7/11/2024 Class Content Grading Policy • Crystal Structure • Lithium Niobate and Thin-Film Lithium Niobate • PLZT, BTO • Presentation and Reports • PPT file (20~30 Slides) • Report (2~3 Pages) • Content: • Focus on any inorganic materials, semiconductor materials, or their related measurements • Bonus Points: • Voluntary presentation at the last class: additional bonus points will be awarded • Contact: lu@cm.kyushu-u.ac.jp • Your attendance will not be checked 1 1 2 2 Types of Solids I. Crystal Structure Three general types of solids: (a) Amorphous (b) Polycrystalline (c) Crystalline 3 3 4 4 7/11/2024 Lattice and Unit Cell Crystal • Lattice: A regular periodic arrangement of points in space, such as the arrangement of atoms or molecules in a crystal. Each point in the lattice is a lattice point, which can be an atom, a group of atoms, an ion, or a molecule. • Unit Cell: A small volume of a crystal that can be used to reproduce the entire crystal. • In a very broad sense, crystal means something that repeats. • So even a wallpaper with a repeating pattern is a crystal! Two-dimensional representation of a single crystal lattice. 5 5 A two-dimensional representation of a single crystal lattice 6 with various possible unit cells. 6 Crystals are composed of a periodic array of atoms: 1-dimensional crystal (1D periodic structures) The structure of all crystals can be described in terms of a lattice, with a group of atoms attached to each lattice point called basis: Basis (Unit Cell) + Lattice = Crystal Structure + = To obtain the whole crystal structure one has to translate the UNIT Cell to each LATTICE POINT 7 7 8 8 7/11/2024 Different choices of unit cell 2-dimensional crystal (2D periodic structures) 9 9 10 10 Crystal Lattice Cubic Unit Cell • Crystal lattice is the mathematical object, describing the periodicity of crystal structure. • Do not confuse crystal lattice with crystal structure. • Crystal structure is Unit Cell Crystal Lattice. • To get the whole crystal structure, one has to translate the unit cell to all lattice points. All sides equal length All angles are 90 degrees 11 11 12 12 7/11/2024 Face Centered Cubic (FCC) Unit Cell • (a) The crystal structure of copper is Face Centered Cubic (FCC). The atoms are positioned at well-defined sites arranged periodically and there is a long-range order in the crystal. • (b) An FCC unit cell with closed packed spheres. • (c) Reduced sphere representation of the FCC unit cell. Examples: Ag, Al, Au, Ca, Cu, y-Fe (>912℃), Ni, Pd, Pt, Rh FCC lattice structure has high packing density 13 13 14 14 Body Centered Cubic (BCC) Unit Cell Atomium in Brussels has BCC structure ! Examples: Alkali metals (Li, Na, K, Rb), Cr, Mo, W, Mn, 𝛼-Fe (< 912℃), 𝛽-Ti (>882℃). Body centered cubic (BCC) crystal structure. (a) A BCC unit cell with closely packed hard spheres representing the Fe atoms. (b) A reduced-sphere unit cell. 15 15 16 16 7/11/2024 Diamond Crystals The diamond crystal is a covalently bonded network of carbon atoms. Each carbon atom is bonded covalently to four neighbors forming a regular threedimensional pattern of atoms which constitutes the diamond crystal. The diamond structure can also be interpreted as two Interpenetrating FCCs. 17 17 18 18 Hexagonal Structure Carbon nanotube (1D Crystal) Carbon nano-tubes are formed by rolling a single layer of graphene. These are used to make quantum devices! 19 19 20 20 7/11/2024 Basic Crystal Strutures Other Crystal Structures The easiest 3-D lattice to work with is the simple cubic lattice (SCC) which has lattice points on all the corners of a cube. The Cubic (Isometric) crystal system is characterized by its total symmetry. It has three crystallographic axes that are all perpendicular to each other and equal in length. The cubic system has one lattice point on each of the cube's four corners. Crystal structures which are combinations of these are also possible. (a) Simple (a) Body centered (c) Face centered 21 21 22 22 Miller Indices Step 1: Identify the intercepts on the x-, y- and z- axes. In this case the intercept on the x-axis is at x = a ( at the point (a,0,0) ), but the surface is parallel to the y- and z-axes - strictly therefore there is no intercept on these two axes but we shall consider the intercept to be at infinity ( ∞ ) for the special case where the plane is parallel to an axis. The intercepts on the x-, y- and z-axes are thus Intercepts: a, ∞, ∞ Step 2: Specify the intercepts in fractional co-ordinates Co-ordinates are converted to fractional co-ordinates by dividing by the respective cell-dimension - for example, a point (x,y,z) in a unit cell of dimensions a x b x c has fractional co-ordinates of ( x/a, y/b, z/c ). In the case of a cubic unit cell each co-ordinate will simply be divided by the cubic cell constant, a . This gives Fractional Intercepts: a/a, ∞/a, ∞/a i.e. 1, ∞, ∞ Step 3: Take the reciprocals of the fractional intercepts This final manipulation generates the Miller Indices which (by convention) should then be specified without being separated by any commas or other symbols. The Miller Indices are also enclosed within standard brackets (….) when one is specifying a unique surface such as that being considered here. The reciprocals of 1 and ∞ are 1 and 0 respectively, thus yielding Miller Indices: (100) 23 Miller Indices (Examples) Assignment Intercepts: a, a, ∞ Fractional intercepts: 1, 1, ∞ Miller Indices: (110) 23 24 Assignment Intercepts: a, a, a Fractional intercepts: 1, 1, 1 Miller Indices: (111) Assignment Intercepts: 1/2a, a, ∞ Fractional intercepts: ½, 1, ∞ Miller Indices: (210) 24 7/11/2024 XRD – X-ray diffraction 25 25 26 26 where d is the spacing between diffracting planes, θ is the incident angle, n is any integer, and λ is the wavelength of the beam 27 27 28 28 7/11/2024 Several Atomic Planes and Their d-spacings in a Simple Cubic - Review 29 29 30 30 Semiconductor Materials • possible elements for making semiconductor materials • Si most well-known semiconductor. C(Carbon) and Ge (Germanium) can also be semiconductors. • Other possibilities combinations of III and V group. e.g. GaAs (Gallium Arsenide ) A portion of the periodic table Group III Group IV Group V B Al C P Ga Si As In Ge Sb 31 31 32 32 7/11/2024 The differences between crystalline (crystals) and amorphous (glasses) solids Crystalline Solids (Crystals) Amorphous Solids (Glasses) Shape Polyhedral shape with naturally formed faces No naturally formed faces Properties Anisotropic Isotropic Atomic structure Periodic (long range ordered) No periodicity, Shortorder only X-ray Diffraction Well separated diffraction picture with DISTINCT spots No clearly separated features Amorphous Si • Advantages • Low temperature deposition (~250℃) • Large area deposition possible at low cost • Disadvantages • Low conductivity • Cannot be used for high-speed circuits 34 33 33 34 Uses of Amorphous-Si Elemental and Compound Semiconductors • Single element → elemental semiconductor • More than one element → compound semiconductor Binary Semiconductor (2 elements): Si1-xGex, SiC Ternary Semiconductor (3 elements): AlxGa1-xP Quaternary Semiconductor (4 elements): AlGaAsP Properties of comp semi can be controlled by changing the concentration of the elements 35 35 36 36 7/11/2024 Polycrystalline-Si Growth of Semiconductor Materials • Growth from Melt • Epitaxial growth (MBE, MOVPE, etc.) 38 37 37 38 Growth from Melt 𝝁-Czochralski (Grain-Filter) Process with Excimer-Laser Silicon ingot from czochralski process Initially, holes which act as seeds are formed by photolithography. Then excimer laser is used to melt silicon. Square-shaped grains are formed at the seed locations. 39 39 40 40 7/11/2024 Epitaxial Growth • Single-crystalline layer growth on a single-crystalline substrate with the same crystal structure is referred to as Homo-epitaxy, for example, Si on Si. • Hetero-epitaxy is single-crystalline layer growth on a singlecrystalline substrate with a different crystal structure, such as Si on SiGe, AlGaAs on GaAs. • These processes can be achieved by means of: • Chemical vapor deposition (CVD) • Liquid Phase Epitaxy (LPE) • Molecular Beam Epitaxy (MBE) 41 41 42 42 Molecular Beam Epitaxy (MBE) Liquid Phase Epitaxy (LPE) 43 43 44 44 7/11/2024 Segregation Coefficient (k0) Floating Zone Method (for purifying silicon ingot) Floating zone method relies on the segregation coefficient. For this process to be used for purification this co-efficient should be less than 1. 45 45 46 46 Si Wafer Fabrication Ko D (× 10-4 cm2/s) B 0.8 2.4 AI 0.002 7.0 Ga 0.008 4.8 In 0.0004 6.9 C 0.07 2 P 0.35 2.3 As 0.3 3.3 Sb 0.023 1.5 O 1.40 3.3 Oxygen cannot be removed by floating zone method because its segregation coefficient is more than 1. The diffusion co-efficient (D) determines the speed of purification. 47 47 48 48