Gas Cabinets and Valve Manifold Boxes:
Applying CGA G13- Rev 2015
to Gas Delivery Equipment
The Standard Governing the Storage & Use of Silane:
Compressed Gas Association’s Publication CGA G-13 2015:
“Storage and Handling of Silane and Silane Mixtures”
1. Outdoor Storage & Use – Section 6
2. Indoor Storage & Use – Section 7
3. System Configuration for Cylinder Sources – Section 8
4. System Configuration for Bulk Sources – Section 9
5. Piping & Components – Section 10
6. Gas & Flame Detection – Section 11
7. Fire Protection System – Section 12
8. Ventilation System – Section 13
9. Venting & Treatment – Section 14
10.Purge Gas System – Section 15
11.Electrical Requirements – Section 16
12.Fundamental Supervisory Control Requirements – Section 17
The Standard Governing the Storage & Use of Silane:
Compressed Gas Association’s Publication CGA G-13 2015:
Why You Must Follow the Standard with this Gas
2005 Silane Explosion - Taiwan
Result of the Explosion:
Gas Cabinet Explosions:
Silane released into a Gas Cabinet followed by an Explosion:
•
Germany, 1976 – 1 fatality
•
Japan, 1989 – 1 fatality & 1 injury
•
Japan, Dec. 1989 – 2 fatalities & 2 injuries
•
US, Jan 1992 – 1 injury
•
US, 1996 – No injuries
•
Japan, 1996 – 1 fatality
•
US, 2003 – No injuries
•
US, 2005 – 2 injuries
•
Taiwan, 2005 – 1 fatality
•
India, 2007 – 1 fatality
•
China, 2009 – 1 injury
•
China, 2010 – 1 Injury
* Data from 2012 Silane Safety Seminar
Why is Critical Systems Presenting on this Topic?
• CSI’s History – 17 years Supplying Gas Delivery & Abatement Equipment
• CSI’s Background – High Production Semiconductor Fabs
• What we Hear when we talk with Potential Customers
• What we See when we go to Customer’s Sites
• Dangers of Silane & Desire to Promote Safety
Focus of the Presentation:
1. Tubing & Components
2. Gas Cabinets for Cylinder Use
3. Gas Rack Units
4. Valve Manifold Boxes / Enclosures
Tubing & Components Required per CGA G-13:
1. Tubing Connections – Section 10.1.2
a. Welded Fittings & VCR Acceptable – No Compression!
b. Metal Gaskets Only – No Teflon or PCTFE
Tubing & Components Required per CGA G-13:
1. Tubing Connections – Section 10.1.2
a. Welded Fittings & VCR Acceptable – No Compression!
b. Metal Gaskets Only – No Teflon or PCTFE
Tubing & Components Required per CGA G-13:
1. Tubing Connections – Section 10.1.2
a. Welded Fittings & VCR Acceptable – No Compression!
b. Metal Gaskets Only – No Teflon or PCTFE
2. COAX– Not Required Unless Silane is Mixed with a Toxic – Section 10.1.3
3. Process Valves – Diaphragm or Bellows Only - Section 10.2.1
4. Check Valves – Cannot be Sole Means of Backflow Prevention - Section 10.2.2.1
5. Regulators – Section 10.2.2.2
a. Metal Diaphragms Required
b. Bonnet Relief Vents Required
6. Restricted Flow Orifice is Required – Max Size 0.010 – Section 10.2.4
Tubing & Components Required per CGA G-13:
6. Restricted Flow Orifice is Required – Max Size 0.010 – Section 10.2.4
Tubing & Components Required per CGA G-13:
6. Restricted Flow Orifice is Required – Max Size 0.010 – Section 10.2.4
Tubing & Components Required per CGA G-13:
1. Tubing Connections – Section 10.1.2
a. Welded Fittings & VCR Acceptable – No Compression!
b. Metal Gaskets Only – No Teflon or PCTFE
2. COAX– Not Required Unless Silane is Mixed with a Toxic – Section 10.1.3
3. Isolation Valves – No Packed Valves - Section 10.2.1
4. Check Valves – Spring Opposed, Positive Shutoff - Section 10.2.2.1
a. Cannot be sole means of preventing backflow
5. Regulators – Section 10.2.2.2
a. Metal Diaphragms
b. Bonnet Relief Vents Required
6. Restricted Flow Orifice is Required – Max Size 0.010 – Section 10.2.4
7. Excess Flow Control Required – Section 10.2.5
a. Valves, Control Devices, Flow Control Systems are Allowed
b. Capable of Manual Reset AFTER Corrective Action
Gas Cylinder Cabinets:
Gas Cylinder Cabinet CGA G-13 Requirements:
1. G-13 Definition of Gas Cabinet–Section 8.2.2
1. Cabinet/Enclosure, Controller, Gas Panel
2. Connected to Scrubbed Exhaust
3. Lockable Windows to View & Operate Gas Panels
4. Control System Outside the Cabinet
5. Controller enables Auto-Purge Procedures
2. 2 Cylinders in a Gas Cabinet– Separation Plates / Single Cabinets- Section 10.2.2.1
3. Gas Monitoring – All Connections Must be Monitored for Leaks - Section 11.1.2
a. Indoor Storage – Gas Monitoring or Optical Flame Detection System
b. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1
a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection
c. Alarm @ 50 ppm – Shutdown V0, Local Alarm, Transmit to Constantly Attended Location –
Sections 11.1.4.1; 11.1.5.1 & 11.1.6
Gas Cylinder Cabinet CGA G-13 Requirements:
1. G-13 Definition of Gas Cabinet–Section 8.2.2
1. Cabinet/Enclosure, Controller, Gas Panel
2. Connected to Scrubbed Exhaust
3. Lockable Windows to View & Operate Gas Panels
4. Control System Outside the Cabinet
5. Controller enables Auto-Purge Procedures
2. Less than 30 psi Cylinder Pressure – Don’t need a Gas Cabinet– Section 7.11
3. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2
a. On the Cylinder or Close Coupled to the Cylinder Connection
b. Remote Shutdown - ESO Button (Sec 6.4.1) - Gas Monitor - UVIR (Sec 6.4.1.2)
4. 2 Cylinders in a Gas Cabinet– Separation Plates / Single Cabinets- Section 10.2.2.1
5. Gas Monitoring – All Connections Must be Monitored for Leaks - Section 11.1.2
a. Indoor Storage – Gas Monitoring or Optical Flame Detection System
b. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1
a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection
c. Alarm @ 50 ppm – Shutdown V0, Local Alarm, Transmit to Constantly Attended Location –
Sections 11.1.4.1; 11.1.5.1 & 11.1.6
Gas Cylinder Cabinet CGA G-13 Requirements:
1. G-13 Definition of Gas Cabinet–Section 8.2.2
1. Cabinet/Enclosure, Controller, Gas Panel
2. Connected to Scrubbed Exhaust
3. Lockable Windows to View & Operate Gas Panels
4. Control System Outside the Cabinet
5. Controller enables Auto-Purge Procedures
2. Less than 30 psi Cylinder Pressure – Don’t need a Gas Cabinet– Section 7.11
3. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2
a. On the Cylinder or Close Coupled to the Cylinder Connection
b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec 6.4.1.2)
Gas Cylinder Cabinet CGA G-13 Requirements:
1. G-13 Definition of Gas Cabinet–Section 8.2.2
1. Cabinet/Enclosure, Controller, Gas Panel
2. Connected to Scrubbed Exhaust
3. Lockable Windows to View & Operate Gas Panels
4. Control System Outside the Cabinet
5. Controller enables Auto-Purge Procedures
2. Less than 30 psi Cylinder Pressure – Don’t need a Gas Cabinet– Section 7.11
3. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2
a. On the Cylinder or Close Coupled to the Cylinder Connection
b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec 6.4.1.2)
4. 2 Cylinders in a Gas Cabinet– Separation Plates / Single Cabinets- Section 8.2.2.1
Gas Cylinder Cabinet CGA G-13 Requirements:
1. G-13 Definition of Gas Cabinet–Section 8.2.2
1. Cabinet/Enclosure, Controller, Gas Panel
2. Connected to Scrubbed Exhaust
3. Lockable Windows to View & Operate Gas Panels
4. Control System Outside the Cabinet
5. Controller enables Auto-Purge Procedures
2. Less than 30 psi Cylinder Pressure – Don’t need a Gas Cabinet– Section 7.11
3. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2
a. On the Cylinder or Close Coupled to the Cylinder Connection
b. Remote Shutdown - ESO Button (Sec 6.1.4) - Gas Monitor - UVIR (Sec 6.4.1.2)
4. 2 Cylinders in a Gas Cabinet– Separation Plates / Single Cabinets- Section 8.2.2.1
5. Gas Monitoring – All Connections Must be Monitored for Leaks - Section 11.1.2
a. Indoor Storage – Gas Monitoring or Optical Flame Detection System
b. Sampling Points in Ducts from Enclosures Containing Breakable Connections - 11.1.3.1
a. Not Less than 5 Duct Diameters Downstream of Enclosure Connection
c. Alarm @ 50 ppm – Shutdown V0, Local Alarm, Transmit to Constantly Attended Location –
Sections 11.1.4.1; 11.1.5.1 & 11.1.6
Gas Cylinder Cabinet CGA G-13 Requirements:
6. Flame Monitoring– Shuts the Gas Supply at the Source - Section 11.2.2
a. Outside the Cabinet at Potential Leak Points - Sec 11.2.2.1
b. Inside the Gas Cabinet or Enclosure – Required - Sec 11.2.2.2
7. Fire Protection System– Quick Response Sprinkler Head - Water Only– Section 12.3.1
a. Desire is to Keep the Cylinder Cool and Not put out the Fire
8. Emergency Power – Delivery Systems Must Fail Safe – Section 16.2
9. Supervisory Control Requirements – Section 17.1
a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off
b. Piping with Breakable Connections – Gas Monitor & Flame Detection
Gas Cylinder Cabinet CGA G-13 Requirements:
6. Flame Monitoring– Shuts the Gas Supply at the Source - Section 11.2.2
a. Outside the Cabinet at Potential Leak Points - Sec 11.2.2.1
b. Inside the Gas Cabinet or Enclosure – Required - Sec 11.2.2.2
7. Fire Protection System– Quick Response Sprinkler Head - Water Only– Section 12.3.1
a. Desire is to Keep the Cylinder Cool and Not put out the Fire
8. Emergency Power – Delivery Systems Must Fail Safe – Section 16.2
9. Supervisory Control Requirements – Section 17.1
a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off
b. Piping with Breakable Connections – Gas Monitor & Flame Detection
Gas Cylinder Cabinet CGA G-13 Requirements:
6. Flame Monitoring– Shuts the Gas Supply at the Source - Section 11.2.2
a. Outside the Cabinet at Potential Leak Points - Sec 11.2.2.1
b. Inside the Gas Cabinet or Enclosure – Required - Sec 11.2.2.2
7. Fire Protection System– Quick Response Sprinkler Head - Water Only– Section 12.3.1
a. Desire is to Keep the Cylinder Cool and Not put out the Fire
8. Emergency Power – Delivery Systems Must Fail Safe – Section 16.2
9. Supervisory Control Requirements – Section 17.1
a. Exhaust & Gas Monitoring, Flame Detection, Emergency Shut Off
b. Piping with Breakable Connections – Gas Monitor & Flame Detection
10. Ventilation System–Section 13.2
a. Continuous Exhaust - Required
b. Non-combustible Ductwork - Required
c. Required Airflow 250:1 Volume Ratio – Section 13.2.3
d. Failure in Ventilation System – Local Alarm & Transmission to Constantly Attended Location
e. Enclosures Designed to Prevent Pocketing – Section 13.2.4
f.
Unattended Operations – Table 6
Gas Cylinder Cabinet CGA G-13 Requirements:
11. Silane Venting & Treatment - Section 14
a. If No Toxics - Gas from Cycle Purging dilute with Inert Gas, Open Air Disposal - Sec 14.2
b. Mixed with Toxics – Abate with Appropriate Scrubber
c. Treatment System Must be designed for Silane - Section 14.3
d. Vent into Ducts - < 25% of the LFL or 0.34% if Ignition is Only Concern– Section 14.4
e. Must have a Dedicated Process Vent – Section 14.5
f.
Vent Stack Designed to Prevent Thermal Radiation from Causing Harm - Section 14.5
g. Purge through Venturi on Gas Panel must be Continuous – Section 14.5.1
Gas Cylinder Cabinet CGA G-13 Requirements:
12. Purge Gas System - Section 15
a. Must use Vacuum in Combination with Purge Gas – Section 15.1
b. Must use a Dedicated Purge Bottle – Section 15.2
Gas Cylinder Cabinet CGA G-13 Requirements:
12. Purge Gas System - Section 15
a. Must use Vacuum in Combination with Purge Gas – Section 15.1
b. Must use a Dedicated Purge Bottle – Section 15.2
Gas Cylinder Cabinet CGA G-13 Requirements:
12. Purge Gas System - Section 15
a. Must use Vacuum in Combination with Purge Gas – Section 15.1
b. Must use a Dedicated Purge Bottle – Section 15.2
Gas Cylinder Cabinet CGA G-13 Requirements:
12. Purge Gas System - Section 15
a. Must use Vacuum in Combination with Purge Gas – Section 15.1
b. Must use a Dedicated Purge Bottle – Section 15.2
c. Cannot use House Gas for Purging – Section 15.2.1
d. Can use House Gas for Venturi Vents – Section 14.5
e. Must have a Check Valve before the Venturi – Section 15.4.2
f.
Panel Consists of Dedicated Supply, Regulator, Relief Valve, Check Valve & Low Purge
Gas Alarm – Section 15.3
Purge Gas Panel:
CGA G-13 Requirements for Gas Cabinets
Containers > 14 liters & Concentrations > 1.36%
• Automatic Shutdown (Cabinet & 1 Remote)
• Z-Purge in Controller
• Vacuum Venturi for Purge/Vent
• Exhaust Monitor
• Sprinkler – Quick Response Head
• UVIR Flame Monitor / Gas Monitor
• Dedicated Purge System
• Excess Flow Switch or Valve
• Regulator Bonnet Vent Line
• Low Purge Gas Pressure Alarm
• Check Valve on Purge Panel
• AOP on Cylinder or Close Coupled Shutoff Valve
• Cylinder Isolation - Separate Cabinet or Steel Plate
• High Flow Gas Cabinet Vents
• Enclosure Designed to Eliminate Pocketing
Gas Rack Units:
Gas Rack Unit G-13 Requirements:
1. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2
a. On the Cylinder or Close Coupled to the Cylinder Connection
b. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec 6.4.1.2)
2. Separation Plates between Cylinders - Section 6.4.2
a. 1/4” Thick Steel Plates – Minimum 18” Below & 6” Above Centerline of Valve or “Other
Means of Providing Equivalent Protection”
3. Purge Panel Requirements – Same as Gas Cabinets – Section 8.1.3
4. Gas Monitoring – Not Required - Section 11.1.1
5. Flame Detection – Section 11.2.1
a. Required in Potential Leak Zones
b. Approved for Outdoor Silane use with no False Trips from Artificial Sources
6. Ventilation Systems – Section 13.1.1
a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces
7. Supervisory Control Requirements – Section 17.1
a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Used
b. Flame Detection with Source Shutdown
c. Emergency Shut off at Exits
Gas Rack Unit G-13 Requirements:
1. V0 Valve – Shuts the Gas Supply at the Source - Section 8.1.2
a. On the Cylinder or Close Coupled to the Cylinder Connection
b. Remote Shutdown or ESO Button (Sec 6.1.4) or Gas Monitor, UVIR (Sec 6.4.1.2)
2. Separation Plates between Cylinders - Section 6.4.2
a. 1/4” Thick Steel Plates – Minimum 18” Below & 6” Above Centerline of Valve or “Other
Means of Providing Equivalent Protection”
3. Purge Panel Requirements – Same as Gas Cabinets – Section 8.1.3
4. Gas Monitoring – Not Required - Section 11.1.1
5. Flame Detection – Section 11.2.1
a. Required in Potential Leak Zones
b. Approved for Outdoor Silane use with no False Trips from Artificial Sources
6. Ventilation Systems – Section 13.1.1
a. Natural ventilation acceptable, Mechanical ventilation for Obstructed Spaces
7. Supervisory Control Requirements – Section 17.1
a. Exhaust Monitoring w/ Alarm if Mechanical Ventilation Used
b. Flame Detection with Source Shutdown
c. Emergency Shut off at Exits
Typical Outdoor Cylinder Layout:
Setback Distances and Openness Requirements–Section 6
a. Distances to Exposure for Outdoor Cylinders – Section 6, Table 3
CGA G-13 Requirements for Rack Units
Containers > 14 liters & Concentrations > 1.36%
• Automatic Shutdown (Cabinet Sensors & Remote)
• Z-Purge in Controller
• Emergency Shutoff
• Sprinkler
• Vacuum Venturi for Purge/Vent
• UVIR Flame Monitor
• Excess Flow Switch
• Low Pressure Purge Gas Alarm
• AOP Cylinder Shutoff Valve (Close Coupled is OK)
• Check Valve on Purge Gas
• 1/4” Steel Plate (6” Above/18” Below – Centerline
of Cylinder Valve
Valve Manifold Boxes / Enclosures:
Valve Manifold Box CGA G-13 Requirements:
1. Description–Nothing in Code says you can’t use a Manual VMB - Section 8.2.4.1
a. CAN BE Controlled Automatically
b. Emergency Gas Shutoff & Purging MAY BE Accomplished with Automated VMB
2. Branch Purging –from Non Dedicated Source if Backflow Prevention - Section 8.2.4.2
3. Gas Monitoring –Section 8.2.4.3
a. Same as Gas Cabinet per - Section 11.1.2
b. Activation of Gas Monitoring Shuts Source of Gas (at VMB or Cabinet)
4. Flame Detection – Section 11.2.2
a. Same as Gas Cabinet per - Section 11.2.2
b. Activation of Flame Monitoring Shuts Source of Gas (at Cabinet)
5. Fire Protection – VMBs not Mentioned – Section 12.3
6. Ventilation Systems – Section 13.2
a. Same as Gas Cabinet Requirements – See Table 6 for Exhaust Flow Rates
7. Supervisory Control Requirements – Section 17.1
a. Exhaust & Gas Monitoring, Flame Detection
CGA G-13 Requirements for Valve Manifold Boxes
• Individual Stick Shutdown
• Z-Purge in Controller
• Tool Gas Monitoring Shuts Down Stick VMB Gas Monitoring Shuts Down the Cabinet
• Emergency Shutdown
• Exhaust Monitoring
• Enclosure Design to Eliminate Pocketing
• UVIR Flame Monitor
• High Flow Enclosure
Silane Gas Installation Supplement:
• Supplement from UNIDOCS based on
California Fire Code helps when
applying for Silane permit.
• Covers Key Code Aspects of Silane
Systems and points to where in your
submittals they reside.
Summary of Air Products Internal Safety Requirements for Silane
(note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place)
U.S. Requirements
All Silane
Systems
•
•
•
•
•
•
•
•
•
•
UVIR Detector
Gas Monitor
Exhausted Enclosure for Indoor Equipment
Dedicated Purge System
High Pressure not liquid bulk (Purge Source)
Overpressure Protection
Process Vent Dedicated to Silane
Continuous Purge on Vent Line
Electrical Hazardous Area Protection
Secondary Containment (recommended)
•
•
•
•
•
•
•
•
•
Trickle Purged Vent Header
Welded Fittings / Breakable Connections
Process Vent
Vacuum System
Backflow Prevention
Cylinder Isolation Valves
Pressure Indication
Compatible Materials
Equipment and Hazard Labels
Additional
Requirements
for Enclosed
Systems
•
•
•
•
•
Access / View Port for Distribution Systems
Access Port for Source Systems
Exhaust Monitor
Automatic Door and Window Closures
Ventilation > 250 times potential Leak Rate
•
•
•
•
Separation Plates or Individual Cabinets
150 ft/min Min – Open Window Velocity
200 ft/min Ave – Open Window Velocity
No Pocketing in Enclosure
Additional
Requirements
for Source
Systems
•
•
•
•
•
•
•
•
RFO in Source Container Valve
0.010” RFO Max for Cylinders
Sprinkler
Captured Bonnet Relief Vents
Emergency Shutoff System
Excess Flow Protection
Metal Separation Plates
Remote Emergency Stop
•
•
•
•
•
•
•
•
12 gauge Sheet Metal for Enclosures
Pressure Regulation
Controller
Cylinder Restraints
Provisions for Seismic Anchoring
All-Welded Pigtail
Automated Purging
High Pressure Leak Test
Summary of Air Products Internal Safety Requirements for Silane
(note: Any exceptions to these requirements require a Hazop / Safety Review to ensure equivalent protection is in place)
U.S. Requirements
All Silane
Systems
•
•
•
•
•
•
•
•
•
•
UVIR Detector – Sec 11.2.2
•
Gas Monitor – Sec 11.1.2
•
Exhausted Enclosure for Indoor Equipment – Sec 7.11 •
Dedicated Purge System – Sect 15.2
•
High Pressure not liquid bulk (Purge Source) – Sec 15 •
Overpressure Protection – Sec 10.2.6
•
Process Vent Dedicated to Silane - Sec 10.1.4.3
•
Continuous Purge on Vent Line – Sec 14.5.1
•
Electrical Hazardous Area Protection – Sec 16 & 17.1 •
Secondary Containment (recommended) - Sec 10.1.3 •
Additional
Requirements
for Enclosed
Systems
•
•
•
•
•
Access / View Port for Distribution Systems
• Separation Plates or Individual Cabinets - Sec 6.4.2
Access Port for Source Systems – Sec 8.2.2
• 150 ft/min Min – Open Window Velocity – Table 6
Exhaust Monitor – Sec 13.2.5
• 200 ft/min Ave – Open Window Velocity – Table 6
Automatic Door and Window Closures
• No Pocketing in Enclosure – Sec 13.2.4
Ventilation > 250 times potential Leak Rate – Sec 13.2.3
Additional
Requirements
for Source
Systems
•
•
•
•
•
•
•
•
RFO in Source Container Valve – Sec 10.2.4
0.010” RFO Max for Cylinders – Sec 10.2.4.1
Sprinkler – Sec 12.3.1
Captured Bonnet Relief Vents – Sec 10.2.2.3
Emergency Shutoff System – Sec 10.2.3
Excess Flow Protection – Sec 10.2.5
Metal Separation Plates – Sec 6.4.2
Remote Emergency Stop – Sec 10.2.3
•
•
•
•
•
•
•
•
Trickle Purged Vent Header
Welded Fittings / Breakable Connections – Sec 10.1.2
Process Vent – Sec 10.1.4.3 & Sec 14
Vacuum System – Sec 13.2
Backflow Prevention – Sec 10.2.2 & Sec 15.3.1
Cylinder Isolation Valves – Sec 8.1.2 & Sec 9.3.2
Pressure Indication – Sec 15.3.2
Compatible Materials – Sec 7.10 & Sec 10.1.4.3
Equipment and Hazard Labels – Sec 8.2.2.2 & 10.1.6
Check Valves on Purge Gas - Sec 15.4.2
12 gauge Sheet Metal for Enclosures
Pressure Regulation – Sec 10.2.2.2
Controller – Sec 6.4.1 & Sec 6.4.1.2
Cylinder Restraints
Provisions for Seismic Anchoring
All-Welded Pigtail -Sec 10.1.2
Automated Purging – Sec 15.1
High Pressure Leak Test - Sec 10.1.5
In Closing:
1. Silane can be Deadly
2. Your local AHJ “Authority Having Jurisdiction” needs to be involved in the
process before you bring this gas in – Provide “Silane Gas Installation
Supplement” for headache relief
3. Always enlist a qualified Engineering Firm – knowledgeable about Silane - to
help design and assure compliance with all Applicable Standards & Codes
•
ANSI/CGA G-13 - NFPA 318 & 55 – IFC Chapters 18, 27, 30 & 41
•
FM Global 7-7 - EMI S18
4. In conjunction with your Engineering Firm, develop a Silane Procedures
Manual and Train your Technicians how to operate/maintain the systems
properly
5. Don’t sidestep a Quality Gas System because it’s more expensive than you
budgeted.
a. Find companies like ours that manufacture high quality systems and are familiar
with Code and Safety requirements
b. Make sure that their systems are CGA Code G13 Compliant
6. Purchase a copy of the Standard and read it.
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