64 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL ED-16, NO. 1, JANUARY 1969 Large-Signal Analysis of a Silicon Read Diode Oscillator D. L. SCHARFETTER, MEMBER, IEEE, AND H. K. GUMMEL, Abstract—This paper presents theoretical calculations of the large-signal admittance and efficiency achievable in a silicon p-n-v-n Read IMPATT diode. A simplified theory is employed to obtain a starting design. This design is then modified to achieve higher efficiency operation as specific device limitations are reached in large-signal (computer) operation. Self-consistent numerical solutions are obtained for eguations describing carrier transport, carrier generation, and space-charge balance. The solutions describe the evolution in time of the diode and its associated resonant circuit. Detailed solutions are presented of the hole and electron concentrations, electric field, and terminal current and voltage at various points in time during a cycle of oscillation. Large-signal values of the diode's negative conductance, susceptance, average voltage, and power-generating efficiency are presented as a function of oscillation amplitude for a fixed average current density. For the structure studied, the largest microwave power-generating efficiency (18 percent at 9.6 GHz) has been obtained at a current density of 200 A/cm?, but efficiencies near 10 percent were obtained over a range of current density from 100 to 1000 A/cm*. ELF-CONSISTENT large-signal numerical solutions are obtained for equations which describe carrier generation and space-charge balance in a silicon p-n-v-n Read diode [1] microwave oscillator. The solutions describe the evolution in time of the diode and associated circuit (see Fig. 1). The of the detailed IEEE calculation, in addition doping profile of the diode (see Fig. 2) was evolved starting with de- to the enhancement of our understanding of the oscillation mechanisms, was to find conditions under which high efficiency and power output can be obtained, and to establish theoretical limits for these quantities. A rigorous optimization, however, was not attempted in this exploratory work. This would have had to start with carefully formulated constraints and would have constituted a very large-scale project. However, the largest efficiency obtained in the detailed numerical calculation reported here is 18 percent, in good agreement with the simplified theoretical estimate. The large-signal operating characteristics of the diode are calculated in the following two ways: A. Voltage Driven To study the performance at a given freguency, 1. INTRODUCTION S The aim MEMBER, but for various bias and load conditions, it is convenient to drive the diode with a sinusoidal voltage applied through a coupling capacitor [see Fig. 1(a)]. From such studies, the admittance at the fundamental freguency is obtained as a function of driving voltage amplitude. Likewise, the ac power delivered by the diode into the voltage generator is obtained. sign considerations discussed in [2], and reviewed here, B. and modified after initial results for improvement of efficiency. From the numerical solutions, the large-signal operating characteristics of the diode and the efficiency at the fundamental freguency (defined as ac power delivered by the diode divided by dc power dissipated) are computed. bedded in a resonant circuit [see Fig. 1(b)] and performs as a free-running oscillator. In as much as the ac voltage in the oscillator case is nearly sinusoidal, both calculations should, and indeed do, give comparable Read in his original paper [1] suggested that an efficiency of 30 percent should be obtainable in a silicon diode. This calculation, however, neglected the finite width of the avalanche region, and neglected the diff ence in hole and electron ionization coefficients in si con. A modification of Read's calculation, which includes the finite width of the avalanche region and the experimental values of ionization coefficients for silicon [3], is presented in Section II. It is found that the avalanche region must have an appreciable width for the diode to have high power capability and high efficiency. A theoretical efficiency of the order of 15 percent is obtained for conditions which should approach maximum power output. Manuscript received June 3, 1968. e suthors are with Bel Telephone Laboratories, Inc., Murray i Free-Running Oscillator For another series of calculations, the diode is im- results. In Section III, we present the large-signal operating characteristics and detailed solutions. The operating characteristics, i.e., admittance parameters, average voltage, and power generating efficiency, are shown as a function of diode ac voltage amplitude in Figs. 4 through 9. Fig. 10 is a diode admittance plot (small and large signal) which shows the variation of conductance and susceptance with oscillation amplitude and freguency. Also indicated are the power generating efficiencies. Fig. 10 is a compact presentation of the important results of this paper. Detailed solutions are pre- sented of the hole and electron concentrations, electric field, and terminal current and voltage at various points in time during a cycle of oscillation. These solutions are shown in Fig. 11 (Ja.—200 A/cm?, freguency > 11.4 GHz) and Fig. 12 (Js.-1000 A/cm?, freguency =13.4 GHz). The dynamics of charge-pulse buildup Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER AND GUMMEL: SILICON READ DIODE c |c1€ OSCILLATOR 65 one-half the average voltage drift region (a) c it € L $ €= Diode and associated circuit. (a) Voltage driven. (b) Free- running oscillator. Vel , (Vaed + Vaea) () the total dc voltage is divided between across the avalanche region Va the part and the part developed across the drift region Vue.p. Note that we are neglecting any appreciable average ac power contribution from the avalanche region; this is because the avalanche region voltage is inductively reactive relative d %59h to the particle current [4]. The displacement current is | Z capacitively reactive relative | % 0" to the diode voltage and therefore contributes no average ac power. The use of a | £ simple eguivalent circuit [4] for the avalanche region, z which is derived from small-signal considerations, may of course have no validity under large-signal conditions. â 10 However, we will use this approach as a starting point £ o' H H5y 5 2 109 14 where developed 1022 o 2 7 (b) Fig. 1. across the half the inverse transit time of the drift region), the motion of O, results under favorable conditions in an ac particle current which is =180 degrees out of phase with the ac voltage across the diode. The average of the particle current is the dc current Ja.. The particle current swing is, therefore, at most from zero to twice the dc current. For a sguare wave of particle current and a sinusoidal variation of drift voltage, both with magnitude and phase as described above, the microwave power-generating efficiency e is D o T'u.p developed [1], [2]. At the drift frequency (fp=one- for a simple design theory, and compare detailed merical calculations with the simple treatment. In S 4 5 6 DISTANCE IN MICRONS 7 s o in the avalanche region and drift through the drift region is in gualitative agreement with Read's original prediction of operation. Section IV presents conclusions, and the Appendix describes the time evolution computer program. II. SIMPLIFIED DIODE DESIGN In this section, we extend Read's efficiency calculation to include the dc voltage developed across the avalanche region, and to allow for the unegual ioniza- as appropriate it was assumed that no dc produce an ac particle current amplitude egual to the A versus distance. electrons, calculation, power loss was associated with the avalanche region since it was considered small in extent compared to the drift region, and that such an avalanche region could Fig. 2. Net impurity concentration of Read diode tion rates of holes and Read's nu- for silicon [3]. As pointed out by Read, high-power opera- dc current when operated at the drift freguency and operated with ac voltage amplitude egual to one-half the dc voltage [same assumptions as used above in deriving (1)]. Since Vu.4 was neglected compared to Vuep. Read predicted an efficiency of 1/m or about 30 percent. Small-signal calculations [1], [2], [4], [5] show that a resonance frequency f, is associated with any avalanche region, and that it increases as the sguare root of dc current. To obtain small-signal negative resistance reguires operation above this freguency. How- ever, operation of an avalanche region at a freguency well above its resonance freguency was found to result in very inefficient oscillations in a limited number of exploratory large-signal calculations that were completed on a variety of Read diode structures. Small-sig- tion reguires the generation of as large a charge pulse nal calculations in the freguency domain [2] showed an Quax as possible in the avalanche region, without a reduction of the electric field in the drift region below that reguired for velocity saturation when this charge moves optimum growth factor for small-signal oscillations occurring when the operating freguency was about 20 percent higher than the resonance freguency. Therefore, we take as a design criterion that the avalanche freguency of a Read diode should be related to the drift through the drift region. The motion of Quax through the drift region results in an ac voltage amplitude about Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. 66 IEEE evaluated frequency of the diode by the following condition: fp 1.2fn. 2 The small-signal constraint above, coupled with largesignal conditions imposed on the driít space to be discussed below, results in a tentative design for the Read diode which is analyzed numerically in this paper. The sguare of the avalanche region resonance freguency is proportional to the dc current density Juc, the carrier scattering limited velocity ./, and the partial derivative of the average ionization rate By for electrons in the avalanche region with respect to the average clectric field £4. is [1], [2], [4] An approximation for the relationship (nfa): = 2By'Jae/ e G) where e is the dielectric constant, and By’ the partial derivation of B, with respect to Êx. The dc voltage developed across the avalanche region is defined as Va = EaLa, and the dc voltage developed similarly defined as S across the drift region is Va = EpLp, where TRANSACTIONS-ON G) drift regions. With the definition of drift fo — /2Ly, (6) Tuep can be expressed as Vaen = Eptd/2fp. For 50-percent voltage (7 modulation ("™~} lucp), Onax from Gauss' theorem is about —eÊp/2. The ac particle current (which for 100-percent current modulation equals the dc current) eguals On,«fn; therefore, the dc bias current density for efficient operation of the drift space is proportional to freguency: Ja = «Enfp/2. ®) For ionization rates appropriate for silicon [3], we find, for junctions with breakdown fields between 3 and 4X10*V/cm, that the integral of the electron ionization rate with distance is not unity, as is the case for egual rates, but about 3: B, (9) 3. If we assume for simplicity that B, varies as the sixth power of E,, we obtain DEVICES, JANUARY conditions given (10), (8), and (Orfn)* m 2X 6 X 3 X Vaenfn*/Vaeas () for the by 1969 (7),is and with the condition on fs and fp given by (2) results in a relation between Ve and Vaep: Va > 11Vap. 12 This result is only gualitatively correct, since it is based on a combination of small-signal results for the avalanche region, and large-signal constraints on the drift region. Furthermore, the factor 2 in (3) and (11), the factor 6 in (10) and (11), and the factor 3 in (9) and (11) are all approximate, and depend to some extent upon dc bias, freguency, and oscillation amplitude. However, the gualitative result is important: the avalanche region voltage, for a Read diode designed for efficient high-power oscillator operation, is on the order of the drift voltage and not negligible as suggested by Read. This condition reduces the theoretical efficiency by about a factor of 2 (15 percent instead of 30 percent). Note that for Ge, GaAs, or other materials with nearly egual ionization rates, the factor 3 in (9) becomes a 1 and Va3 Vaep, hence the theoretical efficiency is of the order of 23 percent. IlI. LARGE-SIGNAL CALCULATION Ly and Ly are the effective widths of the av- alanche and freguency ELECTRON In this section, we discuss the precise large-signal operating characteristics of a particular Read diode oscillator, as obtained by a numerical calculation per- formed on a high-speed digital computer. Details of the computer program are discussed in the Appendix. Briefly, the approach is to obtain self-consistent numerical solutions for the eguations describing carrier transport, carrier generation, and space-charge balance in a one-dimensional semiconductor structure. The solutions describe the evolution in time of the diode and its associated resonant circuit. Basically, the program solves the following problem at various instances of time during a cycle of oscillation. Given the instanta- neous distribution of the hole and electron concentrations and terminal boundary conditions, how will the carriers move in time, i.e., how will the system, diode, and circuit time evolve? Given the carriers, the program determines the electric field by Poisson's eguation, and knowing the electric field and carrier concentrations, it obtaims the instantaneous hole and electron particle currents (including the dependence of carrier mobilities upon impurity concentration [7] and electric field strength generation [8], [9]). From the particle currents and net rate (including generation and tion by field-dependent impact ionization recombina- [3] and car- rier concentration-dependent single-level recombination centers [10], [11]), it obtains the time derivative of the or, using (9) and (4), By Equation 6 X 3/Vaca- (3), the avalanche resonance (10) relation, when carrier concentrations from the continuity equations. From the time derivatives of the carrier concentrations, the program computes the carrier distributions an instant in time later, and repeats the cycle. Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER AND GUMMEL: SILICON READ DIODE OSCILLATOR The diode operating characteristics are calculated for the diode imbedded in the circuit shown schematically in Fig. 1(a), and (b). The variation of diode negative conductance, susceptance, average voltage, and microwave power-generating efficiency with freguency, dc current density, and ac voltage amplitude was obtained with the circuit shown in Fig. 1(a). This method made it possible to control directly the freguency and ac voltage amplitude in the calculation and was employed to economize on computer time. Essentially the same 67 decreases with ac voltage amplitude when the average current is held constant. Large-signal results at large currents are more difficult shown in Fig. 1(a) (voltage to obtain with generator) the circuit because para- metric [12] efiects occur at large dc current densities. results were obtained with the circuit shown in Fig. 1(b), The susceptance shown in Fig. 5 is expressed as a “capacitance” and plotted in Fig. 7. The value is only slightly less than the depletion layer capacitance (1.9X107* F/cm?), with the largest deviation at the lower freguencies. The ratio of susceptance to conductance O is shown in Fig. 8, and the power-generating if the admittance of the load inductance L and load efficiencies are plotted in Fig. 9. conductance G were properly chosen. The coupling capacitor C served only to isolate the dc and ac portions of the circuit so that the dc current density could be directly controlled. The doping profile for the diode studied in detail is shown in Fig. 2. The corresponding steady-state elec- The conductance and susceptance values as an admirtance plot in Fig. 10. Results for between 6 and 13.4 GHz and ac volage between 0 and 38 volts are shown for a tric field versus distance for this diode is shown in Fig. 3. To simplify the sign convention on field and current density, the figures represent a #-v-n-p structure with the substrate on the left and the diffused junction on the right. Note that the donor density in the » region is not negligible, but causes a continuous fall-off of elec- tric field out to the substrate region. This doping profile evolved in trial runs to eliminate generation by impact ionization as the charge pulse of electrons passed through this region, while still allowing as large an average electric field in the drift region as possible (see Fig. 12(d) which illustrates this effect). density of 200 A/cm*. Also shown are shown freguencies amplitudes dc current are constant effi- ciency contours. The plot indicates, for example, that 10 percent efficiency is obtained at a freguency of 11.4 GHz with a voltage amplitude of 30 volts, while only 20 volts is required at 8.4 GHz. It was found that the efficiency increases with ac voltage until the electric field modulation is so large that, over the negative part of the voltage cycle, the field dropped so low that the carrier velocity was less than the saturated value. This occurs at considerably lower voltage amplitude for the lower freguencies (less than 7 GHz), and made it very difficult ro obtain steady-state solutions for these frequencies. Also, note the rapid increase in negative O (ratio of susceptance to conductance) with ac voltage ac amplitude. This would cause the efficiency to turn over continued until the limit cycle was obtained. The terminal current and voltage waveforms, during a limit cycle, were analyzed to investigate the variation of and decrease with further increases in ac voltage amplitude for devices with series lead and contact resistance, since the diode shunt negative resistance! is reduced by a factor of Q? in converting from a parallel to a series equivalent circuit. Jn a given run with fixed dc current density, voltage amplitude, and freguency, the program was diode characteristics at various values of oscillation amplitude. The three fundamental diode characteristics investigated are negative conductance, susceptance, and average voltage. Results are shown in Figs. 4, 5, and 6. The diode's large-signal negative conductance and susceptance values are effective values at the volt- age generator freguency obtained by Fourier analysis of the terminal current and voltage waveforms. Detailed results are shown for only one current density because of the great number of lengthy computer runs reguired to characterize completely the large-signal behavior. However, calculations made at other current densities (100 to 1000 A/cm?£) indicate that the results are gualitatively similar to the detailed results presented for a current density of 200 A/cm?. The magnitude of negative conductance increases up to about 1000 A/cm?, but the efficiencies obtained are less than at 200 A/cm*. The diode's susceptance is predominately due to the diode's space-charge capacitance, and therefore decreased with increasing current due to widening of the space-charge width. The average voltage increases with current density, but because of the rapid increase of ionization rates with electric field, the average voltage Detailed “snap shots” of the electric field, and hole and electron concentration as functions of distance during one cycle of steady-state oscillation are shown in Fig. 11. The “snap shots” arc shown at approximately one-fourth cycle intervals in Fig. 11(a) through (d). The figures are selected frames from a computer-made movie [6]. A phase plot of the terminal current 7 and voltage V of the oscillation is included Points to note are the following. in the figures. 1) The generation of pulses of holes and electrons begins where the voltage is a maximum; one-fourth cycle later, the charge pulses are fully formed and begin drifting into their respective drift spaces. 2) The holes disappear guickly from the active region while the electrons drift for approximately one-half cycle and constitute positive particle current while the ac voltage is negative. * The caleulation includes all losses that originate between the electrical contacts, i.e., substrate and avalanche space-charge resistances. Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. 68 IEEE TRANSACTIONS ON DEVICES, JANUARY 1969 = » o 160, ELECTRON o T \ » SUSCEPTANCE 120~ T ELECTRIC FIELD (VOLTS/Cm) »1O? — > b o> oe T—T—T—T 140 7.46Hz 6o— S Fig. 3. 4 s 6 7 DISTANCE IN MICRONS 0 Static electric field and particle current prol‘le versus distance in dc steady-state Read diode 7 L 20 30 40 AC VOLTAGE AMPLITUDE 50 Diode susceptance (mhos/cm?) as a function of ac voltage Fig. 5 amplitude for various fixed frequencies. Current density: A/cm?, DC VOLTAGE 87 o CONDUCTANCE 18, 20 30 40 AC VOLTAGE AMPLITUDE 50 60 Fig. 4. Diode negative conductance (mhos/cm?) as a function of ac voltage amplitude for various fìxed frequencies. Current: density 200 A/cm*. 200 o 10 l 20 1 30 | 40 AC VOLTAGE AMPLITUDE L 60 Fig.6, Diode aver e voltage as a function of ac voltage amplitude for various fixei d freguencies. Current density: 200 A/cm*, Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER AND GUMMEL: SILICON READ DIODE OSCILLATOR xJ0-9 1878 2 1.850l— B4, 24 150 e w s xmL 4 r g £ s< 1778 % 1.825)— EFFICIENCY w 1750~ 7.4 GHz, I 0 25 | 20 AC Fig. 7. 78+ s0 1725 T o 100 L 30 VOLTAGE 1 40 L 50 AMPLITUDE Diode susceptance expressed as an eguivalent capacitance (depletion layer capacitance amplitude for various fixed A/cm?, L L ! 20 30 40 AC VOLTAGE AMPLITUDE 60 1.9 X107? F /cm*) versus ac voltage freguencies. Current density: 200 L 50 60 Fig. 9. Power-generating efficiency versus ac voltage amplitude for A/cmt. various fixed frequencies. Current density: 21 1 2 3 SUSCEPTANCE -60 134 -3ol— -20l— 30 ovoLTs Ac - 20 o | 1 20 30 AC VOLTAGE AMPLITUDE 40 Fig. 8. Diode ( (ratio of conductance to susceptance) versus ac voltage amplitude for various fixed frequencies. Current density: 200 A/em?. -25 50 Fig. 10. 20 -i5 E CONDUCTANCE Diode admittance 54 -5 o o o (susceptance versus conductance) as a function of frequen cé and ac voltage amplitude, and resultant efficiency indicated. urrent density: 200 Â /cm?, Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. 70 IEEE 127 TRANSACTIONS 50 ok v ON ELECTRON DEVICES, JAN 'ARY 1969 27 m 50 1ok 402 v 49 2oekâon 7 H3 4303 g 08 && s e uL 708 ss g 2 a 208g & £h 04 S£ 4 J 10 “ H H J 2O 04k 8u 4 o o2t o L & 7 DISTANCE N MICRONS o 8 Z o8l H€ Jsos , H 2 H o2 Y 9 0 o o P I 2 AT 3 4 5 6 7 DISTANCE IN MICRONS (a) v 402: - G H os 7“ o5 2 ]F F bo a o £5E u u do E gni s e 3a o2k1z A3 . 4 5 6 DISTANCE IN_MICRONS (b) 7 . 8$ o s0 21 50 ol o o 9$ 10 (c) 12 n 1ok 8 N iok v \ 40 402 * ELECTRIC FIELD 2 E] «0a Âr s £06- â s HOUES o8 ELECTRONS < ]H s a u 2o w os z SgE dio ozt No 1z 3 4 5 & 7 DISTANCE IN MICRONS () 8 $ u k 10 Fig. 1. Solutions of hole and electron concentrations, electric field, and terminal current and voltage (values indicated by & on phase plot) at various polats in time for the diodeoperating at a frequency of 12.4 GHz, current density of 200 A/erm’, an efficiency of 12 percent. 3) For the next one-fourth cycle, the remnants of the electron charge pulse are swept out of the picture as the voltage again approaches its maximum value. 4) The displacement current is guite large and has an appreciable swing into the conventional forward direction, while the terminal voltage always remains in the conventional reverse polarity. 5) The behavior is as predicted by Read, except that for silicon diodes an extended avalanche region is reguired relative to the drift region to obtain the magnitude of charge pulse necessary for sufficient modulation of diode voltage and particle current for efficient oscillations. Efficient oscillations were also obtained at higher dc current densities by trial and error choices for the load conductance G and load inductance L. “Snap shots” of the oscillation at a dc current density of 1000 A/cm? are shown in Fig. 12(a) through (d). The largest efficiency obtained for this bias (9 percent) occurred at an operat- ing freguency oí about 13.4 GHz. Note that the carrier concentration scales differ by a factor of 5 between Figs. 11 and 12, as do the dc current densities. However, the large-charge pulse, for the 1000 A/cm? case, moving through the drift space results in a significant value of peak field near the substrate just as the electrons approach this region. If this peak field is too large, genera- Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER 60 AND GUMMEL: SILICON READ DIODE [ OSCILLATOR €0, n 9 50 v 9 * =Ê N $ H o < ¢ g 2 2 e 2 aof * o 1ok 01 TM 2 3 L L & 5 & 7 DISTANCE IN MICRONS (a) 8 'W | ! ga gS H g 20 g9 Sg u © 20 Jio iok Y, 12 3 4 5 DISTANCE IN L 6 7 MICRONS L 8 L 9 u u o. 0o () €0 T 50 6.0 T 5.0 PHASE sof @ z 2 £ o. $ . £ s » 4303 | o P 402 h 230 q20 & 9 20 v - g z 50 s0 Ha0, 2 2 <40 U *E | e 300 g 71 HOLES ~_] PLOT " 40, 2 240 M 50|- e * d s i q20 £ g 3 & 30f $ F z & 3920 jio ELECTRIC FIELD 2 d s *' s £ 2E 9 - s H H G ol -fD 2 g dao _ v dsoÊ5 $ 30- S w H 20 o 201 d Hi0 E” “S4 @ 1o ND” o 12 Fig. 12. 3 4 5 6 7 DISTANCE IN MICRONS (b) 8 AN0 9 o! o - 1 - 2 a5 6 7 DISTANCE IN MICRONS (d) 9 0 o Solutions of hole and electron concentrations, electric field, and terminal current and voltage (values indicated by & on phase plot) at various points in time for the diode operating at a freguency of 13.4 GHz, current density of 1000 A/cm*, and efficiency of 9 percent. tion by impact ionization occurs, and the subseguent drift of a hole charge pulse toward the p region would constitute positive particle current while the voltage was also positive, a very unfavorable phase relation. This effect was worse in an earlier doping profile (not shown), and was eliminated by altering the profile to provide a continuous fall-off of electric field out to the substrate ticle current is not a sguare wave during the half cycle (see Fig. 3). The nearly ideal (classical Read obtained by subtracting the displacement current from the total current. At the largest oscillation amplitude, the diode “capacitance” changes parametrically [12] and makes an accurate separation of the current components difficult, The result shown in Fig. 13 is for a voltage amplitude of about 17 volts. However, the waveforms for larger amplitudes are similar. The par- [1]) phase relations obtained between diode voltage and particle current is illustrated in Fig. 13. In this figure, we plot the waveforms in time of the particle current and terminal voltage for an ac steady-state solution at 11.4 GHz and dc current density of 200 A/cm?. The particle current was over which the voltage is negative, but has a hump resulting from the extra component of particle current which flows until the holes that were generated along with the electrons are swept into the p layer. For large amplitudes, the hump becomes more pronounced and the particle current bottoms [all carriers are swept out Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. 72 IEEE TRANSACTIONS ON ELECTRON DEVICES, JANUARY 1969 APPENDIX DIODE VOLTAGE SEMICONDUCTOR DEVICE ANALYSIS CoMPUTER PROGRAM INTRODUCTION This Appendix consists of three sections. Section I describes the device physics included in the large-signal calculation and outlines the solution procedures with- out detail. Section II describes in detail the time ad- vancement technigues and the mathematical formulation employed in the computer calculation. Section 1II is a detailed discussion of the matrix inversion subrou- PARTICLE CURRENT LIMIT CYCLE FREQ * 11.4 GHZ tine developed specifically for the time evolution com- puter program. I. MATHEMATICAL A. TIME Fig. 13. Diode voltage and particle current versus time for one cycle of steady-state oscillation. Charge MODEL Transport Eguations The distribution and motion of carriers within a onedimensional semiconductor device structure can be obtained by solving three basic eguations: 1) the continuity eguation for holes, 2), the continuity eguation for electrons, and 3) Poisson's eguation: as shown in Fig. 11(a)] over an appreciable part of the cycle. (13) The results of the calculation presented in this section have shown that a properly designed silicon Read diode oscillator is operable, with efficiencies from 9 to 18 percent, over an order of magnitude variation in dc current. The freguency of operation, amplitudes of voltage and current oscillations, order of magnitude of (14) and ôE g . —=—(p—n+Np—Ni) dc bias, and efficiency are in fair agreement with the prediction of the relatively simple design theory pre- sented in Section II. dx where ôp J, — quppE — kTu,— IV. CONCLUSIONS ôv Operating characteristics of a silicon Read diode were obtained from large-signal computer calculations of the evolution in time of the diode-resonant-circuit system. The values of ionization rates [3] and carrier velocities [8], [9] appropriate for silicon were used in the calculation. Self-consistent solutions were obtained for the eguations describing carrier transport, carrier generation, and space-charge balance within the diode, and which simultaneously satisfied the boundary condition imposed at the diode metallic contacts by the resonant circuit. Detailed electron solutions € . (15) were concentrations, presented electric of field, the and hole and terminal current and voltage at various points in time during ac steady-state cycles of oscillation. The largest efficiency obtained (18 percent) is in good agreement with the approximate calculation, which includes the appreciable width of the avalanche region reguired for silicon devices. Efficient operation (9 to 18 percent) was obtained over a range of dc current density (100 to 1000 A/cm?) and freguency (6.4 to 13.4 GHz). ôn Ju = gunnE-r kTu — ôx (16) an) Boundary conditions are imposed at the contacts by introducing the appropriate restrictions in (13) through (17). For example, current boundary conditions for a p-n device are introduced by reguiring that (17) is egual to the terminal current density at the » contact and that (16) is egual to the terminal current density at the p contact. Voltage boundary conditions are imposed by reguiring that the integral of E(x, f) over the interval between the two contacts eguals the total voltage. In addition, the electric field at the two end metallic contacts is assumed to be zero. Initial values for the hole and electron densities are either furnished by a previous run or are given by the guiescent zero bias solution, i.e., the solution when (18) Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER AND GUMMEL: SILICON READ DIODE OSCILLATOR In general, the functions g, u,, 4, vary at each point in the device according to the value of m, p, and E at that point. B. tinuity eguations for each increment: d, Eg(.\') =g(V) Carrier Generation-Recombination Expressions The carrier generation term g is composed of two components: 1) carrier generation and recombination through defects, and 2) impact or avalanche ionization. Hole electron generation and recombination through defects are represented by a Shockley-Read-Hall (SRH) single-level model which characterizes defects with neutral and single-charge states. The generationrecombination rate through a single-level center is given by pn—no 8= The upon tron given (19) Tpo(n 4 m) + Tso(p + P9) impact ionization rates are strongly dependent the electric field intensity and the hole and eleccurrent densities. These generation terms are by 1 o= (an(E)|1| + aK(E)|J,) (20) 73 = (J,(M) —J, (M — 1))/Ax dn i ” (V) > g(Y) + (Ju(M) —J(M—1))/Av. = 2.25 X 107 exp (—3.2 X 105/F) Ax where the Mth mesh point is located midway between the major mesh points N4+1 and N. It is customary to employ next the standard difference approximations in the current density expressions (16) and (17) and substitute these results in (25) and (26). However, it can be shown stability points that this procedure whenever exceeds the 2k7/g. Rather, Holes Electrons N S (E/a)? A 480 4X10% 816.1X10° 1400 3X10'¢ 3503.5X10* ¥ F) (23) F B 1.6 2.5X10* 8.8 and inmesh (17) are J.0) = zan) — n ” 77 DM (1.0 — exp (— E(M)Ax) . + —— (29) —, (1.0 — exp (E(M)As)) These eguations provide numerically stable estimates of the current density under all conditions. If the intermesh point voltage is small, these eguations approach the standard difference relations; whereas when the voltage change is large, they approach the drift current density at either mesh point N or N+1. 7.4X10% (24) D. Solution Procedures Because of the nonlinearities in the eguations describing the hole, electron, and field distributions, obtaining a transient or even a steady-state dc solution poses a very difficult numerical problem. The structure to be analyzed is first subdivided into a number of small cells. The eguations are then normalized to reduce redundant coefficient calculations, and standard difference approximations are used tial derivatives in Poisson's (16) between PN + 1)u (M) ] (1.0 — exp (E(M)ax)) (22) + (E/B)* o change T4() = EO I:(x—.o — exp (—E(M)A)) (21) following expression: (/a =1 *(m)*(ïq leads to numerical voltage treated as differential eguations in p and m with J,, J,, H M», and E assumed constant between mesh points. The solution of these differential eguations then relates J» and J, to the other variables: It is necessary to include in the analysis the variations of mobility (u) with the electric field (E) and the ionized impurities density (Np). The theoretical mobility is approximated by the Np 2 = L () — n(8) 4 No(¥) — Na(8)) Mobility Expressions ; ; P(N)m;(M) an(E) = 3.80 X 10* exp (—1.75 X 10¢/E). C. (26) E(M) — E(M — 1) where a, (E) and a,(E) are given by the relations an(E) (23) to approximate the spaeguation and the con- E. Definition of Symbols f, n E g Jp J» hole and electron concentrations, cm^* electric field intensity, V /cm electronic charge, 1.602 X 10~ coulombs hole and electron current densities, A/cm? g hole and electron generation-recom- bination rates, carriers/cm*-s gr impact ionization generation rate for holes and electrons, carriers/cm*:s g: hole and electron generation-recombination rates through a single-level trapping center, carriers/cm*-s € dielectric constant Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. 74 1EEE k Boltzmann constant, 1.38044X10-% JK TRANSACTIONS by the ON closed-form concentration of donor impurity atoms, cm^* ay(E), as(E) P m and acceptor hole and electron mobilities, cm?/V-s low-field low-doping hole mobility in silicon, (480 cm?/V -s) low-field low-doping electron mobility in silicon, (1400 cm?/V-s) ionization coefficients for holes and Eguation increment (33). JANUARY Written in 1969 more ¢ in II. VECTOR-MATRIX level of the FORMULATION time. When we have solved it, we increment the vector y by the solution ôy. To get a better intuitive understanding of what we are doing, let us move the term containing J/t in (36) on the righthand side: ôy(t) = (f r %U)I. hole and electron concentrations in the coincides with the energy single-level trap. (36) — f*t. (36) is the vector eguation we solve for each electrons, carriers/carrier-cm conduction band when the Fermi level A. expression (l —%)ôy cm™? Ma DEVICES, conventional form, 1" absolute temperature, *K Np total ionized impurity concentration, M ELECTRON @37 At time 0, the slope ŷ is f(ys). At time ¢, it is approximately fo+Mdy. The ratio of the finite differences ôy(f)/t corresponds to the slope of the straight line through the points 0 and f. What we are doing is propagating the system according to the time derivative at some advanced time f,—t/2, rather than at the ini- Time Advancement We represent the hole and electron concentrations by the two-component vector y. The system of eguations then reads ŷ > f), (30) i.e., the time derivative of y eguals some nonlinear functionsf of y. We denote y at the beginning of the time interval under study by yo, and denote the deviations of this value as time increases by ôy(f): y(0) = yo+ ôy(D. G tial time. The term in ôy on the right-hand side of (37) represents a feedback that gives the system stability. It is worth noting that the expansion of f with respect to y (the derivative matrix M) is correct to first order, but with regard to time it is correct to second order in ¢. The method of propagation (36) time evolves the system accurately for small time steps f. However, if we are near an eguilibrium state and are interested not in the time evolution, but only in the equilibrium solution, time steps ¢ of infinity can be taken with full feedback, i.e., (1 — Mi)by = f-t. For small deviations ôy, we expand f(y) as 83 — f(yo) + Môy. (32) M is the matrix d//dy and represents an integro-differential operator. Now, if M, f, and 8y were ordinary B. The Derivative Malrix We define the vector y as having components of hole concentration, electron concentration, and electric field: numbers, the solution to (32) would be ôy(t) = (M — 1)f/M (33) Jx — or ») (AHOL(N) |: — | AELE(N) lys ôy(t) = f1(1 + Mt/2 + (MD*/6 + -+ -). (34) Note that if the physical situation is one in which we are near a stable equilibrium state, then the eigenvalues of the matrix M must be negative so that as time goes to infinity, ôy reaches a finite value. For small but finite time steps, we introduce the inverse of the first two terms of (34) to obtain our solution to (30) as st - B0 = = (85) 2 'The operator M in the denominator roughly corresponds to integration and as f goes to infinity, we reach an asymptotic value within a factor of 2 of that given and the right-hand the vector f: ï side of the continuity equations as =)~ Gt ) LN The vector equation (38) |AFIELD(M)) we solve for each (39 time increment f (36) is 2 WN My | G)x > 2(fo)s + (Af) (40) where Af, represents changes in fy at the terminals and where we define the derivative matrix Iy My === N ay (41) Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER AND GUMMEL: SILICON READ DIODE OSCILLATOR and The matrix elements of M are defined by the expanded form of (40) shown below: XLG,N)*ôH(N et (e* DO (a, * B(, ; y1 ” Rl + (42) | FLO, matrices XL, XM, and XR are obtained by taking the partial derivatives of fy with respect to HOL and ELE at mesh points N—1, N, and N+1, respectively, while the two component vectors FL and FR are obtained by taking the partial derivatives of fy with respect to FIELD at M —1, respectively. N) = 6F(M $F(M) — 8F(M DY(X) Input right-hand side RH(1) of the first continuity eguation, and the particle currents at the right contact enter into the right-hand side RH(LR) of the last continuity eguation. Since the total current at the contacts is known, continuity eguations 1 and LR contain three boundary conditions. The fourth boundary condition is current will be described in Section IlI-C of their reguired M =0,LR [XLly N-2,LR [xM]y N =1,LR [XRly N=1,ILM (RH)y (FL)y (FR)y N =1,LR N-2LR N =1,LM. B. (LM =LR-1) Details of Inversion We represent the output quantities ôH and ôE by the vector A. Input-Output y as and similarly input guantities RH, , FL, FR as RHO, N) XL(1, X) * 8H(N — 1) + XL(2, N) * ôE(N — 1) + XM(1,N) * ôH(N) + XM (2, N) » 6E(N) + (43) XR(1,X) * 8H(N + 1) + XR(2, N) * 8E(N + 1) (RH)x = (RH(Z, .\')) FLO, M) Wi = (n(z, M)) s _ (FRO, M) F k = RH, N), as (note ôF(0) and ôF(LR) are zero). SH(N) FL(1, N) * 8F(M — 1) + FR(1, N) » 6F(M) are N =1,LR N =1,LR M -A,LM G)x = (ôE(.Y) solves the range (45) their range are as follows: Appendix. We describe a computer subroutine which following three eguations: — 1))/2. DXy ôHx = Y(1, N) ôÊx = YO, N) ôFw — YG, M) a this + DX(M and Output quantities and field of zero at one contact forces a field of zero at the other contact. The method for solving the discretized continuity eguations will be described for the case of terminal-current boundary conditions. The modifications to this method when boundary conditions are in terms of terminal voltage or a mixture of voltage and = (DX(M) guantities that the electric field at the contact is zero. Since overall the eguations, — 8E(N)) » DY(N) follows: the particle currents at the left contact enter into the into — 1) = (H(N) where for the guantities §H (N), 8E(N), and ôF(M). The guan- is built 1) + FR(2, N) * 8F(M) where N ranges from 1 to LR, and tities ôH and ôE are the changes in the hole and electron concentrations, while ôF is a normalized electric field; ôF is in units of carrier concentration. The boundary conditions have been included in the eguations, i.e., neutrality — = RH(2, ) INVERSION SUBROUTINE This section describes in detail the method for solving the discretized continuity and space-charge eguations space-charge ( + subroutine described in Section III. The 2X2 MATRIX A XRG,N)*ôH(N + 1) + XR(4, N) *ôE(Y 4 1) Vector eguation (42) is solved by the computer program III. * ôE(N — 1) XM, N) * 8H(N) + XM(4, N) * 6E(N) (RH)x — 2(fo)x. mesh points M and — 1) + XL(4, N) « (¥ + (FL)x * ynt—y + (FR)m * yu = (RH)x where 75 The = (FR(Z, M))’ input guantities XL, X M, XR are represented by matrices [XL], [XM], [XR]: Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. 76 IEEE —XL(1,N) XLG,N) vl XLGa,N) XLG,N TRANSACTIONS Note this notation, (43) through (45) can be written |XZ]w * ()xor r [XM]y * (y + [XR]x * Gy Eguation (46): XLy (45) — 1) + (FR)y * 8F(M) can be used as) = (RH)y. to eliminate DEVICES, JANUARY ôF(M—1) in 1969 that (48) can be written as " — (UF), * ôF(L) as + (FL)y * 6F(M ELECTRON 2 l (ME), = (W'« 1&1 — EXRl. G and similarly for [X M]y and [XR]y. With ON and (45) as ôF(L — 1) — ôF(L) — Í8H(L) — ôE(L)) » DY(L); / (53) therefore, once we have [UM], (UF), and (Z) at mesh points 1 to LR, we can work backwards using (52) and 53) to find (v + {[XM]y — [UFL]s] * 0y + [XR]y * (y)ssa F [(ER)y + (FL)y) * 8F(M) = (RH)y where (EE)L and 8Fz—y for L=LR [UFL]y = [ FL(1, N) — FL(1, N) FLO, N) — FLO, .\’)] *DYO GD We assume that we can remove the (y)y_; term in (47) and write the resulting eguation at mesh point N—1 as [UM]x-— * (y)s— + [U R]w—s * G)x as) + (UF)x— * 6F(M — 1) — (Z)x—. Recursion relationships for [UM], [UR], (UF), and (Z) are obtained as follows. Eguations (47) and (48) are combined to eliminate (9)x— terms as {(XM]y — [UFL]s — [Tly * ÍUR]w—i) * (v + [XR]s * )1 F H FR)u F (FL)w) * bF(m) — [T]s * (UF)x— * 5F(M — 1) (a9) — (RH)x — Ty * (Z)y—i [7]y = [XL]y * [UM]yE. The term in ôF(m—1) can be eliminated in (49) by (45), and therefore by comparing (49) with (48) evaluated at mesh point N, we get: [UR]s = [XR]x |UM]x — [XM]x — lUFL]x — [T)y * [UR]xa DY(N) — DY(N) I:Dym — DY(V) ] * [T]s * (UF)x (Z)x = (RH)x — [Ty * (Zx—) (UF)y = (FR)x + (FL)y — [Ty * (UF)x—x. (50) Starting values for [UM], (UF), and (Z) are obtained by comparing (48) (at N=1) with (46) (at N=1) with the term in ôF(1) eliminated by (45): FR(1,1) [UM), = (XM, + [ FR(2,1) =) (Z): > (RH), — FR(1, 1) — FR(2, 1) :I. DY (1) (51) - - - 1. 'The computation procedure is as follows. 1) Compute starting values from (51). 2) Compute values at the remaining mesh points (2, LR) using (50). 3) Use (52) and (53), starting at mesh points LR (note (y);»31 and ôF(LR) are both zero) and working through mesh point 1 to obtain the values for ôH, ôE, and ôF. C. General Boundary Conditions In the discussion thus far, it has been assumed that the desired boundary conditions could be incorporated into the input coefficients. The terminal currents entered into the right-hand side (RH)y at the contacts (N=1) and (N=LR). More general boundary conditions can be incorporated by using an economical superposition process. With the time advancement process described in Section II, we want to solve the eguations [z-»n])«e- (51) where f is the step in time and M is the derivative matrix. If the terminal currents are changing with time, then f is fo, the right-hand side of the continuity eguation at ¢=0, plus one-half of the change in terminal current (the extra term will appear in only two egua- tions, mesh points 1 and LR). Let us multiply (54) by 2 and write it as 2 [F+a]mr=2en+w, ) where Af represents the change in terminal currents in the time f. Equation (55) is identical to (46) and could be solved by the method discussed previously in Section I11-A of this Appendix if the change in terminal currents (Af terms) are known. What is always terminals is one of three possibilities: known at the 1) the terminal current as a function of time is an independent variable; Authorized licensed use limited to: University of North Carolina at Chapel Hill. Downloaded on April 09,2010 at 21:39:33 UTC from IEEE Xplore. Restrictions apply. SCHARFETTER AND GUMMEL: 2) the terminal voltage independent variable; or 3) an eguation relating voltage is known. The general solution to obtained numerically using SILICON READ DIODE as a function of time is an 77 voltage per change in terminal current Av.. If the inte- gral of the electric field component terminal current to terminal (55) for Af arbitrary can be superposition. Let us assume that our final solution will be the sum of two solutions: () > () + (o). (36) These solutions have the following interpretation: (ye) represents the solution for Af=0, that is, for no change in terminal current over the time step f; (y.) represents the additional solution for a change in terminal current. 'To see this more clearly, let us write (55) as |M]y() = (RHi)s + (RH.)y where the quantity OSCILLATOR (57) 2/1--M in (55) has been written as [M]y in (57) and 2fo as (RHs)x and Af as (RH.)x. Eguation (57) has (RH.)y zero everywhere, except at mesh points 1 and LR. Therefore, we solve (57) using the method described in Section III-A of this Appendix with (RH)y — (RH,)y. This yields solutions (yo)x. Next, we solve (57) with (RH)y > (RH.)y; this yields solution (y.)w. Since we do not know the change in terminal current AJ, we obtain solutions (y.)y for a unit change in terminal current. We then integrate the electric field component of (y.)y to obtain the change in terminal of (ys)x is called AT, then the change in terminal voltage ATV is related to the change in terminal current AJ by AV = AV5 F Av. * AJ. (58) REFERENCES (1) W. T. Read, “A proposed high-freguency negative-resistance diode,” Bell Sys. T&ch. J. vol. 37, pp, 401-466, March 1958. [2) H. K. Gummel and Scharfetter, “Avalanche region of IMPATT diodes,” BellSy < Tech. J., vol. 45, pp. 1797-1827, nd W, Wiegmann, “Ionization rates of holes and electrons in silicon,” Phys. Rev., vol. 137, pp. A761-A773, May 1964. (4] M. Gilden and M. B, Hines, “Electronic tuning effects in the read microwave avalanche diode,” JEEE Trans. Electron Devices, yol. ED-13, pp. 169-175, January 1966. [S] T. Misawa, “Negative resistance in — junctions under avalanche breakdown conditions, parts | and lI,” IEEE Trans. Electron Devices, vol. ED-13, Pp. 137-151, January 1966. (6] D. L. Scharfetter and H. K. Gummel, “Design of Read diode oscillators,” presented at the 1966 IÊEE Solid-State Device Research Conf., paper 111 b-4, 17] J. C. Irvin, “Resistivity of bulk silicon and of diffused layers in silicon,” Bell Sys. Tech. J., vol. 31, pp. 387-410, March 1962. 8] A. C. Prior, “Field dependence of carrier mobility in silicon and ïrmnnium," J. Phys. Chem. Solids, vol. 1 pp. 175-180, anuary, 1960. 191 . E. Seidel and D. L. Scharfetter, “Dependence of hole velocity upon electric field and hole density for P-type silicon,” J. Phys. Chem. Solids, vol. 28, pp. 2563-2573, 1967 {10] W. Shockley and W. T. Read, Jr., “Statistics of the recombination of hole and electron,” Phys. Rev., vol. 87, pp. 835-842, September 1952. (11] R. N. Hall, “Electron-hole recombination in germanium,” Phys. Recs vol. 87, p. 387, July 1952, [12] B. C. DeLoach, Jr., and R. L. Johnston, “Avalanche transittime microwave oscillators and amplifiers,” JEEE Trans. Electron Devices, vol. ED-13, pp. 181-186, January 1966. 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