IWAKI
FS
series
Pneumatic Drive Bellows Pump
Iwaki America’s FS is a compact, all-temperature rated, low-cost, air-driven, bellows pump series designed for the
semiconductor industry, chemical delivery or recirculation. This pump handles high temperature nitride etch and
piranha etch applications with ease. FS features intelligent drive technology and leak sensing, with a significant
cost savings over previous models, and a 2-year warranty.
Iwaki America’s FS is rated for liquid temperatures ranging from 5° to 180°C with discharge pressures up to 73
psi, making it the perfect pump for wet process tools, cleaning and chemical feed applications. Utilizing stroke
rates up to 240 spm, FS is able to produce up to 50% higher flow rates in a significantly smaller space. FS has a
contamination-free design; all liquid contact parts are made of PTFE/PFA. The anti-torsion air chamber design
eliminates the need for retorquing connecting rods. The intelligent sensor drive system of Iwaki America’s FS
design uses proximity switches and an external solenoid valve allowing the pump operation to be easily
controlled and monitored.
Model
Max discharge capacity
FS-15HT1/T2
FS-30HT1/T2
FS-60HT1/T2
4.0 GPM (15 LPM)
8.0 GPM (30 LPM)
14.5 GPM (55 LPM)
Max air supply pressure
MPa (PSI)
0.15-0.5
(22.5-75)
0.15-0.3
(22.5-45)
0.15-0.2
(22.5-30)
0.15-0.5
(22.5-75)
0.15-0.3
(22.5-45)
0.15-0.2
(22.5-30)
0.15-0.5
(22.5-75)
0.15-0.3
(22.5-45)
0.15-0.2
(22.5-30)
Liquid temperature range
°C (°F)
5-50
(41-122)
51-100
(123-212)
101-180
(213-356)
5-50
(41-122)
51-100
(123-212)
101-180
(213-356)
5-50
(41-122)
51-100
(123-212)
101-180
(213-356)
200
160
110
200
160
110
200
160
110
Max air consumption
NL/min
Max stroke speed SPM
240
220
200
Pump connection size PFA
1/2”, OD 0.5” x ID 0.385”
3/4”, OD 0.75” x ID 0.63”
1”, OD 0.98” x ID 0.87”
Air supply connection size
PT 1/4, Rc 1/4
PT 1/4, Rc 1/4
PT 3/8, Rc 3/8
Ambient temperature
32-104°F (0-40°C)
Drive system
Self-priming ability
Wetted materials
by proximity switch or APT valve
3.3 FT (1.0 m)
6.6 FT (2.0 m)
PTFE, PFA
6.5 FT (2.0 m)
FS
series
Performance Curves
0.50
70
73 PSI
70
0.45
7
0.45
0.40
60
58 PSI
73 PSI (0.5 MPa)
0.40
44 PSI
6
29 PSI
40
4
0.25
0.20
0.15
0.10
44 PSI (0.3 MPa)
30
22 PSI
20
3
0.20
1
0.05
0.05
0
GPM 0.5
LPM
1.0
2
1.5
4
2.0
6
2.5
8
3.0
10
3.5
12
0
4.5
4.0
14
12
11
58 PSI
44 PSI
50
45
9
8
35
44 PSI (0.3 MPa)
4
29 PSI (0.2 MPa)
15
3
2
10
5
0
1
22 PSI (0.15 MPa)
GPM 1
LPM
16
2
5
3
10
4
15
5
6
20
7
25
8
30
Capacity
60
30
55
0.30
50
58 PSI (0.4 MPa)
45
40
0.25
0.20
0.10
20
58 PSI
35
44 PSI
44 PSI (0.3 MPa)
15
30
25
0.15
25
73 PSI
29 PSI
29 PSI (0.2 MPa)
20
10
22 PSI
15
10
0.00
Air Consumption (CFM)
0.35
5
22 PSI (0.15 MPa)
5
0
0
2
LPM
4
10
6
20
8
30
10
40
12
14
50
16
5
20
73 PSI (0.5 MPa)
0.40
6
22 PSI
FS-60HT
65
7
29 PSI
30
Capacity
MPa PSI
10
58 PSI (0.4 MPa)
25
0.15
0.10
22 PSI (0.15 MPa)
13
73 PSI
73 PSI (0.5 MPa)
60
40
0.25
2
29 PSI (0.2 MPa)
10
0.30
Pressure
58 PSI (0.4 MPa)
Air Consumption (CFM)
5
0.30
Pressure
Pressure
50
14
65
55
0.35
0.35
FS-30HT
MPa PSI
18
60
Capacity
IALT-00038.D Aug 2012
www.IwakiAmerica.com
Five Boynton Road • Holliston, MA • 01746 USA • Tel: 508-429-1440 • Fax: 508-429-1386 info@iwakiamerica.com
9
0
Air Consumption (CFM)
FS-15HT
MPa PSI