Workshop on Simulation and Modeling of Emerging Electronics SMEE 2013, Hong Kong University Along for the Ride: reflections on the past, present, and future of computational electronics Mark Lundstrom Purdue University West Lafayette, Indiana USA transistors à integrated circuits à modern society ? Bell Labs 1947 Apple 2013 Lundstrom SMEE 2013 21st Century electronics 2 outline I. A brief history of computational electronics II. Observations and lessons learned III. Nanotransistors IV. 21 Century computational electronics? Lundstrom SMEE 2013 3 transistors: a transformative technology? 1954 transistors Sony TR-63 6-transistor shirt pocket radio 1957 http://www.sony.net/Fun/SH/1-6/h2.html http://people.msoe.edu/~reyer/regency/ 4 1959: tubes vs. transistors RCA Nuvistor “Tube manufacturers have unveiled, in recent weeks, drastically new concepts and techniques aimed to keep them in the race with the transistor industry.” -ELECTRONIC DESIGN, April 15, 1959, p. 3 5 Lundstrom SMEE 2013 SEEC notes Semiconductor Electronics Education Committee R.B. Adler, et al., 1960-1967 http://web.mit.edu/klund/www/books/seec.html Lundstrom SMEE 2013 6 NMOS-II NMOS I: 7 microns NMOS II: 5 microns = 5000 nm “shallow junctions” (2 µm) 100 nm gate oxide Cu-Si-Al metal VDD = 5V 6 MHz clock 7 Hewlett-Packard Journal, Nov. 1977 observations Semiconductor technology has always: Moved incredibly fast Been highly multidisciplinary Faced almost impossible challenges Never been sure where it was heading http://www.hp9825.com/index.html Lundstrom SMEE 2013 8 Moore’s Law 100 nm barrier 1 micron barrier L = 5000 nm 9 http://en.wikipedia.org/wiki/Moore's_law Moore’s Law on a linear scale transistors per cpu chip 10 Lundstrom SMEE 2013 9 computational electronics What was the role of computational electronics? 11 Lundstrom SMEE 2013 NMOS-II NMOS I: 7 microns NMOS II: 5 microns = 5000 nm “shallow junctions” (2 µm) 100 nm gate oxide Cu-Si-Al metal VDD = 5V 6 MHz clock 12 Hewlett-Packard Journal, Nov. 1977 “the semiconductor equations” D = κε 0E = −κε 0∇V ∇• D = ρ ∂n = −∇ • ∂t ∂p = −∇ • ∂t ( J n −q + ( Gn − Rn ) ) (J p ) ( q = G p − Rp ) ( ρ = q p − n + N D+ − N A− J n = nqµ nE + qDn∇n J p = pqµ pE − qD p∇p ) R = f (n, p) etc. 13 Lundstrom SMEE 2013 the first models were “compact models” “The Silicon Insulated-Gate Field-Effect Transistor” S.R. Hofstein and F.P. Heiman, Proc. IEEE 1963. ( W 2 µ nCox (VGS − VT ) VDS − VDS 2 L 2 W ID = µ nCox (VGS − VT ) 2L ID = ) VDS ≤ VGS − VT VDS > VGS − VT “Characteristics of the Metal-Oxide-Semiconductor Transistor” C.T. Sah, IEEE Trans. Electron Dev., 1964. 14 Lundstrom SMEE 2013 device scaling “Design of Ion Implanted MOSFET’s with Very Small Physical Dimensions,” R.H. Dennard, F.H. Gaensslen, H.-N. Yu, V.L. Rideout, E. Bassous, and A.R. LeBlanc, IEEE J. Solid State Circuits, 9, 256-268, 2Oct. 1974. 1574 citations (M.S. Mock, 91 citations) 15 Lundstrom SMEE 2013 numerical device simulation “A Self-consistent Iterative Scheme for One-Dimensional Steady-state Transistor Calculations,” H.K. Gummel, IEEE Trans. Electron Dev., 11, 455-465, 1964. “Large-signal Analysis of a Silicon Read Diode Oscillator,” D.L. Scharfetter and Gummel, IEEE Trans. Electron Dev., 15, 64-77, 1968. “Computer-Aided Two-Dimensional Analysis of Bipolar Transistors,” J.W. Slotboom, IEEE Trans. Electron Dev., 20, 669-679, 1973. “Two-Dimensional Mathematical Model of the IGFET,” M.S. Mock, Solid-State Electron., 16, 601-609, 1973. 16 Lundstrom SMEE 2013 numerical device simulation “MINIMOS – A Two-Dimensional MOS Analyzer,” S. Selberherr, A. Schutz, and H.W. Potzl, IEEE J. Solid-State Circuits, 15, 605-615, 1980. “Numerical Simulation of Heterostructure Semiconductor Devices,” R. J. Schuelke ad M.S. Lundstrom, IEEE Trans. on Electron Dev., 30, 1151-1159, Sept. 1983. “Numerical Methods for Semiconductor Device Simulation,” R.E. Bank, D.J. Rose, and W. Fichtner, IEEE Trans. Electron Dev., 30, 1031-1041, 1984. “PISCES II: Poisson and Continuity Equation Solver,” M.R. Pinto, C.S. Rafferty, and R.W. Dutton, Stanford University Technical Report, 1984. 17 Lundstrom SMEE 2013 device scaling again 1/2 2 Lmin = A ⎡⎢ x j tox (WS + WD ) ⎤⎥ ⎣ ⎦ “Generalized guide for MOSFET miniaturization,” J.R. Brews, W. Fichtner, E.H. Nicollian, and S.M. Sze, Electron Device Lett., 1, 2-4, 1980. 18 Dennard 1574 citations (279 citations) Lundstrom SMEE 2013 energy transport / hydrodynamic - Te J S Q “A Critical Examination of the Assumptions Underlying Macroscopic Transport Equations for Silicon Devices,” M.A. Stettler, M.A. Alam, and M.S. Lundstrom, IEEE Trans. Electron Dev., 40, 733-740, 1993. 19 Lundstrom SMEE 2013 Monte Carlo simulation “Velocity-field characteristics of GaAs with Γ-L-X Conduction Band Ordering,” M.A. Littlejohn, J.R. Hauser, and T.H. Glisson, J. Appl. Phys., 48, 4587-4590, 1977. “Simulation of high-field transport in GaAs using a Monte Carlo method and pseudopotential band structures,” H. Shichijo, K. Hess, and G. E. Stillman, Appl. Phys. Lett., 38, 89-99, 1981. “Monte Carlo analysis of electron transport in small semiconductor devices including band-structure and space-charge effects,” M.V. Fischetti and S.E. Laux, Phys. Rev. B, 38, 9721–9745, 1988 20 Lundstrom SMEE 2013 quantum transport “Nonequilibrium Green’s-function method applied to double-barrier resonant-tunneling diodes,” R. Lake and S. Datta, Phys. Rev. B, 45, 6670–6685, 1992. “Single and multiband modeling of quantum electron transport through layered semiconductor devices,” R. Lake, G. Klimeck, R. C. Bowen, and D. Jovanovic, J. Appl. Phys. 81, 7845-7869, 1997. “NEMO5: A Parallel Multiscale Nanoelectronics Modeling Tool,” S. Steiger, M. Povolotskyi, H.-H. Park, T. Kubis, and G. Klimeck, IEEE Trans. Nanotechnology, 10, 1464-–1474, 2011. Lundstrom SMEE 2013 quantum transport: II “Current-voltage chartacteristics of self-assembled monolayers by scanning tunneling microscopy,” S. Datta and W. Tang, S. Hong, R. Reifenberger, J.I. Henderson, and C. Kubiak, Phys. Rev. Lett., 79, 2530–2533, 1997. “First-principles based matrix Green's function approach to molecular electronic devices: general formalism,” Y. Xue, S. Datta, Mark A. Ratner, Chemical Phys., 281, 151–170, 2002. “Ab initio modeling of quantum transport properties of molecular electronic devices,” J. Taylor, H. Guo, and J. Wang, Phys. Rev. B., 245407, 2001. 22 Lundstrom SMEE 2013 21 50 years of computational electronics A suite of sophisticated and very powerful tools: • First principles and atomistic tight binding • drift-diffusion-Poisson • Monte Carlo simulation • NEGF quantum transport + insight, understanding, new directions for research 23 Lundstrom SMEE 2013 impact 1) Identifying new opportunities for research and technology development. 2) Broadly communicating insights and understanding. 3) Putting tools into the hands of people with problems to solve. 24 Lundstrom SMEE 2013 outline I. A brief history of computational electronics II. Observations and lessons learned III. Nanotransistors IV. 21 Century computational electronics? Lundstrom SMEE 2013 25 Kadanoff “Excellent computer simulations are done for a purpose… 1) to explore uncharted territory 2) to resolve a well-posed scientific or technical question 3) to make a good design choice.” The Good the Bad and the Awful: Scientific Simulation and Prediction https://www.nanohub.org/resources/3612/ L.P. Kadanov, “Excellence in Computer Simulation,”Computing in Science and Engineering, (Mar./Apr. 2004).(see also, “Computational Scenarios,” Physics 26 Today, Nov. 2004). observations Much of the work was problem-driven. Much of it was done by the people with problems to solve. Then, experts in physics, chemistry, numerical analysis, software made critical contributions. close to the problem close to the solution analysts 27 experimentalists designers Lundstrom SMEE 2013 two kinds of people “Because structural analysis and detailing programs are complex, the profession as a whole will use programs written by a few. Those few will come from the ranks of structural “analysts” … and not from the structural “designers.” Generally speaking, their design and construction-site experience and background will tend to be limited.… . More than ever before, the challenge to the profession and to educators is to develop designers who will be able to stand up to and reject or modify the results of a computer-aided analysis and design.” from a Canadian structural engineer quoted in Engineering and the Mind’s Eye, by E.S. Furgason 28 “true technology developers” “…the (ordinary TCAD) user is relaxed, accepting on faith the program’s results, the (true technology developer) is concerned and busy checking them in sufficient depth to satisfy himself that the software developer did not make dangerous assumptions. … It takes years of training in good schools, followed by handson design practice, to develop this capability. It cannot be acquired with short courses, or with miracle pushbutton simulation tools that absolve the engineer from understanding in detail what he is doing. “Process and Device Simulation in the Era of Multi-Million-Transistor VLSI,” C. Bulucea, IEEE Workshop on Simulation and Characterization, Mexico City, 7-8 September 1998 29 “standing up to a computer” Scanned in from R. A. Pease, Bootherworth, 1991 30 communicating insights and understanding From an anonymous reviewer: “As is the nature of this kind of “simulation:” almost nothing is explained. One must believe that with the right kinds of numerical techniques, the curves come out as they do. A few features can be explained; for the rest of the reader can gaze at the collection of curves. These remarks are not made to put these authors, who are experts in this field, down. Rather, the intent is to indicate that a group can perpetuate its own methods without ever making contact to outsiders. 31 communicating insights and understanding From an anonymous reviewer: The references come in two groups. First, there are many on simulation techniques, which one must read because the present paper would require at least 60 pages to explain its methods. Secondly, there are references to the more conventional, analytical techniques. These are only illustrative; nowhere is there an attempt to connect the results of this paper to earlier, analytical techniques. 32 communicating insights and understanding From an anonymous reviewer: Is this article alterable to make it more accessible? I am afraid not. It is the nature of this type of computation that nothing is revealed (unless the complete computer program is included). So I recommend to publish the paper “as is.” It is a SIGN OF THE TIMES: Everything is included, detailed results come out of it, nothing is learned!” 33 an approach 1) Start simple (analytical or Matlab). 2) Then do experiments and detailed simulations. 3) Refine the simple model. 4) Reduce to its essence and communicate to the broader community – in their language. 5) Share the codes that were developed. 34 solving important problems close to the problem close to the solution 1) Explore uncharted territory 2) Resolve a well-posed question 3) Make a good design choice 35 Lundstrom SMEE 2013 outline I. A brief history of computational electronics II. Observations and lessons learned III. Nanotransistors IV. 21 Century computational electronics? Lundstrom SMEE 2013 36 Minimum Feature Size where we were in the late 1990’s 100 µm 1 10 µm 1K 1M 1 µm 1G 100 nm 1T 10 nm ? 1P 1 nm 1950 1970 1990 2010 2030 2050 Year 37 Lundstrom SMEE 2013 physics of MOSFETs • Mobility irrelevant • Full band structure essential Energy à • Far from equilibrium transport EC • Quantum effects becoming critical • “Too complicated to understand” D. Frank, S. Laux, and M. Fischetti, Int. Electron Dev. Mtg., Dec., 1992. 38 Lundstrom SMEE 2013 ( µm ) semi-classical ballistic transport “A Numerical Study of Ballistic Transport in a Nanoscale MOSFET,” J.-H. Rhew, Z. Ren, and M. Lundstrom, Solid-State Electronics, 46, 1899–1906, 2002. Lundstrom SMEE 2013 39 ballistic and dissipative quantum transport “A Simple Quantum Mechanical Treatment of Scattering in Nanoscale Transistors,” R. Venugopal, . M. Paulsson, S. Goasguen, S. Datta, and M.S. Lundstrom, J. Appl. Physics, 93, 5613-5625, 2003. 40 3D to 2D transition R. Venugopal, S. Goasguen, S. Datta, and M.S. Lundstrom, “A Quantum Mechanical Analysis of Channel Access, Geometry and Series Resistance in Nanoscale Transistors,” J. Appl. Physics, 95, 292-305, 2004. 41 Lundstrom SMEE 2013 energy band diagrams electron potential energy vs. position G source D drain silicon SiO2 S (Texas Instruments, ~ 2000) Lundstrom SMEE 2013 42 the transistor as a barrier controlled device VG E ß low gate voltage E = −qV EF EF EC EC ß VD = VS = 0 source channel drain y Lundstrom SMEE 2013 43 the transistor as a barrier controlled device VG E ß low gate voltage E = −qV Fn EC source channel Fn drain high drain voltage y Lundstrom SMEE 2013 44 the transistor as a barrier controlled device VG E high gate voltage E = −qV EC Fn Fn source high drain voltage y 45 Lundstrom SMEE 2013 how transistors work 2007 N-MOSFET EC VGS VGS (Courtesy, Shuji Ikeda, ATDF, Dec. 2007) EC 46 E.O. Johnson, “The IGFET: A Bipolar Transistor in Disguise,” RCA Review, 1973 understanding MOSFET IV characteristics electrostatics + transport Lundstrom SMEE 2013 47 non-planar MOSFETs “Transistors go Vertical,” IEEE Spectrum, Nov. 2007. See also: “Integrated Nanoelectronics of the Future,” Robert Chau, Brian Doyle, Suman Datta, Jack Kavalieros, and Kevin Zhang, Nature Materials, 6, 2007 Lundstrom SMEE 2013 48 textbook MOSFETs: low VDS L VS = 0 VG > VT VD VGS Qn ( x ) ≈ Cox (VGS − VT ) I D = W Qn ( x )υ x (x) I DLIN = W Cox (VGS − VT ) µeffE x Ex= 49 gate-voltage controlled resistor I DLIN = VDS L W µ C (V − VT )VDS L eff ox GS Lundstrom SMEE 2013 high VDS: velocity saturation Ey≈ VDS 1.0V ≈ ≈ 5 × 10 5 V/cm L 20 nm ↑ 107 υ cm/s υ = υ sat υ = µE 104 E 105 V/cm → 50 Lundstrom SMEE 2013 carrier transport nanoscale MOSFETs Velocity (cm/s) à Energy à quasi-ballistic EC υ sat ( µm ) ( µm ) D. Frank, S. Laux, and M. Fischetti, Int. Electron Dev. Mtg., Dec., 1992. 51 Lundstrom SMEE 2013 textbook MOSFETs: high VDS VS = 0 VG > VT VD E x >> 10 4 (Courtesy, Shuji Ikeda, ATDF, Dec. 2007) I D = W Qn ( x )υ x (x) I DSAT = −W Cox (VGS − VT )υ sat I DSAT = W Cox υ sat (VGS − VT ) 52 Lundstrom SMEE 2013 textbook MOSFET model I DSAT = W Cox υ sat (VGS − VT ) gate-voltage controlled current source gate-voltage controlled resistor (Courtesy, Shuji Ikeda, ATDF, Dec. 2007) I DLIN = W µ C (V − VT )VDS L eff ox GS 53 Lundstrom SMEE 2013 MIT Virtual Source Model ß 32 nm technology à µeff → µapp υ sat → υinj Lundstrom SMEE 2013 54 why does the traditional model work? 1) It’s obvious (Colin McAndrew, Freescale) 2) There’s more to it than that (Lundstrom) 55 Lundstrom SMEE 2013 Landauer approach to transport nano-device gate M (E),Tel ( E ) EF1 f1 ( E ) = 1 f2 ( E ) = 1 + e( E − EF1 ) kB TL I= EF 2 = EF1 − qVDS 2q T ( E ) M ( E ) ( f1 − f2 ) dE h ∫ 56 Lundstrom SMEE 2013 1 1 + e( E − EF 2 ) kB TL i) small drain bias ID = 2q 2q 2 ⎧ ⎛ f0 ⎞ ⎫ T E M E f − f dE → ( ) ( ) ( ) ⎨ ∫T ( E ) M ( E ) ⎜⎝ − ⎟ dE ⎬V 1 2 ∫ h h ⎩ ∂E ⎠ ⎭ I D 2q 2 ⎛ f ⎞ = Tel ( E ) M ( E ) ⎜ − 0 ⎟ dE ∫ ⎝ ∂E ⎠ VDS h G= 57 Lundstrom 5.3.2013 ii) large drain bias nano-device ID = 2q T ( E ) M ( E ) ( f1 − f2 ) dE h ∫ f0 ( E ) = 1 ( E−EF ) 1+ e ID = kBTL EF1 = EFS f1 ( E ) >> f2 ( E ) EF 2 = EFD = EFS − qVDS 2q T ( E ) M ( E ) f1 dE h ∫ 58 Lundstrom 5.3.2013 ballistic MOSFET: I D = W CinvυT (VGS − VT ) ID VGS = VDD VDS I D = WCinv υT (VGS − VT )VDS 2k BTL q 59 Lundstrom 5.3.2013 the ballistic IV (Boltzmann statistics) I D (on) = W υT Cox (VGS − VT ) ID ballistic on-current (V G − VT ) 1 ballistic channel resistance VDS I D = GCH VDS =W Cox 60 υT (V − V )V ( 2kBTL q ) GS T DS “velocity saturation” K. Natori, JAP, 76, 4879, 1994. Landauer theory of the MOSFET ⎛ T SAT ⎞ I DSAT = W ⎜ υT Cinv (VGS − VT ) ⎝ 2 −T SAT ⎟⎠ ID T SAT >T LIN VD ⎛ ⎞ υT I DLIN =T LIN ⎜ WCinv (VGS − VT ) V 2k T q ( B ) ⎟⎠ DS ⎝ 61 Lundstrom SMEE 2013 scattering under high VDS T LIN = E EF1 low VDS L→ T SAT = EF 2 high VDS y λ0 λ0 + L λ0 λ0 + << L T SAT >T LIN 62 Lundstrom 5.3.2013 connection to traditional model (low VDS) ⎛ ⎞ υT I DLIN =T LIN ⎜ WCinv (VGS − VT ) V ( 2kBT q ) ⎟⎠ DS ⎝ I DLIN = T LIN = mfp mfp + L Dn = υT mfp 2 W µ APP Cinv (VGS − VT )VDS L 1 µ APP = 1 µeff + 1 µ B 63 Lundstrom SMEE 2013 connection to traditional model (high VDS) ⎛ T SAT ⎞ I DS = W υT ⎜ Cinv (VGS − VT ) ⎝ 2 −T SAT ⎟⎠ T SAT = mfp mfp + I DS = Cinv (VGS − VT )υinj ⎡1 1 ⎤ υinj = ⎢ + ⎥ ⎣ υT ( Dn ) ⎦ 64 Lundstrom SMEE 2013 −1 Dn = υT mfp 2 the MOSFET as a BJT I DSAT = WCinv (VGS − VT )υinj 1 1 1 = + υinj υT Dn “base” “bottleneck” E “collector” EC ( x ) x E.O. Johnson, “The IGFET: A Bipolar Transistor in Disguise,” RCA Review, 1973 65 Lundstrom SMEE 2013 physics of MOSFETs • Mobility irrelevant • Full band structure essential Energy à • Far from equilibrium transport EC • Quantum effects becoming critical • “Too complicated to understand” D. Frank, S. Laux, and M. Fischetti, Int. Electron Dev. Mtg., Dec., 1992. 66 Lundstrom SMEE 2013 ( µm ) MIT Virtual Source Model ß 32 nm technology à µeff → µapp υ sat → υinj Lundstrom SMEE 2013 67 “parameter space compression” “Parameter Space Compression Underlies Emergent Theories and Predictive Models”, B.B. Machta, R. Chachra, M.K. Transtrum, and J.P. Sethna, Science, 342, 604-606, 1 Nov., 2013. “The microscopically complicated real world exhibits behavior that often yields to simple, yet quantitatively accurate descriptions. Predictions are possible despite large uncertainties in microscopic parameters….” 68 Lundstrom SMEE 2013 limits to barrier control: quantum tunneling 69 4) 3) 2) 1) from M. Luisier, ETH Zurich / Purdue the next digital switch… ab initio gate drain source semi-emipirical (pz orbitals) LDOS ambipolar conduction in Schottky barrier CNFETs Jing Guo and M.P. Anantram A. Javey and H. Dai, 2003 70 ultimate CMOS and beyond… Molecular à Electronics Ultimate CMOS à Beyond CMOS 71 outline I. A brief history of computational electronics II. Observations and lessons learned III. Nanotransistors IV. 21 Century computational electronics? Lundstrom SMEE 2013 72 electronics today CMOS transistors for logic III-V transistors for RF A/D and D/A convertors Digital Signal processor Microprocessor ROM and FLASH memory www.apple.com 73 CMOS imager Gyroscope MEMS devices Magnetometer Microphone, speaker LCD display and touch screen technology and applications applications technology 74 Lundstrom SMEE 2013 From Nvidia presentation at IEDM 2013 21st Century Device Research Will technology drive electronics in the 21st Century? 75 Lundstrom SMEE 2013 from hardware to software? NY Times: June 16, 2013 Disruptions: Mobile Competition Shifts to Software Design By Nick Bolton SAN FRANCISCO — “Hardware features … offer only fleeting advantages…” “But changes to the software are limited only by the skill and creativity of a company’s engineers and designers and are not as easily mimicked…” Lundstrom SMEE 2013 76 era of accelerated technology innovation • Differentiated process technology will become a competitive advantage. • Technology innovation will become more diverse and less predictable. • Technology innovations will be driven by the pressing needs of society. Dennis Buss, “Microelectronics Industry in Transition,” http://nanohub.org/resources/19576 re-purposing Si technology…. Sanger sequencing Ion Torrent 2nd generation sequencing http://www.genome.gov/sequencingcosts/ 78 Ion Torrent (Nature, 475, 349, 21 July, 2011) 77 new materials à new applications Bio-integrated electronics for cardiac therapy. This flexible, waterproof circuit can wrap the surface of the heart… The New Yorker, 25 Nov., 2013 John Rogers Research Group: http://rogers.matse.illinois.edu technology and applications ATI new technology applications technology 80 new technology Lundstrom SMEE 2013 79 electronics for a new era • Tools for the new era? • Ph.D.’s for the new era? nano bio info cog 81 technology maestros society’s grand challenges • Are deep in their field • Understand related disciplines and technologies • Able to learn, adapt, and contribute (quickly) 82 nanoHUB-U SEEC Semiconductor Electronics Education Committee R.B. Adler, et al., 1960-1967 http://nanohub.org/u 1960’s 2010’s 83 nanoHUB-U http://nanohub.org/u Lundstrom SMEE 2013 84 materials and devices à circuits and systems systems circuits analytical description compact models NEEDS device R&D theory / simulation experiment 85 NEEDS NEEDS Mission Mission: To provide SPICE-compatible and physics-based compact models for emerging nano-devices to researchers in industry and academia with, but more importantly… To create and deploy a complete compact model development environment, the associated processes and educational resources and to help connect materials and device research to circuits and applications. 86 needs.nanoHUB.org needs.nanohub.org 87 Conclusions “Probably the most important invention of the 20th Century.” - Ira Flatow, Transistorized! (www.pbs.org) “One of the most amazing tasks that humankind has ever done.” - George Whitesides (about Moore’s Law) “The most important moment since man emerged as a life form.” - Isaac Asimov (about the invention of the planar process) Lundstrom SMEE 2013 88 the end of Moore’s Law? “Moore’s Law is about lowering cost per function…Progress continues at a breathtaking pace, but transistor scaling is approaching its limit. When the limit is reached, things must change, but that does not mean that Moore’s Law has to end.” Science, 299, 210, 2003 89 We’ve only seen the first half of the story… Lundstrom SMEE 2013 90