CRITICAL MATERIALS HANDLING
PROCESSGARD® PES CARTRIDGE
AND DISPOSABLE FILTERS
PES filters for weak acids, bases and DI water filtration
PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS
for high particle loading
applications
Overview
Features and Benefits
ProcessGard® PES cartridge and disposable filters
are high-flow, longer-lifetime filters that are ideally
suited for filtration of weak acids, bases and ultrapure DI water for the electronics industry.
•Asymmetric PES structure provides longer lifetime and high flow rate
•Hydrophilic PES media eliminates prewetting
treatment, reduces filter changeout time and
increases equipment uptime
Applications
•Various retention ratings, fitting sizes and types
to meet various requirements
•Flat panel display; all rinsing application after
wet etching and stripping
•Facility system – ultrapure DI water that
requires high retention and longer lifetime
ProcessGard PES Cartridge Filters
Specifications
Materials:
Membrane
Hydrophilic polyethersulfone
Supports, core, sleeve
Polypropylene
O-rings (AS568-222)
EPDM, fluoroelastomer, E-FKM
(encapsulated fluoroelastomer)
Dimensions: (nominal)
Length
263 mm (10.35”)
Diameter
70 mm (2.75”)
Operating conditions:
Maximum forward differential pressure
0.5 MPa (5.0 bar, 73 psi) @ 20°C (68°F)
0.25 MPa (2.5 bar, 36 psi) @ 50°C (122°F)
0.2 MPa (2.0 bar, 29 psi) @ 90°C (194°F)
Retention rating:
Maximum reverse differential pressure
0.3 MPa (3.0 bar, 44 psi) @ 20°C (68°F)
Maximum operating temperature
90°C (194°F)
0.04, 0.05, 0.1, 0.2, 0.45 and 1.0 μm
Note: ProcessGard PES cartridge filters can be sterilized by autoclaving up to 25 cycles at 125°C or sterilized by steam-in-place up to
10 cycles at 135°C℃ for 30 minutes at less than 0.3 bar differential pressure.
2
ENTEGRIS, INC.
PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS
Dimensions
Ø70 MM CODE F FILTER
Ø70 MM CODE 0 FILTER
A
A
Ø70 mm
(2.76”)
Length
Ø70 mm
(2.76”)
A
Length
A
5”
143 mm (5.63”)
5”
132 mm (5.20”)
10”
263 mm (10.35”)
10”
253 mm (9.96”)
20”
509 mm (20.04”)
20”
497 mm (19.57”)
30”
756 mm (29.76”)
30”
745 mm (29.33”)
40”
1002 mm (39.45”)
40”
988 mm (38.90”)
Ø70 MM CODE 7 FILTER
Ø70 MM CODE 5 FILTER
A
A
Ø70 mm
(2.76”)
Ø70 mm
(2.76”)
Length
A
Length
A
5”
196 mm (7.72”)
5”
200 mm (7.87”)
10”
316 mm (12.44”)
10”
318 mm (12.52”)
20”
562 mm (22.13”)
20”
566 mm (22.28”)
30”
809 mm (31.85”)
30”
815 mm (32.09”)
40”
1055 mm (41.54”)
40”
1060 mm (41.73”)
Ø83 MM CODE 6 FILTER
Ø70 MM CODE 8 FILTER
244.5 ±2 mm (9.63” ±0.08”)
267.5 ±2 mm (10.53” ±0.08”)
245 mm ±2 mm (9.65” ±0.08”)
227.0 mm (8.94”)
Ø83 mm
(3.27”)
Ø51.2 mm ±1.0 mm
(2.02 ±0.04”)
Ø56.2 mm ±1.0 mm
(2.21 ±0.04”)
ENTEGRIS, INC.
3
PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS
Performance Data
ProcessGard PES Cartridge Filters
0
3
6
GPM
9
12
15
0.8
0.6
0.04 µm
8
0.05 µm
0.2 µm
0.45 µm
0.4
6
4
0.1 µm
0.2
2
1.0 µm
0
0
10
30
50
20
40
Flow Rate (L/min) — 1 cP @ 20°C (68°F)
Differential Pressure (psi)
Differential Pressure (kg/cm2)
10
0
60
Ordering Information
ProcessGard PES Cartridge Filters
Part Number
PS
1
Quantity
Length
Code
0 = Code 0
F = Code F
5 = Code 5
6 = Code 6*
7 = Code 7
8 = Code 8**
05 = 5”
10 = 10”
20 = 20”
30 = 30”
40 = 40”
O-ring
1/pack
E =EPDM
V = FKM
T = E-FKM
Retention Rating
P4 = 0.04 µm
P5 = 0.05 µm
01 = 0.1 µm
02 = 0.2 µm
45 = 0.45 µm
10 = 1.0 µm
* 222 with 83 mm/247 mm
** 226 with 70 mm/263 mm
4
ENTEGRIS, INC.
PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS
ProcessGard PES Disposable Filters
Specifications
Materials:
Operating conditions:
Retention rating:
Membrane
Hydrophilic polyethersulfone
Supports, core, sleeve
Polypropylene
Fitting connections
Flare, MNPT, FNPT, compression
Maximum forward differential pressure
0.4 MPa (4.0 bar, 58 psi) @ 20°C (68°F)
Maximum reverse differential pressure
0.2 MPa (2.0 bar, 29 psi) @ 20°C (68°F)
Maximum operating temperature
60°C (140°F)
0.05, 0.1, 0.2, 0.45 and 1.2 μm
Note: ProcessGard PES disposable filters can be sterilized by autoclaving up to 25 cycles at 125°C℃ for 30 minutes. It cannot be in-situ
steam sterilized.
Performance Data
ProcessGard PES (11⁄2”) Disposable Filters
1⁄4” Compression
0.05 µm
0.8
0.1 µm
1.0
0.2 µm
Differential Pressure (kg/cm2)
Differential Pressure (kg/cm2)
1.0
0.6
0.4
0.45 µm
0.2
1.2 µm
0
0.8
0.05 µm
0.6
0.1 µm
0.2 µm
0.4
0.2
2
6
4
Flow Rate (L/min) @ 22°C
8
10
0.45 µm
1.2 µm
0
0
0
2
4
6
Flow Rate (L/min) @ 22°C
8
10
ProcessGard PES (21⁄2”) Disposable Filters
1⁄4” Compression
1.0
Differential Pressure (kg/cm2)
ProcessGard PES (5”) Disposable Filters
3⁄8” Compression
0.05 µm
0.8
0.1 µm
0.2 µm
0.6
0.4
0.45 µm
0.2
1.2 µm
0
0
2
4
6
Flow Rate (L/min) @ 22°C
8
10
ENTEGRIS, INC.
5
PROCESSGARD PES CARTRIDGE AND DISPOSABLE FILTERS
Dimensions
ProcessGard SKP-H (11⁄2”)
Ø73.2 mm
(2.88”)
B
Ø68.2 mm
(2.68”)
26 mm
(1.02”)
Vent
ProcessGard SKP-L (5”)
ProcessGard SKP-S (21⁄2”)
Ø73.2 mm
(2.88”)
Ø68.2 mm
(2.68”)
26 mm
(1.02”)
Vent
Outlet
Ø73.2 mm
(2.88”)
Ø 68.2 mm
(2.68”)
26 mm
(1.02”)
Vent
Outlet
Outlet
A
B
A
B
A
Drain
Inlet
Drain
Inlet
Drain
Inlet
Fitting Connection
Inlet/Outlet
Vent/Drain
SKP-H (11⁄2”)
SKP-S (21⁄2”)
A
B
A
B
A
SKP-L (5”)
B
1⁄4”
1⁄4”
compression
(2 caps)
68 mm
(2.68")
95 mm
(3.74")
98 mm
(3.86")
125 mm
(4.92")
153 mm
(6.02")
179 mm
(7.05")
3 ⁄8”
compression
1⁄4”
compression
(2 caps)
68 mm
(2.68")
95 mm
(3.74")
98 mm
(3.86")
125 mm
(4.92")
153 mm
(6.02")
179 mm
(7.05")
1⁄ 2”
compression
1⁄4”
compression
(2 caps)
68 mm
(2.68")
101 mm
(3.98")
98 mm
(3.86")
131 mm
(5.16")
153 mm
(6.02")
185 mm
(7.28")
MNPT (2 caps)
68 mm
(2.68")
98 mm
(3.86")
98 mm
(3.86")
128 mm
(5.04")
153 mm
(6.02")
182 mm
(7.17")
68 mm
(2.68")
94 mm
(3.70")
98 mm
(3.86")
124 mm
(4.88")
153 mm
(6.02")
179 mm
(7.05")
compression
1⁄4”
MNPT
3 ⁄8”
FNPT
1⁄4”
flare
1⁄8”
MNPT (2 caps)
68 mm
(2.68")
123 mm
(4.84")
98 mm
(3.86")
153 mm
(6.02")
153 mm
(6.02")
208 mm
(8.19")
3 ⁄8”
flare
1⁄4”
flare (no caps)
68 mm
(2.68")
95 mm
(3.74")
98 mm
(3.86")
125 mm
(4.92")
153 mm
(6.02")
179 mm
(7.05")
68 mm
(2.68")
126 mm
(4.96")
98 mm
(3.86")
156 mm
(6.14)
153 mm
(6.02")
210 mm
(8.27")
11⁄ 2”
Tri-­clamp
6
1⁄8”
Female Luer Lok
(2 caps)
Female Luer Lok
(2 caps)
ENTEGRIS, INC.
Ordering Information
ProcessGard PES Disposable Filters
Part Number
SKPS
Length
H = 11⁄2”
S = 21⁄2”
L = 5”
Retention
Rating
005=0.05 µm
010=0.1 µm
020=0.2 µm
050=0.45 µm
120=1.2 µm
I/O Fitting
2C= 1⁄4” compression seal
3C= 3⁄8” compression seal
4C= 1⁄2” compression seal
2N= 1⁄4” MNPT
3NF = 3⁄8” FNPT
2F= 1⁄4” flare
3F= 3⁄8” flare
5TC= 11⁄2” Tri-clamp
For More Information
Please call your Regional Customer Service
Center today to learn what Entegris can do
for you. Visit www.entegris.com and select the
Customer Service link for the center nearest you.
Terms and Conditions of Sale
All purchases are subject to Entegris’ Terms
and Conditions of Sale. To view and print
this information, visit www.entegris.com and
select the Legal Notices link from the footer.
Entegris®, the Entegris Rings Design®, Creating a Material Advantage® and ProcessGard ® are registered trademarks of Entegris, Inc.
ENTEGRIS, INC.
Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USA
Customer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022
In North America 800 394 4083 | www.entegris.com
©2009–2015 Entegris, Inc.
All rights reserved
Printed in USA
4416-5587ENT-0515