Process flow for the fabrication of …
Purpose
This document will serve as a run card for the fabrication of …
Revision log
Rev #
1
Wafer data
# of wafer
Wafer IDs
Start Date
End Date
Date
Author
Comments
Step
Machine
Process
Comments
Name of Step
Which machines are needed
Process parameters
Done date
Step
Machine
Process
Comments
Name of Step
Which machines are needed
Process parameters
Done date
Step
Machine
Process
Comments
Name of Step
Which machines are needed
Process parameters
Done date
Step
Machine
Process
Comments
Name of Step
Which machines are needed
Process parameters
Done date
Step
Machine
Process
Comments
Name of Step
Which machines are needed
Process parameters
Done date
Step
Machine
Process
Comments
Done date
Name of Step
Which machines are needed
Process parameters