Solid-State Electronics 47 (2003) 727–739 www.elsevier.com/locate/sse Analysis of the turn-off failure mechanism of silicon power diode Alex Q. Huang *, Victor Temple 1, Yin Liu 2, Yuanzhu Li 3 Center for Power Electronics Systems, The Bradley Department of Electrical and Computer Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA Received 22 July 2002; accepted 19 August 2002 Abstract A series of simulations were carried out to investigate the failure mechanism of large area silicon power diodes. Static breakdown behavior of high voltage diodes is first investigated at elevated temperatures. Sustain-mode dynamic avalanche is then discussed. It was found that under isothermal and homogeneity condition, the reverse bias safe operation area (RBSOA) of power diodes is the same as the sustain-mode dynamic avalanche. After introducing current inhomogeneity, the failure will occur at reverse power density that is much less than the RBSOA predicted by the sustainmode dynamic avalanche. The failure mechanism of power diodes is then proposed based on these findings. Ó 2002 Elsevier Science Ltd. All rights reserved. 1. Introduction The silicon power diode is one of the key components necessary to construct power electronic systems such as DC to AC power conversion systems. However, todayÕs silicon power diode has several drawbacks when turning off from forward conduction to reverse blocking. For example, the power dissipation during turn-on of a highvoltage switching device (e.g. IGBTs, GTOs) is mainly attributable to the diodeÕs reverse recovery current. In addition, possible diode failure when turning off with high dI=dt [1] and dV =dt [2] limits the power electronics systemÕs reliability. While much of the published work on power diodes is focused on improving the reverse recovery characteristics, the failure mechanism of power diodes has also attracted much attention. * Corresponding author. Tel.: +1-540-231-8057; fax: +1-540231-6390. E-mail address: huang@vt.edu (A.Q. Huang). 1 Silicon Power Corporation, 3 Northway Lane North, Latham, NY 121102, USA. 2 Present address: Chrontel Inc. San Jose, CA 95131, USA. 3 Present address: RF Integrated Corp., 15375 Barranca Pkwy, Irvine, CA 92618, USA. Although diode failure, which limits its reverse bias safe operation area (RBSOA) during reverse recovery, is generally attributed to the on-set of dynamic avalanche, the exact failure mechanism is still not well understood. In [3], the measured turn-off failures occur at power densities that vary from 500 kW/cm2 for voltages around 800 V to 300 kW/cm2 for 1200 V. The peak power density generally occurs before the turn-off failure and in some cases can be as high as 700 kW/cm2 . Device simulations performed by [3] did not predict the turn off failure (i.e. a sudden voltage drop and a subsequent current increase) observed in measurements. Furthermore, the diodeÕs dV =dt decreases in simulations for high reverse voltages, whereas in measurements dV =dt remains large until the turn-off failure at which a sudden voltage drop appears. The reported end result of a diode failure is that the breakdown characteristic of the diode is impaired permanently, probably by a local heating during a very short time (for some measurements only 0.5 ls) when the diode is conducting the failure current. The rise of the temperature before failure seems impossible given the short time the diode is conducting the reverse current. The diode would have to have a very high current crowding (or current filament) to stress the local spot to such high temperature. The same authors also performed measurement on a higher voltage diode 0038-1101/02/$ - see front matter Ó 2002 Elsevier Science Ltd. All rights reserved. PII: S 0 0 3 8 - 1 1 0 1 ( 0 2 ) 0 0 3 2 8 - 3 728 A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 and showed a failure power density higher than 500 kW/ cm2 [4]. However, only a small temperature increase is seen in their simulations, indicating that a homogeneous current distribution exists in the diode and thermal runaway does not occur. In [5], a stable dynamic avalanche at a maximum power density of about 2.4 MW/ cm2 was measured in a small 3.3 kV silicon Pþ NNþ power diode. Device simulations of this diode with a shallow Nþ emitter indicate that impact ionization at the Nþ /N junction can result in negative differential resistance (NDR) and current filamentation, whereas a deep Nþ emitter in the experimentally studied diode suppresses NDR. It is, therefore, proposed that the deep Nþ emitter is important for the stable dynamic avalanche. In [6], the author concludes that the reasonable agreement between measurements and device simulations strongly indicate that the experimentally studied diode eventually becomes limited by current filamentation due to the on-set of impact ionization at the Nþ /N junction. In [3–6], a new experimental technique has also been developed to study dynamic avalanche in a well-defined small region of a large power diode. That was accomplished by a carrier plasma excitation in a small n-region of the diode first with a laser pulse and thereafter reverse biasing the diode with a high dV =dt. Since no failure was reproduced in device simulations by authors in [3–6], it is therefore an objective of this study to provide a better understanding of the diode failure mechanism, in particular, the relationship between the inhomogeneous in diodes and that of diode failure. The concepts of thermal stability and thermal runaway are also clarified in this study. We will show, in this paper, that the on-set of dynamic avalanche may or may not be the failure point of the diode. We will also show that the on-set of dynamic avalanche is not a stable condition. The sustain-mode dynamic avalanche, a stable condition, will be reached at a much higher power density of more than a few MW/cm2 . 2. Diode structure and static avalanche characteristic Numerical simulations using MEDICI [7] were performed on a high voltage Pþ NNþ diode. The diode is rated at 3.3 kV, 1 kA and has an active region of 15 cm2 . Default physical models for impact ionization, field dependent mobility, carrier–carrier scattering, concentration dependent carrier lifetime, Auger recombination, Fermi–Dirac statistics and band-gap narrowing were used. The carrier lifetime is fixed at 3.22 ls for electrons and 0.46 ls for holes by matching the simulated forward I–V with the experimental device. To include self-heating effect in the simulation, a lumped thermal resistance Rthermal ¼ 3 107 K lm/W, and a lumped junction to case thermal capacitance Cthermal ¼ 0:5 106 J/K lm are attached to the cathode side of the diode in the simulation. Before the discussion on dynamic avalanche, the diodeÕs static avalanche characteristics are analyzed. Fig. 1 shows the isothermal reverse-bias I–V when the case temperature is 348 K. Notice the high reverse current density range shown in Fig. 1. There are three distinct regions of the reverse I–V curve and two critical voltage points. Before the first avalanche point, the leakage current is low. After the first avalanche at 2870 V, the current rises with a positive slope (or positive resistance). Fig. 1. First and second static avalanche breakdown of the studied diode obtained by MEDICI. A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 The current rises to more than 100 A/cm2 when VR ¼ 4810 V. After this point the slope of the current becomes negative with a NDR. This point (4810 V) is defined as the second avalanche point. The whole I–V curve represents a stable operating locus of the diode in the reverse direction under the isothermal and homogeneous condition. 3. Dynamic blocking capability of the diode 3.1. On-set of the Pþ /N dynamic avalanche When power diode is in the reverse recovery, the high dI=dt will cause a high peak reverse recovery current and a high current density controlled effective doping (Neff ) in the depletion region [8]. The high Neff may result in the on-set of dynamic avalanche well below the static breakdown voltage. Before the on-set of dynamic avalanche, the current is mostly composed of hole current in the Pþ /N space charge region (SCR). At the Nþ /N side, carrier extraction of electrons also happens due to the reverse of the current direction. Another SCR region may exist at the Nþ /N junction side in order to maintain the high reverse recovery current JR . This SCR will appear at the Nþ /N junction if JR is higher than the space charge limited current Jcrit ¼ qND tsat . Between these two SCRs, a high level of carrier plasma still exists. Diffusion of these carriers (holes to the Pþ /N SCR and electrons to Nþ /N SCR) forms the carrier extraction process. In the Pþ /N SCR, the critical electrical field will be decided by the Neff , not the N-base doping concentration ND because the mobile holes will increase the electrical field significantly. Eq. (1) shows the relationship between Neff and J before the on-set of dynamic avalanche. Jp Jn J ND þ Neff ¼ ND þ p n ¼ ND þ qtsat qtsat ð1Þ where Jp and Jn are hole and electron current density in the Pþ N SCR, tsat is the hole saturation velocity. A peak power density of 200 kW/cm2 is frequently referred as the power density required to cause the on-set of the dynamic avalanche. This is based on the following calculation. Assume the voltage is only supported by the Pþ /N SCR, then it reaches a critical maximum value when the maximum space charge region width is W ¼ es Ec qNeff ð2Þ So that we can obtain the on-set voltage for dynamic avalanche, 1 1 es Ec BVdy ¼ Ec W ¼ Ec 2 2 qNeff ð3Þ 729 For large J , using equation (1), and neglecting ND , one gets BVdy ¼ 1 es Ec2 tp 2 J ð4Þ And, the power density at the on-set point is 1 Pdy ¼ BVdy J ¼ es Ec2 tp 2 ð5Þ here es ¼ 11:7 8:85 1014 F/cm. If Ec ¼ 2 105 V/cm, tsat ¼ 107 cm/s, then Pdy ¼ 206 kW/cm2 . After on-set of dynamic avalanche, the diode is normally not in the sustain-mode dynamic avalanche, because the carriers generated by the dynamic avalanche are not enough to form a sustainable current, hence, the SCR region will continue to expand (although at a slower rate due to the extra carriers generated) and the voltage will increase at lower dV =dt. 3.2. On-set of the Nþ /N dynamic avalanche In the diode reverse recovery process, the reverse current could be significant, therefore the Nþ /N dynamic avalanche can also happen. In most cases the on-set of dynamic avalanche at the Pþ /N junction happens first. A simple calculation can show that the power density needed to create the on-set of both Pþ /N and Nþ /N avalanche is more than 400 kW/cm2 . This is often cited as the power density required to cause dynamic avalanche at the Nþ /N junction. Assume the voltages are supported by the two SCRs, they reach their maximum field values at the same time, then BV1 ¼ 1 es Ec2 tp 2 J ð6Þ and 1 es Ec02 tn ð7Þ 2 J here J is the current density, tp and tn are electron and hole saturation velocities respectively. Therefore, BV2 ¼ BVdy ¼ BV1 þ BV2 ¼ 1 es Ec2 tp 1 es Ec02 tn þ 2 J 2 J ð8Þ If tp ¼ tn ¼ 1 107 cm/s, Ec0 ¼ Ec , then Pdy ¼ BVdy J ¼ es Ec2 tp 412 kW/ cm2 . 3.3. Sustained-mode dynamic avalanche and theoretical diode RBSOA Even after the on-set of the Nþ /N avalanche, the total carriers generated by the avalanche are still not enough to form a stable current because there are still carriers between the two SCRs. The voltage will keep increasing to expand both SCRs until the diode enters the sustain-mode dynamic avalanche. 730 A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 In order to understand the process of dynamic avalanche and sustained mode dynamic avalanche, a set of simulations was performed under isothermal condition. The circuit used in the mixed mode simulation is shown in Fig. 2. A 1 cm2 diode in the schematic is numerically modeled by MEDICI and initially conducts a forward current of I1 ¼ I. The current source I2 is set to zero at the beginning of the simulation. Then the value of current source I2 rises to two times of I1 within 100 ns. After the I2 current rise, the diode will enter the reverse conduction mode and the voltage of the cathode will increase to a value that can sustain a current I (the anode is connected to ground). Fig. 3 shows the cathode voltage and the cathode current waveforms when the current source I1 is 100 A. The cathode current is therefore )100 A/cm2 initially and increases as the current source I2 increases. At 100 ns, the current source I2 reaches 200 A and the cathode Fig. 2. Circuit diagram used to simulate sustained mode dynamic avalanche voltage. current of diode is forced to be 100 A/cm2 . After the cathode current becomes 100 A, the cathode voltage will increase and eventually reach a stable value. The stable value is therefore the sustain-mode dynamic avalanche voltage at a reverse current equal to 100 A/cm2 . Evaluation of the initial electrons and holes concentrations in the diode ðA0 Þ and those at point A in Fig. 3 indicates that the carrier concentrations do not change at point A due to the high dI=dt assumed for current source I2 . This provides us a reverse conducting carrier plasma condition the same as that of the forward conducting. It is important to emphasis that the difference between a practical diode reverse recovery such as that in a chopper circuit and this simulation. In this simulation, a current boundary condition is imposed that forces stronger carrier extraction (much stronger than practical diode reverse recovery where the reverse current density is selfdetermined based on carrier distribution and dI=dt). During the cathode voltage rise, the stored carriers will be extracted at the Pþ /N junction and Nþ /N junction. The amount of carriers extracted by both SCRs are basically the same and DQ ¼ IDt. High electrical field regions will appear at the Pþ/N and Nþ /N junctions. Our simulation shows that the field at the Pþ /N junction is much higher than that at the Nþ /N SCR due to difference in the electric field slope. When the electrical field reaches the critical value, the dynamic avalanche of the Pþ/N junction happens first. The electrons and holes generated by the avalanche will contribute to the current. This is the on-set of the Pþ/N junction dynamic avalanche. The change of the voltage slope at point B in Fig. 3 is an indication of the on-set of Pþ /N dynamic avalanche. After point B, o2 V =ot2 < 0, as shown in Fig. 3. The power density at point B is, however, only 50 Fig. 3. The cathode voltage and current waveforms obtained in the sustained mode dynamic avalanche simulation. Initial forward current density is 100 A/cm2 . A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 kW/cm2 , much lower than 200 kW/cm2 calculated earlier. The difference seems due to the fact that the calculation used a critical field of 20 V/lm while the simulator determined critical field value is only 11 V/lm (Fig. 5). Since the carriers generated by the Pþ /N avalanche are not enough to maintain the constant reverse current, the SCRs will expand and the voltage will increase. At the same time, the electrons generated by Pþ /N avalanche will drift to the SCR1 region which makes SCR1 wider with lower field slope (Fig. 5). Eventually, dynamic avalanche happens in the Nþ /N junction and this provides more carriers to support the current. However, if the electrons and holes generated by the two avalanche regions are still not enough to compose the current, the SCRs must expand further into the middle diode region. If the two SCRs meet in the middle before sustain mode is reached, there will be no more carriers left in the middle region to be extracted [9]. The voltage rise will then become extremely fast. This is shown in Fig. 3 after point C. The power density at point C is about 180 kW/cm2 and on-set of both avalanches and merging of the two SCRs have already happened. At point D, avalanche generated electrons and holes can provide the cathode current. Then the cathode voltage will not increase and the diode enters its sustain mode dynamic avalanche. The stable cathode voltage is therefore the sustain mode dynamic avalanche voltage. Fig. 4 shows the carrier distribution along the Y direction during the cathode voltage rising at points B, C and D. Fig. 5 shows the electrical field distribution along the Y direction at the three same points. At point B, the stored carriers in the middle region have not been extracted completely, so the holes and electrons concen- 731 trations are quite large as shown in Fig. 4. The carrier generation rate and the electrical field are small as shown in Fig. 5. That means only a weak dynamic avalanche has happened at the Pþ /N junction. At point C, the holes and electrons concentration are smaller compared to point B, but are still higher than the N region doping concentration (1013 cm3 ) in order to maintain the current. From Fig. 5, it is clear that the dynamic avalanche has occurred at both the Pþ/N junction and Nþ /N junction at point C and the two SCRs have merged. The generated electrons form the majority of the current. At point D, the device has entered sustain dynamic avalanche and the avalanche in the Nþ /N junction has become quite large. From Fig. 5, we can see the electrical field has been changed. The electrical field in the middle region becomes flat but high. That makes the avalanche region larger in order to generate enough electrons and holes to sustain the current. Fig. 6 shows the calculated sustain mode dynamic voltage at different current densities, using the circuit of Fig. 2, compared with the static breakdown voltage. The difference is very small. That means the sustain-mode dynamic avalanche voltage is basically the same as the static breakdown voltage at the same current density. The sustain-mode dynamic avalanche is therefore a stable situation and the diode can stay in that condition if there is no temperature rise. The sustain-mode dynamic avalanche voltage should also be expected to be the same as the static avalanche breakdown voltage at other temperatures. From the above conclusion, the failure of diode will only occur when the reverse recovery trajectory crosses the sustain mode dynamic avalanche curve in Fig. 6. Fig. 4. The carrier concentration distribution along Y direction at points B, C, D in Fig. 3. The diode cathode is on the left and the anode is on the right of the figure. 732 A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 Fig. 5. The electrical field distribution along Y direction at points B, C and D. Fig. 6. The simulated sustain mode dynamic voltage and the static breakdown voltage at 298 K. Therefore the sustain-mode of dynamic avalanche boundary in the J –V plane can be considered as the theoretical RBSOA. This large RBSOA is only reached when isothermal condition is maintained across the whole region of the device, and no other inhomogeneity exists in the device. For example, Fig. 6 suggests that the ideal RBSOA is reached at a power density of more than several MW/cm2 . 4. Large area diode failure and thermal stability The above ideal diode RBSOA was only realizable under isothermal and homogeneous condition. This is almost impossible to realize in reality. As the tempera- ture of the device will rise during turn-on or turn-off, thermal resistance and thermal capacitance of the actual packaged device should be added for a real case. Coupled lattice temperature methods should therefore be used in simulations in order to calculate the dynamic junction temperature of the device. However, to study the failure of large area power diode under single pulse condition, the temperature rise is small, thus the external thermal resistance and capacitance due to a heat sink are not important. However, if localized high power stress exists, then the effect of internal temperature rise becomes important. To study diode reverse recovery stress, especially the localized high power stress exists in large area diode, diode inhomogeneity must be included. Local differences A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 (edge current fringing, non-uniform carrier lifetime and/ or doping etc.) between the diode segment (cells) lead to current density inhomogeneity in the large area diode which in turn results in local areas of higher power stress during reverse recovery. This situation becomes worse when the area of the diode becomes large since a larger area diode may behave ÔuniformlyÕ while a smaller area cell is carrying a high current filament. 4.1. Inhomogeneities in large area diode Inhomogeneities in large area diode are caused probably by the following mechanisms. First of all, a small area with lower breakdown voltage may be introduced due to the field crowding at the edge of the diode. Second, in the case of devices where high level minority carrier injection occurs, it becomes necessary to introduce deep level recombination centers in order to speed up or control the device characteristics. If those recombination centers or impurities are introduced nonuniformly, non-uniform lifetime results which causes non-uniform initial carrier distribution in the diode. Initial carrier plasma level in the inhomogeneous area is typically higher than those of other areas. Third, nonuniform Pþ region doping can also cause inhomogeneity in carrier plasma because of the differences in injection efficiency. The edges and corner regions of the diode are both regions that can have higher initial plasma concentration than the rest of device due to the twodimensional current spreading effect. Above-mentioned inhomogeneities should be ideally studied by directly simulating the large area device. The direct modeling approach considers a device structure in which there are small parts that are different from the other region, for example, they have more carriers or higher ionization rate or have higher lifetime. Between the special region and the normal region, there also should have a middle or joining region that connects the special part with the normal region to make the change of such parameters continuous. However, such a model is difficult to realize because of the huge number of numerical nodes needed to describe a large area device, and the limited capability of the numerical simulator and computer resources (memories and CPU). A simpler approach is to use two paralleled 1-D diode structures with different areas. The areas of the two 1-D diodes are different; the large diode A represents the normal ÔuniformÕ portion of the diode and the small diode B represents the special region. The area ratio N determines the final current filament density in the special region because the worse case would be for diode B carrying all current hence JB;max ¼ N JB;0 , where J JB;0 is the initial current density. The inhomogeneity that causes current filament can be introduced by changing the device parameters of the small device B. For example, the ion- 733 ization rate can be changed to obtain a lower breakdown voltage in diode B; the lifetime can be changed to model the lifetime difference. The doping concentration can also be changed to make the small device having higher initial carrier concentration. This approach is used in our simulation of large area diode turn-off. Inhomogeneous is introduced either as a difference in avalanche breakdown voltage, or the difference in initial carrier distribution. 4.2. Simulation results and discussions Fig. 7 shows the circuit diagram used to study the large area diode reverse recovery circuit. Paralleled small and large 1-D diodes are used. The area of the large diode A is 15 cm2 and the area ratio N is fixed at 100. The impact of area ratio N will be discussed later in the report. The current source was 1000 A, resulting in an initial forward conducting current density of 66 A/cm2 . The voltage source V1 was set at 2500 V. The Lp is the parasitic inductor and its value is very small, about 10 nH. The Lp is the snubber inductor to limit the dI=dt of the diodes during the reverse recovery. 4.2.1. Inhomogeneous breakdown voltage A small inhomogeneity was introduced by increasing the ionization rate of the small diode. The doping profile and initial carrier concentration in the small diode is the same as the large diode. Only the static breakdown voltage of the small diode is about 180 V lower. With a large snubber inductor of 5 lH (or a dIF =dt of 500 A/ls), no failure or current filament was observed in the simulation. Although the simulated waveforms show a very snappy reverse recovery (sudden drop of reverse current to zero), the current density in the small diode B remains the same as those in the large diode A. Therefore it is concluded that an inhomogeneous static breakdown voltage (therefore also sustained mode dynamic avalanche voltage) does not cause a current filament in diode B for slow dIF =dt. When the dIF =dt of the diode increases, the reverse peak current and the peak voltage of diode will increase. So do the reverse recovery power density (defined as reverse peak current times reverse peak voltage). Fig. 8 shows the turn-off waveforms when the snubber inductor decreases to 0.5 lH. Although the diode finally turns off and hence we consider no failure happens, there are two significant current filaments or current bumps in the small diode during the reverse recovery. The first filament only lasts for about 150 ns and the second one lasts longer for about 500 ns. During these two rapidly forming filament periods, the current of the large diode transfers to the small diode to make the current density of the small diode rise dramatically. But the trend of the current density rising or the formation of current 734 A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 Fig. 7. Paralleled 1-D diode model used in the simulation of a large diode turn-off. Fig. 8. The reverse recovery current and voltage waveforms when the Ls ¼ 0:5 lH, showing current filament formation and disappearance. filament in the small diode didnÕt continue. As the reverse recovery voltage keeps rising, the current goes back to the large diode. Eventually, the current density in the diode will become the same as the large diode again. The diodes turn off safely with homogeneous current sharing at the end. The first bump region shown in Fig. 8 is enlarged in Fig. 9 and solutions at several time points were saved to reveal the details in the small diode. Fig. 10 shows the electrical field in the small diode. At time point 1, the dynamic avalanche happened only in the Pþ/N junc- tion (which is located at distance ¼ 365 lm in the diagram). The electrical field and the generation rate in the Pþ/N junction are much larger than the rest area. At point 2, the dynamic avalanche begins to occur at the Nþ /N junction (at distance ¼ 12 lm). The electrical field and the carrier generation rate (not shown) in the Nþ /N junction are comparable to that of the Pþ /N junction region. At point 3, the current density of the small diode is the biggest and the avalanche in both junction regions is the strongest. But at point 4, the avalanche in both junction regions ceased and the A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 735 Fig. 9. Enlarged current waveform of Fig. 8 showing the first current bump (filament) in the small diode. Fig. 10. Electric field corresponding to that of Fig. 9. current density of the small diode decreases to the same value as that of the large diode. It is clearly shown that the inhomogeneity happened before point 2 but reaches a critical point at point 2 because of the dynamic ava- lanche breakdown voltage is different for the two diodes. The dynamic avalanche of the small diode happens first and the current of the small diode will increase. That makes part of the large diode current transfer to the 736 A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 small diode and makes the current density of the small diode increase dramatically. The dynamic avalanche at the Nþ /N junction region initiates the current bump in Fig. 8. But as we mentioned before, the diode did not reach its sustain mode dynamic avalanche and the voltage can continue to increase. As the voltage increases, the dynamic avalanche in the large diode occurs and draws some current back from the small diode. That is why we observed the later decrease of the current density in the small diode. Eventually, the current density of the two diodes becomes equal again. The first current bump of the small diode disappeared. The two diodes become homogeneous again. The second bump happens at much higher voltage. The high voltage is induced by the snappy reverse recovery of the diode current (large diode current, not clearly visible in Fig. 8). This can be confirmed by a much faster voltage rise rate. This bump disappears for the same reason as the first bump because the large diode reaches the same condition slightly later and draws the current back into the large diode and stable filament does not form. Since these filaments are so short, the temperature rise is also small and device failure cannot be observed even with a coupled thermal– electrical simulation of Fig. 8 case. In any case, the power density at which the first bump (filament) is observed can be obtained in our simulation. This can be done by repeating Fig. 8 simulation at different dIF =dt which causes the first current bump of the small diode to happen at different reverse recovery voltage and current. Fig. 11 shows such points in the current density and voltage plane and are compared with the sustain mode dynamic avalanche voltage. The constant power density of 400 kW/cm2 curve is also plotted. The first bump region happens at about 400 kW/cm2 . It is the on-set dynamic avalanche points of the Nþ /N junction calculated before. Some papers [3] have reported failures at a reverse power density of about 400 kW/cm2 . Based on the above discussion, it is concluded that the only way a stable filament can be formed is that the filament reaches the sustained mode of dynamic avalanche (Fig. 11) before the on-set of dynamic avalanche in the large diode. To facilitate this discussion, a parameter called dynamic avalanche conductance gdynamic is defined. gdynamic ¼ dJ dV V >Von-set ð9Þ For the studied diode, gdynamic is estimated to be about 15 S/ cm2 . Diode failure at 400 kW/ cm2 would happen if the following conditions are satisfied condition (1): gdy DVon-set > Jsustain ðT Þ J0 condition (2): NJ0 > Jsustain ðT Þ condition (3): NDR exits in sustain mode dynamic avalanche voltage Condition (1) means that the diode current filament must reach a stable mode to cause failure. J0 is the current density when the on-set dynamic avalanche of the small device happens. Jsustain ðT Þ represents the sustain mode current density at voltage V ffi Von-set þ DVon-set . DVon-set is the difference of the on-set dynamic breakdown voltage between the small diode and the large diode. Since the effect of temperature rise is important, T is included in condition (1). Condition (2) means that Fig. 11. Simulated power density that causes the current filament in the diode. A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 737 Fig. 12. Proposed diode failure mechanism. there is enough current to stress the small cell. This condition is typically always true in large diode if N is large. Condition (3) is basically necessary for (1) to be true, otherwise (1) can never be reached. A proposed diode failure mechanism is then shown in Fig. 12 based on condition (1)–(3). Isothermal, ideal RBSOA is also shown. For the diode under study, a very small NDR is seen. Therefore, an estimated non-isothermal NDR is constructed assuming an increased temperature towards higher current side. Since a much larger NDR is possible at higher temperature (or higher dynamic temperature). For the diode to fail, the current filament must be large enough to reach stable condition before counter effects, such as the on-set of dynamic avalanche in large diode happens. This requires the small diode to move from T 1 ! T 2 ! T 3. 4.2.2. Inhomogeneous initial carrier plasma Previous simulation models diode based on the inhomogeneous in static breakdown voltage, the initial carrier concentration in the diode is homogeneous. Diode failure was not observed in the simulation even at high dIF =dt and high bus voltage. We suspect that the on-set of dynamic avalanche of both diodes are too close to cause the small diode to reach sustained-mode or meet condition (1)–(3). Fig. 13 shows a failure case during reverse recovery simulation. Coupled thermal/electrical simulation was Fig. 13. Turn-off waveforms when the lifetime of small diode is 10 times of that in large diode. Stable current filament is formed with filament temperature reaching more than 1800 K. 738 A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 used in this case. The lifetime of carriers in small diode is increased to 10 times of that in large diode, which makes the initial forward current density in small diode 4.7 times larger than that of the large diode (299.7 and 63.7 A/cm2 respectively). This results in large inhomogeneity in initial carrier plasma. The onset of dynamic avalanche voltage is therefore significantly changed. As the anode voltage reaches the dynamic avalanche voltage of the small device at about 500 V, a current bump appears and the current is increased quickly in the small device. Since the dynamic avalanche has not happened in the large device, the current of the small diode takes over 100% of the total current. As the current density of the small device increases, its sustain-mode dynamic avalanche voltage may have been reached. However, this cannot be confirmed. At t ¼ 1:7 ls, a drop in the voltage may indicate the reaching of the sustained-mode dynamic avalanche at a temperature already much higher than the initial temperature. This result also confirms the importance of including temperature effects during the formation of the filament. Since a very large power stress is applied to the small diode for a much longer time (stable), the temperature eventually rises to 1800 K about 1 ls after the current bump. Failure of turn-off eventually occurs due to rapidly rising temperature in the small diode. The high temperature will form hot spots in diode and destroy the device permanently in the form of a melted through holes. The end result of such failure is frequently referred as thermal runaway or thermal instability. The result in Fig. 13 shows a failure during the second phase of reverse recovery (overall reverse current starts to decrease after passing the reverse recovery current peak) starting at t ¼ 1:3 ls. The failure point power density in the small device is 500 V 500 A=cm2 ffi 250kW=cm2 , however, the effective failure power density for the overall diode is 500 V 100 A=cm2 ffi 50 kW=cm2 . This simulated failure power density (50 kW/cm2 ) is much less than the 400 kW/cm2 predicted in Fig. 11. This is simply because the inhomogeneity in the initial carrier density (which can cause current density of several hundred percent different and here 4.7 higher) is a much worse situation than the previous inhomogeneity in static breakdown. When the difference in the lifetime of the two diodes is five times, the strong inhomogeneous current distribution still makes the small diode fail in the turn off. But when the difference changes to three times, both diodes turn off successfully. These results confirm that the level of inhomogeneity is very important in determining diode failure. Area ratio between these two diodes is another important factor. When the lifetime difference changes to three times, if N increases to 1000, it was found that the turn-off still failed. In actual large area diodes, N is a dynamic parameter with N ðt1 Þ < N ðt2 Þ for t1 < t2 . The size of the current filament is increasingly squeezed into a small spot due to the positive feedback between NðtÞ and J (small). Quantitatively it is difficult to model N ðtÞ, but N in the range of several thousand is not surprisingly large. Also it is feasible that the filament might move from one location to another location. Using two paralleled diode model, this type of movement cannot be modelled. Using three or more cells with different types of inhomogeneities, it may be possible to model the filament formation as well as filament movement from cell to cell. Finally, based on all results presented in this paper, the diode RBSOA can be expressed as: RBSOAdiode ¼ ð250–400 kW=cm2 Þ=K ð10Þ where K P 1 represents the initial current density ratio of the failure cell to the rest of the diode. This RBSOA is reached when conditions (1)–(3) are met. If conditions (1–3) are not met, larger RBSOA can be observed. 5. Conclusions Numerical analysis of the failure for 3.3-kV Si power diodes during reverse recovery was performed. The sustain-mode dynamic avalanche voltage was extracted and has been proved to be the same as the static breakdown voltage. It was found that under isothermal and homogeneity condition, the RBSOA of power diodes is the same as the sustain-mode dynamic avalanche. This theoretical RBSOA is very large and even exceeds 3 MW/cm2 . So the potential RBSOA of power diodes are very large. Because of the inhomogeneity and thermal consideration existing in the real world diode, the failure will occur at reverse power density that is much less than the RBSOA determined by the sustain-mode dynamic avalanche. A simple numerical model was used to approximate two such possible inhomogeneities. Two paralleled diode of different size and physical parameters were used for simplicity. After the introduction of the inhomogeneity between the large and small devices, a current bump occurs in the small diode. It was shown that such current bump was the results of the on-set of dynamic avalanche at the Nþ /N junction. Such current bumps arise form current filament formation that is dangerous to diode operation. Device failure will happen if the current density of the filament reaches the sustain-mode. In some cases, counter effects exist to remove the current filament and the device becomes homogeneous again. Diode failure has been proved to be caused by diode electrical property, not the thermal properties of the diode. Thermal runaway is basically an end product of current filament larger than the sustainmode dynamic avalanche RBSOA. A.Q. Huang et al. / Solid-State Electronics 47 (2003) 727–739 Acknowledgements This work was supported primarily by Silicon Power Corporation and National Science Foundation Career Award ECS-9733121. References [1] Matsushita K-I, Schinohe T, Tsukua M, Minami U, Miwa J-i, Yanagisawa S, et al. 4.5 kV high-speed and rugged planar diode with novel carrier distribution control. In: Proceedings of ISPSD, 1998. p. 191–294. [2] Tomomatsu Y, Suekawa E, Enjyoji T, Takeda M, Kondoh H, Hagino H, et al. An analysis and improvement of destruction immunity during reverse recovery for high voltage panar diodes under high dIrr=dt conduction. 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