IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 56, NO. 2, FEBRUARY 2009 337 Maximum Junction Temperatures of SiC Power Devices Kuang Sheng, Senior Member, IEEE Abstract—This paper presents a detailed physical analysis on the junction temperatures, thermal stabilities, and thermal runaway effects of self-heating unipolar SiC power devices. Results reveal that the risk of thermal runaway could limit the usable junction temperature of these SiC devices to substantially lower than 200 ◦ C, regardless of the device size and the cooling method used. Index Terms—BJT, high temperature, JFET, MOSFET, power device, Schottky barrier diodes (SBD), SiC. I. INTRODUCTION M ANY PAPERS have reported the operation of nonpower SiC devices at temperatures as high as 600 ◦ C and pulsed testing of power SiC devices at 300 ◦ C−400 ◦ C, demonstrating the ability of SiC material and the physical junctions to withstand high temperatures [1]–[4]. However, detailed analysis and investigation have not been available on the capability of SiC power devices in a realistic power electronic circuit where they need to dissipate a significant amount of heat. In such a circuit, due to the self-heating effect, the junction temperature of a power device is significantly higher than the ambient temperature. The maximum current and power ratings of a power device are typically limited by the maximum junction temperature of the device. Such self-heating imposed limit can have the following two different physical mechanisms. 1) Switching and conduction losses of the power device cause its junction temperature to increase beyond the material temperature limit (> 800 ◦ C for SiC). At those high temperatures, excessive and exponentially increasing leakage current quickly damages the integrity of the semiconductor or other materials used to fabricate the power device. 2) Device switching and conduction losses cause its junction temperature to rise. An increasing junction temperature leads to more device losses and hence sets up a positive feedback mechanism. A thermal runaway can be triggered at a temperature that is much lower than critical temperatures of the materials. Most silicon power devices fail with mechanism “1)” described earlier, and their current/power ratings are set Manuscript received October 2, 2008. Current version published January 28, 2009. The review of this paper was arranged by Editor M. A. Shibib. The author is with the Department of Electrical and Computer Engineering, Rutgers University, Piscataway, NJ 08854 USA (e-mail: ksheng@ece. rutgers.edu). Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TED.2008.2010605 accordingly. For SiC power devices, however, mechanism “1)” is unlikely going to be the reason that is limiting their current-/ power-handling capability due to its high intrinsic temperature. They will more likely be limited by the following: i) ohmic/ Schottky contact metal temperature limit; ii) passivation/ packaging materials used; or iii) mechanism “2).” In this paper, the effect of mechanism “2)” described previously on the current-/power-handling capability and maximum junction temperature of SiC power devices will be analyzed and discussed in detail. It will be shown that this mechanism can, in some cases, seriously limit our ability in fully realizing the SiC material potential on power devices. Possible approaches that can be taken to alleviate such limitation will also be discussed. II. THERMAL STABILITY OF A SELF-HEATING POWER DEVICE A typical cross-sectional view of a packaged SiC power device mounted on a heat sink is shown in Fig. 1(a). Its steadystate thermal equivalent circuit is included in Fig. 1(b). For the thermal circuit to stabilize, the following equation has to be satisfied: TJ − Tamb = Ploss (TJ ) ∗ θJ−A (1) where TJ is the device junction temperature, Tamb is the ambient temperature, Ploss (TJ ) is the junction temperaturedependent device power loss, and θJ−A is the total junction-toambient thermal resistance. While detailed discussion may lead to some variations, θJ−A is taken as temperature independent in this paper. A. Temperature Dependence of Device Loss The total power device loss under a given circuit load condition [Ploss (TJ ) in Fig. 1(b)] comprises the current conduction loss and switching loss. The conduction loss of a power device can be written as 2 RON (TJ )D = ILOAD VON (TJ )D PCON (TJ ) = ILOAD (2) where ILOAD is the current going through the device, RON (TJ ) is the effective device resistance, VON (TJ ) is the ON-state voltage, and D is the current conduction duty cycle. The device resistance (or ON-state voltage) usually increases quickly with 0018-9383/$25.00 © 2009 IEEE Authorized licensed use limited to: Tsinghua University. Downloaded on September 29,2024 at 07:48:58 UTC from IEEE Xplore. Restrictions apply. 338 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 56, NO. 2, FEBRUARY 2009 Fig. 1. (a) Cross-sectional view of a typical thermal system for a SiC power device and (b) its steady-state equivalent thermal circuit. Fig. 2. Amount of power generated by a 4H-SiC epitaxial resistor (0.17 Ω at 300 K) versus junction temperature at different current levels. Also shown in the figure is the power dissipation line with θJ _A = 20 K/W. Fig. 3. Steady-state temperature versus current for a 4H-SiC epitaxial resistor (0.17 Ω at 300 K). junction temperature. As an example, resistance of a uniformly doped N-type 4H-SiC epitaxial layer is given by [5] power dissipation line and the power generating curves are the steady-state operating points for those current levels. It is seen that when the current increases to above a certain level, an intersection point between the curve and the linear line cannot be found, indicating a thermal runaway condition. As shown in Fig. 2, the highest current that the considered epitaxial resistor can conduct is 4.15 A, corresponding to a junction temperature of 238 ◦ C. A better illustration is shown in Fig. 3 where the steadystate device junction temperature is plotted against its current level for the resistor described earlier. The steady-state device junction temperature increases at an accelerated rate with increasing current. While 4.15 A and 238 ◦ C are the theoretical maximum device current and junction temperature, respectively, one cannot use the device at this level in a practical application, as safety margins will be needed. If a 10% current safety margin is applied (I = 90% ∗ 4.15 A), the device junction temperature drops sharply to 110 ◦ C. This is much lower than the temperature potential of SiC material which promises to remain reliable at temperatures as high as 600 ◦ C. The thermal runaway temperature of this device can also be calculated by substituting (2) and (3) into (1) and set RON (TJ ) = RON_300 K T 300 2.4 (3) where RON_300 K is the resistance at room temperature. An epitaxial resistor is used in the following example, as it provides the intrinsic structure for all unipolar SiC power devices. B. Junction Temperatures of a Self-Heating Power Device With (1)–(3), the junction temperature of an intrinsic 4H-SiC unipolar power device can be calculated for a given set of device structural parameters and application conditions. In Fig. 2, the amount of power generated by an epitaxial resistor (R = 0.17 Ω at 300 K) is plotted against junction temperature when conducting different current levels. Clearly, due to electron mobility degradation, the resistor generates more power with increasing junction temperature. Also plotted in the same figure is a linear line depicting the amount of power that can be continuously dissipated by the cooling system with a total thermal resistance (θJ−A ) of 20 K/W. The intersecting points between this linear Authorized licensed use limited to: Tsinghua University. Downloaded on September 29,2024 at 07:48:58 UTC from IEEE Xplore. Restrictions apply. SHENG: MAXIMUM JUNCTION TEMPERATURES OF SiC POWER DEVICES 339 Fig. 4. Steady-state temperature versus current with different junction-to-case thermal resistances and ambient temperatures for a 4H-SiC epitaxial resistor (0.17 Ω at 300 K). ∂ILOAD /∂TJ = 0. Simple mathematical derivation will lead to the following thermal runaway condition: TJ _ max = Pmax = α Tamb α−1 (α − 1)α−1 Tamb αα θJ−A (4) where α = 2.4 is the exponent used in (3), TJ _ max is the thermal runaway temperature in kelvins, Tamb is the ambient temperature in kelvins, and Pmax is the maximum power that can be dissipated continuously. This result is surprisingly simple and indicates that the thermal runaway temperature is independent of the device resistance and cooling method. It is only related to the ambient temperature. To verify (4) and study the effect to a fuller extent, the maximum junction temperatures of the SiC epitaxial resistor under other packaging and ambient conditions have also been studied by evaluating junction temperature against current with different θJ−A values (20, 10, and 5 K/W) and at ambient temperatures (−50 ◦ C, 27 ◦ C, and 100 ◦ C). The results are shown in Fig. 4, from which a few interesting observations can be made. First, as predicted, as in (4), the maximum junction temperature (TJ _ max ) remains constant for a given ambient temperature, regardless of how the device is cooled (θJ−A ). Better cooling only increases the device current capability but not its TJ _ max . The TJ _ max values are 108 ◦ C, 238 ◦ C, and 365 ◦ C for ambient temperatures of −50 ◦ C, 27 ◦ C, and 100 ◦ C, respectively. This is in good agreement with (4). With a similar 10% current safety margin, the maximum usable device junction temperature for these three ambient temperatures will drop to 15 ◦ C, 110 ◦ C, and 209 ◦ C, respectively. This is surprisingly low for SiC devices. Fig. 5. Maximum junction temperature and current for a 4H-SiC epitaxial resistor (0.17 Ω at 300 K) at different ambient temperatures. A 10% margin for maximum current is also considered. θJ _A = 5 K/W. Second, the maximum junction temperature rise above ambient (ΔT = TJ − Tamb ) is higher at a higher ambient temperature. This indicates that thermal runaway is less likely in a hotter environment and that the device can dissipate more power in those ambient temperatures. In Fig. 5, the maximum junction temperatures and currents at thermal runaway are plotted against ambient temperature. Also included in the figure are the maximum temperatures and currents when a 10% margin is considered for the current in a practical application. The big gap between device temperatures at Imax and 90% ∗ Imax , as explained previously, is clearly evident. III. THERMAL STABILITY OF SiC POWER DEVICES The temperature dependences of losses from SiC switching devices (MOSFET, BJT, and JFET) in a practical power electronics application can differ from that of a resistor. The switching losses of these devices can be generally considered to be temperature independent due to a lack of conductivity modulation. This even includes BJT [3] since no reliable evidence of significant conductivity modulation has been reported in the literature (despite a few such claims). On the other hand, the conduction losses of conductivity-modulation-free devices are mainly determined by the carrier (most likely electron) mobility and hence increase significantly with junction temperature. Due to the unique structure of each device, their temperature dependence differs from each other and will be discussed in detail hereinafter. A. Junction Temperatures of SiC Power Devices in Conduction-Loss Dominant Mode In many power electronic circuits, power device losses are dominated by their conduction loss. The following paragraphs discuss the maximum junction temperatures for 4H-SiC Schottky barrier diodes (SBDs), JFETs, BJTs, and MOSFETs. Authorized licensed use limited to: Tsinghua University. Downloaded on September 29,2024 at 07:48:58 UTC from IEEE Xplore. Restrictions apply. 340 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 56, NO. 2, FEBRUARY 2009 Fig. 6. Steady-state temperature versus current with different junction-tocase thermal resistances and ambient temperature for a 4H-SiC SBD (1.2 kV and 10 A). 1) 4H-SiC SBDs: The forward-voltage drop of an SBD comprises an offset voltage related to Schottky barrier (VB ) and a resistive component proportional to the current, as described in the following: VON = VB (TJ ) + ILOAD ∗ RON (TJ ). (5) The differential resistance RON arises from the drift region and it increases with temperature in the same way as the epitaxial resistor discussed in Section II. VB decreases somewhat with temperature, and its temperature dependence can be empirically fitted based on [6] VB (TJ ) = VB0 + C1 TJ + C2 TJ2 (6) where VB0 , C1 , and C2 are fitting constants. Based on (3), (5), and (6), the SBD junction temperature can be analyzed based on (1) for various ambient temperatures and θJ−A . The results are shown in Fig. 6. While the figure is similar to Fig. 6, there are a few key differences. First, the thermal runaway takes place at a higher temperature, particularly when the thermal resistance θJ−A is high. Second, TJ _ max is dependent on θJ−A . With a 10% current margin considered, the maximum usable junction temperatures that such a 1.2-kV 10-A device can operate with θJ−A = 5 K/W are 226 ◦ C (8.8 A), 143 ◦ C (10.3 A), and 71 ◦ C (12.5 A) for ambient temperatures of 100 ◦ C, 27 ◦ C, and −50 ◦ C, respectively. This is somewhat higher than a pure SiC resistor analyzed in Section II but still significantly lower than the SiC material potential. The differences between the SiC SBD and epitaxial resistor can be attributed to the offset voltage (VB ) that decreases at higher temperature. It helps to slow down the increase of device loss with temperature, and hence, it makes the SBD less prone to thermal runaway. 2) 4H-SiC JFETs and BJTs: Due to the lack of conductivity modulation and other nonresistive voltage-drop contributor, the forward I–V curves of 4H-SiC JFETs and BJTs under typical operating current densities behave just like a resistor. The voltage-drop temperature dependences of these devices also follow the 2.4 power law shown in (3) [7]–[9]. As a result, the thermal runaway temperatures of these two devices can be expected to be the same as what have been shown in Figs. 3–5. (It is assumed that the SiC JFET and BJT considered also have a 0.17-Ω resistance at 300 K. However, the thermal runaway temperatures would remain the same for other device sizes.) 3) 4H-SiC MOSFETs: As the most favored transistors in SiC, 4H-SiC MOSFETs have experienced great difficulty in perfecting their MOS interface for high channel electron mobility and good device reliability and stability. On the other hand, the imperfect MOS interface has also given rise to a channel electron mobility that increases with increasing temperature, which is exactly the opposite of the trend for that in other devices (e.g., Si MOSFET, SiC JFET, etc.). Since MOSFET channels reported by different groups have different imperfections, the temperature coefficients of the overall device resistance can be positive or negative, depending on the manufacturer and the temperature range considered [7], [10]. Nevertheless, resistances of all of these MOSFETs do not increase as quickly as those of the epi-resistance discussed previously. As a result, they are significantly less prone to the thermal runaway problem highlighted earlier. Quantified analysis on their maximum junction temperatures is not included here due to the large variation of MOSFET performances among different groups and their fast-changing nature at this point. B. Junction Temperatures of SiC Power Devices in Switching Mode In power electronics applications other than those mentioned in Section III-A, SiC device switching losses cannot be ignored. As discussed in the beginning of Section III, switching losses for the devices considered can be treated as independent of junction temperature. As a result, thermal runaway conditions for these applications will be different from the conductionloss-dominated case presented in Section III-A. If the total device loss is dominated by the temperature-independent switching losses, then the positive feedback described in mechanism “2)” in the introduction of this paper will not take place, and thermal runaway will not happen. Therefore, the maximum device junction temperature and thermal runaway analysis will depend on the relative percentages of conduction and switching losses, which can differ greatly from application to application. However, there have been reports in the literature that conduction loss and switching loss should be the same if an optimum device size is chosen [11]. Based on this assumption, the thermal stability analysis of various SiC power devices presented in Section III-A will be reexamined in this section. 1) 4H-SiC SBDs: During transient operation, SBDs operate in much the same way as a nonlinear parallel-plane capacitor. With only displacement current involved, no energy loss can be resulted in this device during such transients (note that the same is not true for p-i-n diodes). As a result, the power loss of a SiC SBD is always conduction loss dominated (neglecting leakage loss). The thermal stability and maximum junction temperature of the SiC SBDs in switching circuit are the same as that presented in Section III-A. Authorized licensed use limited to: Tsinghua University. Downloaded on September 29,2024 at 07:48:58 UTC from IEEE Xplore. Restrictions apply. SHENG: MAXIMUM JUNCTION TEMPERATURES OF SiC POWER DEVICES 341 excursions above TJ _ max predicted in this analysis without causing thermal runaway. IV. INTERPRETATION AND DISCUSSION OF RESULTS Fig. 7. Steady-state temperature versus current with different junction-to-case thermal resistances and ambient temperatures for 4H-SiC JFETs and BJTs. The on-resistance at 300 K is set to 0.17 Ω, and the device switching loss is assumed to be the same as the conduction loss at 300 K. 2) 4H-SiC JFETs and BJTs: As explained before, temperature dependences of the conduction loss and switching loss of SiC JFETs and BJTs are virtually the same. The two devices are discussed together in this paper on the thermal stability aspect. The steady-state junction temperatures of a SiC JFET (or BJT) are recalculated in the same approach as that in Section II by including switching losses. To make it comparable to the analysis based on SiC epitaxial resistor, the JFET/BJT analyzed here is also assumed to have a resistance of 0.17 Ω at 300 K. Based on the optimum assumption cited earlier, the device switching loss is assumed to be the same as the conduction loss at 300 K. The junction temperature versus current curves are shown in Fig. 7 with different junction-to-case thermal resistances and ambient temperatures. With 10% current margin, SiC JFETs and BJTs can be used safely up to temperatures of 243 ◦ C, 157 ◦ C, and 72 ◦ C for the three ambient temperatures considered. This is substantially higher than the corresponding TJ _ max (209 ◦ C, 110 ◦ C, and 15 ◦ C) when switching loss was not considered. It is clear that SiC JFETs and BJTs can be used for higher junction temperatures when switching loss is present. The thermal stability of these devices will be even better if the switching loss accounts for a higher percentage of the total losses. 3) 4H-SiC MOSFETs: The thermal stability of MOSFETs with switching losses considered is also expected to be better than the conduction-loss-dominated case. For the same reason as in Section III-A, quantified analysis for MOSFETs is not included here. It is worth noting that the discussion here assumes highfrequency repetitive device switching and that the junction temperature fluctuation within a switching cycle is neglected. For applications with low duty-cycle current pulses and large junction temperature fluctuation, dynamic thermal impedance will need to be considered. The junction temperature can have The analysis in Section III shows that, depending on the device type and whether switching loss is significant in the circuit, the SiC power devices analyzed in this paper could have substantially different thermal runaway effect. SiC JFETs and BJTs are predicted to encounter this problem at surprisingly low temperatures (e.g., TJ _ max = 238 ◦ C when Tamb = 27 ◦ C) when their switching losses are negligible compared to conduction losses. This happens for all device sizes, packages, and cooling methods as long as the junctionto-ambient thermal resistance (θJ−A ) is constant (true for most practical cases). The picture becomes drastically bleaker for a designer when a 10% (or more) margin is considered when choosing the maximum device current to avoid thermal runaway. The usable device junction temperature has to be limited to 110 ◦ C (Tamb = 27 ◦ C), a level far below what is expected from a SiC device. Such constraints on device junction temperature may be relieved when device switching losses account for a significant portion of the total device loss. For a given application where the load current and device gate driver are fixed, thermal stability can be improved by adopting a larger device die size which will decrease conduction loss and increase switching loss. SiC SBDs are less prone to the thermal runaway problem due to the negative temperature coefficient on its forward I–V curve offset voltage. It encounters the thermal runaway problem at temperatures around 200 ◦ C–300 ◦ C, depending on the total thermal resistance (θJ−A ). The usable junction temperature with 10% current margin is typically around 150 ◦ C and becomes worse when θJ−A is lower. One disadvantage of SiC SBD on this aspect is that the thermal stability issue cannot be relieved by introducing more frequent switching action because its switching loss is always negligible. Among these devices, SiC MOSFETs are projected to be much less prone to the thermal stability problem, thanks to the negative temperature coefficient of the imperfect channel resistance. It should be noted that the limitation on SiC device TJ _ max does not prevent them from handling high power density by simply adopting better cooling methods (a smaller θJ−A ). It should also be noted that all analyses in this paper are carried out by assuming a temperature-independent θJ−A . The situation can be even worse if θJ−A is dominated by thermal conduction and hence increases with the amount of power being dissipated. V. SUMMARY AND CONCLUSION In this paper, the thermal stability and thermal runaway problems of SiC power devices including SBDs, JFETs, BJTs, and MOSFETs have been analyzed in detail. Based on fundamental physical models and experimental data, steady-state junction temperatures of these devices have been calculated at different device currents, switching losses, junction-to-ambient thermal resistances, and ambient temperatures. Authorized licensed use limited to: Tsinghua University. Downloaded on September 29,2024 at 07:48:58 UTC from IEEE Xplore. Restrictions apply. 342 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 56, NO. 2, FEBRUARY 2009 The results reveal that, with the exception of MOSFETs, these devices may become thermally unstable (runaway) at junction temperatures as low as < 200 ◦ C, which are substantially lower than the superior capability of SiC material itself (> 800 ◦ C). Such limitation is particularly serious when conduction loss is dominant over switching loss and/or ambient temperature is low, regardless of the device size, packaging, and cooling methods used. The issue investigated in this paper warrants careful consideration and attention from researchers and engineers designing and using SiC power devices. The analysis carried out suggests that the maximum junction temperature of these devices can be improved by the following ways: 1) increasing the percentage of switching loss in the total losses; and/or 2) operating at a higher ambient temperature; and/or 3) using heat sinks whose thermal resistances decrease with increasing power dissipation and minimizing thermal resistance attributed to thermal conduction. [4] J. Richmond, S. H. Ryu, S. Krishnaswami, A. Agarwal, J. Palmour, B. Geil, D. Katsis, and C. Scozzie, “400 watt boost converter utilizing silicon carbide power devices and operating at 200 ◦ C baseplate temperature,” Mater. Sci. Forum, vol. 527–529, pp. 1445–1448, 2006. [5] M. Roschke and F. Schwierz, “Electron mobility models for 4H, 6H, and 3C SiC,” IEEE Trans. Electron Devices, vol. 48, no. 7, pp. 1442–1447, Jul. 2001. [6] Datasheet, Cree Inc., Durham, NC, 2008. [Online]. Available: http:// www.cree.com [7] H. Zhang, “Electro-thermal modeling of SiC power electronic systems,” Ph.D. dissertation, Univ. Tennessee, Knoxville, TN, 2007. [8] Y. Zhang, K. Sheng, M. Su, J. H. Zhao, P. Alexandrov, X. Li, L. Fursin, and M. Weiner, “Development of 4H-SiC LJFET-based power IC,” IEEE Trans. Electron Devices, vol. 55, no. 8, pp. 1934–1945, Aug. 2008. [9] Y. Tang, J. B. Fedison, and T. P. Chow, “High temperature characterization of implanted-emitter 4H-SiC BJT,” in Proc. IEEE/Cornell Conf. High Perform. Devices, 2000, pp. 178–181. [10] B. A. Hull et al., “Status of 1200 V 4H-SiC power DMOSFETs,” in Proc. ISDRS, 2007, pp. 1–2. [11] A. Q. Huang, “New unipolar switching power device figures of merit,” IEEE Electron Device Lett., vol. 25, no. 5, pp. 298–301, May 2004. R EFERENCES Kuang Sheng (M’99–SM’08) received the B.Sc. degree in electrical engineering from Zhejiang University, Hangzhou, China, in 1995 and the Ph.D. degree in electrical engineering from Heriot–Watt University, Edinburgh, U.K., in 1999. He was a Researcher with Cambridge University, Cambridge, U.K., for three years and is currently an Assistant Professor with the Department of Electrical and Computer Engineering, Rutgers University, Piscataway, NJ. His research areas include various aspects of power semiconductor devices and ICs on SiC, Si, and SOI. He has authored or coauthored around 80 technical papers in international journals and conferences, and he is the holder of a patent. [1] G. W. Hunter, P. G. Neudeck, R. S. Okojie, G. M. Beheim, J. A. Powell, and L. Chen, “An overview of high-temperature electronics and sensor development at NASA Glenn Research Center,” J. Turbomach., vol. 125, no. 4, pp. 658–664, Oct. 2003. [2] P. G. Neudeck, D. J. Spry, L. Y. Chen, R. S. Okojie, G. M. Beheim, R. Meredith, and T. Ferrier, “SiC field effect transistor technology demonstrating prolonged stable operation at 500 ◦ C,” Mater. Sci. Forum, vol. 556/557, pp. 831–834, 2007. [3] K. Sheng, L. C. Yu, J. Zhang, and J. H. Zhao, “High temperature characterization of SiC BJTs for power switching applications,” Solid State Electron., vol. 50, no. 6, pp. 1073–1079, Jun. 2006. Authorized licensed use limited to: Tsinghua University. Downloaded on September 29,2024 at 07:48:58 UTC from IEEE Xplore. Restrictions apply.
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