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1) Title of Tech offer
All-Solid-State Lithium Ion Thin Film Micro Battery
2) Abstract (Summary of Tech offer)
All-solid-state thin-film lithium-ion batteries are deemed a promising replacement for
liquid electrolyte-based Li-ion batteries owing to their superior cycle life, compact
structure, high energy and power densities with an extremely low self-discharge rate.
However, the state-of-art all-solid-state Li-ion batteries mainly use thermal-evaporated
lithium metal as anode, which considerably undermines their cost-effectiveness and
also raises safety concerns of Li explosion. With our new technology, a spinel Li–Ni–Mn–
O/lithium phosphorus oxynitride (LiPON)/Si-based Li-free all-solid-state Li-ion full cell
battery has been successfully developed for the first time using sputter-deposition
technique. LiPON can increase electrochemical stability in all-solid electrolyte state full
cell. Solid LiPON electrolyte is a very good candidate as electrolyte for high-voltage
lithium-ion batteries. Compared with the 3.6 V upper cutoff voltage of the
LiCoO2/LiPON/Si thin-film batteries, our spinel Li–Ni–Mn–O/LiPON/Si thin-film batteries
show a higher upper cutoff voltage of 4.55 V (spinel Li–Ni–Mn–O has a reaction voltage
of 4.7 V versus Li) and could outperform them in power output.
3) Technology Overview (A brief summary or description of the invention - What
is the problem solved by this technology? Who is going to buy this technology?
How is this IP addressing a need/problem in the marketplace?)
Thickness and the life cycle of the coin cell batteries has been an issue to many users. All
solid lithium ion thin film micro battery provides power on chip. The whole battery
consisting of all solid state, is safer and thinner than ordinary liquid batteries, and has
faster charge/discharge current rate. No lithium metal is used in the battery or battery
fabrication, thus the process reduces the expensive fabrication cost and increase the
safety of all-solid-state thin film batteries. Moreover, the process fits for fabrication of
various sputtered cathode/LiPON/Si all-solid-state thin film Li-ion batteries. It offers the
prospect of supplying the micro system with long-lasting, environmentally friendly and
sustainable electrical power.
4) Technology Features and Specifications (What does the technology comprise
of? E.g. Video camera, software algorithm)
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Growth of thin film multilayers using a sputtering deposition method
Microfabrication of the thin film battery using a standard silicon process flow
The all-solid-state thin-film lithium-ion batteries are compact, efficient and they can
fit the size of semiconductor chips easily
Easy integration and safe
Better performance
Environmental friendly
5) Potential Applications (In which industry can this technology be employed?
What are the products that can be marketed based on this technology?)
The thin film battery can be used for:
• Chip Memory Backup, MEMS and Sensors
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Drug Delivery Systems and Medical Implantable Devices
Radio-frequency Identification (RFID) Tags and Smart Cards
Solar Cell Storage Devices
Low-power Wireless Remote Controls and Other Low Power Consumption Devices
6) Market Trends and Opportunities (What is the approximate market size for this
technology? What makes this IP attractive to the market?)
The technology can be adapted to meet various market opportunities. It enables “power
on a chip” to be achieved.
7) Customer Benefits (How is this improvement over the "State of the Art?" What is the
Value Proposition?)
• Microfabrication of Li-free all-solid-state Li-ion thin film battery using a standard
silicon process flow
• The battery is safer and thinner than ordinary liquid batteries, and has faster
charge/discharge current rate. No lithium metal is used in the battery or battery
fabrication. This process fits for fabrication of various sputtered cathode/LiPON/Si
all-solid-state thin film Li-ion batteries.
• It enables “power on a chip” to be achieved.
8) Relevant images to include in poster (please see requirements below)
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