About Conax Semiconductor 2011 © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com • Division of Conax Technologies LLC • 55 Year Old Company based in Buffalo, NY, USA • Fully Integrated, State-of-the-Art Facility featuring some of the most sophisticated manufacturing systems in the industry. • ISO 9001:2008 certified © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Search for product, info and more… Home About Us Literature Customers What’s New Search Contact Us Facilities Our fully integrated, state-of-the-art ISO 9001:2000 certified production facility in upstate New York features some of the most sophisticated manufacturing systems in the industry. Complete in-house capabilities include computer-aided engineering, design and manufacturing. We have state-of-the-art equipment for machining, assembly, welding and testing. All Conax Semiconductor products are produced under our stringent quality assurance program. Product Assurance Capabilities • Calibration Lab • Unholtz-Dickie Vibration System (600lb Table Capacity, 5g’s, to 2000Hz) • Environmental Chambers (Temperature and Humidity Testing) • High Purity Mineral Insulated Cable Fabrication • Leak Testing (Helium Mass Spectrometer with sensitivity to 10-11 scc/sec) • X-ray Capabilities • High Magnification Video Inspection System Helium Mass Spectrometer Product Development and Analysis Capabilities We have a wide variety of equipment to support product development efforts and should the need arise, failure and root cause analyses. This equipment includes chambers for accelerated thermal aging and cycling with temperature capabilities to 1700°C, temperature and humidity chambers, high magnification video inspection system and in-house x-ray capabilities to name a few. We are also located less than 15 minutes from the renowned State University of New York – Buffalo where we routinely access sophisticated analysis tools such as Scanning Electron Microscopy (SEM). © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Search for product, info and more… Home About Us Literature Customers What’s New Contact Us Laminar Flow Tables – Certified 209E, Class 100 We manufacture a variety of products for the semiconductor industry. Some are required to be manufactured under and packaged for clean room environments. In these cases, we utilize laminar flow tables for assembly and double bag products to allow for a two-step unpacking process as our products move into cleaner environments within the fab prior to installation. Inside of our specialized semi production unit, we utilize laminar flow tables to assemble those temperature sensors that require this exacting process. Raw materials used in the construction of these types of thermocouples are only handled with latex-gloved hands. The components are cleaned with semiconductor grade, lint-free isopropyl alcohol wetted wipes. Laminar Flow Tables Test and Calibration Lab Our instruments are tested and calibrated against exacting standards that are traceable to the National Institute of Standards and Testing (NIST) and conform to the latest industry specifications and protocols such as the American Society for Testing and Materials (ASTM). We have in-house capabilities enabling us to perform NIST traceable calibrations at temperature up to up to 1650°C. We utilize a state-of-the-art computer controlled data acquisition system that provides computer generated calibration reports, ensuring data accuracy and integrity by eliminating potential human errors in reporting. © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | Test and Calibration Equipment www.conaxsemiconductor.com Search Search for product, info and more… Home About Us Literature Customers What’s New Contact Us Laser Welding Capabilities We have three welding processes that perform on a daily basis. Two of these processes, Tig and Plasma have been utilized in our production for a number of years. These welding process produce welding techniques that are faster and better. For example, we can can now precisely form an ungrounded junction on MIMS that are as small as .040” in outside diameter and also form isolated ungrounded junctions on MIMS that are .062” in diameter with 4-wires. Laser welding also creates a very minimal HAZ (Heat Affected Zone) on thermocouple wires and leaves the junctions with virtually no mechanical stress. This dramatically improves the integrity and life of the products. Laser Welding Equipment Laser Engraving Capabilities Laser Engraving Examples When appropriate, Conax Semiconductor laser engraves serial numbers on each thermocouple connector. Our competitors routinely provide no serialization, or at best hand-scratch serial numbers onto connectors. © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | Conax www.conaxsemiconductor.com vs. Competition Search Search for product, info and more… Home About Us Literature Customers What’s New Contact Us Quality Assured Packaging Process Conax Semiconductor takes all the necessary packaging steps required by the semi industry. For example, when we package and ship our quartz sheathed thermocouple products, we place all finished thermocouple assemblies inside their unsealed bags into a vacuum chamber. Once evacuated, the chamber is filled with hospital-grade dry-air. This process is then repeated. Following the second drying cycle, the plastic bags are then sealed. Each serial numbered assembly is then placed into a foam padded box for shipment. Same Day Shipment Program Conax Semiconductor stocks many temperature sensor and sealing gland styles that are ready for same-day shipment. If you need a customized product, Conax will stock these on our shelves as well if you enroll in our Customer Managed Inventory Program (CMI). Re-sheath and Reclamation Programs for Thermocouples For customers who wish to reuse the internals of our thermocouple (ex. precious metals), Conax offers a Thermocouple Resheath Program that is designed to save money and extend the ROI on your initial purchase. For those customers who prefer not to reuse their thermocouple internals but would like to save money (and the environment), Conax offers a Precious Metals Reclamation Program. This program provides our customers with credits to be used to offset the cost of new thermocouples. © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Search Our Website and Literature © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Our Focus on the Semiconductor Industry • Leading supplier of custom designed temperature sensors and compression seal fittings to the Semiconductor Industry for over 30 years. • Specializing in: – High Temperature Epitaxial thermocouple designs for several Silicon and Compound Semiconductor process tools – High Temperature Photovoltaic Crystal Growth temperature sensors, electrode and thermocouple/wire feedthroughs for PV Cell Processing/Coating – High Temperature Compound Semiconductor Crystal Growth – High Accuracy/High Stability room temperature controls used in Nanotechnology Research and Development Laboratories – Fiber Optic Feedthroughs used to introduce Fibers into High Vacuum tools such as EUV Lithography Tools © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Partial List of Semiconductor/PV Customers Allegro Microsystems Linear Samsung Analog Devices LG Siltron Siltronic (Wacker) Applied Materials Maxim Integrated Products SolarWorld Axcelis Technologies MEMC Electronic Materials SORAA Axic Miasole SST International Blue Square Energy Moore Technologies (Moore Semi Parts) Sumco Phoenix Chartered (Global Foundries) Nanofilm Sumika Fairchild Nanosolar Texas Instruments First Solar Numonyx TSMC GT Solar On Semiconductor Veeco Compound Semiconductor Hemlock Semiconductor Osram Opto Semiconductor Vishay Siliconix II-VI (eV Products, Endicott Interconnect) Philips Lumileds Willard & Kelsey Intel Polar Semiconductor Xunlight International Rectifier Poongsan Microtec Zygo IQE-RF Power Film Resellers selling to unknown customers Kayex Rainbow Opto © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Two General Product Groups • Compression Seal Fittings • Temperature Sensors © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Thermocouples for ASM Epsilon® Reactors • Conax offers a full line of thermocouples for the 150mm, 200mm and 300mm versions of ASM Epsilon reactor • Two choices for cost conscious Fabs – Gen 1.0 manufactured using OEM Certified quartz components – Gen 1.1 manufactured from standard-sized quartz tubing with sensor life 10%-30% longer than OEM standard but at a lower price • One version for Fabs requiring long life performance – Gen 2.0 designed for 40-160% longer service life over standard OEM version with no reactor modification needed © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Thermocouples for ASM Epsilon® Reactors © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com One 150/200 ASM Epsilon Customer’s Experience • Our longer-lasting Gen 2.0 TCs allows our customer to reduce by 50% the number of PMs required solely to change out thermocouples • Gives them ability to produce more wafers • Translates into a projected $1 million annual increase in finished product per reactor per year! © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Epitaxial Barrel Reactor © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Epitaxial Barrel Reactor Calibration TC Triple-Point Calibration TCs AMAT P/N Conax P/N 676692 9277-01 676693 9277-02 678582 9277-03 678583 9277-04 678826 9277-05 671097 9277-06 N/A 9277-07 0090-14001 317579-001 N/A 317579-002 90602 316518-001 N/A 316518-003 N/A 318436-001 66534 10-0344-001 Single-Point Calibration TC 1310-01031 © 2011 Conax Technologies | C424-1 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Centura Epitaxial Reactor Calibration TC Centura Calibration TCs © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | AMAT P/N Conax P/N 1150-01015 10-0800-001 1310-01058 10-0800-002 1310-00127 10-0800-003 www.conaxsemiconductor.com Ion Implanter TCs Axcelis Ion Implanter TCs © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | Axcelis P/N Conax P/N 7435-0011-0001 318441-001 7435-0010-0001 318441-002 ? 10-1160-001 ? 10-1160-002 www.conaxsemiconductor.com Horizontal & Vertical Diffusion/Oxidation Furnaces © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Profile TC for Horizontal Diffusion/Oxidation Furnaces © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Profile TC for Horizontal Diffusion/Oxidation Furnaces © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Profile TC for Vertical Diffusion/Oxidation Furnaces © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Single and Dual Spike TCs for Vertical Diffusion/Oxidation Furnaces © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Dual, small diameter TC with Conax machined VCR Seal for high vacuum application © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Dual, small diameter TC with Conax machined KF Flange for high vacuum application © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Bare Junction C-type TC for High Temp. High Vacuum © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Mini, High Temperature, Bare Junction TC for Fast Response © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Heavy Duty Dual Ceramic/Metal Sheath, Dual Sheath Seal, ANSI Flange © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Heavy Duty Dual Ceramic/Metal Sheath, Dual Sheath Seal, ANSI Flange © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Ceramic Sheath, Dual Seal on Sheath and Bare Wires with Union for fast removal © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Bare Junction TC with Quartz Sheath for Vacuum environment with Metal Mounting Bracket © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Dual High-Temp TC with Dual Sheath/Wire Seal and Integrated Vacuum Flange © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Copper Wire Feedthrough for HAST IC Testing © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Thermocouple Wire Feedthrough for HAST IC Testing, Chamber Validation © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Various Small and Large Diameter Wire Feedthroughs, some transitioning from Solid to Stranded Wires for Increased Flexibility © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com Multi-mode, Multi-axis Fiber Optic Vacuum Feedthrough © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com RF Coaxial, Multi-mode, Single-Mode Fiber Optic Vacuum Feedthrough © 2011 Conax Technologies | 2300 Walden Avenue, Buffalo, New York 14225 USA | www.conaxsemiconductor.com