3, Enclosed Handle Assessment Criteria.
Maximum 80 N (18 lbf)
—
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 41
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LETTER BALLOT
Section
DRAFT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Acceptance Criteria
Metric Units
(US Customary Units)
Section
Indicator
6.9.1
Finger pull handles (four
fingers)
Opening length, minimum 90 mm
(3.5 in.)
Opening width, minimum 25 mm
(1 in.)
Depth, minimum 19 mm (0.75 in.)
Lip length, minimum 19 mm
(0.75 in.)
Finger clearance width, minimum
91 mm (3.6 in.)
Finger clearance height, minimum
22 mm (0.8 in.)
Knuckle clearance height, minimum
28 mm (1.1 in.)
Lip length, minimum
18 mm (0.7 in.)
Maximum push/pull force
Reference
Pictogram
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
Knuckle
clearance
height
Finger
clearance
height
Operational tasks
36 N (8.1 lbf) all radii
Maintenance/service tasks
97 N (21.7 lbf) all radii
6.9.2
Finger pull handles pull
force (four fingers)
Maximum 9.8 N (2.2 lbf)
Lip
length
Finger
clearance width
Force
________
Finger
clearance
height
________
Finger
clearance
width
________
Lip
________
Knuckle
clearance
height
________
Conforms?
Yes No N/A
Table A1-1 Supplier Ergonomic Success Criteria Checklist (continued)
7
Hand/Arm Clearance {no changes to this section for line item 3}
8
Display Location {no changes to this section for line item 3}
9
Hand Control Location {no changes to this section for line item 3}
10
Workstation Design {no changes to this section for line item 3}
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 42
Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Line Item 3, Part B: Addition of Appendix with handle assessment criteria
Insert new Appendix 3 with handle assessment instructions and criteria. This will allow assessors to assess
“non-standard” handles.
Re-number subsequent appendices accordingly. NOTE numbers below start with 501, to avoid confusion
with the published document. NOTES will be numbered sequentially through the document at publication.
APPENDIX 3
ENCLOSED HANDLE ASSESSMENT CRITERIA
NOTICE: The material in this Appendix is an official part of SEMI-S8 and was approved by full letter ballot
procedures on ?????.
A3-1 General Criteria
A3-1.1 Enclosed handles should be sized appropriately for the required forces and glove conditions.
A3-1.2 Maximum perimeter of the handle section grasped by the hand should be no greater than 157 mm (6.2 in.).
This equates to a diameter of 50 mm (2 in.) for round handles.
A3-1.3 For some handles, the recommended maximum force is higher for a fingertip grip than a hook grip even
though there is enough knuckle clearance for a hook grip. In these situations, the greater force value may be used.
A3-1.5 Within the context of this guide, radius is the line segment that describes the arc of the surface of the handle
presented to the inside of the curled fingers. For handles with an elliptical cross-section, use the axis perpendicular
to the applied force.
A3-1.6 Maximum recommended force values are provided for machine operation and maintenance/service tasks.
Handle force limits for operation tasks are in the rows marked “O” and maintenance/service tasks are in the rows
marked “M” in “Task-Type” column of Table A1-2. If a handle is used for both operation and maintenance/service
tasks then use the more stringent criteria.
NOTE 501: Maximum gripping force is achieved when the thumb and fingers overlap slightly so a handle that allows the fingers
to fully encircle it will provide an optimum grip for pulling and pushing. A handle with a diameter of 38 mm (1.5 in) will allow
maximum gripping force for most users.
NOTE 502: Enclosed handles need not be made solely from cylindrical stock. Round or elliptical cross-sections are preferred
over square sections for handles because they allow equal pressure distribution against the hand.
NOTE 503: A handle that does not have an opening wide enough for four fingers but with sufficient room for three fingers may
be grasped with three fingers; if not three fingers, then two fingers, etc. However, the maximum recommended force will be lower
because with fewer fingers there will be less contact area to distribute the load.
A3-2 Gloves
A3-2.1 Handles should be sized appropriately for use with gloves anticipated by the semiconductor manufacturing
equipment supplier for use in the work environment and for the work to be performed. Table A1-2 includes
allowances for gloved conditions which have been added to bare hand clearance dimensions. The glove thicknesses
below were added to the clearances, two thicknesses for each finger (one for each side in line with the dimension).
A3-2.1.1 Cleanroom gloves with knit liners: 1.5 mm (0.06 in.)
A3-2.1.2 Chemical resistant gloves over cleanroom gloves and liners: 3 mm (0.11 in.)
A3-2.1.3 Thermal/electrical insulating gloves: 6 mm (0.23 in.)
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 43
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LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
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Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
A3-3 Handle Measurements
A3-3.1 Enclosed handle measurement conventions follow in Table A2-1 with cross section views shaded in blue.
Hook and fingertip grip handles are measured differently depending on the direction of force applied by the hand
(see green arrows below).
Table A3-1: Handle Measurement Locations
Handle type
Force direction in line with handle
(Green arrow shows force direction)
Finger
clearance
height
Full finger encirclement or
hook grip handle (finger
clearance height will
determine which)
Finger
clearance
width
Force direction perpendicular to handle
(Green arrow shows force direction)
Finger
clearance
height
Finger
clearance
width
Radii
Radii
Knuckle
clearance
height
Finger
clearance
height
Finger
clearance
height
Lip
height
Lip
height
Hook grip handle, pocketstyle
Radius
Finger
clearance
width
Knuckle
clearance
height
Radii
Finger
clearance
width
Finger
clearance
height
Finger
clearance
height
Lip
height
Lip
height
Fingertip grip handle,
pocket style
Finger
clearance
width
Finger
contact
surface
Finger
contact
surface
Finger
clearance
width
A3-4 Assessment System Instructions
A3-4.1 Table A1-2, Enclosed Handle Dimensions, provides recommended dimensions and maximum hand-handle
contact forces for enclosed handles. Data in this table may be interpolated for intermediate values.
A3-4.2 Instructions for use:
1.
Determine whether the handle is intended for equipment operation or maintenance/service.
2.
Measure or calculate the force required for the hand(s) to accomplish the intended task. Operation task
handle force limits are in the rows labeled “O” and maintenance/service tasks are in the rows marked “M.”
3.
Determine whether the user will be wearing gloves, and if so, what type.
4.
If the handle is to be designed or selected then use the table to determine the minimum handle dimensions
based on the force requirements, anticipated glove condition, and design needs.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 44
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LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
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Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
5. If you are assessing an existing handle, collect the measurements listed below and use Table A1-2 to
determine whether or not the dimensions are appropriate for the required force by following the appropriate
rows and columns.
a.
Finger clearance height to determine the handle grip category.
b.
Finger opening to determine number of fingers the handle will accommodate for the gloved condition.
c.
Handle radius or fingertip contact area at the hand-handle interface.
d.
Lip length and knuckle clearance (if present) for the gloved condition.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 45
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LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
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Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Hand-Handle Interface
Clean
InsulatBare
Chem.
room
ing
Hand
Glove
Glove
Glove
mm (in.)
mm (in.)
mm (in.)
mm (in.)
Handle grip
category
Min.
clearance
dims
Full finger
encirclement
Finger
clearance -- 38 (1.5) 41 (1.6) 44 (1.7)
height
Direction
of travel
Finger clearance
height
Min.
finger
width
50 (2.0)
1
30 (1.2) 33 (1.3) 36 (1.4)
42 (1.7)
2
60 (2.4) 66 (2.6) 72 (2.8)
84 (3.3)
3
90 (3.5) 99 (3.9) 108(4.3) 126 (5.0)
4 110 (4.3) 122 (4.8) 134 (5.3) 158 (6.2)
Hook grip
Finger
clearance
height
Knuckle
clearance
Finger
clearance
height
Lip
length
Lip
length
Knuckle
clearance
Fingertip grip
Finger
clearance
height
Knuckle
clearance
Finger
clearance
height
Lip
length
Lip
length
Finger
clearance -- 25 (1.0) 28 (1.1) 31 (1.2)
height
Min.
finger
width
Min.
finger
width
25 (1.0) 28 (1.1) 31 (1.2)
37 (1.5)
2
50 (2.0) 56 (2.2) 62 (2.4)
74 (2.9)
3
70 (2.8) 79 (3.1) 88 (3.5) 106 (4.2)
4
85 (3.3) 97 (3.8) 88 (3.5) 133 (5.2)
Knuckle
clearance
Lip
length
N (lbf)
--
7 (0.25)
10 (0.38)
Maximum Force
N (lbf)
N (lbf)
--
13 (0.5)
N (lbf)
--
-38 (8.6)
O
9 (2.0)
19 (4.3)
30 (6.6)
M
24 (5.3)
51 (11.5)
79 (17.7) 102 (23.0)
O
18 (4.0)
38 (8.6)
59 (13.2)
76 (17.2)
M 47 (10.6) 102 (22.9) 157 (35.2) 204 (45.8)
O
26 (5.8)
56 (12.6)
86 (19.4) 112 (25.2)
M 69 (15.5) 150 (33.6) 230 (51.7) 299 (67.2)
O
33 (7.4)
72 (16.1) 110 (24.8) 143 (32.2)
M 88 (19.8) 191 (42.9) 294 (66.1) 382 (85.9)
--
--
--
--
O
4 (0.9)
9 (2.0)
14 (3.1)
18 (4.0)
M
11 (2.5)
24 (5.3)
37 (8.2)
48 (10.7)
O
8 (1.8)
18 (4.0)
27 (6.2)
36 (8.0)
M
22 (4.9)
47 (10.7)
73 (16.4)
95 (21.3)
O
12 (2.7)
26 (5.9)
40 (9.0)
52 (11.7)
M
32 (7.2)
70 (15.6) 107 (24.1) 139 (31.3)
O
15 (3.5)
33 (7.5)
M
41 (9.3)
89 (20.1) 137 (30.9) 179 (40.1)
51 (11.6)
67 (15.0)
--
--
--
58 (2.3) --
--
--
--
--
26 (1.0) --
--
--
--
--
36 (1.4)
2
45 (0.9) 48 (1.9) 51 (2.0)
57 (2.2)
3
65 (2.6) 70 (2.7) 74 (2.9)
83 (3.3)
85 (3.3) 91 (3.6) 97 (3.8) 109 (4.3)
-- 15 (0.6) 18 (0.7) 21 (0.8)
3 (0.13)
--
25 (1.0) 27 (1.0) 30 (1.2)
Knuckle
-- 25 (1.0) 28 (1.1) 31 (1.2)
clearance
Hand-Handle Contact Radii, mm (in.)
57 (2.2) --
1
4
--
37 (1.5) --
1
Knuckle
-- 45 (1.8) 48 (1.9) 51 (2.0)
clearance
Lip
-- 46 (1.8) 49 (1.9) 52 (2.0)
length
Finger
clearance -- 20 (0.8) 22 (0.8) 23 (0.9)
height
Task Type*
# of Fingers
Table A3-2: Enclosed Handle Dimensions
O
10 (2.3) all radii
M
27 (6.1) all radii
O
20 (4.6) all radii
M
54 (12.2) all radii
O
29 (6.6) all radii
M
78 (17.5) all radii
O
36 (8.1) all radii
M
97 (21.7) all radii
37 (1.5) --
--
--
--
--
27 (1.1) --
--
--
--
--
*Task Type: “O” = operation activity, “M” = maintenance or service activity
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Doc. 5009D  SEMI
LETTER BALLOT
Document Number: 5009D
Date: 3/21/2016
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Phone: 408.943.6900, Fax: 408.943.7943
DRAFT
Line Item 3, Part C Add documents to § 8 (Related Documents)
Add documents to the section 8, Related Documents, under Other Documents as shown below.
8.9.x
Human Hand Dimension for Ergonomic Design 2010. Research Institute of Human Engineering for Quality Life. Osaka, Japan, 2010.
8.9.y
Garrett, J.W. The adult human hand: some anthropometric and biomechanical considerations. Human Factors 13 (1971): pp 117-131.
8.9.z
Hall, Charlotte. “External pressure at the hand during object handling and work with tools.” International Journal of Industrial
Ergonomics 20 (1997): 191-206.
Line Item 4
Changes to Appendix 1, Section 7: New Whole Body Clearance
Criteria, Movement (within Appendix 1) of Select Criteria to a New
Maintenance and Service Section, and addition of documents to §8
Related Documents
NOTICE: Unless otherwise noted, all material to be added shall be underlined, and all material to be deleted shall be
struck through.
4-1 Line Item 4, Part A: Criteria for Whole Body Clearances Added to Appendix 1, Section 7.
4-1.1 Modify Appendix 1 SESC ¶¶ 7 to 7.2.9 as shown below.
APPENDIX 1
SUPPLIER ERGONOMIC SUCCESS CRITERIA (SESC)
NOTICE: The material in this appendix is an official part of SEMI-S8 and was approved by full letter ballot
procedures on November 21, 2006.
A1-1 Introduction
A1-1.1 Pictograms and text within the pictogram cells are provided for illustrative purposes only and are not
normative. Also, the pictograms are not intended to depict every possible application of the guidelines.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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DRAFT
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
1
Manual Material Handling {no changes to this section for Line Item 4}
2
Product Loading in a Standing Posture {no changes to this section for Line Item 4}
3
Wafer Cassette Loading {no changes to this section for Line Item 4}
4
Work in Process Storage {no changes to this section for Line Item 4}
5
Manual Wafer Cassette Rotation Device Design {no changes to this section for Line Item 4}
Handle Design {no changes to this section for Line Item 4}
6
Section 7: Clearance Criteria
Equipment may extend into the recommended clearance envelopes provided that the assessor captures in the assessment report a
rationale demonstrating that the impinging object(s) will not interfere with the task or tasks for which clearance is being
evaluated. The rationale should give consideration to at least the following points:
• 95th percentile North American male body dimensions,
• Line-of-sight vision required throughout the task(s),
• Anticipated body motions (e.g. turning, reaching) during the task(s).
The following clearance criteria for design and assessment do not include consideration of the tools, materials, and devices
identified by the supplier to be moved and used in the course of the task, and personal protective equipment recommended by
the supplier to be worn by workers during the task(s). Additional clearance should be provided for these considerations.
These criteria are limited to the equipment structure as provided, and installed per supplier instructions. If a horizontal
dimension extends outside the envelope of the equipment, as provided, then the excursion should be included in the equipment
ergonomics clearances (see for example SEMI-S8 ????, paragraph 7.3). Clearance around the equipment (ergonomic clearance),
per the supplier’s specifications, may be considered in determining conformance as applicable.
Clearances should be approached from a task analysis point of view. Clearances should be provided based on the nature of the
tasks performed in the designated area.
Acceptance Criteria
Reference
Metric Units (US Customary Units) Pictogram
Minimum lighting level in Minimum 300 lux (30 fc)
routine maintenance areas
is required where the
operator has to read
information, use a hand
tool, or make a connection.
This provision can be met
by providing integral
lighting or portable
lighting which can be
temporarily attached such
that it does not have to be
hand held.
Actual/
Conforms?
Actual
Section Indicator
7.1
Conforms?
Yes
No
N/A
—
7.27.1 Full Body Clearance Whole Body Clearance for Walking and Crawling (point-to-point access only and
not work activities).
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be
provided based on the nature of the tasks performed in the designated area.
—
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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Indicator
7.1.1
7.2.1
Any posture: upper body
clearance (shoulder
width)
Clearance for walking
(operator tasks)
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Minimum 610 mm (24 in.)
A. Vertical clearance, minimum.
1980 mm (78 in.)
B. Passage width, minimum
610 mm (24 in.)
Actual/
Conforms?
Measurements
A. ______
B. ______
Conforms?
B
A
Yes No N/A
7.1.2
7.1.3
Any posture: upper body
clearance (shoulder
width)
Clearance for walking
(maintenance and service
activity only)
Clearance for walking
through vertical
hatchways (maintenance
and service activity only)
Minimum 610 mm (24 in.)
A. Vertical clearance, minimum
1900 mm (74.8 in.)
B. Upper body passage width,
minimum 610 mm (24 in.)
C. Walking surface width
minimum 457 mm (18 in.)
D. Elbow/hip clearance height,
maximum height of sloped area
1002 mm (39.8 in.)
A. Overhead clearance, minimum
1524 mm (60 in.)
B. Upper body passage width,
minimum 610 mm (24 in.)
C. Height of threshold, maximum
406 mm (16 in.)
Measurements
A. ______
B. ______
C. ______
D. ______
Conforms?
B
A
D
Yes No N/A
C
B
A
C
Measurements
A. ______
B. ______
C. ______
Conforms?
Yes No N/A
7.1.4
Clearance for moving
sideways (maintenance
and service activity only)
A. Overhead clearance, minimum
1900 mm (74.8 in.)
B. Forward horizontal clearance,
minimum 477 mm (18.8 in.)
Measurements
A. ______
B. ______
Conforms?
B
A
7.1.5
7.2.6
Kneeling crawl
A. Overhead clearance measured
(maintenance and service
from floor, minimum 740 mm
activity only)
(29 in.)
B. Forward horizontal clearance,
minimum 1520 mm (60 in.)
C. Elbow clearance, minimum
635 mm (25 in.)
Yes No N/A
B
A
C
Measurements
A. ______
B. ______
C. ______
Conforms?
Yes No N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5009D
Date: 3/21/2016
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Phone: 408.943.6900, Fax: 408.943.7943
7.2
7.2.1
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Full Whole Body Clearance for Work Activities
NOTE: Clearances should be approached from a task analysis point of view. Clearances should be
provided based on the nature of the tasks performed in the designated area.
These criteria apply to tasks that are anticipated by the supplier to involve manual and visual activity
lasting longer than 5 minutes, or having multiple occurrences with a total duration of greater than 1
hour per 8-hour shift.
Clearances should be provided based on the nature of the tasks performed in the designated area.
When determining the working space required for a given task, first estimate where the hands, tools
and equipment will be, the line-of-sight needed, and if the body will be supported (for example, sitting
on a stool) for the envisioned task. Also consider space needed for movement such as squatting to lift
an item or applying push/pull forces. Once this is done, estimate the posture(s) that will be associated
with the task and use ¶¶ 7.2.1–7.2.9 to determine the various minimum clearance dimensions required
for that posture.
Clearances required for displays and controls in sections 8 and 9 should also be considered.
Any posture: hHorizontal Minimum 610 mm (24 in.)
clearance for upper body
(all postures).

Actual
Conforms?
Yes
No
N/A
Measurement
______
Conforms?
Yes No N/A
7.2.2
Standing
A. Overhead clearance, minimum
1980 mm (78 in.)
B. Forward horizontal clearance#1,
minimum 690 mm (27 in.)
C. Lower body clearance#1,
minimum 508 mm (20 in.)
B
A
C
Actual
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
C. ______
Conforms?
Yes No N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5009D
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7.2.3
7.2.7
Indicator
Stooping
Acceptance Criteria
Metric Units (US Customary Units)
A. Overhead clearance, minimum
1450 mm (57 in.)
B. Forward horizontal clearance#1,
minimum 1020 mm (40 in.)
C. Working height, minimum
640 mm (25.2 in.)
Reference
Pictogram
B
Actual/
Conforms?
Actual
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
Conforms?
A
Yes No N/A
7.2.4
7.2.5
Kneeling
A. Overhead clearance (from
floor), minimum 1450 mm
(57 in.)
B. Forward horizontal clearance#1,
minimum 1220 mm (48 in.)
C. Working height, minimum
640 mm (25.2 in.)
Actual
B
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
Conforms?
A
Yes No N/A
7.2.5
Sitting
The given clearance
dimensions do not
provide room for
movement of seating
devices.
Thickness of chair
backrest is not included.
Room for movement of
the seating device is not
included.
A. Overhead clearance measured
from sitting surface,
minimum 1010 mm (39.8 in.)
B. Forward horizontal clearance
(as measured from any
obstruction, or front [user] side
of backrest, if present) #1
B1.Clearance for operation tasks
(relaxed posture), minimum
1034 mm (40.7 in.)
B2. Clearance for maintenance
tasks (upright posture),
minimum 867 mm (34.1 in.)
B
A
Measurements
A. ______
B1. _____
B2. _____
Conforms?
Yes No N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5009D
Date: 3/21/2016
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7.2.6
7.2.4
Indicator
Squatting
Acceptance Criteria
Metric Units (US Customary Units)
A. Overhead clearance, minimum
1220 mm (48 in.)
B. Forward horizontal clearance#1,
minimum 790 mm (31 in.)
C. Working height, minimum
460 mm (18.1 in.)
Reference
Pictogram
Actual/
Conforms?
Actual
B
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
Conforms?
A
Yes No N/A
7.2.7
7.2.3
Sitting-on-floor
A. Overhead clearance, minimum
1000 mm (39 in.)
B. Forward horizontal clearance#1,
minimum 690 mm (27 in.)
C. Working height, minimum
280 mm (11 in.)
Actual
B
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
Conforms?
A
Yes No N/A
7.2.8
Supine (lying on back)
A. Vertical clearance Height
(overhead), minimum 430 mm
(17 in.)
If the supplier specifies the use of a
mechanic’s-type creeper for a task,
measure from the top surface of the
creeper to the overhead obstruction.
B. Length (forward), minimum
1980 mm (78 in.)
B
A
Actual
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
Conforms?
Yes No N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5009D
Date: 3/21/2016
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Phone: 408.943.6900, Fax: 408.943.7943
7.2.9
Indicator
Prone or crawl space
(lying on stomach)
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
A. Vertical clearance Height
(overhead), minimum 510 mm
(20 in.)
If the supplier specifies the use of a
mechanic’s-type creeper for a task,
measure from the top surface of the
creeper to the overhead obstruction.
B. Length (forward), minimum
2440 mm (96 in.)
Actual/
Conforms?
Actual
B
Conforms?
Yes
No
N/A
Measurements
A. ______
B. ______
Conforms?
A
Yes No N/A
7.2.10 To determine space needed to assume prone or supine positions from a standing posture, use the clearance
recommendations for standing, squatting, and crawling sequentially.
1. Standing
7.37.3.7
7.4
2. Squatting
3. Crawling
4. Prone or Supine
Hand/Arm Clearance {no changes to this section for line item 4}
—
Maintenance and Service Access {no changes to this section for line item 4, part A}
8
Display Location {no changes to this section for Line Item 4}
9
Hand Control Location {no changes to this section for Line Item 4}
10
Workstation Design {no changes to this section for Line Item 4}
Line Item 4, Part B: Recommendations Specific to Equipment Maintainability and Serviceability
Moved to a New SESC Section 11.
Create a new SESC Section 11 titled “Equipment Maintainability and Serviceability.”
Relocate currently published ¶ 7.1 as shown below and re-number as ¶ 11.1 as shown below.
Relocate currently published ¶¶ 7.4 to 7.5.5 as shown below and re-number as ¶¶ 11.2 to ¶¶ 11.8 as shown
below.
Table A1-1 Supplier Ergonomic Success Criteria Checklist
Section
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
1
Manual Material Handling {no changes to this section for Line Item 4}
2
Product Loading in a Standing Posture {no changes to this section for Line Item 4}
3
Wafer Cassette Loading {no changes to this section for Line Item 4}
4
Work in Process Storage {no changes to this section for Line Item 4}
5
Manual Wafer Cassette Rotation Device Design {no changes to this section for Line Item 4}
Handle Design {no changes to this section for Line Item 4}
6
Section 7: Clearance Criteria {no changes to this line for line item 4, part B}
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5009D
Date: 3/21/2016
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DRAFT
Acceptance Criteria
Reference
Metric Units (US Customary Units) Pictogram
Minimum lighting level in Minimum 300 lux (30 fc)
routine maintenance areas
is required where the
operator has to read
information, use a hand
tool, or make a connection.
This provision can be met
by providing integral
lighting or portable
lighting which can be
temporarily attached such
that it does not have to be
hand held.
Actual/
Conforms?
Actual
Section Indicator
7.1
—
Conforms?
Yes
No
N/A
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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7.2 7.3.7
7.4
7.4.1
7.4.2
7.4.3
7.5
7.5.1
7.5.2
7.5.3
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
{no changes to these lines for line item 4, part B}
—
Maintenance and Service Access
Enclosures or covers
must, unless fully
removable, be selfsupporting, in the open
position, and not require
manual support during
maintenance. Exceptions
may be allowed for selfclosing doors for fire
safety or compliance
reasons.
Supports present
Conforms?
Yes
No
N/A
—
Access covers should be Handles present, or other suitable
equipped with full-handed means to grasp the cover refer to
grasp areas or other means § 6 for design criteria.
for opening them.
Height of access cover
handle over the entire
range of motion required
for operation or
maintenance. There
should be no greater than
a 254 mm (10 in.) deep
obstruction in front of the
handle.
—
Maximum 1700 mm (67 in.).
Actual
Conforms?
Yes
No
N/A
Replaceable Components
Serviceable components
Serviceable components
are replaceable as modular configured as described.
packages, and are
configured for rapid
removal and replacement.
Serviceable components
should not be stacked
directly on one another
(i.e., a lower layer should
not support an upper
layer).
Conforms?
Yes
No
N/A

Serviceable components
independently accessible.

Heavy components
Guide/locating pins present.
(objects which have a
lifting index of 0.5 or
greater, see SESC, § 1.0)
or bulky components
(greater than 36 inches in
length) requiring frequent
removal/installation
should include
guide/locating aids to
assist in positioning.

Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Locating pins
An example of locating pins
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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Document Number: 5009D
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7.5.5
Cables, connectors, plugs, Identification present, keyed where
and receptacles should be needed.
labeled, keyed, color
coded, or otherwise
configured to make
connection easier and
prevent cross connection.
This feature is assessed
only if a SEMI S2
assessment is not being
conducted.

Circuit boards mounted in Finger access, gripping, or ejecting
a card cage configuration aids available.
should have gripping or
ejecting aids for mounting
and removal.
8
Display Location {no changes to this section for Line Item 4}
9
Hand Control Location {no changes to this section for Line Item 4}
10
Workstation Design {no changes to this section for Line Item 4}
Conforms?
Yes
No
N/A
Conforms?
Yes
No
N/A
Section 11: Equipment Maintainability and Serviceability
Section
11.1
11.2
Indicator
Acceptance Criteria
Metric Units (US Customary Units)
Minimum lighting level in Minimum 300 lux (30 fc)
maintenance areas is
required where the worker
has to read information,
use a hand tool, or make a
connection. This provision
can be met by providing
integral lighting or
portable lighting that does
not have to be hand held.
Lighting should be
properly rated for the
environment of intended
use.
Covers or doors must,
Supports present
unless fully removable, be
self-supporting, in the open
position, and not require
manual support during
maintenance. Exceptions
may be allowed for selfclosing doors for fire
safety or compliance
reasons.
Reference
Pictogram
Actual/
Conforms?
Conforms?
Yes No N/A
—
Conforms?
Yes No N/A
—
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
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7.5.4
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11.3
11.4
11.5
11.6
11.7
Indicator
Height of access cover
handle over the entire
range of motion required
for maintenance.
This requirement can be
met by the use of a
ladder or step platform;
however, its use should
be noted in the
assessment report.
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Measurement
______
Conforms?
Maximum 1700 mm (67 in.).
Maximum handle
height over entire
range of motion
Serviceable components
Serviceable components configured
are replaceable as modular as described.
packages, and are
configured to facilitate
removal and replacement.
Serviceable components
should not be stacked
directly on one another
(i.e., a lower layer should
not support an upper
layer).
Serviceable components
independently accessible.
Weight bearing aids to
support items that can
fall if not supported by at
least one hand while
being attached should be
provided for items which
are specified for
installation as part of a
maintenance or service
task.
Alignment aids provided
to facilitate positioning
when precise alignment
is needed to insert
fasteners for items which
are specified for
installation as part of a
maintenance or service
task.
Note: aids include, but
are not limited to pins,
hooks, bayonet mounts,
and keyholes.
Weight bearing /alignment aids
present.
Cables, connectors, plugs,
and receptacles should be
labeled, keyed, color
coded, or otherwise
configured to make
connection easier and
prevent cross connection.
This feature is assessed
only if a SEMI S2
assessment is not being
conducted.
Identification present, keyed where
needed.
Yes No N/A
Conforms?
Yes No N/A

Conforms?
Yes No N/A

Conforms?
Yes No N/A
Weight
bearing pins
An example of weight bearing aids
Conforms?
Yes No N/A

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 57
Doc. 5009D  SEMI
LETTER BALLOT
Section
DRAFT
Document Number: 5009D
Date: 3/21/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
Indicator
11.8
Circuit boards mounted in
a card cage configuration
should have gripping or
ejecting aids for mounting
and removal.
Acceptance Criteria
Metric Units (US Customary Units)
Reference
Pictogram
Actual/
Conforms?
Finger access, gripping, or ejecting
aids available.
Conforms?
Yes No N/A
Line Item 4, Part C: Add documents to § 8 (Related Documents)
Add documents to the section 8, Related Documents, under Other Documents as shown below.
8.9.w Gordon, Claire C. “1988 Anthropometric Survey of U.S. Army Personnel: Summary Statistics, Interim Report.”
U.S. Army Natick Research, Development and Engineering Center, 1989.
8.9.x Harrison, Catherine R., and Robinette, Kathleen M. “CAESAR: Summary Statistics for the Adult Population
(Ages 18-65) of the United States of America.” Air Force Research Laboratory, Human Effectiveness
Directorate, Crew System Interface Division, 2002.
8.9.y Japanese Body Size Data 2004-2006. Research Institute of Human Engineering for Quality Life, Japan, 2008.
8.9.z McDowell, M. A. et al. Anthropometric Reference Data for Children and Adults: United States, 2003–2006,
National Health Statistics Reports, no. 10, October 22, 2008.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 58
Doc. 5009D  SEMI
LETTER BALLOT
Section
DRAFT
Document Number: 5009D
Date: 3/21/2016