Power Matters.TM SiC MOSFET & Diode Roadmap September p 12,, 2016 DPG-PDM © 2016 Microsemi Corporation. Company Proprietary 1 SiC Capabilities Vs. Silicon © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 2 SiC Epitaxial Wafer Cross-Polarization History 2007 2008 2009 2010 2011 2012 2013 2014 doping stain Birefringence induced by lattice strain strain. A perfect crystal will produce a uniform appearance when viewed between crossed polarizers polarizers, as the polarized light rotation will be the same everywhere. Lattice strain induced by lattice defects, polytype inclusions, compositional in-homogeneities, etc. can all result in regions that induce locally different rotations of the polarized light. The local variations in light rotation are easily imaged with this technique, providing a picture of crystal quality. © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 3 18‐Sep‐09 9 29‐Jan‐10 0 22‐Feb‐10 0 12‐Mar‐10 0 1‐Apr‐10 0 16‐Apr‐10 0 16‐Jun‐10 0 5‐Aug‐10 0 3‐Feb‐11 29‐Apr‐11 1 26‐May‐11 1 1‐Aug‐11 1 2‐Nov‐11 1 19‐Dec‐11 5‐Jan‐12 2 22‐Feb‐12 2 9‐Apr‐12 2 26‐Jun‐12 2 5‐Nov‐12 2 20‐Feb‐13 3 26‐Feb‐13 3 13‐Mar‐13 3 15‐Mar‐13 3 20‐Mar‐13 3 1‐Apr‐13 3 19‐Apr‐13 3 23‐Apr‐13 3 10‐May‐13 3 30‐May‐13 3 28‐Jun‐13 3 19‐Jul‐13 3 2‐Aug‐13 3 30‐Aug‐13 3 3‐Sep‐13 3 13‐Sep‐13 3 27‐Sep‐13 3 17‐Oct‐13 3 29‐Oct‐13 3 22‐Nov‐13 3 3‐Jan‐14 4 24‐Jan‐14 4 25‐Jan‐14 4 7‐Feb‐14 4 31‐Mar‐14 4 17‐Apr‐14 4 9‐May‐14 4 22‐May‐14 4 30‐Jun‐14 4 1μm Thicknes ss [μm m] Epitaxial Layer Thickness 220-0402 Thickness Target = 12.5um target Dow G 2 Gen Gen2 Thickness Target = 10.5 Dow Gen 2 © 2016 Microsemi Corporation. Company Proprietary Denko Gen 2 Power Matters.TM 4 18‐Sep‐09 29‐Jan‐10 22‐Feb‐10 12‐Mar‐10 1‐Apr‐‐10 16‐Apr‐10 16‐Jun‐10 5‐Aug‐10 3‐Feb‐11 29‐Apr‐11 26‐May‐11 1‐Aug‐11 2‐Nov‐11 19‐Dec‐‐11 5‐Jan‐12 22‐Feb‐12 9‐Apr‐‐12 26‐Jun‐12 5‐Nov‐12 20‐Feb‐13 26‐Feb‐13 13‐Mar‐13 15‐Mar‐13 20‐Mar‐13 1‐Apr‐‐13 19‐Apr‐13 23‐Apr‐13 10‐May‐13 30‐May‐13 28‐Jun‐13 19‐Jul‐13 2‐Aug‐13 30‐Aug‐13 3‐Sep‐13 13‐Sep‐13 27‐Sep‐13 17‐Oct‐13 29‐Oct‐13 22‐Nov‐13 3‐Jan‐14 24‐Jan‐14 25‐Jan‐14 7‐Feb‐14 31‐Mar‐14 17‐Apr‐14 9‐May‐14 22‐May‐14 30‐Jun‐14 1015 Dopin ng concentra ation m-3] [cm Epitaxial Layer Doping Dow Early Gen 2 Dow Gen 2 © 2016 Microsemi Corporation. Company Proprietary Denko Gen 2 Gen 2 Doping Target = 6E15 0402 Doping Target = 5.3E15 target Dow Gen 2 Power Matters.TM 5 © 2016 Microsemi Corporation. Company Proprietary 30‐Jun‐14 22‐May‐… … 9‐May‐14 17‐Apr‐14 31‐Mar‐… … 7‐Feb‐14 25‐Jan‐14 24‐Jan‐14 3‐Jan‐14 22‐Nov‐13 29‐Oct‐13 17‐Oct‐13 27‐Sep‐13 13‐Sep‐13 3‐Sep‐13 30‐Aug‐13 2‐Aug‐13 19‐Jul‐13 28‐Jun‐13 30‐May‐… … 10‐May‐… … 23‐Apr‐13 19‐Apr‐13 1‐Apr‐13 20‐Mar‐… … 15‐Mar‐… … 13‐Mar‐… … 26‐Feb‐13 20‐Feb‐13 5‐Nov‐12 26‐Jun‐12 9‐Apr‐12 22‐Feb‐12 5‐Jan‐12 19‐Dec‐11 2‐Nov‐11 5Å RM MS Surrface R Roughn ness[Å Å] Epitaxial Layer Surface Roughness Denko D k Gen 2 Power Matters.TM 6 200 D Defect count [per 100mm waffer] Epitaxial Layer Defect Count © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 7 Special Processing Contrast to Silicon Technology • Dopant introduction by implant at elevated temperatures • Dopant activation, implant damage anneal at high temperatures • No diffusion • High temperature gate oxidation • Above translates into all layer removal post dopant introduction for electrical activation • Alignment is critical E220 Production Implanter CentroTherm CHV-100 P t Implant Post I l t Annealing A li tto 1700°C © 2016 Microsemi Corporation. Company Proprietary Hi Temp Oxidation SiC MOSFET Gate Oxidation Power Matters.TM 8 SiC MOSFET Transistor X-Section poly gate source p-well N- drain epitaxyt Doping Concentra ation [cm-3] Source (N14) # Athena simulation Voltage blocking p-well (Al27) Vth adjust p-well (Al27) Depth [µm] • Simulation-based technology development to cut cycles of learning • Flexibility of design variations for special applications • Thick Thi k Al Al-Cu C metallization t lli ti ffor iinterconnect t t and db bond d pads d • Dual layer metal process integration for maximized packing density • Thick final passivation for maximum reliability © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 9 Process Integration • P-well implants for reduced RDS(ON) contribution from JFET region o Vth adjustment implant o Voltage blocking implant • Balance between guard-ring, p-well voltage blocking enables UIS capability • Topology conforming backend metallization for high yield Mask 1 M1 M2 p-well1 p-well1 pw1 M2 pw1 p-well2 p-well2 n-epitaxy n-epitaxy n-substrate n-substrate (A) (B) M1 M2 n+ source pw 1 Mask 3 M2 + pw n source 1 p-well2 p-well2 gate poly n+ source pw1 p+ n+ source pw1 p+ pw1 p-well2 p+ p-well2 p-well2 n-epitaxy n-epitaxy n-substrate n-substrate (C) n+ source pw1 n+ source p+ gr p-well2 n-epitaxy p y n-substrate (D) © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 10 Microsemi SiC MOSFETs Voltage Current RDS(ON) Part Number 700V 35A ~100mΩ APT35SM70B APT35SM70S TO-247 D3 Mid-August TO-247 D3 SOT-227 Mid A Mid-August t New Package Samples Availability 700V 70A 53 Ω 53mΩ APT70SM70B APT70SM70S APT70SM70J 700V 130A 33mΩ APT130SM70B APT130SM70J TO-247 SOT-227 End-July 1200V 25A 140mΩ APT25SM120B APT25SM120S TO-247 D3 Early-August APT40SM120B APT40SM120S APT40SM120J APT80SM120B APT80SM120S APT80SM120J TO‐247 D3 SOT‐227 TO-247 TO 247 D3 SOT-227 APT5SM170B APT5SM170S TO-247 D3 N New 1200V 40A 80mΩ 1200V 80A 40mΩ 1700V 5A 800 Ω 800mΩ © 2016 Microsemi Corporation Mid-June then Early-July Mid J ne Mid-June then Mid-July E l O t b Early-October © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 12 What Makes A High Speed Switch Typical Transistor Gain Characteristics ft fmax Transistor switching speed Transistor i power gain i gm ft Cgs Cgd ft f max rg Cgd ft © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 13 gm @ 10A, 1 10V gm Optimization gm g m’ g m' gm 1 g m Rs Rs RDS(ON) @ 10A 10A, 20V • Packing density (without increasing parasitic capacitance) • Source resistance minimized (gm vs. RDS(ON) plot) o Perfection of source contact formation o Push the limit on gate/source overlap without trading manufacturability © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 14 DC Characteristics Key to Switching Performance N Normalize ed RDS(ON) Best in Class RDS(ON) vs. Temperature 2.2 2.1 2 19 1.9 1.8 1.7 16 1.6 1.5 1.4 1.3 1.2 1.1 1 09 0.9 Competitor 2 1200V, 30A, 80mΩ Competitor 1 1200V, 36A, 80mΩ Microsemi APT40SM120B 1200V, 40A, 80mΩ 25 50 75 100 125 150 175 200 Tj [°C] • Lower RDS(ON) at temperature provides higher ceiling for continuous current rating © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 16 RG & Dynamic Performance Turn-On Turn-Off +20V +20V Gate driver ON Gate driver ig OFF RG(MOSFET) RG(MOSFET) OFF ON Ciss 20V RG driver RG MOSFET Ciss ig MOSFET ig t 0 MOSFET ig t 0 20V RG driver RG MOSFET • High gate resistance limits available charging current current, consequently consequently, retards transistor switching performance © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 17 Ultra Low Gate Resistance Minimized Switching g Energy gy Loss & Higher g Switching g Frequency q y 10 9 8 RG (Ω) 7 6 Competition High RG 5 4 3 2 Microsemi Low RG 1 2 3 4 Compettitor 2 Compettitor 1 Oscillation-free with minimal external RG 1 APT40SM M120B 80m mΩ 0 APT50SM M120B 50mΩ 0 5 Microsemi © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 18 High Transconductance (gm) Cuts ton Microsemi ID [A] gm [S] competitor 1 † VD=0.1V VG [V] • 2× gm at the start of the turn-on turn on process © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 19 High Transconductance (gm) Cuts ton Microsemi (RG=7Ω) Intentionally added external Rg to show case high gm Competitor p 1 ((RG=0Ω)) 25 20 Microsemi 50mΩ (7Ω) 10 Microsemi 50mΩ (0) 5 0 70 60 D 50 40 30 20 10 0 12,000 Comp 1 (0)Microsemi 1.E+01 ID solid=7Ω dashed=0 Ω Id [[A] VG 1.E+02 15 V 1 E+00 1.E+00 competitor 1 1.E-01 Sub-threshold S b th h ld slope: l Shallow junction and good interface quality Pon 10,000 8,000 competitor 1 6,000 1.E-02 0 4 000 4,000 2,000 Microsemi 0 -20 -10 0 10 20 Time [ns] 30 40 50 5 10 15 20 Vg [V] • Superior sub-1A gm jumps start the turn-on process © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 20 Maximum Switching Frequency, fmax 1.E+06 Total switching time ≤ 5% switching period Microsemi APT50SM120B 1200V, 50A, 50mΩ fmax fmax [Hz] [Hz] 1.E+05 Limitation 1 Competitor 2 1200V, 30A, 80mΩ Thermally limited switching frequency 1.E+04 Microsemi APT40SM120B 1200V, 40A, 80mΩ Limitation 2 † T =150°C; T =75°C j c 1.E+03 0 10 20 30 40 50 60 IDID [A] [A] Dynamic performance breakaway enablers: • Superior Eon (ton) due to high gm, ultra low RG • Superior Eoff due to extremely low RG (yet oscillation free with very low external RG) • Low RDS(ON) at high temperatures extends switching frequency and current capability © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 21 Superior Short Circuit Withstand Microsemi Competitor 1 8.5µs • Microsemi Microsemi’s s 80mΩ SiC MOSFET demonstrates 25% longer short circuit capability © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 22 Superb Avalanche Ruggedness Unclamped inductive load VDD v L APT40SM120B di dt Vg=20V Id=20A (1200V/80mΩ/40A) Max Vd=2225V DUT gate poly p+ n+ source pw1 pw1 p-well2 n+ source p+ gr 2 3J (20A) 2.3J p-well2 n-epitaxy n-substrate • Competitor1 not UIS rated, competitor2 GEN2 1200V/80mΩ/36A Ea=1J 1J (20A) © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 23 SiC MOSFET Technology Reliability Assessment Field-driven intrinsic weakness in bulk SiC materials SiC gate oxide, interface quality Gate oxide lifetime High temperature reverse bias (HTRB) Positive bias temperature instability (PBTI) Negative bias temperature instability (NBTI) • 2000hrs VDD=960V @ 175°C • 2000 hrs VG=+20V @ 175°C • 2000 hrs VG=-20V @ 175°C Timedependent dielectric breakdown (TDDB) • Constant current stress to breakdown © 2016 Microsemi Corporation. Company Proprietary Stacking faults growth in epitaxial wafers Body diode forward bias stress • 100A/cm2 forward current through body diode Power Matters.TM 24 Die Size Scaling Larger=More capacitance=More Switching Loss? Difference Between On/OFF (not described by Qg characteristic) 20 † Inductive switching IV 18 turn-on 16 14 12 Id [A] 10 8 6 4 turn-off 2 0 0 100 200 300 400 500 600 700 Vd [V] • Turn-on: An energizing process with transistor gm generator hard at work p • Turn-off: Capacitive • Area under the dynamic load-line: Eon>Eoff © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 26 Gate Charge (Qg) Characteristic linear saturation sC CA < CC SA > Sc ON sA 450 OFF 700 • Plateau voltage: g gm ((but note: Qg characteristic has no gm action,, i.e.,, high g gm does not speed things up due to the very choked gate current contrast to real switching. Further, more gate charge does not mean higher switching loss necessarily) • Slope of Vg in region A: Capacitance at weak turn-on (CA) • Flatness of Vg in region B: Degree of saturation • Slope of Vg in region C: Capacitance at strong turn-on (CC) No contribution to switching power loss (Vd=0) Cgg Cgd CC 10V CA © 2016 Microsemi Corporation. Company Proprietary Vth Vgs=d 1kV Vds=g27 Power Matters.TM Low Current Qg @ 10A Vd 25 40A (10A) VG 1E+03 80A (10A) VG 40A (10A) VD 80A (10A) VD APT80 (solid) APT40 (dashed) 20 1E+02 Vg [V] 1E 01 1E+01 VD [V] † Transistor size Vg [V V] 15 Vd [V] 10 APT80=2× APT40 δ=3V 9V 1E+00 6V 5 -5 5.0E 0E-5 5 0 0 0E+0 0.0E+0 -5 1E-01 5 0E-5 5.0E 5 1 0E-4 1.0E 4 1 5E-4 1.5E 4 2 0E-4 2.0E 4 Time [s] No Eoff APT80 2 5E-4 2.5E 4 1E-02 • Apparent: Bigger transistor=More capacitance (Vg slope, slope duration) • Not so obvious: Bigger transistor=Lower Vplateau=Higher gm • Turn-on: gm-dictated process bigger transistor wins • Turn-off: Eoff worse for the bigger transistor (Eoff is purely capacitance) • Etotal remains constant (current/capacitance scaling) equal for big and small @ low/moderate currents © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 28 High Switching Current 180 APT80(1200V/80A) +20V +18V APT40(1200V/40A) +16V 160 140 +14V 120 ID [A] +20V +18V +16V 100 +14V 80 +12V 60 40 +8V +8V 20 +6V +6V 0 ON 0 5 10 15 VDS [V] 450 OFF 700 • VG required for a larger transistor to support a given current is lower • @ a given high switching current, VG of a smaller transistor is required to climb to a higher value to support ID in the turn-on process Lag in VD fall f time to complete turnon Eon ↑ © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 29 High vs. Low Switching Current Qg (for APT40SM) 25 1E+03 APT40 (10A) VG APT40 (60A) VG APT40 (10A) VD APT40 (60A) VD Vd 20 1E+02 60A 15 Vg [V] 10 1E+01 VD [V] Vg [V V] 10A Vd [V] 60A 5 10A 1E+00 5.0E 0E-5 5 -5 0 0.0E+0 0 0E+0 5 0E-5 5.0E 5 1 0E-4 1.0E 4 1 5E-4 1.5E 4 Time [s] -5 1E-01 • In contrast to 10A o 60A pushes the transistor to higher Vg (more saturated) to support current o Transistor struggles to support the current o Higher Vd is required o Lag in Vd fall results o Note the worse gate voltage slope indicative of higher gate capacitance at higher Vg (no contriution to loss) © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 30 High Current Qg @ 60A (APT40 vs. vs APT80) 25 1E+03 Vd APT40 (60A) VG APT80 (60A) VG APT40 ((60A)) VD APT80 (60A) VD APT40 (dashed) 20 1E+02 APT80 (solid) Vg [V] 15 Vg [V] 12.4V δ=4.25V 10 1E+01 Vd [V] 8.15V 1E+00 5 5 0E 5 -5.0E-5 0 0 0E+0 0.0E+0 -5 1E-01 5 0E 5 5.0E-5 1 0E 4 1.0E-4 1 5E 4 1.5E-4 2 0E 4 2.0E-4 2 5E 4 2.5E-4 Time [s] 1E-02 No Eoff APT80 • Smaller transistor screaming for gm (requires higher Vg to support high current) • The falling of Vd slows toward the end of Miller plateau onset of saturation for smaller transistor to support current at a higher Vd • Lag in Vd dissipates more power during turn-on © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 31 High Current Turn-On Lag • @ a given i hi h switching high i hi currents o Smaller transistor lags in gm required to sweep to a higher voltage (Vg, Vd) o Smaller S ll ttransistor i t tturn-on lag l lleads d tto higher turn-on switching loss G, VD/10 [V] VVG g, Vd/10 [V] 50 1200V/40A (dashed) 1200V/80A (solid) Vd/10 160 140 120 40 100 40A 80A 30 80 60 20 40 Vg 10 • A smaller transistor can only support a high switching current at a higher Vds due to saturation, i.e., drain voltage never falls sufficiently leading to the increase of switching/conduction loss conduction loss a bigger transistor is needed Id [A] IID d [A] 60 20 0 0 60000 50000 PPon [V] ON [W] 40000 40A 80A 30000 20000 conduction loss due to saturation 10000 0 1E‐8 1E‐7 1E‐6 Time [s] Time [s] © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 32 Transistor Size Scaling Summary • Larger transistor Lower conduction loss (RDS(ON)) • For a given voltage • @ low/moderate switching current Equal Etotal performance • @ high switching current Larger transistor has lower switching loss • At a switching current where drain voltage fails to complete its fall Transistor size cannot support the current and a bigger transistor is required © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 33 Microsemi 700V SiC MOSFET Benchmarked Against 700V Silicon Superjunction MOSFET Microsemi SiC MOSFET APT70SM070B: 700V, 53mΩ Silicon Superjunction MOSFET IPW65R045C7: 700V, 45mΩ Norm malized RDDS(ON) (to 25°C) Thermal Friendly SiC MOSFET 2.5 2.4 23 2.3 2.2 2.1 2 19 1.9 1.8 1.7 1.6 15 1.5 1.4 1.3 1.2 11 1.1 1 0.9 Silicon Superjunction MOSFET 700V/45mΩ SiC MOSFET 700V/53mΩ 25 50 75 100 125 150 175 200 Tj [°C] • For silicon superjunction MOSFET, conduction loss deteriorates rapidly with temperature while SiC MOSFET remains temperature insensitive insensitive. • Switching/conduction loss deteriorates at high current/temperature due to saturation © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 35 Norm malized RDDS(ON) (to 25°C) Thermal Friendly SiC MOSFET 2.5 2.4 23 2.3 2.2 2.1 2 19 1.9 1.8 1.7 1.6 15 1.5 1.4 1.3 1.2 11 1.1 1 0.9 Silicon Superjunction MOSFET 700V/45mΩ SiC MOSFET 700V/53mΩ 25 50 75 100 125 150 175 200 Tj [°C] • For silicon superjunction MOSFET, conduction loss deteriorates rapidly with temperature while SiC MOSFET remains temperature insensitive insensitive. • Switching/conduction loss deteriorates at high current/temperature due to saturation © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 36 Silicon Superjunction MOSFET Qg ~ 1.5× 700V/53mΩ SiC MOSFET (dotted) 50 1E+3 3E-9 700V/45mΩ superjunction MOSFET (solid) Vd 45 1200V/40A 40 30 Vg [V] 25 1E+1 Vd [V] 20 Vg 15 Crss [F] 1E+2 35 2E-9 t turn-on 1E-9 C 10 1E+0 5 0 0.0E+0 ‐5 A 0E+0 1E-2 B 5.0E‐5 1.0E‐4 1.5E‐4 Time [s] 2.0E‐4 1E-1 2.5E‐4 1E‐1 1E+0 1E+1 1E+2 1E+3 Vds=g [V] • Plateau Vg silicon superjunction MOSFET lower stronger gm (μn, die size) • Slope of Vg in region A o SiC MOSFET steeper lower input capacitance Ciss in region A (Vth) o SiC breakdown field 7.3× Allows heavier doping for a given breakdown voltage o For F a given i breakdown b kd voltage lt and d RDS(ON) SiC MOSFET has h a smaller ll die di size i o Silicon superjunction MOSFET die size 1.67× • Flatness of Miller plateau (region B) o Flat for silicon superjunction MOSFET More saturation o Never flat for SiC MOSFET Much less saturation More current capability • Region C slope of Vg post Miller plateau (Cgg of Vg>Vth) No contribution to loss © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 37 Qg Characteristic Summary Features in gate Switching performance charge implication characteristic gm plateau voltage SiC MOSFET Silicon superjunction MOSFET turn-on loss - + (die size, mobility) - Input capacitance slope(Vg) switching loss + (die size, integration, y ) layout) Miller capacitance duration of Miller plateau (till Vd falls sufficiently) switching loss (+) (die size, integration, layout) - Saturation flatness of plateau switching current, temperature capability + - linear saturation sC CA < CC SA > Sc ON sA 450 OFF © 2016 Microsemi Corporation. Company Proprietary 700 Power Matters.TM 38 SiC MOSFET Module Product Roadmap The SiC MOSFET Module product range is based upon: • Two die sizes S5F04 and S5F05 • Two voltage ratings (700V and 1200V) • APT70SM70D (700V /53 mOhms typ, 60 mOhms max) • APT40SM120D (1200V/80 mOhms typ, 100 mOhms max) • APT140SM70D (700V/30 mOhms typ, 35 mOhms max) • APT80SM120D (1200V/40 mOhms typ, 55 mOhms max) © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 39 SiC MOSFET Module Product Roadmap Electrical configurations • Boost Chopper • Buck Chopper • Single switch • Phase leg • Full bridge • Triple phase leg © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 40 Packaging and power density To achieve the best switching performance and highest integration level a custom approach totally dedicated to the application efficiency target and mechanical constraints is the ultimate solution Duplicated +DC terminals Distributed +DC and – DC terminals for ceramic capacitors decoupling Thermal sensor G&S OUT Duplicated -DC terminals Example of a high current, high frequency, high voltage SiC MOSFET phase leg © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 41 Packaging and Power Density Module performance and reliability depend on assembly material choice h i Material Base Substrate Die CTE (ppm/K)) (pp Thermal conductivity (W/m.K) Thermal CTE conductivity Rthjc (K/W) (ppm/K) (W/m K) (W/m.K) Density (g/cc)) (g CuW 6.5 190 17 Silicon Die (120 mm2) or SiC Die (40mm2) AlSiC 7 170 2.9 Cu/Al2O3 17/7 390/25 0.35 Cu 17 390 8.9 AlSiC/Al2O3 7/7 170/25 0.385 Cu/AlN 17/5 390/170 0.28 Al2O3 7 25 - AlSiC/AlN 7/5 170/170 0.31 AlN 5 170 - AlSiC/Si3N4 7/3 170/60 0.31 Si3N4 3 60 - DBC s ub s t rat e So ld er J o int Si 4 136 - So ld er SiC 2.6 370 - 4 136 Dice Bas e More closely matched TCEs of materials increases module lifetime. Higher thermal conductivity maximizes thermal performance Engineered materials such as AlSiC provide substantial weight reductions (up to 50%) over traditional copper material. © 2016 Microsemi Corporation. Company Proprietary • AlSiC and Alumina offer best CTE matching • AlN and d Si3N4 on AlSiC offer ff higher thermal performance with good CTE matching Power Matters.TM 42 Packaging and Power Density All full SiC Mosfet modules from Microsemi are built with Aluminium Nitride (AlN) substrate for best thermal p performance Si3N4 substrates is offered as an option Any full SiC power module can be converted from a standard t d d copper b base plate l t tto an AlSiC b base plate l t ffor extended operating temperature range and higher p cycling y g capability p y temperature © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 43 Packaging and Power Density SiC technology is capable of high temperature operation All Microsemi SiC MOSFET modules use high temperature solder alloy for die attach as a standard to allow maximum junction temperature operation As SiC technology will improve, high temperature solder alloy ll will ill b become a lilimitation it ti ffor extreme t jjunction ti temperatures operation Ag sintering technology is the future for SiC devices assemblyy © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 44 Packaging and Power Density Basic Ag sintering process As printed 200-300ºC 3 After sintering Organic cap Ag Nano particle During Sintering process solvents and organic cap escape, exposing pure silver core to allow particles to coalesce and form solid conductive Ag structure © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 45 Packaging and Power Density Ag is an ideal Die Attach Material Melting range Density CTE Tensile strength Modulus Thermal conductivity Electrical resistivity Material °C g/cm3 ppm/°C MPa GPa W/m.K µΩcm Silver 962 10.5 20 140 76 419 1.6 287-296 11 29 29 - 27 8.5 80Au20Sn 280 14.5 16 276 59 57 16 96 5S 3 5A 96.5Sn3.5Ag 221 74 7.4 30 38 50 58 12 5 12.5 92.5Pb5Sn2.5Ag Ag paste is processed at 250°C – 300°C under pressure to form pure Ag interface After processing , Ag paste acts as bulk Ag with a melting point of 962°C Density (85 to 90%) • Thermal conductivity: 200 – 300 W/m.K W/m K • Electrical resistivity: 2 – 2.5 µΩcm • No intermettallic phases formed Ag paste allows highest thermal performance and reliability © 2016 Microsemi Corporation. Company Proprietary Power Matters.TM 46 Thank You Microsemi Corporation (MSCC) offers a comprehensive portfolio of semiconductor and system solutions for communications,, defense & security, y, aerospace p and industrial markets. Products include high-performance g p and radiationhardened analog mixed-signal integrated circuits, FPGAs, SoCs and ASICs; power management products; timing and synchronization devices and precise time solutions, setting the world's standard for time; voice processing devices; RF solutions; discrete components; enterprise storage and communication solutions, security technologies and scalable antitamper products; Ethernet solutions; Power-over-Ethernet ICs and midspans; as well as custom design capabilities and services. Microsemi is headquartered in Aliso Viejo, Calif., and has approximately 4,800 employees globally. Learn more at www.microsemi.com Microsemi Corporate Headquarters One Enterprise, Aliso Viejo, CA 92656 USA Within the USA: +1 (800) 713-4113 Outside the USA: +1 (949) 380-6100 Sales: +1 1 (949) 380-6136 380 6136 Fax: +1 (949) 215-4996 email: sales.support@microsemi.com www.microsemi.com Microsemi makes no warranty, representation, or guarantee regarding the information contained herein or the suitability of its products and services for any particular purpose, nor does Microsemi assume any liability whatsoever arising out of the application or use of any product or circuit. The products sold hereunder and any other products sold by Microsemi have been subject to limited testing and should not be used in conjunction with mission-critical equipment or applications. Any performance specifications are believed to be reliable but are not verified, and Buyer must conduct and complete all performance and other testing of the products, alone and together with, or installed in, any end-products. Buyer shall not rely on any data and performance specifications or parameters provided by Microsemi. It is the Buyer’s responsibility to independently determine suitability of any products and to test and provided by y Microsemi hereunder is p provided “as is,, where is” and with all faults,, and the entire risk associated with such verifyy the same. The information p information is entirely with the Buyer. Microsemi does not grant, explicitly or implicitly, to any party any patent rights, licenses, or any other IP rights, whether with regard to such information itself or anything described by such information. Information provided in this document is proprietary to Microsemi, and Microsemi reserves the right to make any changes to the information in this document or to any products and services at any time without notice. ©2016 Microsemi Corporation. All rights reserved. Microsemi and the Microsemi logo are registered trademarks of Microsemi Corporation. All other trademarks and service marks are the property of their respective owners. TM © 2016 Microsemi Corporation. Company Proprietary Power Matters. 47
