Subject Group of Mechanical and Intelligent System Engineering
27215
Plasma Material Engineering
Summer
Description and rationale: Plasma is typically an ionized gas, and is usually considered to be a distinct state
of matter in contrast to gases because of its unique properties. Plasma interaction with material devices is of
importance for a material design in the field of plasma related engineering. The study course aims to learn the
basis of such plasma-material interaction, physics & chemistry for plasma material engineering. Students will
learn the background of various analyzing techniques for plasma-material interaction.
Keywords: Plasma-material interaction, plasma material physics & chemistry, nuclear materials include fusion
materials, plasma surface interaction and its characterization, plasma processing
Pre-requisite: undergraduate physics, mathematics and electromagnetism
Expected students: master and doctoral
Instructors:
Lecture 1:
Prof. Seiichi WATANABE (sw004@eng.hokudai.ac.jp)
Lecture 2:
Assoc. Prof. Yuji YAMAUCHI (yamauchi@qe.eng.hokudai.ac.jp)
Lecture 3:
Assoc. Prof. Tamaki SHIBAYAMA (shiba@qe.eng.hokudai.ac.jp)
Course outline:
The course is divided into 3 sections; the first concerns key features of plasma- materials interaction while the
second and the third deal with plasma application in fusion device and plasma processing.
Lecture 1:
Lecture 2 :
Lecture 3:
Course introduction (1)
Introduction to plasma material engineering (2)
Material Characterization for plasma-material interaction (2)
Introduction to plasma-surface interaction in fusion devices (2)
Particle control in fusion devices (1)
Plasma processing (2)
Introduction to fusion and fission materials (1)
Plasma diagnostics material (2)
Application of plasma processing to electronic devices (2)
Grading:
20%: Class participation
30%: Assignments (a few assignments will be required during the term)
50%: Final report
Textbooks and references:
1) Handout made by the course instructors will be delivered.
2) References are shown below.
*Principles of plasma physics: N. A. Krall and A.W. Trivelpiece, San Francisco Press, Inc.
*Glow discharge processes (sputtering and plasma etching): B. Chapman, New York: Wiley.
Materials Science and Technology, Nuclear Materials, R. W. Cahn et.al., VCH, ISBN 3-527-29236-5.
Physical processes of the interaction of fusion plasmas with solids: Edited by W.O. Hofer and J. Roth,
Academic Press.
*available at the library
8/2008