EE436 – INTRODUCTION TO MICRO & NANOELECTRONICS
- COURSE OVERVIEW & INTRODUCTION DR. JHONATHAN PRIETO ROJAS (JPROJAS@KFUPM.EDU.SA)
OFFICE HOURS: U,T: 10-11AM; W: 12-1PM or by appointment (also
available @ MS Teams)
MY BACKGROUND
• Master’s degree and PhD degree in electrical engineering from King Abdullah
University of Science and Technology (KAUST)
• Research interests include novel micro- and nanofabrication techniques for energy
harvesting and flexible and stretchable electronics
• Joined KFUPM as Assistant Professor from Fall 2015
http://faculty.kfupm.edu.sa/ee/jprojas/
3µm
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MY BACKGROUND
➢ Study and development of a Kirigami-based Thermoelectric Generators:
HOT
P-type
N-type
COLD
➢ Development of Fractal-based Electrodynamic Screens for Dust Removal:
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Why is this course relevant nowadays?
A growing semiconductor industry is being developed in the Kingdom!
https://twitter.com/i/status/1509446309618540544
“Authorities are exploring
strategies for developing a vibrant
semiconductor industry in the
Kingdom.”
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TOPICS OVERVIEW
❖ Semiconductor materials and devices fundamentals.
❖ Fundamental microfabrication processes.
❖ Characterization techniques.
❖ Transistor’s manufacturing.
❖ MEMS.
❖ Introduction to Nanotechnology.
❖ Emerging technologies and applications.
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CX IN MECHATRONICS
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COURSE-LEVEL STUDENT LEARNING OUTCOMES (CLO S)
▪ Describe the main micro- and nano-manufacturing techniques.
▪ Recognize and discuss emerging technologies described in scientific papers related
to micro- and nanotechnology.
▪ Recognize the impact and challenges of emerging technologies related to micro- and
nanotechnology.
▪ Work in groups to produce a literature review on a subject relevant to micro- and
nanotechnology.
▪ Orally report a literature review on a relevant subject to micro- and nanotechnology.
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GRADE DISTRIBUTION
➢ Attendance
– 3%
➢ Assignments (x5)
– 12%
➢ Quizzes (x5)
– 18%
➢ Literature Rev. Report
– 7%
➢ Literature Rev. Presentation
– 10%
➢ Midterm Exam (week#9)
– 20%
➢ Final Exam
– 30%
GUIDELINES FOR ATTENDANCE: (more details in syllabus)
Starting from the 3rd unexcused absence → 0.5% deduction per absence.
9th unexcused absences → DN
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TEXTBOOK
 Slides and reading material will be provided.
Electronic references:
 Sami Franssila, Introduction to Microfabrication, 2nd Edition, Wiley & Sons. Inc., 2010.
 J. D. Plummer, P. B. Griffin, Integrated Circuit Fabrication: Science and Technology, Cambridge
University Press, 2022.
Other useful references and material:
 John D. Cressler, Silicon Earth: Introduction to Microelectronics and Nanotechnology, 2nd Edition, CRC
Press, 2015.
 Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, 3 rd Edition, CRC Press, 2011.
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INQUIRY-BASED LEARNING (IBL) IMPLEMENTATION
✓ Engage students ➔ Real-world connections ➔ Exploration + questioning.
✓ Students research issues and questions to develop knowledge or solutions.
✓ Go beyond general curiosity into critical thinking and understanding.
Implementation Plan:
➢ Lab visits.
➢ Interactive assignment.
➢ Reading exercises & class discussions.
➢ Research, Writing and Presentation exercises.
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LAB VISITS (TENTATIVE)
Sputtering Tool:
Photovoltaic Laboratory
CORERE
KFUPM
SEM Tool:
Core Lab
KFUPM
Virtual Experience:
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SCALES (MACRO /MICRO / NANO)
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http://www.nikon.com/about/sp/universcale/index.htm
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“POWER OF MINIATURIZATION”
ENIAC (1940)
It had 17,468 vacuum tubes
Weight: 30 tons
Area: 2.5 x 25 meters
Consumed 150 kW
It cost $500,000 (~$6 million today)
KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
Apple M2 Ultra (June 2023)
It has 134 billion transistors
Weight: few grams
Area: 10 x 15 mm
Laptop consumes 50-60 W
Laptop cost $1000-$2000
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TRANSISTOR COUNT AND MOORE’S LAW
100b!
1946
1958
~80 billion neurons
in our brains!
1960
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TECHNOLOGY EVOLUTION
- Silicon Age KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
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INTRODUCTION TO
MATERIALS
(SEMICONDUCTORS)
MATERIALS’ CLASSIFICATION
➢ Conductors (Superconductors, semimetals)
➢ Semiconductors (large range)
➢ Insulators (low-k / high-k dielectrics)
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SEMICONDUCTORS
- A material whose conductivity lies between that of conductors
(copper) and insulators (glass)  Single-element – such as germanium and Silicon.
 Compound – such as gallium-arsenide.
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Periodic Table of Elements
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SEMICONDUCTORS (BASIC CONCEPTS)
CHEMICAL BONDS:
• Valence electron – they participate in the formation of chemical bonds.
• Atoms with 1 or 2 valence e- more/less than closed shell are highly
reactive.
• Covalent bond – chemical bond in which two atoms share a pair of
electrons.
• It is a stable balance of attractive and repulsive forces → Stronger
bond.
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SILICON
 Four valence electrons
 Requires four more to complete outermost shell (octet rule)
 Each pair of shared e- forms a covalent bond
 The atoms form a crystal/lattice structure
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CRYSTALLINE STRUCTURE
Types of Solids:
Amorphous
Polycrystalline
Single-crystal
Crystalline material: atoms, ions or molecules are orderly arranged.
➢ Most semiconductors are crystalline materials.
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SILICON CRYSTAL
Single Crystalline Silicon
(a.k.a. monocrystalline)
“Diamond” Structure
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SILICON CRYSTAL ORIENTATION
• A direction in crystal coordinates is
denoted
by square
e.g. [100]
Some
directions
andbrackets,
planes have
a
•higher
The set
of symmetrically
equivalent
density
of nodes. These
highdirections
is written
with braces,
density
planes
can influence
thee.g.
<100> of the crystal. For instance,
behavior
•some
The fundamental
plane perpendicular
to a direction
properties
are is
denoted
with parentheses,
e.g. such
(100) as:
directly
related
to this density,
• The set
of symmetrically
Optical:
Refractiveequivalent
index.
planes
is writtenCharge
with curlybrackets,
Electrical:
mobility. e.g.
{100}
3D Silicon Model: https://sketchfab.com/3d-models/silicon-crystal-lattice-73e292f32ffe4ca490e166faeba317e7
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