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Digital Integrated
Circuits
A Design Perspective
Adapted from
Jan M. Rabaey
Anantha Chandrakasan
Borivoje Nikolic
Semiconductor
Memories
© Digital Integrated Circuits2nd
Memories
Chapter Overview
 Memory Classification
 Memory Architectures
 The Memory Core
 Periphery
 Reliability
© Digital Integrated Circuits2nd
Memories
Semiconductor Memory Classification
Read-Write Memory
Random
Access
Non-Random
Access
SRAM
FIFO
DRAM
LIFO
Non-Volatile
Read-Write
Memory
Read-Only Memory
EPROM
Mask-Programmed
E2PROM
Programmable (PROM)
FLASH
Shift Register
CAM
© Digital Integrated Circuits2nd
Memories
Memory Timing: Definitions
© Digital Integrated Circuits2nd
Memories
Memory Architecture: Decoders
M bits
Decoder
S0
Word 0
S1
Word 1
S2
N
M bits
Word 2
SN 2
2
SN 2
1
words
Storage
cell
S0
Word 0
A0
Word 1
A1
Word 2
A K2
1
Word N 2 2
Word N 2 2
Word N 2 1
Word N 2 1
K
Input-Output
(M bits)
Intuitive architecture for N x M memory
Too many select signals:
N words == N select signals
Storage
cell
= log2N
Input-Output
(M bits)
Decoder reduces the number of select signals
K = log2N
Problem: ASPECT RATIO or HEIGHT >> WIDTH!?
© Digital Integrated Circuits2nd
Memories
Array-Structured Memory Architecture
L-K
K+1
L-1
Amplify swing to
rail-to-rail amplitude
K-1
© Digital Integrated Circuits2nd
Selects appropriate
word
Memories
Hierarchical Memory Architecture
Advantages:
1. Shorter wires within blocks
2. Block address activates only 1 block => power savings
© Digital Integrated Circuits2nd
Memories
Block Diagram of 4 Mbit SRAM
Clock
generator
Z-address
buffer
X-address
buffer
Predecoder and block selector
Bit line load
Transfer gate
Column decoder
Sense amplifier and write driver
CS, WE
buffer
© Digital Integrated Circuits2nd
I/O
buffer
x1/x4
controller
Y-address
buffer
[Hirose90]
X-address
buffer
Memories
Memory Timing: Approaches
DRAM Timing
Multiplexed Adressing
© Digital Integrated Circuits2nd
SRAM Timing
Self-timed
Memories
Read-Write Memories (RAM)
 STATIC (SRAM)
Data stored as long as supply is applied
Large (6 transistors/cell)
Fast
Differential
 DYNAMIC (DRAM)
Periodic refresh required
Small (1-3 transistors/cell)
Slower
Single Ended
© Digital Integrated Circuits2nd
Memories
SRAM - Introduction
Line – Horizontal select line that
enables a single row of cells
 Bit Line – wire that connects the cells in
a single column to the input/output
circuitry
 Register cell / semiconductor memory
 Block Address – Wire length, power
saving mode
 Word
© Digital Integrated Circuits2nd
Memories
© Digital Integrated Circuits2nd
Memories
6-transistor CMOS SRAM Cell
WL
V DD
M2
M5
Q
M1
BL
© Digital Integrated Circuits2nd
M4
Q
M6
M3
BL
Memories
CMOS SRAM Analysis (Read)
WL
V DD
M4
BL
Q= 0
M5
V DD
Cbit
© Digital Integrated Circuits2nd
M1
Q= 1
V DD
BL
M6
V DD
Cbit
Memories
CMOS SRAM Analysis (Read)
1.2
Voltage Rise (V)
1
0.8
0.6
0.4
0.2
Voltage
rise [V]
0
0
© Digital Integrated Circuits2nd
0.5
1 1.2 1.5 2
Cell Ratio (CR)
2.5
3
Memories
CMOS SRAM Analysis (Write)
WL
V DD
M4
M5
Q= 1
M1
BL = 1
© Digital Integrated Circuits2nd
M6
Q= 0
V DD
BL = 0
Memories
CMOS SRAM Analysis (Write)
© Digital Integrated Circuits2nd
Memories
6T-SRAM — Layout
VDD
M2
M4
Q
Q
M1
M3
GND
M5
BL
© Digital Integrated Circuits2nd
M6
WL
BL
Memories
Resistance-load SRAM Cell
WL
V DD
RL
M3
BL
RL
Q
Q
M1
M2
M4
BL
Static power dissipation -- Want R L large
Bit lines precharged to V DD to address t p problem
© Digital Integrated Circuits2nd
Memories
SRAM Characteristics
© Digital Integrated Circuits2nd
Memories
3-Transistor DRAM Cell
BL 1
BL 2
WWL
WWL
RWL
M3
X
M1
CS
M2
RWL
V DD 2 V T
X
BL 1
BL 2
V DD
DV
V DD 2 V T
No constraints on device ratios
Reads are non-destructive
Value stored at node X when writing a “1” = V WWL-VTn
© Digital Integrated Circuits2nd
Memories
3T-DRAM — Layout
BL2
BL1
GND
RWL
M3
M2
WWL
M1
© Digital Integrated Circuits2nd
Memories
1-Transistor DRAM Cell
Write: C S is charged or discharged by asserting WL and BL.
Read: Charge redistribution takes places between bit line and storage capacitance
CS
D V = VBL – V PRE = V BIT – V PRE -----------C S + CBL
Voltage swing is small; typically around 250 mV.
© Digital Integrated Circuits2nd
Memories
DRAM Cell Observations
 1T
DRAM requires a sense amplifier for each bit line, due
to charge redistribution read-out.
 DRAM memory cells are single ended in contrast to
SRAM cells.
The read-out of the 1T DRAM cell is destructive; read
and refresh operations are necessary for correct
operation.
 Unlike 3T cell, 1T cell requires presence of an extra
capacitance that must be explicitly included in the design.
 When writing a “1” into a DRAM cell, a threshold voltage
is lost. This charge loss can be circumvented by
bootstrapping the word lines to a higher value than VDD
© Digital Integrated Circuits2nd
Memories
Sense Amp Operation
V BL
V(1)
V PRE
D V(1)
V(0)
Sense amp activated
Word line activated
© Digital Integrated Circuits2nd
t
Memories
1-T DRAM Cell
Capacitor
M 1 word
line
Metal word line
SiO2
Poly
n+
Field Oxide
n+
Poly
Inversion layer
induced by
plate bias
Cross-section
Diffused
bit line
Polysilicon
gate
Polysilicon
plate
Layout
Uses Polysilicon-Diffusion Capacitance
Expensive in Area
© Digital Integrated Circuits2nd
Memories
SEM of poly-diffusion capacitor 1T-DRAM
© Digital Integrated Circuits2nd
Memories
Advanced 1T DRAM Cells
Word line
Insulating Layer
Cell plate
Capacitor dielectric layer
Cell Plate Si
Capacitor Insulator
Refilling Poly
Transfer gate
Isolation
Storage electrode
Storage Node Poly
Si Substrate
2nd Field Oxide
Trench Cell
© Digital Integrated Circuits2nd
Stacked-capacitor Cell
Memories
Periphery
 Decoders
 Sense Amplifiers
 Input/Output Buffers
 Control / Timing Circuitry
© Digital Integrated Circuits2nd
Memories
Row Decoders
Collection of 2M complex logic gates
Organized in regular and dense fashion
(N)AND Decoder
NOR Decoder
© Digital Integrated Circuits2nd
Memories
Hierarchical Decoders
Multi-stage implementation improves performance
•••
WL 1
WL 0
A 0A 1 A 0A 1 A 0A 1 A 0A 1
A 2A 3 A 2A 3 A 2A 3 A 2A 3
•••
NAND decoder using
2-input pre-decoders
A1 A0
A0
A1
© Digital Integrated Circuits2nd
A3 A2
A2
A3
Memories
Dynamic Decoders
Precharge devices
GND
VDD
GND
WL 3
VDD
WL3
WL2
WL 2
VDD
WL1
WL 1
V DD
WL0
WL 0
VDD f
A0
A0
A1
A1
2-input NOR decoder
© Digital Integrated Circuits2nd
A0
A0
A1
A1
f
2-input NAND decoder
Memories
4-input pass-transistor based column
decoder
BL
BL
BL
BL
0
A0
1
2
3
S0
S1
S2
A1
S3
2-input NOR decoder
D
Advantages: speed (tpd does not add to overall memory access time)
Only one extra transistor in signal path
Disadvantage: Large transistor count
© Digital Integrated Circuits2nd
Memories
4-to-1 tree based column decoder
BL 0 BL 1 BL 2 BL 3
A0
A0
A1
A1
D
Number of devices drastically reduced
Delay increases quadratically with # of sections; prohibitive for large decoders
Solutions: buffers
progressive sizing
combination of tree and pass transistor approaches
© Digital Integrated Circuits2nd
Memories
Decoder for circular shift-register
V DD
WL
V DD
V DD
WL
0
R
f
f
f
f
R
V DD
V DD
WL
1
f
f
f
f
R
V DD
2
f
f
f
f
• • •
V DD
© Digital Integrated Circuits2nd
Memories
Logical Effort in Decoders
Collection of 2M complex logic gates
Organized in regular and dense fashion
(N)AND Decoder
NOR Decoder
© Digital Integrated Circuits2nd
Memories
Logical Effort in Decoders with Precoder
© Digital Integrated Circuits2nd
Memories
Sense Amplifiers
 DV
C
tp = ---------------Iav
large
make D V as small
as possible
small
Idea: Use Sense Amplifer
small
transition
s.a.
input
© Digital Integrated Circuits2nd
output
Memories
Differential Sense Amplifier
V DD
M3
M4
y
M1
bit
SE
M2
Out
bit
M5
Directly applicable to
SRAMs
© Digital Integrated Circuits2nd
Memories
Differential Sensing ― SRAM
V DD
PC
V DD
BL
BL
EQ
V DD
y M3
WL i
M1
x
SE
V DD
M4
M2
2y
2x
2x
x
SE
M5
SE
SRAM cell i
Diff.
x Sense 2x
Amp
V DD
Output
y
SE
Output
(a) SRAM sensing scheme
© Digital Integrated Circuits2nd
(b) two stage differential amplifier
Memories
Latch-Based Sense Amplifier (DRAM)
EQ
BL
BL
VDD
SE
SE
Initialized in its meta-stable point with EQ
Once adequate voltage gap created, sense amp enabled with SE
Positive feedback quickly forces output to a stable operating point.
© Digital Integrated Circuits2nd
Memories
Charge-Redistribution Amplifier
V ref
VL
M2
M3
M1
C large
VS
C small
Transient Response
Concept
© Digital Integrated Circuits2nd
Memories
Charge-Redistribution Amplifier―
V
EPROM
DD
SE
Load
M4
Out
V casc
M3
Cascode
device
Cout
Ccol
WLC
Column
decoder
M2
BL
WL
© Digital Integrated Circuits2nd
M1
CBL
EPROM
array
Memories
Single-to-Differential Conversion
WL
BL
x
Cell
Diff.
S.A.
2x
1
2
V ref
Output
How to make a good Vref?
© Digital Integrated Circuits2nd
Memories
Open bitline architecture with
dummy cells
EQ
L
L1
L0
V DD
R0
R1
L
SE
BLL
CS
…
CS
BLR
CS
Dummy cell
© Digital Integrated Circuits2nd
…
SE
CS
CS
CS
Dummy cell
Memories
Voltage Regulator??
© Digital Integrated Circuits2nd
Memories
Voltage Regulator
VDD
Mdrive
VDL
VREF
Equivalent Model
Vbias
VREF
+
Mdrive
VDL
© Digital Integrated Circuits2nd
Memories
Charge Pump
© Digital Integrated Circuits2nd
Memories
DRAM Timing
© Digital Integrated Circuits2nd
Memories
RDRAM Architecture
Bus
Clocks
Data
bus
k
k3 l
memory
array
network
mux/demux
Column
Row
© Digital Integrated Circuits2nd
demux
packet dec.
demux
packet dec.
Memories
Address Transition Detection
V DD
A0
DELAY
td
A1
DELAY
td
A N2 1
DELAY
td
© Digital Integrated Circuits2nd
ATD
ATD
…
Memories
Reliability and Yield
© Digital Integrated Circuits2nd
Memories
Sensing Parameters in DRAM
1000
C D(1F)
V smax (mv)
100
smax
V
,
DD
V
,
S
C
,
S
Q
,
D
C
C S(1F)
Q S(1C)
10
V DD (V)
Q S 5 C S V DD / 2
V smax 5 Q S / (C S 1 C D )
4K
64K
1M 16M 256M 4G
Memory Capacity (bits
© Digital Integrated Circuits2nd
64G
/ chip)
From [Itoh01]
Memories
1. Noise Sources in 1T DRam
BL
substrate Adjacent BL
CWBL
a -particles
WL
leakage
CS
electrode
Ccross
© Digital Integrated Circuits2nd
Memories
Open Bit-line Architecture —Cross Coupling
EQ
WL 1
WL 0
WL
C WBL D
C WBL
WL D
WL 1
WL 0
BL
BL
C BL
C
C
© Digital Integrated Circuits2nd
C
Sense
Amplifier
C BL
C
C
C
Memories
Folded-Bitline Architecture
WL 1
WL 0 C
WBL
WL 0
WL D
WL D
CBL
BL
…
BL
WL 1
C
y
x
C
C
C
C
C
Sense
EQ Amplifier
x
CBL
y
CWBL
© Digital Integrated Circuits2nd
Memories
Transposed-Bitline Architecture
Ccross
BL 9
BL
SA
BL
BL 99
(a) Straightforward bit-line routing
Ccross
BL 9
BL
SA
BL
BL 99
(b) Transposed bit-line architecture
© Digital Integrated Circuits2nd
Memories
3.Leakage
PN junction & Subthreshold leakage
Minimum WL - Refresh time
Changing doping profile
Operating at reduced temperature
© Digital Integrated Circuits2nd
Memories
3. Charge Carriers -Alpha-particles (or Neutrons)
a -particle
WL
V DD
BL
n1
SiO 2
2
1
2
1
1
2
2
1
2
1
1
2
1 Particle ~ 1 Million Carriers
© Digital Integrated Circuits2nd
Memories
Yield
Yield curves at different stages of process maturity
(from [Veendrick92])
© Digital Integrated Circuits2nd
Memories
Redundancy
Row
Address
Redundant
rows
:
Fuse
Bank
Redundant
columns
Memory
Array
Row Decoder
Column Decoder
© Digital Integrated Circuits2nd
Column
Address
Memories
Error-Correcting Codes
Example: Hamming Codes
e.g. B3 Wrong
with
1
1
=3
0
© Digital Integrated Circuits2nd
Memories
Redundancy and Error Correction
© Digital Integrated Circuits2nd
Memories
Sources of Power Dissipation in
Memories
V DD
I DD 5 S C iD V if1S I DCP
CHIP
nC DE V INT f
m
selected
C PT V INT f
mi act
I DCP
n
ROW
DEC
PERIPHERY
m(n 2 1)i hld
non-selected
ARRAY
mC DE V INT f
COLUMN DEC
V SS
© Digital Integrated Circuits2nd
From [Itoh00]
Memories
Data Retention in SRAM
1.30u
1.10u
0.13 m m CMOS
Ileakage
900n
700n
500n
Factor 7
(A)300n
0.18 m m CMOS
100n
0.00
.600
1.20
1.80
VDD
SRAM leakage increases with technology scaling
© Digital Integrated Circuits2nd
Memories
Data Retention in DRAM
© Digital Integrated Circuits2nd
Memories
Data Retention in SRAM
© Digital Integrated Circuits2nd
Memories
Suppressing Leakage in SRAM
V DD
V DD
low-threshold transistor
V DDL
sleep
V DD,int
sleep
V DD,int
SRAM
cell
SRAM
cell
sleep
SRAM
cell
SRAM
cell
SRAM
cell
V SS,int
Inserting Extra Resistance
© Digital Integrated Circuits2nd
SRAM
cell
Reducing the supply voltage
Memories
Data Retention in DRAM
© Digital Integrated Circuits2nd
From [Itoh00]
Memories
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