Gerard Roelofs
Head NanoLab
Course program NanoLab cleanroom
Access training NanoLab
Intro Building
Tour building
Interview user
Safety & cleanroom behaviour
Technology Support
Introduction to cleaning technology
Overview metrology
NICE workshop
Hands on : lithography; wetbenches; pre furnace clean
Follow-up program
Equipment Training
Vacuum course
Ellipsometer/ Dektak
MESA+ Institute for Nanotechnology
Combines nanotechnology, microsystems and materials science
research at the University of Twente
• Staff
– 525 people, 34 research groups
• Yearly turnover
– 55 M€ with 60%
from external sources
• Mission
– excelling in its research field &
exploring new research themes
− educating researchers and designers
− offering state of the art infrastructures
− commercializing research results
− initiating and participating in fruitful international collaboration
MESA+ Institute for Nanotechnology
Pillars of MESA+
Science
Education
Infra structure
Commercialization
About NanoLabNL
•
Providing an open-access infrastructure
for research and innovation in nanotechnology
•
NanoMaterials, NanoFabrication, NanoFluidics,
NanoElectronics, BioNano, NanoMedicine, ….
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National consortium at 4 locations:
• Eindhoven
• Groningen
• Twente
• Delft
A1+2
• MESA+ NanoLab Twente facilities:
– 2500 m2 building
– 1250 m2 cleanroom
– 150 m2 materials analysis lab
– 150 m2 research group labs
VC-curves Frequency 1-100 Hz
– 800 m2 VC-G surface
– 150 m2 BioNano lab
• 400 users, ~80 new/ year
• 40% use by companies
VC-C
VC-D
VC-E
VC-F
VC-G
Vibrationspeedamplitude
12,5 um/s 1 um details; optical microscope, epitaxy
6,3 um/s 0,3 um details; foto lithography, cell implantation app.
3,15 um/s 0,1 um details; scanning probe scanning beam, optical benches
1,56 um/s 30 nm details; scanning probe,scanning beam
0,78 um/s 10 nm details; Nanotechnology
BioNanoLab ?
Cleanroom ?
Analysis ?
Group laboratory ?
Cleanroom
Laboratories
Laboratories
Analyse
NanoLab Laboratories
Offices
Laboratories
Laboratories
Cleanroom
Vibration free
Cleanroom
Facility/
Technics
area
Cleanroom ISO 5
• Number of particles with a
diameter of 0,1 µm per m3
A human produces 10.000.000.000 particles =
1 m 2 per day
(50 um thick)
100.000
5.0000.000
500.000
1.000.000
10.000.000
2.5000.000
15.000.000//30.000.000
MIS webpage
MIS website is your guide in the Cleanroom
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For selection of courses
For safety information
For status of equipment
For cleanroom news
For booking of equipment
Who to contact of NL-Staff
http://www.utwente.nl/mesaplus/nanolab/cleanroom/
Inlog:
Username: initials
Password : initials
Miriam Luizink
Technical director
Personal MESA+ NanoLab
Analyse & other support
Gerard Roelofs
Head NanoLab
Sharron Koch
Secretary
Henk v Wolferen
Dual FIB
Rico Keim
EF TEM
Samantha Ooijman
Logistics
Gerard Kip
XPS
Anita Kooij
Financial
Bert vd Akker
ICT
HenkJan de Haan
Building
Mark Smithers
HR SEM
Personal MESA+ NanpLab
NL- Cleanroom Staff
Marion Nijhuis
Wetbenches
IteJan Hoolsema
LPCVD
Christiaan Bruinink
Quality Engineer
Eddy Ruiter
Metrology
Huib van Vossen
Lithography
Hans Mertens
Sputtering,
evaporating
Meint de Boer
Technology advice
Ton Jenneboer
Lithography
E-beam lith.
Rene Wolf
Plasma Etching
Robert Wijn
Furnaces
Ion implanting
Peter Linders
Masks
PECVD
• Tour NanoLab
Interview
• Are you PhD, master student, guest
• Who is your supervisor
• Description of your project
• Time Schedule
• Which apparatus are needed?