Wisconsin Center for Applied Microelectronics
1550 Engineering Drive
Madison, WI 53706
Phone: 608/262-6877
Fax: 608/265-2614
Rev. 10/20/15
OPERATING PROCEDURE
Tystar Oxidation Furnace
Safety:
1)
2)
3)
4)
5)
Impact resistant eye protection required
Read SDS for tool process chemicals
Training and tool access required
Know lab evacuation procedures
Know location and use of eye/body showers
Material Restrictions:
All materials in/on your sample must be on the “allowed materials list” for this tool before using it. NO
EXCEPTIONS. It is the user’s responsibility to make sure that the material(s) they are putting in a tool is on
the allowed materials list for that tool. Here is how to check the Allowed Materials list for WCAM tools:
1.
2.
3.
4.
Go to WCAM’s website at: http://wcam.engr.wisc.edu/
Click on the “Chemicals in the Lab” link.
Click on the link at the top of the page “LIST OF APPROVED MATERIALS”.
Scroll thru the document to find the tool you want to check the materials list for or hit Ctrl + F to bring
up a search bar for the document and type in the tool’s name that you want to check the materials list
for.
5. If the material(s) that you want to use in a tool are not on the approved list for that tool you may not
put your sample in the tool. If you have no other way to process your sample and think it makes sense
to use a particular material in a tool you may request that it be added to that tool’s material list by
filling out the form on the “Chemicals in the Lab” webpage listed as “New Material Request Form”.
Then email your material request form along with a SDS for the material to the WCAM lab manager.
The request will be reviewed by the WCAM advisory committee and you will get an email back from the
lab manager approving or denying your material request for a particular tool.
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Tool Purpose & Restrictions:
The Tystar oxidation furnace is a torch furnace that uses gas cylinders of H 2 and O2 to produce wet
oxidation of silicon samples or just the tank of O2 to produce dry oxidation growth on silicon. Just clean
silicon with no history of metal processing that has gone thru the pre-furnace clean bench in its entirety is
allowed in this tool. Cleanliness and no metal ion contamination are very important in this furnace for the
growth of gate oxides, which is why the sample restrictions and rules are so strict. Pre-furnace clean is
required of all samples and must be put in the furnace within one hour of being cleaned. Because the
furnace uses gas cylinders of H2 and O2 to produce the wet and dry oxidations, oxidation times are limited
to two hours for wet and four hours for dry oxidations.
Tool Safety:
1. If there is an emergency related to the tool the best thing to do is to press the Emergency Shut Off
(ESO) button. Located on the front and is a big red button. This button will immediately power down
the whole tool.
2. This tool has an interlock controlled by the CRESS system. This is to restrict use of the tool to only users
that have gone thru the training process for the tool and have access to it. The CRESS interlock for this
tool is the furnace cantilever will not come out when a recipe is started if the user is not logged into
the tool via CRESS.
3. Do not burn yourself. Hot glove must be worn on the hand opposite holding the furnace fork when
loading and unloading quartz boats. Cool time coming out of the furnace for samples and the quartz
boat is 2 minutes on the cantilever and 15 minutes once removed from the furnace cantilever and
placed on the quartz staging plate. Do not touch your sample or quartz boat with anything except the
furnace fork and quartz staging plate until these cool times have finished.
4. Do not load or unload quartz boats while the furnace cantilever is moving.
User Responsibilities:
1.
2.
3.
4.
5.
Filling out the run log after loading sample and when finished is required for this tool.
Clean up the area after you are done using the tool.
Check the materials allowed list. Samples must not have a metal processing history prior to this tool.
No tweezers with a metal tip.
Pre-furnace clean of sample is required and the sample must be put into the furnace within 1 hour of
completion of the pre-furnace clean.
6. Do not leave the lab until the furnace cantilever is back in the tube and moves onto the next step.
7. The user must be back within 2 hours of the furnace being done during staffed hours or once staff
hours start.
8. Only the designated quartz boats can be used in this furnace.
9. Do not have the furnace open any longer than it needs to be. Once the furnace is open be ready to
load your sample.
10. Wet oxidations must not exceed 2 hours and dry oxidations must not exceed 4 hours per user per day.
Operating Procedure:
1. The oxidation tube is the top tube on the Tystar furnace stack.
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2. The tube computer is the white flat screen instrument to the left of the furnace as shown on the title
page.
3. On the right side of the tube computer there are function buttons that you will need to use:
Abort
Please note the Abort
button, which you can
press if you believe
the furnace is acting
incorrectly.
Menu
Enter
Run
Alarm
Ack
Event
4. During furnace operation the tube computer should be in DISPLAY STATUS.
5. If at any time you see that your recipe is in step SHLD, contact staff. This is a special hold and requires
a staff person to step out of the program.
Login in to CRESS
1. Log into the CRESS computer.
2. Select the Tystar Oxidation system.
Check the Tube Status on the Tube Computer
1. Press MENU
2. On alpha keypad press: D – S for display status.
3. Press ENTER
4. View the screen and verify the status of the system.
 Mode: IDLE. If it is not IDLE, see a staff person.
 Step Name: IDLE. If it is not IDLE, see a staff person.
 Check ACTUAL tube temperature. ACTUAL temperature should equal SETPT temperature. If not,
see staff. In the idle state the temperature should be 750C.
 Check the bottom of the screen for any error messages.
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FNC: DS - Display process Status
MODE: IDLE
END: 00:00:00
SETPT ACTUAL
SIGNAL SETPT
TEMPL XXX.X
TEMPC XXX.X
Gas flows
TEMPS XXX.X
(recipe name)
STEP: IDLE
ST_TTG: 00.00.00
ACTUAL
SIGNAL SETPT
SIGNAL ACTUAL
YYY.Y
YYY.Y
Interlock signals
YYY.Y
Error message display
Load your Recipe
List of Recipes:
1. Press MENU
DRY1050.001
2. On alpha keypad press: R – L for recipe load.
WET950.001
3. Press ENTER
TLC.001 (staff only)
4. The display will now have a list of recipes available.
WET1050.001
5. Use the arrow keys to highlight (>) the recipe that you desire.
WET980.001
6. Press ENTER
DRY950.001
DRY900.001
7. Press ENTER (yes, you do it twice)
ANL900.001
8. WAIT for the recipe to upload to the tube computer.
ANL1000.001
9. The screen will now display the name of the oxidation step and a
time entry next to it.
a. Using the number pad and the decimal (.) key. Type in your oxidation time.
Wet Oxidation times are not to exceed 2hrs. and dry oxidation times are not to exceed 4hrs.
b. The oxidation time format should be six digits with decimal points:
Example: 01.30.50 means 1 hour, 30 minutes, and 50 seconds.
(NOTE: The decimal point between units, NOT a colon.)
c. Press ENTER to load the time.
FNC: RL - recipe load
Recipe upload
successful
IF – Go to Verification Phase
O Errors
Variable Parameter Phase
Step: XXX Steptime = (hh.mm.ss): _ _._ _._ _
Recipe load complete
10. The display will now read “recipe load complete”
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Use number pad
to key in time
Successful
time input
10/20/15
Running the Recipe
Troubleshooting Tip:
1. Press MENU
If the system remains in step STRT, you did
2. On alpha keypad press: D -- S
not log into CRESS. Once you log into CRESS,
3. Check that the recipe name on the screen is the one
the recipe will proceed.
that you want.
4. Press RUN
5. The recipe will now start running and the display will now have the step name STRT.
6. The END: 00.00.00 will have the approximate duration of the recipe.
Loading Your Sample(s)
1. Once the recipe has started the system will pull the boat out of the
tube.
2. WAIT until you hear the SONIC alarm telling you that the boat is fully
out of the tube.
3. The tube computer display STEP: LDWF.
4. Press ALARM ACK to turn off the alarm.
5. Ensure that the sample-loading table is clear for working
with the quartz boat. Only place quartz boats on the
quartz plate.
6. Select the correct size boat for your samples. All boats are
located on the wire shelving unit. Do not use boats that
are not designated for this process tube.
7. Load you sample(s) into the boat using the vacuum wand
or polymer tipped tweezers. Face the front of wafer(s) –
flat on top – towards the left, which will be the door of the
tube. For small sample pieces place them face up in the
opaque quartz small sample boat in the 3 inch wafer quartz boat.
8. Pick up the boat with the quartz fork and place it on the cantilever in the center with the wafer fronts
still facing left or away from the tube.
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9. Once quartz boat is on the cantilever, press EVENT.
10. The boat will now go into the tube and the oxidation recipe will run.
11. Note the amount of recipe time remaining END: 00.00.00; the system will be ready for you to unload
your wafers when there is about 11 minutes left in the recipe.
12. Once the furnace is fully closed and moves onto the next step you may leave the lab until your
sample(s) are ready to be unloaded. Fill out the first portion of the run log so staff and other users
know who is using the tube.
Unloading Your Sample(s)
1. Check that the sonic alarm is making a noise and the tube computer says that it is
step HLD1.
2. Press ALARM ACK to turn off the alarm. Note: Someone could of done this
already if the alarm was bothering them.
3. Press EVENT. The cantilever will now pull out of the tube.
4. Press ALARM ACK to turn off the alarm at the end of the pull.
5. Ensure that the sample-loading table is clear for working with the quartz boat.
6. Using the quartz fork, pick up the boat from the cantilever and place it on the
quartz plate on the sample-loading table.
7. Press EVENT to return the cantilever to the furnace.
8. Let the boat cool for 15 minutes.
9. Unload your samples using the vacuum wand or polymer tipped
tweezers.
10. Once cool, store the boat on the wire shelving designated for this tube.
System Idle
1. Wait until the cantilever is in the furnace and the recipe completes.
2. The tube computer should display that the status of the system is in idle. The Step Name should be
IDLE.
3. After the step name is IDLE, you may go to CRESS and logout of the Tystar Oxidation system.
Reference the oxidation curves or the online thermal oxide
growth calculator to determine the oxidation time needed
for your process.
Troubleshooting:
1. If you need to abort your furnace run for some reason after you start the run press the ABORT button.
The system will go into a 15 minute abort countdown and when finished will go to its idle state and
cool the rest of the way to its idle temperature of 750C. Once the abort process is complete you will
have to find a staff member to help get your sample out of the furnace.
2. If the recipe goes into a hold (HLD) for no reason during your process try hitting the run button to get
the recipe to resume. If that does not work follow the abort process in troubleshooting #1.
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Appendix:
Recipe Lists
Idle Temperature = 750C
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Example Wet Ox
STEP
STRT
BOUT
LDWF
HLDL
BTIN
STB1
RMPU
STB2
DRYO
WETO
DRYP
ANEL
RMPD
HLD1
BTOT
ULWF
HLDU
BIN2
ENDP
COMMENT
1ST Step & CRESS login
Boat OUT
Load Wafers
Hold to load
Boat IN
TEMP=750
Ramp Up TEMP
Stabilize Temp
Dry Oxidation
Wet Oxidation
Post Dry Oxidation
Anneal 5% O2
Ramp Down TEMP
Hold for Unload
Boat OUT
Unload Wafers
Hold to unload
Boat In
End Process
TIME
00.00.10
00.15.00
00.01.00
00.00.00
00.10.00
00.20.00
XX.XX.XX
00.02.00
00.15.00
YOUR TIME (<2hrs)
00.30.00
00.15.00
YY.YY.YY
HOLD
00.10.00
00.01.00
00.00.00
00.10.00
00.00.10
Example Dry Ox
STEP
STRT
BOUT
LDWF
HLDL
BTIN
STB1
RMPU
STB2
DRYO
ANEL
RMPD
HLD1
BTOT
ULWF
HLDU
BIN2
ENDP
COMMENT
1ST Step & CRESS login
Boat OUT
Load Wafers
Hold to load
Boat IN
TEMP=750
Ramp Up TEMP
Stabilize Temp
Dry Oxidation
Anneal 5% O2
Ramp Down TEMP
Hold for Unload
Boat OUT
Unload Wafers
Hold to unload
Boat In
End Process
TIME
00.00.10
00.15.00
00.01.00
00.00.00
00.10.00
00.20.00
XX.XX.XX
00.02.00
YOUR TIME (<4hrs)
00.15.00
YY.YY.YY
HOLD
00.10.00
00.45.00
00.00.00
00.10.00
00.00.10
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10/20/15
Silicon Dioxide Color Chart
Oxide Thickness COLOR
[Å]
500
750
1000
1250
1500
1750
2000
2250
2500
2750
3000
3100
3250
3450
3500
3650
3750
3900
4120
4260
4430
4650
4760
4800
4930
5020
5200
5400
5600
5740
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COLOR
CODE
D2B48C
A52A2A
B32F79
2E73F3
ADD8E6
D9ECB3
F9F9C8
DAA520
F6853D
B32F79
5D3694
0000FF
0083AE
00FF00
84D82E
84C82E
E2DE2B
FFFF00
FFB500
FA7FC1
E82362
B32F79
EE82EE
5D3694
0000FF
008080
008846
9ACD32
ADFF2F
FFFFD2
5850
6000
6300
6800
FFDE93
FA7FC1
EE82EE
7200
7700
8000
8200
8500
8600
8700
8900
9200
9500
9700
9900
10000
10200
10500
10600
10700
11000
11100
11200
00A080
FFFF8C
FFA500
FA8072
B32F79
EE82EE
5D3694
0000FF
0083AE
84C82E
FFFF00
F3770C
FA7FC1
E82362
B32F79
EE82EE
5D3694
008846
84C82E
008846
AE82FF
Color and Comments
Tan
Brown
Dark Violet to red violet
Royal blue
Light blue to metallic blue
Metallic to very light yellow-green
Light gold or yellow slightly metallic
Gold with slight yellow-orange
Orange to Melon
Red-Violet
Blue to violet-blue
Blue
Blue to blue-green
Light green
Green to yellow-green
Yellow-green
Green-yellow
Yellow.
Light orange
Carnation pink
Violet-red
Red-violet
Violet
Blue Violet
Blue
Blue-green
Green (Broad)
Yellow-green
Green-yellow
Yellow to Yellowish (not yellow but is in the position where yellow is to be
expected. At times is appears to be light creamy gray or metallic)
Light orange or yellow to pink borderline
Carnation pink
Violet-red
Bluish (Not blue but borderline between violet and blue-green. It appears more
like a Mixture between violet-red and blue-green and over-all looks grayish)
Blue-green to green (quite broad)
Yellowish
Orange (rather broad for orange)
Salmon
Dull, light red-violet
Violet
Blue-violet
Blue
Blue-green
Dull yellow-green
Yellow to Yellowish
Orange
Carnation Pink
Violet-red
Red-violet
Violet
Blue-violet
Green
Yellow-green
Green
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11800
11900
12100
12400
12500
12800
13200
14000
14500
14500
15000
15100
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EE82EE
B32F79
E82362
FA7FA1
FFA500
FFFF00
47B0E3
FFA500
EE82EE
5D3694
0000FF
84C82E
Violet
Red-violet
Violet-red
Carnation Pink-Salmon
Orange
Yellowish
Sky blue to green-blue
Orange
Violet
Blue-violet
Blue
Dull Yellow-green
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10/20/15
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