SUPPLEMENTAL MATERIAL FOR: The role of insulator charging in transport across ultra-thin metalinsulator-semiconductor junctions By Ayelet Vilan. Department of Materials and Interfaces, Weizmann Institute of Science, POB 26, Rehovot, 76100, Israel. I. Details of numerical simulation The numerical simulation follows closely the method proposed by Tarr et al. (Ref. 11 of main text). This procedure defines two unknown variables: 𝐵𝐵, the band-bending in the semiconductor, and 𝑄𝐹, the position of the quasi-Fermi level of minority carriers with respect to the bulk Fermi level (see Figure 1 of main text). At each applied bias, these parameters are computed by solving two equations: Charge neutrality (i.e., Equation 2 of main text) and Continuity of current by minority carriers. The second balance means that tunneling of minority carriers across the insulator equals the supply of minority carriers by the semiconductor by mechanism of diffusion and generationrecombination. After the 𝐵𝐵 and 𝑄𝐹 are known the net-current is computed as the sum of electrons and holes currents, using Equation 1 of main text. The net bias is the sum of change in 𝐵𝐵 and Ψ (Equation 4 of main text) rather than an independent parameter. This yields a varying spacing in 𝑉, which can be latter smoothed by spline interpolation. Setting 𝑉 as an output of the computation rather than an input parameter, fasten the computation, because the more influential parameter in each regime is fixed. Thus for depletion and inversion regimes, the 𝐵𝐵 is taken as an independent fixed parameter while Ψ and 𝑄𝐹 are computed by iteratively nulling the charge balance minority current balance. For accumulation regime, the order is inversed, and Ψ is taken as the arbitrary input parameter and 𝐵𝐵 and 𝑄𝐹 are computed numerically. Initially, the 1 transition between the two sub-regimes is found by computing the flat-band potential form the interface energy alignment. The following Table SI list the parameters used in the simulations. TABLE SI. List of materials constants used in the simulation Insulator Silicon parameters Property Value Units Permittivity 3.5 ε0 Effective massa) 0.4 me Barrier Height electronsb) 2.4 eV Barrier Height holesb) 3.6 eV Area 1 cm2 Type n Doping level of Si Energy of dopants from gap edge temperature 1.00E+15 cm-3 0.05 eV 298 K Forbidden energy gap 1.12 eV, @RT Nc 2.80E+19 cm-3 , @RT Nv 2.65E+19 cm-3 , @RT Permittivity 11.7 ε0 Richardson 120.1735 A∙cm-2K-2 effective mass holes 0.65 me effective mass electrons 0.37 me electrons' lifetime 10 seconds electrons' mobility 1450 cm2∙V-1sec-1 holes' lifetime 10 seconds hole' mobility 500 cm2∙V-1sec-1 a) This empirical factor is added to adjust the computed tunneling decay length (β) to experimentally known values (β∼1Å-1); b) Based on Ref. 16. 2 II. Derivation of Cheung-Werner method for a general potential drop in series to a diode Here I briefly reproduce the mathematical derivation of Eq. 10 of main text following Ref. 27. Starting from a generic diode equation describing the current density, 𝐽, as a function of the applied bias, 𝑉, and including a potential drop, 𝑈𝑆 , in series to the diode: V−U J = J0 ∙ [exp ( nkTS) − 1] (S1 Notice that the parameters 𝐽0 and 𝑛 could get different interpretations depending on the details of the diode. Differentiating Eq. S1 with respect to bias yields: dJ V−US dV = J0 ∙ exp ( nkT )∙ 1−US ′ nkT = J+J0 nkT (1 − dUS dJ ∙ dJ dV ) (S2 The second equality uses Eq. S1 and further differentiates 𝑈𝑆 with respect to current instead of voltage. Collecting arguments and neglecting 𝐽0 ≪ 𝐽, gives: dJ 1 = dV ∙ [ nkT J + dUS dJ ] (S3 𝑑𝑉 𝑑𝑉 Finally multiplying both sides by the inversed derivative, 𝐽 ∙ 𝑑𝐽 ≡ 𝑑 ln 𝐽, yields: dV = nkT + J ∙ d ln J dUS (S4 dJ Eq. S4 is identical to Eq. 10 of main text, and it is strait forward to show that expressing it in terms of current (𝐼, as in Eq. 10) or current density (𝐽, as in Eqs. S1-S4) does not matter as long as all terms are consistent. III. Computing the insulator charging coefficient Eq. 8b of main text: d 2ε kNC R ins = ε D √ πAsc∗ε i 0T ∙ eβd⁄2 (8b, main text Plunging physical constants: d[Å] R ins = ε D[μm] 10−4 [ i μm Å 2∙1.38∙10−23 [J⁄K] εsc NC [cm−3 ] βd⁄2 e T[K] ] √π∙110[A⁄K2 cm2 ]∙8.85∙10−14 [F/cm] ∙ √ (S5 The following term is for any semiconductor, where the insulator thickness, 𝑑 is in Å, the contact diameter, 𝐷 is in μm, the dielectric constants, 𝜀𝑖 , 𝜀𝑠𝑐 are dimensionless and the density of states in the conduction band, 𝑁𝐶 is in cm-3: d εsc NC i T R ins = 0.95 ∙ 10−10 ∙ ε D eβd⁄2 ∙ √ ∙ [√J⁄AF] (S6 3 Finally, the following silicon-specific parameters (see Ref. 25 and §) are substituted into Equation S6: 𝑁𝐶,𝑆𝑖 = 6.2 · 1015 · T1.5 [𝑐𝑚−3 ] 𝜀𝑠𝑖 = 11.7; or: 𝑁𝐶,𝑆𝑖,𝑅𝑇 = 2.8 ∙ 1019 [𝑐𝑚−3 ] d R ins |Si = 0.0256 ∙ T 0.25 ∙ ε D ∙ eβd⁄2 (S7a i and at room temperature: d R ins |Si = 10∙ε D ∙ eβd⁄2 (S7b i Using 𝑅𝑖𝑛𝑠 = 𝑝0 ⁄𝐷, 𝑝0 is extracted by fitting 𝑅𝑖𝑛𝑠 to 1⁄𝐷 , and can be further used to extract the tunneling decay coefficient, 𝛽: d p0 = 10∙ε ∙ eβd⁄2 (S8) i Which explain the factor ‘10’ in Eq. 13b. IV. Additional data for Me-Sty and C16 Original diode curves for Pb/C16-Si(111) Current Density [Acm-2] A. 1 0.1 0.01 3 m 10 m 30 m 100 m 1E-3 1E-4 1E-5 1E-6 -0.5 0.0 0.5 1.0 Bias to Pb [V] § http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Si 4 FIGURE S1: Diode curves for of the C16 alkyl-chain tMIS, showing the current density against applied bias on a semi-log plot. The data is generally highly reproducible (cf. Fig. 3 of main text for Me-Sty), except for the smallest diameter on reverse bias where perimeter shunt increases the current. A slight deviation from area scaling starts appearing toward 1V but it is much weaker than for Me-Sty. The figure shows averaged curves, using the same data set used to compute Figure 5b of main text. FIGURE S2: The ideality factor extracted from the constant parameter (“intercept”) of the parabolic fit (Eq. 12, main text) of inversed derivative against square root of the current (Fig. 5 of main text), for tMIS with a) Me-Sty (data of Fig. 5a) and b) C16 (data of Fig. 5b). The diameter (Xaxis) is shown on a log-scale for clarity. As can be seen, except for the two exceptionally large diameters of Me-Sty, the extracted ideality factor values are independent of the diameter as predicted by the model. This is in a marked difference to the reciprocal dependence on diameter of the linear coefficient of the fit (𝑅𝑖𝑛𝑠 ), shown in Fig. 5c,d of main text. Ideality Factor, n Extracted Ideality factors 1.5 1.0 Me-Styrene 0.5 a 1 10 100 1,000 10,000 Contact Diameter [m] Ideality Factor, n B. 2.5 2.0 1.5 1.0 C16 alkyl b 3 10 30 100 Contact Diameter [m] 5 Extracted parabolic coefficients for Me-Sty FIGURE S3: An apparent ‘series resistance’ factor extracted from fitting the inversed derivative of Me-Sty to √𝐼 . The figure plots of the coefficient multiplying 𝑥 2 = 𝐼 (see Eq. 12 of main text) against the contact diameter, on a log-log scale. Dots are fitting-extracted coefficients and line is a fit to a reciprocal relation: 𝑅𝑆 = 23.6𝑘Ω⁄𝐷. Square Parameter, RS [] C. 1000 100 10 1 10 100 1,000 Contact Diameter [m] D. Inversed derivative plots for C16 as a function of temperature Inverse Derivative [V] FIGURE S4: Inversed derivative plots for Pb/C16-Si(111) tMIS with a 0.25 diameter of 100 μm for varying 300K 273K temperatures. Symbols are raw data 0.20 250 K of typical curves (not averaged) and 230 K lines are linear fits. The parameters 200 K 0.15 extracted from these fits are shown in Fig. 6 of main text. The inset is a 0.10 blown-up of the near 0 region, showing that the variation in the 0.05 0.05 intercept (reported in Fig. 6a of main text) are directly observable and not a 0.0m 0.2m 0.4m 0.6m 0.8m 1.0m 0.00 fitting artefact. As the temperature 0 1m 2m 3m 4m 5m 6m reduces, the behavior becomes less sqrt(Current) [A0.5] linear. However, increasing the order of the fit to a parabola, as done for Me-Sty (Fig. 5a) is physically unrealistic because it would yield a negative ‘series resistance’, because the curves bend downward. This is another indication that the explanation of the inversed derivative (Eq. 12) should be further refined to reveal a more accurate explanation for deviation from linearity. 6 FIGURE S5: Inversed derivative analysis for tMIS made of Hg/Cn-Si(111) showing a) averaged current-voltage curves; b) inversed derivative against square-root of the current; and c) Polynomial coefficients plotted against the molecular length. Data in (a) is taken from Ref. 33 and was numerically differentiated to yield the symbols shown in (b). Lines in (b) are fits to a thirdorder polynomial: 𝑑𝑉 𝑑 ln 𝐽 = 𝑝0 + 𝑝1 𝑥 + 𝑝2 𝑥 2 + 𝑝3 𝑥 3 , Current Density [Acm-2] INVERSED DERIVATIVE PLOTS FOR VARYING LENGTH ALKYL CHAINS Inversed Derivative [V] V. 1 0.1 0.01 1E-3 1E-4 1E-5 1E-6 1E-7 1E-8 0.0 C12 C14 C16 C18 a 0.2 0.4 0.6 0.8 1.0 Bias to Hg [V] 0.4 0.3 0.2 C12 C14 C16 C18 Polynomial Coefficients where 𝑝0 , 𝑝1 , 𝑝2 & 𝑝3 are the 0.1 constant (intercept), linear, square and cubic parameters, 0.0 0.2 0.4 0.6 0.5 respectively. These are the sqrt(current) [A ] coefficients shown in (c) except 1000 for 𝑝0 because it didn’t vary Linear 100 much between the different Square Cubic curves, as expected (𝑝0 = 𝑛𝑘𝑇) 10 with extracted 𝑝0 values yielding 1 𝑛 = 1.4 𝑡𝑜 2.2. The log-scaled 0.1 Y-axis in (c) reveals that all parabolic coefficients were 0.01 length-dependent and especially 12 13 14 15 16 17 18 the highest one, 𝑝3 has a clear Number of Carbons exponential dependence. This is a clear indication that these higher coefficients originate in the insulator (of varying thickness) and not due to an external resistance of the system (thickness independent). b c 7