place photo here
Quantrainx50
Module 1 - Introduction
Feb 2011
Confidential
Introduction to the Quantax50
• Marc Castagna, Senior Applications Engineer
• Rick Passey, Senior Applications Engineer
• Ove Thompson, Senior Applications Field Engineer
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FEI’s Product Lines
• Quantax50 (SEM and SDB)
• Inspect (SEM)
• Nova NanoSEM (ultra Hi-res/Low Vac SEM)
• Magellan (XHR SEM)
• Tecnai G2 (TEM)
• Titan (TEM)
• Focused Ion Beams (FIBs)- Nova Nano Lab, Helios, 235..
• Small Dual Beam (SEM & FIB)
• Mask Repair (SEM & FIB)
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USER FEEDBACK
• The Quantax50 FEG users are welcome to provide feedback to
our development team on the functionality, ease of use, the
feature set and/or the stability of the current software.
• You can send a message with comments and suggestions to:
• QuantaSW@fei.com
• Software development team FEI Company
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Quantax50 Course Outline
•
QUANTRAIN x50 1.PPTx- Intro
•
QUANTRAINx 50 2 .PPT- Factors
•
Topo
•
Elemental
•
Conductivity
•
• Scan rates
• Low KV
• Low Vac
Vacuum Compatibility- gas interaction
•
• ESEM intro
Crystallography
•
Magnetic
•
Surface Potential
•
Cathodo..
•
5
.
QUANTRAINx 50 3.1.PPt -- Electron Optics
•
Gun
•
Column/mag /spot
•
Focus
•
Detectors
•
QUANTRAINx50 3.2PPT LV & ESEM
•
QUANTRAINx50 4.PPT- The Quantax50
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•
QUANTRAINx50 5.1.PPT- BDM
•
QUANTRAINx50 7 .1 .PPT- Options-EDS
•
QUAMTRAIN x50 7.2- Peltier
•
QUANTRAIN x50 7.3- STEM
•
QUANTRAIN 10-.PPT-Sample
Prep
Introductions
• Student’s name, department
• Area of interest in microscopy
• Equipment
• Experience level
• Hopes for the course
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This Course Deals With Scanning
Electron Microscopes
• There are also:
- Transmission Electron Microscopes (TEM)
- Light Microscopes (LM)
- Scanning Probe Microscopes (SPM)
- Scanning Tunneling Microscopes (STM)
- Atomic Force Microscopes(AFM)
… and more….
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SEM Vs. TEM
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• SEM looks at the surface
of a sample
• TEM looks at internal
structure
• SEM scans
• TEM has a static beam
• SEM has limited
resolution to nanometers
• TEM has higher resolution
to sub angstrom
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This Is What the World Thinks of Electron
Microscopes
Thanks to Gary
Larson of The
Far Side…
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Glossary of Abbreviations
•
BD – Beam Deceleration
•
BSD - Back Scatter Detector (generic term)
•
CBD- Concentric Backscatter Detector
•
EDS - Energy Dispersal System
•
ESEM - Environmental Scanning Electron Mode
•
ET SED – Everhardt-Thornly Secondary Electron Detector
•
FEG- Field Emission Gun
•
GAD - Gaseous Analytical Detector ( SS BSD with cone)
•
GBSD - Gaseous Back Scatter Detector
•
GPL - Gas Path Length
•
GSED – Gaseous Secondary Electron Detector
•
HFW- Horizontal Field Width
•
HV – High Voltage ( also High Vacuum)
•
ICD – In Column Detector
•
LFD - Large Field Detector/LVD- Low Vacuum Detector
•
LV- Low Vacuum
•
PLA - Pressure Limiting Aperture
•
RH - Relative Humidity
•
SS BSED- Solid State Back Scattered Electron Detector
•
STEM- Scanning Transmission Electron Microscopy
•
vCD- low voltage high Contrast Detector
•
WD - Working Distance
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Common Keyboard shortcuts
• F3- Videoscope
• F5 – toggle from full screen to quad mode
• F7 – reduced area view
• F9 – Auto C & B
• Shift, Pause – to pause or un-pause all quads
• Ctrl, 0 (zero) - move stage to center position in x and y
• ESC – stop stage movement
• Ctrl, R – restart the scan
• * - round off mag to nearest whole number
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Confidential
Module 1- Introduction to Beam/ Specimen
Interaction
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Your Sample and Your SEM With a
Blank Monitor
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The SEM Scans a Beam Across the Sample and
Displays the Results Simultaneously
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You Now Have an Image of Your Sample
on the CRT
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Scanning and Image Display*
* Video courtesy of Oxford Instruments
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The SEM Image
• The SEM image
consists of many
distinct points of
varying gray
levels…. All
adding up into a
viewable image.
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• What is the image?
• How do we get this image?
… Well, Let’s look at how our eyes
see things...
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Light Interacting With Matter
• Objects smaller than the
wavelength of light are not
well resolved
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Electrons Interacting With Matter
• Small objects can be resolved
because of the wavelength of
electrons
?
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One Needs an Electron Detector and
SEM to “See” the Image
SEM
Electron Detector
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:
Quantax
50
But Is the Image Real?
?
SEM
Electron Detector
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:
Quantax
50
What Is “Reality” in the SEM ?
• Secondary electron image
- low voltage
- high voltage
• Backscatter electron image
- elemental
- topographical
- reverse biased S.E.D.
• Mix of most of the above
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What Is “Reality” in the SEM ?
• The Microscopist creates their own “reality” in the
SEM.
• The course goal is to understand this “reality” and be
able to translate this image interpretation to others.
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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Mesas or Valleys?
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Valleys or Mesas?
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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What Is “Reality” in the SEM ?
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Elemental Maps
Spinel in silicate
B
Light element inclusions
5kV, 12.5kx
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Grey Levels- Are They Linear?
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Grey Levels- Are They Linear?
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Can You Believe Your Eyes?
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Scanning Action of the Electron Beam
Across Specimen Surface
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Scanning of the Beam *
* Video courtesy of Oxford Instruments
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Beam Penetration *
* Video courtesy of Oxford Instruments
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The Electron Beam Penetrates the
Sample 3- Dimensionally at Each Scanned
Pixel
Primary Beam
Characteristic X-rays
Secondary Electrons
Backscatter Electrons
Specimen
Specimen Current
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Other Affects of Beam Penetration
Primary Beam
Auger Electrons
Characteristic X-rays
Secondary Electrons
Bremstrahlung X-rays
Backscatter Electrons
Cathodoluminesence
Specimen
Specimen Current
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The Beam Penetrates in a “Random” Forward Scattering
Motion.
Primary Beam
Sample Surface
Specimen
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The Tear Drop Shape of Electron Beam
Penetration
Primary Beam
Secondary
100 Angstroms
X-ray emission
2/3 volume
***-important
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BSE- 1/3 volume
Results of Electron Beam Penetration
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Factors That Affect Depth Penetration of
the Electron Beam (The Big Three)
• Accelerating voltage
• Elemental makeup of the sample
• Angle of incidence
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The Affect of Accelerating Voltage
Primary Beam
30KV
15KV
5KV
.16 mm
1KV
.01 mm
(100A)
.99 mm
3.1 mm
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Depth Penetration in Iron
.5KV
35 A
Interaction Volume - Accelerating Voltage
15 kV
5 kV
25 kV
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The Affect of Atomic Number (Z) of Sample
Primary Beam
Low Z
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High Z
Interaction Volume –Sample Composition
Iron
Silver
Carbon
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Depth Penetration ( Microns) vs. Accelerating
Voltage and Atomic Number
Z
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5
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12
13
14
19
20
22
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30
32
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79
***-important
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SYMBOL
Be
C
Na
Mg
Al
Si
K
Ca
Ti
Cr
Mn
Fe
Co
Ni
Cu
Zn
Ge
Sr
Zr
Mo
Pd
Ag
Au
ELEMENT
Beryllium
Carbon
Sodium
Magnesium
Aluminum
Silicon
Potassium
Calcium
Titanium
Chromium
Maganese
Iron
Cobalt
Nickel
Copper
Zinc
Germanium
Strontium
Zirconium
Molybdenum
Palladium
Silver
Gold
1KV
.04
.03
.08
.04
.03
.03
.09
.05
.02
.01
.01
.01
.01
.01
.01
.01
.02
.04
.02
.01
.01
.01
.01
5KV
.6
.4
1.1
.6
.4
.5
1.3
.7
.3
.2
.2
.2
.1
.1
.1
.2
.3
.5
.2
.1
.1
.1
.1
10KV
1.8
1.3
3.6
2.0
1.3
1.5
4.3
2.3
.8
.5
.5
.5
.4
.4
.5
.6
.8
1.7
.7
.4
.4
.4
.3
20KV
5.8
4.2
11.5
6.3
4.2
4.7
13.6
7.5
2.8
1.7
1.7
1.6
1.4
1.4
1.5
1.8
2.6
5.5
2.2
1.4
1.2
1.4
.8
30KV
11.5
8.4
22.7
12.4
8.3
9.3
26.8
14.6
5.5
3.4
3.4
3.1
2.9
2.8
2.9
3.6
5.1
10.7
4.3
2.7
2.4
2.7
1.6
Topography Affects Secondary Electron Emission
(Angle of Incidence)
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Interaction Volume - Tilt
0 degree tilt
70 degree tilt
30 degree tilt
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• Running the SEM is the easy part.. Interpreting, understanding
and communicating the results to others is the challenge.
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End of QUANTRAINx50 1.PPT - Intro
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