Effect of silver doping on spray pyrolysed Indium Sulfide thin films Mahdi H. Suhail1, Souad G. Kaleel 2 & Faten M.Yasser 2 1 2 Dept. of Physics, College of Science, Univ. of Baghdad-Iraq Dept. of Physics, College of Science for women, Univ. of Baghdad-Iraq E Mail:mhsuhail@yahoo.com, mhsuhail956@gmail.com Abstract: In this research, Ag-doped In2S3 thin films were prepared by chemical spray pyrolysis technique, using mixing Indium chloride (InCl3) and thiourea CS(NH2)2, on glass substrates preheated at (350°C) with spray rate 5sec / min , with different doping (3%,6%,9%,12%,15%) .These films are characterized by structural, optical and electrical measurement techniques. The investigation of (XRD) indicates that the (In2S3) films are polycrystalline type of (tetragonal), the effect of increasing the doping was clear in the crystalline structure of the films by appearance new peak relate to (103,121,110,111,112,123,) and (120) planes for Ag with Monoclinic phase. The optical properties such as transmittance spectra of In2S3 film were collected between 300 to 1100nm wavelength. The optical energy gap (Eg)and the optical constants, which involve refractive index (n), extinction coefficient (k), real dielectric constant (r) and imaginary dielectric constant (i) have been studied. Key words: In2S3thin film, chemical spray pyrolysis, structural, optical properties. 1. Introduction The substitution of cadmium sulfide (CdS) buffer layer by alternative materials is among the challenges faced by the researchers working on Cu (In, Ga) (S, Se)2 thin films based solar cells since the end of 1990s. Due to environmental hazards connected with production and disposal of CdS layers, much attention has been focused on the development of other buffer layers. One such possible substitute for CdS is Indium sulfide (In2S3). In2S3 exhibits different polymorphic structures such as α, β and γ depending on the processing parameters. β-In2S3 phase is found to be the stable crystalline phase of indium sulfide at room temperature with tetragonal structure [1-8]. Indium sulfide (In2S3) is an important material for optoelectronic and photovoltaic applications and is a promising candidate for many technological applications due to its stability, wider band gap and photoconductive behavior. It can be used as an effective nontoxic substitute for cadmium sulfide (CdS) in Cu (In,Ga)Se2 based solar cells. This material not only eliminates toxic cadmium but also improve light transmission in the blue wavelength region on having band gap wider than that of CdS [9-11]. In2S3 is a III–VI compound originating from the II–VI semiconductor by replacing group II metals by group III elements and exists in three crystallographic modifications α, β and γ with β -In2S3 being the stable state with a tetragonal structure at room temperature[12, 13]. In this phase, it crystallizes in defect spinel structure with a high degree of disorder and high degree of vacancies, ordering at tetrahedral cation sites [14]. Due to its high defect structure, β -In2S3 is an n-type semiconductor with a direct band gap of 1.98 eV finds many applications in different fields. However, a small fraction of indium atoms may leave their ordered positions and occupy crystallographically ordered vacancies. This results in a number of quasi-interstitial cations and an equal number of cation vacancies, so that in a stoichiometric crystal of β -In2S3, a considerable degree of disorder is always present [15]. The optical properties of thin films are very important for many applications, (such as in solar cells, optical detectors, and optoelectronic devices, due to high stability [16]), as well as optoelectronics, integrated optics, solar power engineering, microelectronics, optical sensor technology and high absorption coefficient [17]. The optical properties of the indium sulfide films vary between the various studies. The band gap values reported in the literature extend from 2.0 eV up to 3.7 eV. It should be noted that values of the band gap were determined assuming a direct allowed transition. Contrary to this assumption, an indirect band gap was assumed by Rahman and Podder [18] as well as Allsop et al [19] for the ILGAR process. The aim of the present study is to discuss the possibility of preparing a thin film of indium sulfate using Chemical Spray Pyrolysis Method with ratio (1.2 :8) and Study the Structural, Electrical and Optical properties of In2S3 films doped with Ag and see the effect of doping on those properties. 2. Experiential Details: The preparation of In2S3 thin films glass slide was carried out using chemical spray pyrolysis technique , the glass substrates (7.6 x2.6 x0.1)cm were previously cleaned in water with detergent , then immersed in ethanol to remove any oil , last rinsed with distilled water and dried in air. The precursor solution prepared by dissolving a certain amount (0.1 M) of mixing Indium chloride (InCl3) and thiourea CS(NH2)2 as an starting materials, (molecular weight of the InCl3 = 221.1761 g/mol, molecular weight for CS (NH2)2 = 76.12 g/mol) in 100 ml of distilled water and increase clarity of the solution. The glass substrate was kept at a temperature of (350°C). The spray rate of (5 s /min) was maintained using carrier gas is nitrogen compressor regulator (3bar), the distance between spray nozzle and substrates was fixed at (30 ±1 cm). The deposition process was repeated several times and reproducibility of the results until we get the required thickness. After deposition process was completed, the films were kept on the heater at deposition temperature for 30 min in order to provide sufficient time and temperature for recrystallization. The In2S3 formulation can be represented as: 2InCl3 + 3 Cs (NH2)2 + 6 H2O In2S3 + 3 CO2 + 6NH4Cl The ratio of the compounds in the solution was varied to change the atomic ratio of In and S in the resulting films. In the present studies the ratio of InCl3 & (CS (NH2)2) was selected to be (1.2:8) and doping with Ag with (3%, 6%, 9%, 12%, 15%). XRD instrument is (Shimadzu 6000) type with the following specifications are target is CuKα radiation with wavelength, λ=1.54056A°. The average grain size of thin film samples were calculated by using the Scherrer's equation [20] . D= 0.9 𝜆 … … … … … … … … … … … … … … (1) 𝛽 cos 𝜃 where: λ 𝑖s the X-ray wavelength (1.5406Å), 𝛽 is the full width at half maximum (FWHM) in radian and 𝜃 Bragg ′ s angle. The In2S3 thin film is a tetragonal structure and the lattice parameter 'a' can be evaluated from the relation [21]: 1 𝑑2 = [ ℎ2 + 𝑘 2 𝑎2 ]+ 𝑙2 𝑐2 … … … … … … … … … … …(2) where: 𝑑 is the interplaner distance , ℎ𝑘𝑙 ∶ miller indices ,𝑎 & 𝑐 𝑖𝑠 lattice constants. To study the morphological characteristics and surface roughness of In2S3: Ag thin films, surface morphology photographs were recorded by using (CSPM AA3000 AFM ) supplied by Angstrom Company . The spectral transmittance and absorbance of the films were measured by (UV-160A) UV-Visible recording Spectrophotometer, Japanese company UV/VIS spectrophotometer in the range (300-1100) nm. In order to determine the optical band gap of the semiconductor, the following dependence of the absorption coefficient 'α' on the photon energy equation is used, for direct transitions: αhν = A (αhν – Eg) r …………………………(3) Where, ν is the frequency of the incident photon, h is Planck's constant, A is constant, Eg is optical energy gap and r is the number which characterizes the optical processes. 3. Results and Discussions: 3-1- structural properties: Figure 1 represents the X-ray diffraction of the In2S3 thin film at (350°C). It reveals from the pattern the film is a polycrystalline and the film has a tetragonal structure according to ASTM card. Fig. (1): X-ray diffraction pattern for pure In2S3 film deposited by spray paralysis at substrate temperature at Ts= (350 ºC). The results compared with ASTM card were in a good agreement as shown in table 1. Table (1) lists the observed the d-values with standard (JCPDS-ICDD file NO, 96-400-0814 for In2S3. Table (1) X-ray diffraction pattern data with standard card for pure In2S3 film. FWHM dhkl Exp G.S dhkl Std 2θ (Deg.) hkl phase card No. (Deg.) (Å) (Å) (Å) 27.40 0.60 3.252 128 3.2497 (213) Tet. In2S3 96-400-0814 33.31 0.64 2.688 122 2.6943 (220) Tet. In2S3 96-400-0814 43.62 0.70 2.073 115 2.0741 (323) Tet. In2S3 96-400-0814 47.75 0.76 1.903 108 1.9060 (22 12) Tet. In2S3 96-400-0814 59.39 0.70 1.555 123 1.5560 (04 12) Tet. In2S3 96-400-0814 The XRD patterns of the as deposited In2S3: Ag films on glass at substrate temperature equal to 350°C with thickness equal to 0.333 m, for different doping (3%, 6%, 9%, 12%, and 15%) are illustrated in Figure 3. From XRD studies (Figure 2, the effect of increasing the doping was clear in the crystalline structure of the films by appearance new peak relate to (103, 121, 110, 111, 112, 123,) and (120) planes for Ag with Monoclinic phase. It was also clear that after diffusion of silver the peak positions shifted slightly to lower values of 2θ. Correspondingly, value of lattice spacing (d) increased, (Table 2). Fig. (2 X-ray diffraction pattern for In2S3 film doped with different Ag content (a=3%, b=6%, c=9%, d=12%, e=15%) deposited by spray paralysis. The d-values of all samples coincided with that of β-In2S3 in standard JCPDS data card (96-900-0254). For silver doped samples, it was very clear that the Bragg peaks in XRD pattern became more intense, indicating a clear improvement in crystallinity. The observed d-values with standard (JCPDS-ICDD file NO, 96-400-0814, and 96-900-0245) for In2S3 compound. The observed of the d-values for In2S3: Ag for different doping (3%, 6%, 9%, 12%, and 15%) is in agreement with the standard values for the tetragonal structure. Grain size calculated using Debye Scherrer formula, the Grain size for (213) plane is (256.8, 428) increases with doping with (3%,6%) and for doping with (9%,12%,15%) the Grain size (427.9,233.3,307.7)decreases with increases doping, Our result are nearly in agreement with Meril Mathew[22]. The XRD pattern shows the appearance of new preferred plane for crystal growth localized at 2θ =29.10, 29.21, 28.99, 29.05o,corresponding to (111) for Ag2S which affirm that addition of Ag to the In2S3 binary system has been done successfully where (Ag) atom become bounded with it[23,24]. Generally from the XRD spectrum, the Full-width at the half maximum (FWHM) of the diffraction peak is smaller, the grain size of thin film was larger and the quality of the film was better. It proved that the crystalline quality of In2S3 thin film obtained in experiment was better. 3.2. Morphological properties of pure (In2S3) and (In2S3: Ag thin films The grain size (grain diameter) and average roughness and root mean square roughness (RMS) of pure In2S3 and In2S3:Ag thin films for different doping (3%,6%,9%,12%,15%) deposited on glass substrates with substrate temperature(350°C) and thickness(0.333) µm have been measured using AFM Figure 4 and the results listed in table 3. pure a b c d e Fig. (4 ): AFM image for pure(In2S3), )and ( In2S3:Ag ) thin films at(0.333µm) with difference doping(a=3%, b=6%, c=9% , d=12% , e=15%). Table (3) show the value of average roughness and root mean square roughness (RMS) and average grain size for In2S3: Ag. Table (3) the value of average roughness, RMS and average grain size for In2S3:Ag Doping Ag % average roughness (nm) RMS (nm) average grain size (nm) 3% 0.849 1.02 - 6% 1.15 1.37 - 9% 3.06 3.73 104.41 12% 0.825 1.04 61.53 15% 0.445 0.559 98.32 It is observed from this table that the average roughness and root mean square roughness value increasing with increase the doping for doped with Ag (3%,6%,9%). While the average roughness for films doped with Ag (12%, 15%) decreasing with increase doping. On the other hand from the same table the average of grain size decreases with increasing of doping, i.e this decrease but in non systematic sequence with the increase of Ag content, this behavior can be explained on the basis that addition of Ag to In2S3 binary system reduces the local structure since it leads to some degree of disordering [Revathi et al 2008 [21] and Mathew et al 2010 [22] ]. 3-3- Optical Properties: In2S3 thin films were successfully deposited on glass substrate using chemical spray deposition technique with thickness 250 nm. The films are firmly adhered to the substrates. 3.3.1. The Transmittance Spectra of doped In2S3 thin Films The transmittance spectrum of as-deposited In2S3: Ag thin films, where doping equal to (3%, 6%, 9%, 12%, 15%), are shown in figure 4. 100 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% Transmittance% 80 60 40 20 0 300 400 500 600 700 λ (nm) 800 900 1000 1100 Fig. (4) The transmittance spectra for (In2S3:Ag) at Ts=350°C. From figure (4), it can be seen that all In2S3 films deposited at different doping having a high transparency in visible region, while the transparency in UV region was very low. All spectrums reveal very pronounced interference effects for photon energies below the fundamental absorption edge by exhibiting an interference pattern. Such behavior of the spectrum is evidence of the thickness uniformity of the films. We notice also that the transmittance decreases but not uniform with increasing of doping and shifted to longer wavelengths. This may be attributed to the creation levels at the energy band by increasing doping. It is observed that maximum transmittance at (3%) doping for wavelength range (300-900 nm) i.e. at visible region which is very suitable for solar cell. However, transmittance is inversely proportional with doping, i.e., it decreases when doping increases, transmittance decreases slightly with the increasing of film doping. This behavior is attributed to the increase the number of atoms with the doping that leads to the increase of the number of collision between incident atoms, which in turn, leads to the increase of absorbance and decreasing transmittance. 3.3.2 Absorbance spectrum: The absorbance spectrums of as-deposited In2S3: Ag thin films, for doping equal to (3%, 6%, 9%, 12%, 15%), are shown in figure 5. 4 Ag= 3% 3.5 Ag= 6% Absorbance 3 Ag= 9% 2.5 Ag=12% 2 Ag=15% 1.5 1 0.5 0 300 400 500 600 700 λ (nm) 800 900 1000 1100 Fig. (5) The absorbance spectra for In2S3:Ag at Ts=350°C. It is clear that as the Ag doping increases the absorbance of thin films increases. This increase in the absorbance is attributed to the increase of Ag concentration (Sulfur vacancies increase) which leads to the increase of the depth of donor levels, which had been deduced from the electrical measurements, as will be discussed later. These donor levels are associated with these vacancies and will be available for the photons to be absorbed. Therefore the absorbance will increase with the increase in Ag concentration .As well as from the same figure, it can be seen that the absorption edge shifts to the higher wavelengths. From this shifting in the absorption edge to the red region it can be deduced that the energy gap of In2S3: Ag thin films will decrease with the increase in (Ag) as will be discussed later. 3.3.3 Absorption Coefficient: α (cm-1)x 100000 The absorption coefficient () was determined from the region of high absorption at the fundamental absorption edge of the film. The variation of the absorption coefficient of (In2S3: Ag) thin films with the wavelength for doping equal to (3%, 6%, 9%, 12%, 15%) is shown in figure 6. 4 3.5 3 2.5 2 1.5 1 0.5 0 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% 300 400 500 600 700 800 λ (nm) 900 1000 1100 Fig. (6) The absorption coefficient spectra for (In2S3:Ag) at Ts=350°C. We can notice that in general decreases with increasing of wavelength, () has the same behavior of the absorbance and in order of (104) cm-1 which supports the direct band gap nature of the semiconductor. It is also clear that the absorption coefficient of thin films increases with the increase in Ag concentration. The higher values of the absorption is attributed that the incoming photons have the sufficient energy to excite the electrons from the valence band to the conduction band .The absorption decreases in the higher wavelength region and this decrease is corresponds to the reduction in the photon’s energy 3.3.4. Extinction coefficient: Figure 7 illustrates the variation of the extinction coefficient of In2S3: Ag thin films with the wavelength for doping equal to (3%, 6%, 9%, 12% & 15%). It can be noted that (k) varies with the increase in the wavelength corresponding to the reduction in the photon’s energy. The increases highly at the absorption edge region. This increase is attributed to the increase of the absorption coefficient due to the direct electronic transitions . Later (k) reaches its maximum value at the high absorption region corresponding to the increment in the photon’s energy and the increase in the absorption coefficient with the decrease in the wavelength. 0.8 0.7 0.6 0.5 k 0.4 0.3 0.2 0.1 0 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% 300 400 500 600 700 800 λ (nm) 900 1000 1100 Fig.(7): Extinction coefficient as a function of wavelength for In2S3:Ag thin films . 3.3.5. Refractive Index: It is necessary to give attention to the refractive index (n) in order to complete the fundamental study of the optical properties and the optical behavior of the material .The variation refractive index of In2S3: Ag thin films as a function of the wavelength is illustrated in figure 8. 8 7 6 5 n 4 3 2 1 0 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% 300 400 500 600 700 800 λ (nm) 900 1000 1100 Fig.(8):The variation of the refractive index as a function of the wavelength for (In2S3:Ag) thin films at Ts=350°C. It is clear from this figure that the refractive index decreases with the increase in the wavelength of the incident photon. Also it can be observed, that the refractive index of In2S3: Ag thin films increases with the increase in the doping. This increase is attributed to the increase in the grain size of the films with the increase in the Ag concentration, which intern causing an increment in the compactness of the films which intern reduces the speed of light in the material of the thin film and then leads to an increase in the refractive index. In addition, it can be observed that the curves of the refractive index shifts to the higher wavelength with the increase in the Ag concentration due to the increasing in the absorption coefficient and the decrease in the optical energy gap films. The increase may be attributed to higher packing density and the change in crystalline structure, this increase due to the enhancement of growth crystalline. 3.3.6. Optical Energy Gap: In order to determine the optical band gap, graph was plotted with (αhν)2 against hν. Optical band gap was determined from this plot for all films by the linear fit in the straight portion of the graph. The relations are drawn (figure 9) between (αhν)2 and photon energy ( hν) illustrate allowed direct transition electronic . 100 90 80 70 60 50 40 30 20 10 0 (αhν) 2 (cm -2. (eV) 2)*1010 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% 1 2 3 4 5 hν (eV) Fig. (9) The plot of (ahν)2 vs. hν for (In2S3:Ag) at Ts=350°C. From figures 9, it can be observed that (Eg) is decreasing slightly with the increasing of doping and shifts towards the red region as the Ag concentration in the films increases for all films. The optical energy gap values for In2S3: Ag thin films were 3.35 eV, 3.10 eV, 2.50 eV, 2.30 eV and 2.20 eV for doping equal to (3%, 6%, 9%, 12% & 15%) respectively. This is because of the increasing in the carrier concentration, which results in filling the bottom of the conduction band that leads to the decrease in hole between (C.B.) levels and (V.B.) level that leads to zoom out the energy gap band [25] and may be attributed to the decrease of S concentration (Sulfur vacancies increase) which leads to an increase of the depth of donor levels associated with these vacancies which in turn cause a reduction in the optical energy gap for In2S3:Ag thin films . The obtained values of the optical energy gap match well with the reported values of In2S3. 3.3. 7. Dielectric Constant: Figure 10, 11 illustrates the variation of the real (εr) and imaginary (εi) parts of the dielectric constant as a function of the wavelength for In2S3: Ag thin films for doping equal to (3%, 6%, 9%, 12% & 15%). The real part of the dielectric constant (εr) depends mainly on the value of (n2), because of the smaller values of (k 2) comparison with (n2), whereas the imaginary part of the dielectric constant (εi) depends mainly on the (k) values which are related to the variations of the absorption coefficient. It is observed that their values increase with wavelength to maximum value of (εr) and then decrease for doping (3%, 6%), but for the rest doping (9%, 12%, 15%) continue to increase slightly. 6 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% 5 4 εi 3 2 1 0 300 400 500 600 700 λ (nm) 800 900 1000 1100 Fig.(10):The variation of the real part of the dielectric constant as a function of the wavelength for In2S3:Ag thin films. 50 45 40 35 30 εr 25 20 15 10 5 0 Ag= 3% Ag= 6% Ag= 9% Ag=12% Ag=15% 300 400 500 600 700 800 900 1000 1100 λ (nm) Fig.(11):The variation of the imaginary part of the dielectric constant as a function of the wavelength for In2S3 :Ag thin films . The optical properties parameters including absorption coefficient and optical constants which include refractive index, extinction coefficient, real and imaginary parts of the dielectric constant at the wavelength which is equal to (600) nm for (In2S3:Ag)thin films, for doping equal to (3% , 6%,9% , 12% & 15%) deposited by chemical spray pyrolysis method on a glass substrate at 350°C with thickness 250 nm are listed in table (4 ) . Table (4): The optical properties parameters of (In2S3: Ag) thin films at (λ=600) nm Ag% T% α (cm-1) K n εr εi Eg (eV) 3 6 9 12 15 37.15 32.36 22.36 14.45 11.75 39612 45139 59929 77381 85672 0.189 0.216 0.286 0.370 0.409 4.119 4.380 4.902 5.203 5.244 16.932 19.135 23.947 26.937 27.334 1.559 1.889 2.807 3.847 4.292 3.350 3.100 2.500 2.300 2.200 It is clear from this table that all these parameters increase with the increase in the doping except Eg and Transition. 3.4. The Electrical Properties of thin films The electrical properties of (In2S3:Ag) thin films include the D.C. conductivity from which the transport mechanism of the charge carriers can be estimated, and the Hall effect which gives information about the type, concentration and mobility of the charge carriers. The (d.c) conductivity (σd.c) for In2S3: Ag films has been studied as a function of (1000/T) with the range of (398-443 K), at different value of doping (3%, 6%, 9%, 12%, 15%). The activation energy deduced from the figure ,the type of charge carriers, concentration (nH) and Hall mobility (H) for thin films, have been calculated from Hall coefficient (RH) data and D.C conductivity are listed in Table (5). Table (5): D.C. conductivity parameters for In2S3:Ag films at different doping, with thicknesses250nm and substrate temperatures350°C. Doping with (Ag %) Ea1 (eV) Ea2 (eV) (298-73)K (373-43)K pure In2S3 0.746 0.520 3% 0.198 nH cm -3 1.345 x1014 0.560 0.212 0.389 0.157 .cm-1 1.482 x 10-3 76.55 4.920 x 10-9 13.793x10-3 0.198 7.045 1.742 x 10-1 0.368x10-3 0.129 160.1 1.075 x 10-2 232.018x10-3 0.187 4.432 x1013 15% σR.T 0.727x10-3 3.972 x1013 12% 69.17 0.137 1.526 x1017 9% R. .cm-1 2.010x10-3 4.459 x1010 6% H 2 cm / V.s 470.1 4.099 x 10-4 3100.77x10-3 0.013 2.383 x1015 544.4 1.583 x 10-2 The conductivity of In2S3 and In2S3:Ag films with 250nm thick are n-type as confirmed by Hall Effect measurements. Our results agree with Teny et al.[25] , Mathew et al.[22] and Kumar et al.[26] . The two conduction mechanisms mean that the conductivity is non-linear with temperature . The first activation energy (Ea1) occurs at low temperatures , in which the conduction mechanism is due to charge carriers' transport (hopping) to localized states near the conduction [27] band[6,23] . In this temperature region , the temperature dependence of conductivity for all ratio of (doping)increases with small activation energies equal to(0.198 , 0.560 , &0.389 ) eV for doping equal to (3%,6% ,12%) respectively and decreases with small activation energies equal to (0.212 ,0.157 ) for doping equal to (9%,15%) respectively. The second activation energy (Ea2) occurs at high temperatures, in which the conduction mechanism is attributed to the thermal excitation of charge carriers from grain boundaries to neutral region of the grains [6]. It is specifically due to carriers excited into the extended states beyond the mobility edge [7].In this temperature region, activation energies was equal to (0.137 , 0.198 & 0.187 ) eV for doping equal to (3%,6%,12%) respectively and decreases with activation energies equal to(0.1299,0.0130) eV for doping equal to (9%,15%) respectively. This increases is expected because the energy gap of In2S3:Ag thin films decreases with the increase in the Ag concentration , which requires lower energies .Besides the decrease in the activation energies is attributed to the increase in the grain size of In2S3:Ag thin films as the Ag concentration increases which causes an improvement in the crystallinity and homogeneity of In2S3:Ag thin films, which are evident from the XRD analysis of In2S3:Ag thin films. Since the activation energy represents a mean value of the inter-crystalline barrier height combining the effects of both carrier concentration and mobility, it is expected that the measured values of the activation energy will differ among researchers using different preparation conditions [5]. 4. Conclusions: The homemade chemical spray pyrolysis unit has been used to prepare In2S3 thin films. The dependences of structural, optical and electrical properties of In2S3 thin films were investigated on increase doping varied from 3% to 15%. The XRD results showed peaks corresponding to the pure In2S3 films were observed, indicating that shift in the peak positions. The transmittance is generally low with increase doping in VIS region, this behavior converse with absorbance which was increased. Allowed direct energy band gap transitions were the most probable transition, and were found to vary from (3.35-2.2)eV for (3%-15%) respectively obtained for the In2S3 film under various doping. Values of the refractive index and extinction coefficient were increase within range (2.5-5.2) and (0.079.0409) respectively with various doping. The conductivity of In2S3 and In2S3: Ag films are ntype as confirmed by Hall Effect measurements. The activation energy represents a mean value of the inter-crystalline barrier height combining the effects of both carrier concentration and mobility. 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