Shared Experimental Facilities - The University of Oklahoma

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4.E.4 Shared Experimental Facilities

Over the past ten years C-SPIN has used NSF and state support to develop interdisciplinary research in nanoscience at OU and UA. In terms of research personnel, they have directly hired two new faculty members, added two new technical staff, played a role in attracting about ten new faculty, prepared new and renovated space, supported technicians, and provided fellowships for graduate and undergraduate students. These advances have been essential to C-SPIN research and to expanding the competitive research culture at the universities and across the two states. As part of the institutional support, OU and UA are each providing another new full-time technical staff position . In terms of experimental instrumentation, C-SPIN has used NSF and state support to greatly upgrade and expand the instrumentation available. Most notably, older MBE systems have been upgraded and new MBE systems purchased, state-of-the-art SEM and TEMs have been obtained along with the expertise to effectively run them, scanning probe microscopes, optics and magneto-optics and fabrication labs have been upgraded.

Finally , C-SPIN researchers take advantage of the network of materials facilities in the US, including the

National Nanotechnology Infrastructure Network (NNIN), DOE Nanoscale Science Research Centers and other federal labs. Furthermore, as described earlier, both OU and UA have extensive collaborations within the US and around the world. UA’s MBE-grown dot samples are central to more than 15 collaborations within the US, while OU’s MBE-grown narrow-gap samples are central to more than 10 collaborations within the US. Thus C-SPIN’s activities already strongly contribute to the network of materials research facilities across the United States, especially within the South Central region. The availability of these facilities provides a stimulating environment for students, scientists, and small businesses in our area.Below we describe C-SPIN experimental facilities in more detail in paragraphs describing the Facilities, Staff, Financial Support, Collaborative Facilities and General OU-UA Facilities.

C-SPIN Facilities: The table at the end of this section lists the shared experimental facilities. The growth facilities at both institutions are central to many of the proposed collaborative experiments. The complementary arrays of structural characterization tools and set-ups for transport and optical experiments are used to study samples grown at both institutions. The Semiconductor Physics

Fabrication Facility (SPiFF) at OU, and the FabLab at UA are available free of charge to Center participants and on a fee use basis to other academic and external users.

While the Center is currently well equipped, there will be an immediate impact made by adding pieces of equipment that are critical for the proposed pursuits. At OU a multi-user MBE system will be augmented, as will several pieces of equipment within SPiFF. Similarly, upgrades will be made to various chambers of the UA multi-user MBE system. The equipment to be purchased with NSF and matching funds is listed in italics in the last table below.

C-SPIN Materials Staff: Staffing is undoubtedly one of the keys to the success of any analytical user facility because of the lack of experience of many end users and the wide variety of materials that need to be grown or analyzed. The overall operating philosophy and funding of C-SPIN dictates staff responsibilities and, consequently, the staff’s educational background. We have found that a balance between technicians and Ph.D. scientists is required for optimal functioning of our user facilities. The technicians and scientists are listed in the table below.

Name

Jeremy Jernigan

Tetsuya Mishima

Joel Keay

Zhaobing Tian

Lin Li

New Position

Dave Monk

Responsibilities

Cleanroom & Characterization

MBE and TEM

Fab. & Characterization

IR Lasers & Detectors

MBE specialist

Electrical, ½ supported by OU

Electrical, ½ supported by OU

Device Fabrication & Testing Physics, match position by OU

MBE and characterization Physics, staff position by UA

Dorel Guzun Optics

Mourad Benamara Focused Ion Beam/SEM

Department & Support

Physics, supported by OU

Physics, staff position by OU

Physics, match position by OU

Physics, match position by UA

Physics, supported by UA

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Mike Hawkridge

Vasyl Kunets

X-Ray/AFM

MBE and transport

Physics, supported by UA

Physics, supported by grants

New Position Fabrication laboratory Physics, match position by UA

(Fractions of staff salaries not supported by OU or UA are from grants.)

The new OU staff member will assist C-SPIN participants in device fabrication and measurement with electron beam lithography and other fabrication processes available within SPiFF and C-SPIN. The new UA staff member will maintain the fabrication laboratory which supports measurement and application of our novel nanoscale materials

Financial Support of Facilities: The user base at OU and UA is expanding to include more internal and external users, but is still insufficient for recovering the staff salaries, maintenance costs, and service fees entirely from user fees. Instead, research grants and the universities provide direct support.

To become self-sustaining, we need an even larger internal and external user base. We employ a graded fee structure where academic users are charged one rate, startup-companies are charged a higher rate and fully established companies are charged an even higher rate. These fees are waived for preliminary measurements that support proposals in which cost schedules for continued use of the equipment are included. Similarly, we waive the initial use fee for technique evaluation and first time uses.

Furthermore, we are establishing a web presence and developing pamphlets to disseminate information about our facilities to industrial organizations and universities in our region. Over the last ten years, we have seen a marked increase in our facilities use. We are confident that the user base will continue to grow.

Collaborative Facilities: In addition to activity within the Center, we facilitate networking of Center PIs with each others collaborators. Examples include THz spectroscopy at the University of Alberta to measure anisotropic photoconductivity in MBE grown quantum wires, which was initially a collaboration only with Johnson and now includes collaboration with Salamo.

Over the past few years we have seen the number of such secondary collaborations grow. Furthermore, our students have benefited from visits to a number of our collaborators’ facilities at Sandia, in Germany, and in Japan. Below is a list of Center collaborators grouped by the facility or technique they provide.

1.

Oak Ridge National Labs (ORNL): TEM and electron holography, A. Blom and L. F. Allard Jr.;

Piezoelectric Force Microscopy, S. Jessi and S. Kalinin

2.

Argonne National Labs (ANL): Synchrotron x-ray, J.W. Freeland

3.

Sandia National Labs: Mesoscopic Device Fabrication; MBE growth, John Klem

4.

Los Alamos National Labs: Novel Optical Scanning Probe Microscopy, V.I. Klimov

5.

National High Magnetic Field Laboratory: Low-Temperature/High B-Field Measurements

6.

NNIN: UC Santa Barbara and Penn State: Atomic Layer Deposition (ALD) of gate oxides

7.

Nonlinear Optical Facilities: G. Stegeman, CREOL of the University of Central Florida

8.

THz Spectroscopy: F. Hegmann, University of Alberta, Canada

9.

Synchrotron X-ray Beam: M. Schmidbauer, Institut für Physik, Humboldt-Universität zu Berlin

10.

Low Temperature NSOM: C. Lienau, Carl von Ossietzky Universität Oldenburg, Germany

11.

Electron-beam-lithography (EBL): W.T. Masselink, Physics, Humboldt-Universität zu Berlin

12.

Fabrication Facilities for Optical Waveguides: M. Chauvet, Universite

de Franche Comte, France

13.

THz Spectroscopy on oxides: J. Hlinka and J. Petzel, University of Prague, Czech Republic

14.

Low-Temperature/High B-Field Measurements: Y. Hirayama, Tohoku University, Japan

General OU-UA Facilities : The OU Department of Physics and Astronomy maintains a first-class instrument shop staffed by three machinists with no charge for services from departmental PIs.

Additionally, the department has a fee-free electronics shop staffed by one, and a full-time computer systems operator. The OU Department of Chemistry maintains a fee-free electronics shop staffed by three. Both the Physics and Chemistry instrument and electronics shops provide services to those outside the departments at cost. The UA Physics Department maintains a machine shop staffed by a full-time

4.E.4 2 of 3

machinist and a electronics shop staffed by a electronics specialist. Also available at both OU and UA are a glass-blowing shop with one full-time glass blower. Numerical studies can be done on either campus on scientific workstations.

University of Oklahoma (OU)

Growth:

MBE #1: IV-VI (Pb, Eu, Se, Te) & BaF

2

/CaF

2

MBE #2: Sb-related III-V (In, Ga, Al; & Sb, As)

ALD of Insulators

Auger Electron Spectroscopy and XPS with depth profiling, AFM/STM

University of Arkansas (UA)

Growth:

MBE #1: III-V (Al, Ga, In, Mn; & As, P), Sb purchased

MBE #2: III-V (Al, Ga, In; & As)

MBE #3: Complex Oxides

MBE #4: Nitrides (Al, Ga, In; & N)

Two Laser-MBE Growth Systems

UHV CVD: SiGeSn

Extension chamber to Laser MBE for ferroelectrics

Add Low-Temp, UHV near-field optical probe.

Add Bismuth cell

Characterization:

High Res. TEM

JEOL 2000FX (LaB

SEM with EDS

6

) with EDS and PEELS

JEOL 2010F (Field-Emission Source)

JEOL JSM-880 (LaB

6

);

JEOL JSM-640A (LaB

6

) with EBL

FE-SEM (recent MRI purchase, to be installed 2011)

Add Precision Ion Polishing System

Characterization:

High Res. TEM

FEI Titan

SEM with EDS

FEI Dual beam FIB

FEI XL-30 FEG ESEM Environmental with EBL

Hitachi S2300 SEM (W-filament)

SQUID Magnetometer, Quantum Design MPMS

Nuclear Magnetic Resonance Bruker DSX-400,

Raman Spectroscopy, custom

FTIRFT-Raman/PL Bruker IFS66

Requested UV-Vis-IR spectrophotometer

TEM attachment for mechanical characterization

Laser to extend microscope single QD spectroscpy

Common to both institutions: Excellent on campus supercomputer computation capability ,

X-ray Diffractometers: high res. and low-angle systems, Optical Microscopy, Hall Effect System,

FTIR and Photoluminescence, Confocal Microscope, XPS, AFM

Transport:

3 He and 4 He cryostats with B up 9T

Optical Spectroscopy:

Photoluminescence (0.2 to 5

 m)

UV-Vis spectrophotometer

4 He cryostat with FIR laser for cyclotron resonance

Transport:

4-probe low-temp., weak magnetic field system.

Optical Spectroscopy:

CW/Pulsed Lasers (0.4 to 16

 m), time-resolved spectroscopy: Laser and optics for ultra-short pulse UV capabilities

SPiFF: III-V Processing Facility

Photolithography, Karl Suss Model MJB-3

FabLab: e-beam evaporator, ion etcher, e-beam lithography

Photoresist Spinner: Laurel Tech. WS-200-4NPP HiDEC: 5"- Multichip Module (MCM) Facility

Deposition Systems: Edwards thermal evaporator Kurt Wide range of deposition and characterization techniques.

Lesker RF- DC-magnetron sputtering system CHA- 600 e-beam evaporator

Etching Systems: Trion Mini-Lock II, for Si and III-V materials.

SPiFF Ball Bonder: Kulicke & Soffa Model 4524.

Requested Plasma Enhanced CVD,

Photo and e-beam lithography, oxide/metal deposition,

Add Plasma Enhanced CVD

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